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61. 发明申请

US20090188431A1 Substrate processing apparatus and method for manufacturing a semiconductor device 有权
标题翻译：基板处理装置及半导体装置的制造方法
公开(公告)号：US20090188431A1
公开(公告)日：2009-07-30
申请号：US12382082
申请日：2009-03-09
申请人： Takashi Ozaki , Tomoshi Taniyama , Hiroshi Unami , Kiyohiko Maeda , Shinya Morita , Yoshikazu Takashima , Sadao Hisakado
发明人： Takashi Ozaki , Tomoshi Taniyama , Hiroshi Unami , Kiyohiko Maeda , Shinya Morita , Yoshikazu Takashima , Sadao Hisakado
IPC分类号： C23C16/00
CPC分类号： C23C16/4409 , C23C16/4401 , C30B25/08
摘要： A CVD device has a reaction furnace (39) for processing a wafer (1); a seal cap (20) for sealing the reaction furnace (39) hermetically; an isolation flange (42) opposite to the seal cap (20); a small chamber (43) formed by the seal cap (20), the isolation flange (42), and the wall surface in the reaction furnace (39); a feed pipe (19b) for supplying a first gas to the small chamber (43); an outflow passage (42a) provided in the small chamber (43) for allowing the first gas to flow into the reaction furnace (39); and a feed pipe (19a) provided downstream from the outflow passage (42a) for supplying a second gas into the reaction furnace (39). Byproducts such as NH4Cl are prevented from adhering to low temperature sections such as the furnace opening and therefore the semiconductor device production yield is therefore increased.
摘要翻译： CVD装置具有用于处理晶片（1）的反应炉（39）; 密封盖（20），用于密封反应炉（39）; 与密封盖（20）相对的隔离凸缘（42）; 由密封盖（20），隔离凸缘（42）和反应炉（39）中的壁表面形成的小室（43）; 用于将第一气体供应到所述小室（43）的进料管（19b）; 设置在小室（43）中的用于允许第一气体流入反应炉（39）的流出通道（42a）; 以及设置在所述流出通道（42a）的下游的供给管（19a），用于向所述反应炉（39）供给第二气体。诸如NH 4 Cl之类的副产物被防止粘附到诸如炉开口的低温部分，因此半导体器件的生产率提高。

62. 发明申请

US20090087964A1 Manufacturing Method of Semiconductor Device and Substrate Processing Apparatus 有权
标题翻译：半导体器件和衬底加工设备的制造方法
公开(公告)号：US20090087964A1
公开(公告)日：2009-04-02
申请号：US12223718
申请日：2007-03-15
申请人： Takahiro Maeda , Kiyohiko Maeda , Takashi Ozaki , Akihito Yoshino , Yasunobu Koshi , Yuji Urano
发明人： Takahiro Maeda , Kiyohiko Maeda , Takashi Ozaki , Akihito Yoshino , Yasunobu Koshi , Yuji Urano
IPC分类号： H01L21/20 , H01L21/30
CPC分类号： H01L21/30 , C23C16/345 , C23C16/4405 , C23C16/45574 , C23C16/45578 , C23C16/52 , H01L21/3185
摘要： To realize a high productivity while maintaining excellent film deposition characteristics on a substrate even if a plurality of processing gases of different gas species are used. There are provided the step of loading a plurality of substrates into a processing chamber; supplying a first processing gas to an upper stream side of a gas flow outside of a region where a plurality of substrates loaded into a processing chamber are arranged, supplying a second processing gas to the upper stream side of the gas flow outside of the region where the plurality of substrates loaded into the processing chamber are arranged, supplying the first processing gas to a middle part of the gas flow in the region where the plurality of substrates loaded into the processing chamber are arranged, and causing the first processing gas and the second processing gas to react with each other in the processing chamber, to form an amorphous material and form a thin film on main surfaces of the plurality of substrates; and the step of unloading the substrate after forming the thin film from the processing camber.
摘要翻译：为了实现高生产率，同时在使用不同气体种类的多种处理气体的同时在基板上保持优异的成膜特性。提供了将多个基板装载到处理室中的步骤; 将第一处理气体供给到其中布置有多个基板的区域外的气流的上游侧，将第二处理气体供给到所述气流的上游侧，布置了装载到处理室中的多个基板，将第一处理气体供给到布置有加载到处理室中的多个基板的区域中的气流的中间部分，并且使第一处理气体和第二处理气体处理气体在处理室中彼此反应，以形成非晶材料并在多个基板的主表面上形成薄膜; 以及在从所述加工弯度形成所述薄膜之后卸载所述基板的步骤。

63. 发明申请

US20090017638A1 Substrate processing apparatus and method for manufacturing semiconductor device 审中-公开
标题翻译：基板处理装置及半导体装置的制造方法
公开(公告)号：US20090017638A1
公开(公告)日：2009-01-15
申请号：US12073009
申请日：2008-02-28
申请人： Akihito Yoshino , Takashi Ozaki , Toshihiko Yonejima
发明人： Akihito Yoshino , Takashi Ozaki , Toshihiko Yonejima
IPC分类号： H01L21/30 , C23C16/00
CPC分类号： H01L21/3185 , C23C16/345 , C23C16/45574 , C23C16/45576 , C23C16/45578 , H01L21/0217
摘要： It is intended to provide a substrate processing apparatus and a semiconductor device manufacturing method capable of suppressing formation of a film inside a nozzle and extending a replacement or maintenance cycle of the nozzle, thereby realizing improvement in operation rate of the apparatus. A substrate processing apparatus comprising: a reaction container for performing a processing for generating a film containing a plurality of elements on a substrate; a heater for heating an inside of the reaction container; at least one nozzle that is provided inside the reaction container in such a fashion that at least a part thereof is opposed to the heater for supplying a first gas containing at least one of the plurality of elements forming the film and capable of depositing a film by itself into the reaction container; and a circulation pipe that is provided in such a fashion as to cover at least the part of the nozzle opposed to the heater for supplying a second gas containing at least one of the plurality of elements forming the film and not capable of depositing a film by itself into the reaction container after circulating the second gas thereinside.
摘要翻译：旨在提供能够抑制喷嘴内部的膜的形成并延长喷嘴的更换或维护周期的基板处理装置和半导体装置的制造方法，从而实现装置的运转率的提高。一种基板处理装置，包括：反应容器，用于进行在基板上产生含有多个元素的膜的处理; 用于加热反应容器内部的加热器; 至少一个喷嘴，其设置在所述反应容器内部，使得其至少一部分与所述加热器相对的方式，所述加热器用于提供包含形成所述膜的所述多个元件中的至少一个的第一气体，并且能够通过本身进入反应容器; 以及循环管，其设置成至少覆盖与所述加热器相对的所述喷嘴的部分，以供应包含形成所述膜的所述多个元件中的至少一个的第二气体，并且不能通过在其内部循环第二气体之后，本身进入反应容器。

64. 发明申请

US20080133602A1 Operation Data Management Device, Operation Control Device, and Operation Data Processing Method 审中-公开
标题翻译：操作数据管理设备，操作控制设备和操作数据处理方法
公开(公告)号：US20080133602A1
公开(公告)日：2008-06-05
申请号：US11795366
申请日：2006-01-16
申请人： Koichi Tashiro , Akinobu Uchikubo , Takashi Ozaki , Chie Imamiya , Takeaki Nakamura , Masakazu Gotanda
发明人： Koichi Tashiro , Akinobu Uchikubo , Takashi Ozaki , Chie Imamiya , Takeaki Nakamura , Masakazu Gotanda
IPC分类号： G06F17/30 , G06F3/048
CPC分类号： G06F19/3481 , A61B90/00 , A61B2018/00988 , G16H40/20 , G16H40/63
摘要： An operation data recording device 22 according to the invention includes a setting unit for setting operation data to be recorded out of inputted operation data, and an operation data recording unit for recording the operation data set by the setting unit in a recording device in association with a predetermined time.
摘要翻译：根据本发明的操作数据记录装置22包括：设置单元，用于设置要输入的操作数据中要记录的操作数据;以及操作数据记录单元，用于将设置单元设置的操作数据与记录装置相关联地记录在记录装置中一个预定的时间。

65. 发明申请

US20070225690A1 Medical system and medical display apparatus 审中-公开
标题翻译：医疗系统和医疗显示装置
公开(公告)号：US20070225690A1
公开(公告)日：2007-09-27
申请号：US11715001
申请日：2007-03-07
申请人： Kiyoshi Sekiguchi , Masaru Ito , Takashi Ozaki
发明人： Kiyoshi Sekiguchi , Masaru Ito , Takashi Ozaki
IPC分类号： A61B17/00
CPC分类号： A61B90/50 , A61B90/37
摘要： A medical system is provided with a plurality of medical devices, a panel portion including a display unit which displays information with respect to the plurality of medical devices and a sensor unit which detects an input operation, an information storage unit which stores graphical user interface information for display and graphical user interface information for operation, a detection unit which detects whether or not the panel portion is disposed at least at one predetermined position, and a display selection control unit which selects information between the graphical user interface information for display and the graphical user interface information for operation stored in the information storage unit based on a detection signal of the detection unit so as to be displayed on the display unit.
摘要翻译：医疗系统具有多个医疗装置，面板部分，包括显示单元，显示关于多个医疗装置的信息;以及传感器单元，其检测输入操作;信息存储单元，其存储图形用户界面信息用于操作的显示和图形用户界面信息;检测单元，其检测面板部分是否至少设置在一个预定位置;以及显示选择控制单元，其选择用于显示的图形用户界面信息和图形之间的信息基于检测单元的检测信号存储在信息存储单元中的用于操作的用户界面信息，以便显示在显示单元上。

66. 发明申请

US20070157882A1 Producing method of semiconductor device and substrate processing apparatus 有权
标题翻译：半导体器件和衬底处理设备的生产方法
公开(公告)号：US20070157882A1
公开(公告)日：2007-07-12
申请号：US10549938
申请日：2004-08-25
申请人： Takashi Ozaki , Kazuhiro Yuasa , Kiyohiko Maeda
发明人： Takashi Ozaki , Kazuhiro Yuasa , Kiyohiko Maeda
IPC分类号： C23C16/00
CPC分类号： H01L21/02238 , H01L21/0223 , H01L21/02255 , H01L21/31662 , H01L21/67109
摘要： Disclosed is a method for manufacturing a semiconductor device which comprises a step for carrying a plurality of substrates (1) in a process chamber (4), a step for supplying an oxygen-containing gas from the upstream side of the substrates (1) carried in the process chamber (4), a step for supplying a hydrogen-containing gas from at least one location corresponding to a position within the region where substrates (1) are placed in the process chamber (4), a step for oxidizing the substrates (1) by reacting the oxygen-containing gas with the hydrogen-containing gas in the process chamber (4), and a step for carrying the thus-processed substrates (1) out of the process chmaber (4).
摘要翻译：公开了一种半导体器件的制造方法，其包括在处理室（4）中承载多个基板（1）的步骤，从承载的基板（1）的上游侧供给含氧气体的步骤在处理室（4）中，从对应于在基板（1）被放置在处理室（4）的区域内的位置的至少一个位置供给含氢气体的步骤，用于氧化基板（1）通过使含氧气体与处理室（4）中的含氢气体反应，以及将由此处理过的基板（1）运送到处理室（4）中的步骤。

67. 发明申请

US20060217644A1 Vehicle seats 有权
标题翻译：车座
公开(公告)号：US20060217644A1
公开(公告)日：2006-09-28
申请号：US11335917
申请日：2006-01-19
申请人： Takashi Ozaki , Masaki Hattori , Noboru Nishiguchi
发明人： Takashi Ozaki , Masaki Hattori , Noboru Nishiguchi
IPC分类号： A61H23/04
CPC分类号： A61H9/0078 , A61H2201/0134 , A61H2201/0149 , A61H2205/081 , B60N2/914 , B60N2/976
摘要： A vehicle seat may include a seat back that has a back frame, a cushion pad attached to the back frame, and a massaging unit having a plurality of massaging elements. The cushion pad has a plurality of through bores that pass therethrough in the direction of thickness thereof. The massaging elements are constructed so as to be elastically deformed or compressed along moving axes and to be pneumatically expanded and contracted along the moving axes. The massaging elements are disposed in the through bores in a manner that the moving axes of the massaging elements extend along longitudinal axes of the through bores. The massaging elements have deformability or compressibility identical with or greater than the deformability or compressibility of the cushion pad when the massaging elements are not operated.
摘要翻译：车辆座椅可以包括具有后框架的座椅靠背，附接到后框架的缓冲垫，以及具有多个按摩元件的按摩单元。缓冲垫具有多个通孔，其穿过其中的厚度方向。按摩元件被构造成沿着移动轴线弹性变形或压缩，并且沿着移动轴线被气动地膨胀和收缩。按摩按摩按照按摩按钮的运动轴线沿通孔的纵向轴线延伸设置在穿孔中。当按摩按摩器不操作时，按摩元件具有与缓冲垫的可变形性或压缩性相同或更大的变形性或压缩性。

68. 发明申请

US20060184407A1 Operation information management device and surgery system 审中-公开
标题翻译：手术信息管理装置及手术系统
公开(公告)号：US20060184407A1
公开(公告)日：2006-08-17
申请号：US11353550
申请日：2006-02-13
申请人： Takashi Ozaki , Akinobu Uchikubo , Koichi Tashiro , Chie Imamiya , Takeaki Nakamura , Masakazu Gotanda
发明人： Takashi Ozaki , Akinobu Uchikubo , Koichi Tashiro , Chie Imamiya , Takeaki Nakamura , Masakazu Gotanda
IPC分类号： G06F9/44
CPC分类号： G06Q50/22 , G16H40/20
摘要： An operation information management device for managing a use history of multiple medical apparatuses has a management item setting section for setting management items which classify the use history of the various medical apparatuses, a management item storing section for storing the use history information of the various medical apparatuses based on the management items as a database, an analysis designating section for designating analysis items based on the use history of the various medical apparatuses, and an analysis information creating section for searching use history information of the multiple medical apparatuses stored by the management item storing section based on the analysis items and for generating and outputting analysis information.
摘要翻译：一种用于管理多个医疗装置的使用历史的操作信息管理装置具有：管理项目设定部，设定对各种医疗装置的使用历史进行分类的管理项目;管理项目存储部，其存储各种医疗用途的使用历史信息基于作为数据库的管理项目的装置，用于基于各种医疗装置的使用历史指定分析项目的分析指定部分，以及用于搜索由管理项目存储的多个医疗装置的使用历史信息的分析信息创建部分存储部分，并且用于生成和输出分析信息。

69. 发明授权

US06623423B2 Surgical operation system 有权
标题翻译：手术操作系统
公开(公告)号：US06623423B2
公开(公告)日：2003-09-23
申请号：US09794864
申请日：2001-02-27
申请人： Tomohisa Sakurai , Hiroyuki Takahashi , Masaru Sudo , Takeaki Nakamura , Keiji Shioda , Takashi Ozaki , Makoto Miyawaki
发明人： Tomohisa Sakurai , Hiroyuki Takahashi , Masaru Sudo , Takeaki Nakamura , Keiji Shioda , Takashi Ozaki , Makoto Miyawaki
IPC分类号： A61B1700
CPC分类号： A61B17/320068 , A61B2017/00199 , A61B2017/00225 , A61B2017/00464 , A61B2017/00973
摘要： A plurality of handpieces used to perform an operation is connected to a main operation apparatus, which generates a driving signal, through connectors formed on the main apparatus. When an operator holds a handpiece he/she wants to use, an output line over which the driving signal is transmitted is routed to the held handpiece owing to an output of a sensor that detects a change in capacitance stemming from the hold. The operator therefore need not manually set a mode in which the driving signal is applied to the handpiece he/she wants to use. Moreover, a port number assigned to a port to which the output line is routed is indicated on a display device. The operator can readily identify the usable handpiece.
摘要翻译：用于执行操作的多个手持件通过形成在主装置上的连接器连接到产生驱动信号的主操作装置。当操作者握住他/她想要使用的手机时，由于传感器的输出检测到来自保持的电容的变化，传输驱动信号的输出线被路由到保持的手机。因此，操作者不需要手动地将驾驶信号施加到他/她想要使用的手持件上的模式。此外，在显示装置上指示分配给输出线路由的端口的端口号。操作员可以容易地识别可用的手机。

70. 发明授权

US09053846B2 Permanent magnet and manufacturing method thereof 有权
标题翻译：永磁体及其制造方法
公开(公告)号：US09053846B2
公开(公告)日：2015-06-09
申请号：US13499338
申请日：2011-03-28
申请人： Izumi Ozeki , Katsuya Kume , Keisuke Hirano , Tomohiro Omure , Keisuke Taihaku , Takashi Ozaki
发明人： Izumi Ozeki , Katsuya Kume , Keisuke Hirano , Tomohiro Omure , Keisuke Taihaku , Takashi Ozaki
IPC分类号： H01F1/057 , H01F1/08 , H01F41/02 , C22C38/00 , C22C33/02 , B22F9/04
CPC分类号： H01F1/086 , B22F2009/042 , B22F2998/10 , B22F2999/00 , C22C33/0278 , C22C38/002 , H01F1/0572 , H01F1/0577 , H01F41/0266 , H01F41/0293 , B22F9/04 , B22F3/02 , B22F3/1017 , B22F2201/013
摘要： There are provided a permanent magnet and a manufacturing method thereof enabling carbon content contained in magnet particles to be reduced in advance before sintering even when wet milling is employed. Coarsely-milled magnet powder is further milled by a bead mill in a solvent together with an organometallic compound expressed with a structural formula of M−(OR)x (M includes at least one of neodymium, praseodymium, dysprosium and terbium, each being a rare earth element, R represents a substituent group consisting of a straight-chain or branched-chain hydrocarbon, x represents an arbitrary integer) so as to uniformly adhere the organometallic compound to particle surfaces of the magnet powder. Thereafter, a compact body of compacted magnet powder is held for several hours in hydrogen atmosphere at 200 through 900 degrees Celsius to perform hydrogen calcination process. Thereafter, through sintering process, a permanent magnet 1 is manufactured.
摘要翻译：提供永磁体及其制造方法，即使在使用湿磨时也能预先在烧结前减少磁体颗粒中含有的碳含量。通过珠磨机在溶剂中与结构式M-（OR）x表示的有机金属化合物进一步研磨粗粉末磁体粉末（M包括钕，镨，镝和铽中的至少一种，各自为稀土元素，R表示由直链或支链烃构成的取代基，x表示任意的整数），以使有机金属化合物均匀地附着在磁铁粉末的粒子表面。之后，在200〜900摄氏度的氢气氛中，将紧凑的致密体磁体保持数小时，进行氢煅烧。然后，通过烧结工序制造永久磁铁1。

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