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61. 发明授权

US07763551B2 RLSA CVD deposition control using halogen gas for hydrogen scavenging 失效
标题翻译：使用卤素气体进行氢气清除的RLSA CVD沉积控制
公开(公告)号：US07763551B2
公开(公告)日：2010-07-27
申请号：US12059100
申请日：2008-03-31
申请人： Jozef Brcka , Song Yun Kang , Toshio Nakanishi , Peter L. G. Ventzek , Minoru Honda , Masayuki Kohno
发明人： Jozef Brcka , Song Yun Kang , Toshio Nakanishi , Peter L. G. Ventzek , Minoru Honda , Masayuki Kohno
IPC分类号： H01L21/31
CPC分类号： C23C16/345 , C23C16/511 , H01J37/32192 , H01J37/3222 , Y10T29/41
摘要： Film thickness uniformity and stoichiometry are controlled and deposition rate is increased in the chemical vapor deposition (CVD) of silicon nitride from complex gas mixtures in microwave plasmas. In Si2H6+NH3+Ar gas mixtures using a radial line slot antenna (RLSA) microwave plasma to deposit SiN by CVD, deposition rate and film uniformity are improved by limiting the amounts of atomic or molecular hydrogen from the gas mixture during the deposition process. A halogen, for example, fluorine, is added to a gas mixture of silane or disilane, ammonia and argon. The halogen scavenges hydrogen from the mixture, and prevents the hydrogen from blocking the nitrogen and silicon atoms and their fragments from bonding to the surface atoms and to grow stoichiometric silicon nitride. Adding the halogen generates free halogen radicals that react with hydrogen to create hydrogen halide, for example, HF or HCl, thereby scavenging the hydrogen.
摘要翻译：微波等离子体中复合气体混合物中氮化硅的化学气相沉积（CVD）控制了膜厚均匀性和化学计量，沉积速率增加。在使用径向线槽天线（RLSA）微波等离子体通过CVD沉积SiN的Si 2 H 6 + NH 3 + Ar气体混合物中，通过在沉积过程中限制来自气体混合物的原子或分子氢的量来提高沉积速率和膜均匀性。将卤素，例如氟加入到硅烷或乙硅烷，氨和氩的气体混合物中。卤素从混合物中清除氢，并且防止氢阻挡氮和硅原子及其片段与表面原子结合并生长化学计量的氮化硅。加入卤素产生与氢反应产生卤化氢，例如HF或HCl的游离卤素自由基，从而清除氢。

62. 发明申请

US20100040980A1 METHOD AND APPARATUS FOR REFORMING FILM AND CONTROLLING SLIMMING AMOUNT THEREOF 审中-公开
标题翻译：用于改造薄膜和控制薄膜的方法和装置
公开(公告)号：US20100040980A1
公开(公告)日：2010-02-18
申请号：US12581963
申请日：2009-10-20
申请人： Eiichi Nishimura , Takashi Tanaka , Gen You , Minoru Honda , Mitsuaki Iwashita
发明人： Eiichi Nishimura , Takashi Tanaka , Gen You , Minoru Honda , Mitsuaki Iwashita
IPC分类号： G03F7/20
CPC分类号： G03F7/40
摘要： In a film reforming method for reforming a film layer to be reformed by irradiating electron beams thereon, the electron beams are irradiated in a state where the film layer is cooled. Further, in a slimming amount controlling method for controlling a slimming amount of a resist film layer, the slimming amount thereof is controlled by the irradiation amount of electron beams irradiated thereon in a state where the resist film layer having a specified opening dimension is cooled. Furthermore, in a film reforming apparatus including a mounting unit for mounting thereon an object to be processed and an electron beam irradiating unit for irradiating electron beams on the object disposed on the mounting unit to thereby reform a film layer to be reformed, formed on an object, the electron beams are irradiated from the electron beam irradiating unit in a state where the film layer is cooled by a cooling unit provided in the mounting unit.
摘要翻译：在通过在其上照射电子束来重整薄膜层的薄膜重整方法中，在薄膜层被冷却的状态下照射电子束。此外，在用于控制抗蚀剂膜层的减肥量的减肥量控制方法中，在具有指定的开口尺寸的抗蚀剂膜层被冷却的状态下，通过照射在其上的电子束的照射量来控制其减肥量。此外，在包括用于在其上安装待处理物体的安装单元和用于在设置在安装单元上的物体上照射电子束的电子束照射单元的薄膜重整设备中，从而将形成在其上的膜层重新形成在由设置在安装单元中的冷却单元冷却膜层的状态下，从电子束照射单元照射电子束。

63. 发明授权

US07243787B2 Medicine bag 有权
标题翻译：药袋
公开(公告)号：US07243787B2
公开(公告)日：2007-07-17
申请号：US10800885
申请日：2004-03-15
申请人： Masanobu Iwasa , Minoru Honda , Masaki Ikenoue , Kenji Omori
发明人： Masanobu Iwasa , Minoru Honda , Masaki Ikenoue , Kenji Omori
IPC分类号： B65D25/08
CPC分类号： A61J1/1412 , A61J1/10 , A61J1/1406 , A61J1/1462 , A61J1/1487 , A61J1/18 , A61J1/2024 , A61J1/2093 , A61J2205/30 , B32B1/00
摘要： A medicine bag, which includes a bag body having a medicine storage chamber that stores a medicine in such a way that the medicine is visually confirmed through a light-transmission portion provided in at least one part of the bag body, the bag body having a weak seal portion that divides the medicine storage chamber into a plurality of division spaces, and the sealing of the weak seal portion adjacent to a specific division space being removed by increasing the internal pressure of that division space, including: a cover sheet which is peelably attached to the bag body; and a requisitely-used portion which is used in the process shortly before the medicine is administered, in which the cover sheet includes: a light-shielding portion which shields from the light the medicine stored in at least one division space by covering a predetermined part of the light-transmission portion; and a continuously-formed portion which is continuously formed in the light-shielding portion and is placed so that the requisitely-used portion is prevented from being used with the cover sheet kept attached.
摘要翻译：一种药袋，其具有袋体，所述袋体具有药剂储存室，所述药剂储存室以通过设置在所述袋体的至少一部分的透光部目视确认所述药物的方式存储药物，所述袋体具有将药剂储存室分割为多个分隔空间的弱密封部，通过增加该分隔空间的内压来除去与特定分隔空间相邻的弱密封部的密封，包括：可剥离的覆盖片附在袋体上; 以及在药物被施用之前不久使用的必要使用部分，其中所述覆盖片包括：遮光部，其通过覆盖预定部分遮挡光存储在至少一个分割空间中的药物的光传输部分; 以及连续地形成在遮光部分中的连续形成部分，并且被放置成防止被保护的部分与被保持附着的盖板一起使用。

64. 发明授权

US07195936B2 Thin film processing method and system 失效
标题翻译：薄膜加工方法及系统
公开(公告)号：US07195936B2
公开(公告)日：2007-03-27
申请号：US10745520
申请日：2003-12-29
申请人： Tadashi Onishi , Manabu Hama , Minoru Honda , Kazuyuki Mitsuoka , Mitsuaki Iwashita
发明人： Tadashi Onishi , Manabu Hama , Minoru Honda , Kazuyuki Mitsuoka , Mitsuaki Iwashita
IPC分类号： H01L21/00
CPC分类号： H01L21/02351 , C23C16/56 , H01J37/317 , H01J2237/004 , H01J2237/3156 , H01L21/02126 , H01L21/02274 , H01L21/02282 , H01L21/2636 , H01L21/312 , H01L21/67069 , H01L21/67253
摘要： In a thin film processing method and system, a film thickness is regulated by using electron beams irradiated from a plurality of electron beam tubes onto a film of varying thickness formed on an object to be processed, wherein the output powers or beam irradiation times of the electron beam tubes are individually controlled according to a distribution of the thickness. In the method and system, electric charges charged in a film of an object to be processed can be removed also.
摘要翻译：在薄膜处理方法和系统中，通过使用从多个电子束管照射的电子束到形成在待处理物体上的变化的膜的膜来调节膜厚度，其中输出功率或光束照射时间电子束管根据厚度的分布单独控制。在该方法和系统中，也可以去除装入被处理物体的膜中的电荷。

65. 发明申请

US20050212179A1 Method and apparatus for reforming laminated films and laminated films manufactured thereby 审中-公开
标题翻译：用于重整层压膜的方法和装置以及由此制造的层压膜
公开(公告)号：US20050212179A1
公开(公告)日：2005-09-29
申请号：US11058319
申请日：2005-02-16
申请人： Minoru Honda , Hiroyuki Nagai
发明人： Minoru Honda , Hiroyuki Nagai
IPC分类号： H01L21/768 , B29C55/00 , H01J37/30 , H01L21/312 , H01L21/316 , H05B6/00
CPC分类号： H01L21/76825 , H01J2237/316 , H01L21/02137 , H01L21/022 , H01L21/02203 , H01L21/02282 , H01L21/02351 , H01L21/3122 , H01L21/31633 , H01L21/76835
摘要： There is provided a method for reforming laminated films, which simultaneously reforms a plurality of laminated films by irradiating electron beams on the laminated films. The method for reforming laminated films includes the steps of forming a lower film by coating a first low dielectric material in liquid form on a surface of a substrate; forming an upper film by coating a second low dielectric material in liquid form on the lower film; and irradiating electron beams on the lower and upper film. A laminated film manufacturing system includes a mounting table for mounting thereon a substrate on which the laminated films are formed; and an electron beam unit having a plurality of electron beam tubes for irradiating electron beams on the laminated films to thereby simultaneously reform the films.
摘要翻译：提供了一种层叠膜的重整方法，其通过在层压膜上照射电子束来同时改造多个层叠膜。重整叠层膜的方法包括以下步骤：通过在基板的表面上涂覆液态的第一低介电材料来形成下膜; 通过在下膜上涂覆液态的第二低介电材料形成上膜; 并在下膜和上膜上照射电子束。层叠膜制造系统包括：安装台，其上形成有层压膜的基板; 以及具有多个电子束管的电子束单元，用于在层叠膜上照射电子束，从而同时对膜进行改性。

66. 发明申请

US20050042388A1 Method of processing an organic-film 失效
标题翻译：加工有机膜的方法
公开(公告)号：US20050042388A1
公开(公告)日：2005-02-24
申请号：US10727038
申请日：2003-12-04
申请人： Kazuyuki Mitsuoka , Tadashi Onishi , Minoru Honda , Ryuichi Asako , Mitsuaki Iwashita
发明人： Kazuyuki Mitsuoka , Tadashi Onishi , Minoru Honda , Ryuichi Asako , Mitsuaki Iwashita
IPC分类号： H01L21/283 , B05D1/00 , B05D3/06 , H01L21/3105 , H01L21/312 , B05D3/00
CPC分类号： H01L21/02137 , B05D1/005 , B05D3/068 , H01L21/02203 , H01L21/02282 , H01L21/02351 , H01L21/31058 , H01L21/3124
摘要： A processing method according to the present invention coats a polar liquid film or forms an inorganic film on a surface of an organic film formed on a substrate as a protective film. The processing method comprises a modifying step of curing an organic film by irradiating the organic film with electron beams by means of an electron-beam irradiation device in a rare gas atmosphere, and an applying step of applying a polar liquid to the modified surface of the organic film or an film forming step of forming an inorganic film on the organic film. The organic film is cured and affinity for the polar liquid or the inorganic film is imparted to the organic film.
摘要翻译：根据本发明的加工方法涂覆极性液膜或在形成在基板上的有机膜的表面上形成无机膜作为保护膜。该处理方法包括通过在稀有气体气氛中通过电子束照射装置用电子束照射有机膜来固化有机膜的修改步骤，以及将极性液体施加到改性表面的涂布步骤有机膜或在有机膜上形成无机膜的成膜步骤。固化有机薄膜，赋予极性液体或无机薄膜亲和性。

67. 发明授权

US06692555B2 Internal combustion engine air cleaner and adsorption filter 有权
标题翻译：内燃机空气滤清器和吸附过滤器
公开(公告)号：US06692555B2
公开(公告)日：2004-02-17
申请号：US10095521
申请日：2002-03-13
申请人： Kouichi Oda , Minoru Honda , Yoshinori Inuzuka , Masaki Takeyama , Takashi Nishimoto , Yuji Mochizuki , Tokio Oi
发明人： Kouichi Oda , Minoru Honda , Yoshinori Inuzuka , Masaki Takeyama , Takashi Nishimoto , Yuji Mochizuki , Tokio Oi
IPC分类号： B01D5304
CPC分类号： B01D46/521 , B01D46/0023 , B01D46/0036 , B01D46/10 , B01D53/02 , B01D2253/102 , B01D2267/40 , B01D2275/10 , B01D2279/60 , F02M35/024 , F02M35/10275
摘要： A sheet-like adsorption filter formed by sandwiching particulate activated carbon with heat-resistant nets and non-woven fabric sheets that have a percentage of void of 90% or higher, is disposed at an internal combustion engine side of a filter element.
摘要翻译：通过将颗粒活性炭与具有90％或更高的空隙百分比的耐热网和无纺织物片夹在中间而形成的片状吸附过滤器设置在过滤元件的内燃机侧。

68. 发明授权

US5888442A Method of manufacturing a filter element 失效
标题翻译：过滤元件的制造方法
公开(公告)号：US5888442A
公开(公告)日：1999-03-30
申请号：US972019
申请日：1997-11-17
申请人： Kazuo Kometani , Toshiaki Nakayama , Satoshi Inukai , Takanari Takagaki , Hideo Kamo , Minoru Honda
发明人： Kazuo Kometani , Toshiaki Nakayama , Satoshi Inukai , Takanari Takagaki , Hideo Kamo , Minoru Honda
IPC分类号： B01D39/16 , B01D46/00 , B01D46/10 , B01D46/24 , B01D46/52 , F02M35/024 , B29C51/08
CPC分类号： B01D46/0001 , B01D39/163 , B01D46/0005 , B01D46/10 , B01D46/2411 , B01D46/522 , F02M35/024 , B01D2265/026 , B01D2271/02 , B01D2271/022 , B01D2275/206 , B01D2279/60
摘要： A filter element made of nonwoven filter fabric includes a plurality of pleated portions and a flange portion formed integrally with the filter portion. The flange portion is formed by a pair of press-forming dies to have a thin and compressed connecting portion formed along the outer periphery of the filter portion, a thick and uncompressed seal portion formed along the outer periphery of the connecting portion and a thin and compressed protecting portion formed along the outer periphery of the seal portion.
摘要翻译：由无纺布过滤织物制成的过滤元件包括多个褶皱部分和与过滤部分一体形成的凸缘部分。凸缘部由一对冲压成形模具形成，沿着过滤器部分的外周形成有薄而压缩的连接部分，沿着连接部分的外周形成的厚而未压缩的密封部分，压缩保护部分沿着密封部分的外周形成。

69. 发明授权

US5667545A Filter element for air cleaner and method of manufacturing the same 失效
标题翻译：空气滤清器滤芯及其制造方法
公开(公告)号：US5667545A
公开(公告)日：1997-09-16
申请号：US670288
申请日：1996-06-26
申请人： Minoru Honda , Hideki Inaba
发明人： Minoru Honda , Hideki Inaba
IPC分类号： B01D46/00 , B01D46/52 , B01D27/06 , B01D46/10
CPC分类号： B01D46/523 , B01D46/0001 , B01D46/10 , B01D2271/022 , Y10S55/05
摘要： A filter element for an air cleaner including a sheet-like filter medium for purifying air when the air is transferred from one side to the other side of the filter medium, a frame member having a flange confining the filter medium and a side wall formed on the flange, and a fibrous mat having cushioning effect. The filter medium is folded in a sawtooth-shaped pattern and extends along a plane. The filter medium has a base contour contained in the plane and has a sawtooth-shaped peripheral edge section extending along a part of the base contour. The flange outwardly projects from the frame. The side wall is airtightly bonded to the sawtooth-shaped peripheral edge section of the filter medium. The mat continuously extends along the base contour and is fixedly bonded to a surface of the flange facing the other side of the filter medium.
摘要翻译：一种用于空气净化器的过滤元件，其包括当空气从过滤介质的一侧转移到另一侧时净化空气的片状过滤介质，具有限制过滤介质的凸缘和形成在过滤介质上的侧壁的框架构件凸缘和具有缓冲作用的纤维垫。过滤介质折叠成锯齿形图案并沿着平面延伸。过滤介质具有包含在平面中的基本轮廓，并且具有沿着基部轮廓的一部分延伸的锯齿形周边边缘部分。凸缘从框架向外伸出。侧壁与过滤介质的锯齿形周边部分气密结合。垫沿着基座轮廓连续地延伸并且固定地接合到面向过滤介质另一侧的凸缘的表面。

70. 发明授权

US5590153A Digital modem for reducing interference in the same channel of another system 失效
标题翻译：数字调制解调器，用于减少另一系统相同通道的干扰
公开(公告)号：US5590153A
公开(公告)日：1996-12-31
申请号：US277413
申请日：1994-07-18
申请人： Yutaka Tanaka , Minoru Honda
发明人： Yutaka Tanaka , Minoru Honda
IPC分类号： H04L27/18 , H04H20/30 , H04H60/11 , H04L5/06 , H04L27/04 , H04L27/06 , H04N7/08 , H04N7/081 , H04B1/38 , H04L5/16
CPC分类号： H04H20/72 , H04L27/04 , H04L27/06 , H04L5/06
摘要： In order to reduce radio interference jamming in the same channel exerting from an adjacent broadcasting area when a digitized image signal of, for example, high-definition television utilizing an idle channel in ground broadcasting of television is transmitted, a digital string such as a binary coded image signal is thinned out every predetermined digital period so as to be divided into two groups. Continuous digital strings of two series are formed by converting clock rates of the respective groups and converted into multi-value digits. Intermediate carriers are then modulated with the digital signals of the two series having their requisite bands compressed through quadrature modulation to form modulated carriers, and the modulated carriers are transmitted in bands of two divisional channels which escape from adjacent video and voice carriers, the power of which is responsible for the radio interference in the same channel. The carriers are subsequently received for reconstruction.
摘要翻译：为了减少在例如利用电视地面广播中的空闲频道的高分辨率电视的数字化图像信号发送来自相邻广播区域的相同信道中的无线电干扰干扰时，诸如二进制数编码图像信号每隔预定的数字周期被稀疏化，从而被分成两组。通过转换各组的时钟速率并转换为多值数字形成两个系列的连续数字串。中间载波然后用两个序列的数字信号进行调制，这些数字信号通过正交调制压缩它们所需的频带，形成已调制的载波，并且调制的载波在从相邻的视频和语音载波中逃逸的两个分频信道的频带中传输，它负责同一信道的无线电干扰。随后接收载体进行重构。

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