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61. 发明授权

US6059985A Method of processing a substrate and apparatus for the method 失效
标题翻译：处理基板的方法和方法的装置
公开(公告)号：US6059985A
公开(公告)日：2000-05-09
申请号：US826735
申请日：1997-04-04
申请人： Takanori Yoshimura , Shigeru Mizuno , Shinya Hasegawa , Yoichiro Numasawa , Nobuyuki Takahashi
发明人： Takanori Yoshimura , Shigeru Mizuno , Shinya Hasegawa , Yoichiro Numasawa , Nobuyuki Takahashi
IPC分类号： H01L21/28 , H01L21/00 , H01L21/20 , H01L21/205 , H01L21/285 , H01L21/302 , H01L21/3065 , H01L21/68
CPC分类号： H01L21/0209
摘要： A method of processing a substrate has the following processes. After depositing a thin film onto a substrate by a CVD method, the front surface of the substrate is brought close to a gas supply surface of a gas supply mechanism to have a desired interval without making contact between the front surface and the gas supply surface. Afterwards, an etching gas is supplied into a back space of the substrate to generate plasma there, and further a purge gas is also supplied into a space between the gas supply surface and the substrate so that the purge gas flows into the back space through a peripheral-edge region of the substrate. This purge gas prevents radicals included in the plasma from diffusing into the space between the gas supply surface and the substrate.
摘要翻译：处理基板的方法具有以下处理。在通过CVD法将薄膜沉积到基板上之后，使基板的前表面靠近气体供给机构的气体供给表面，使其具有期望的间隔而不会在前表面和气体供给表面之间接触。然后，将蚀刻气体供给到基板的后部空间中以在其中产生等离子体，并且还将吹扫气体供应到气体供给表面和基板之间的空间中，使得净化气体通过衬底的周边边缘区域。这种净化气体防止包括在等离子体中的自由基扩散到气体供应表面和基底之间的空间中。

62. 发明授权

US6020984A Light beam scanning apparatus using a rotating hologram and a fixed hologram plate 失效
公开(公告)号：US6020984A
公开(公告)日：2000-02-01
申请号：US838987
申请日：1997-04-23
申请人： Shinya Hasegawa , Shigeo Kayashima , Satoshi Maeda , Hirokazu Aritake
发明人： Shinya Hasegawa , Shigeo Kayashima , Satoshi Maeda , Hirokazu Aritake
IPC分类号： G02B5/32 , G02B26/10 , G03H1/12
CPC分类号： G02B5/32 , G02B26/106 , G03H1/0005
摘要： A high-resolution light-beam scanning apparatus utilizing only mass-producible holograms instead of utilizing auxiliary optical systems such as an optical lens or a mirror having curvature, and capable of compensating for disadvantages including scanning beam thickening and variation, failure of a rotatable hologram to rotate at a constant velocity, displacement of a scanning beam position in the scanning direction and the cross scanning direction due to a mode hop of a wavelength of a semiconductor laser, and deviation of a base of a rotatable hologram from a parallel state, which disadvantages are detrimental to efforts for increasing the resolution of a hologram scanner and lowering the cost thereof, the light-beam scanning apparatus being characterized in that provided in the rotatable hologram (1) and the fixed plate (2) arediffraction gratings for minimizing:either a sum total of values obtained by weighting:a square of an optical path length difference between a) an optical path of a light flux measured along a principal axis MA of a light beam incident on and diffracted by a diffraction grating (1a) of a rotatable hologram (1), and incident on and diffracted by a diffraction grating (2a) of a fixed plate (2) so as to conduct a scanning and converging on a scanning point k on an image formation surface (4), and b) an optical path of a light flux measured along a marginal ray M1 distanced from the principal axis MA; or an absolute value of the optical path difference thereof,the weighting being conducted at every scanning position covering an entire range of the image formation surface (4),or a sum total of values obtained by weighting:a square of a sum obtained by adding: an amount of displacement of a light beam convergent on a scanning point k on the image formation surface (4), which displacement is measured along the marginal ray M1 distanced from the principal axis MA of an incident reconstructing light flux with respect to the principal axis MA of a phase of the diffraction grating (1a) of the rotatable hologram (1); to an amount of displacement of the same light, which displacement is measured with respect to the principal axis MA of a phase recorded on the diffraction grating (2a) when the light flux is incident on the fixed plate (2); or by weighting an absolute value of the sum,the weighting being conducted at every scanning position covering an entire range of an image formation surface.

63. 发明授权

US5995250A Method for manufacturing light beam scanning apparatus 失效
标题翻译：光束扫描装置的制造方法
公开(公告)号：US5995250A
公开(公告)日：1999-11-30
申请号：US847315
申请日：1997-04-23
申请人： Shinya Hasegawa , Shigeo Kayashima , Satoshi Maeda , Hirokazu Aritake
发明人： Shinya Hasegawa , Shigeo Kayashima , Satoshi Maeda , Hirokazu Aritake
IPC分类号： G02B5/32 , G02B26/10 , G03H1/12
CPC分类号： G02B5/32 , G02B26/106 , G03H1/0005
摘要： A method of manufacturing a fixed hologram plate of a light-beam scanning apparatus for diffracting a light incident from a light source portion by a rotatable hologram, scanning by the diffracted light through the rotation of the rotatable hologram, diffracting the resulting light by the fixed hologram plate, and for conducting a light-beam scanning on a scanning surface. The method includes the steps of preparing an interference fringe distribution of the fixed hologram plate by two waves: a first wave having a spherical aberration, a transverse aberration of the first wave is in the Y direction, the transverse wave including an astigmatism and a coma; and a second wave having a spherical aberration and astigmatism, and having a wavelength different from a wavelength of a reconstructing wave that is selected to minimize distortion, wherein a transverse aberration of the second wave is in the X direction.
摘要翻译：一种制造光束扫描装置的固定全息板的方法，用于通过可旋转的全息图衍射从光源部分入射的光，通过可旋转全息图的旋转被衍射光扫描，将所得到的光衍射成固定的全息图板，并用于在扫描表面上进行光束扫描。该方法包括以下步骤：通过两波制备固定全息图板的干涉条纹分布：具有球面像差的第一波，第一波的横向像差在Y方向上，横波包括散光和彗差 ; 以及具有球面像差和像散的第二波，并且具有与被选择为使失真最小化的重构波的波长不同的波长，其中第二波的横向像差处于X方向。

64. 发明授权

US5940195A Light beam scanning apparatus 失效
标题翻译：光束扫描装置
公开(公告)号：US5940195A
公开(公告)日：1999-08-17
申请号：US847317
申请日：1997-04-23
申请人： Shinya Hasegawa , Fumio Yamagishi , Masato Nakashima
发明人： Shinya Hasegawa , Fumio Yamagishi , Masato Nakashima
IPC分类号： G02B5/32 , G02B26/10 , G03H1/12
CPC分类号： G02B5/32 , G02B26/106 , G03H1/0005
摘要： A high-resolution light-beam scanning apparatus utilizing only mass-producible holograms instead of utilizing auxiliary optical systems such as optical lenses or a mirror having curvature, and capable of compensating for disadvantages including scanning beam thickening and variation, failure of a rotatable hologram to rotate at a constant velocity, displacement of a scanning beam position in the scanning direction and the cross scanning direction due to a mode hop of a wavelength of a semiconductor laser, and deviation of a base of rotatable hologram from a parallel state. These disadvantages are detrimental to efforts for increasing the resolution of a hologram scanner and lowering the cost thereof. The light beam scanning apparatus includes at least two holograms with an optical path length difference .DELTA..PHI. along a scanning beam light flux. The path length is measured from a light source to a scanning surface in the first hologram, and is represented by .DELTA..PHI.
摘要翻译：仅利用大规模生产的全息图的高分辨率光束扫描装置，而不是利用诸如光学透镜或具有曲率的反射镜等辅助光学系统，并且能够补偿包括扫描光束增厚和变化的缺点，可旋转全息图的故障以恒定速度旋转，由于半导体激光器的波长的模式跳跃而导致的扫描光束位置在扫描方向和横扫描方向上的位移以及可旋转全息图的基底与平行状态的偏离。这些缺点对于增加全息扫描仪的分辨率并降低其成本的努力是有害的。光束扫描装置沿扫描光束光束包括至少两个具有光程长度差DELTA PHI的全息图。路径长度从第一全息图中的光源到扫描面测量，并由DELTA PHI

65. 发明授权

US5786911A Optical scanning apparatus utilizing linear polarized beams 失效
标题翻译：利用线性偏振光束的光学扫描装置
公开(公告)号：US5786911A
公开(公告)日：1998-07-28
申请号：US555866
申请日：1995-11-13
申请人： Fumihiro Tawa , Junji Tomita , Shinya Hasegawa
发明人： Fumihiro Tawa , Junji Tomita , Shinya Hasegawa
IPC分类号： G02B26/10 , G02B26/12 , G02B27/28 , G02B5/32 , G02B26/08
CPC分类号： G02B26/123 , G02B26/106 , G02B27/283
摘要： An optical scanning apparatus is equipped with a light source for outputting a scanning beam having a single fixed direction polarization component. A polarization control element is provided for changing the polarization direction of the scanning beam outputted from the light source. An optical element is provided for splitting the scanning beam outputted from the polarization control element into two linearly polarized beams that orthogonally cross each other. An image formation element is utilized for forming images with the two linearly polarized beams outputted from the optical element at independent locations on a scanning surface. A signal processing device is provided for controlling the light source and the polarization control element, and for switching on and off the two linearly polarized beams.
摘要翻译：光学扫描装置配备有用于输出具有单个固定方向偏振分量的扫描光束的光源。偏振控制元件用于改变从光源输出的扫描光束的偏振方向。提供了一种光学元件，用于将从偏振控制元件输出的扫描光束分成两个彼此正交交叉的线偏振光束。图像形成元件用于在扫描表面上的独立位置从光学元件输出的两个线性偏振光束形成图像。提供一种信号处理装置，用于控制光源和偏振控制元件，并用于接通和关断两个线偏振光束。

66. 发明授权

US5295004A Optical beam scanning apparatus 失效
标题翻译：光束扫描装置
公开(公告)号：US5295004A
公开(公告)日：1994-03-15
申请号：US972520
申请日：1992-11-06
申请人： Shinya Hasegawa , Fumio Yamagishi , Youji Houki , Shigetake Iwata , Shigeo Kayashima , Satoshi Maeda
发明人： Shinya Hasegawa , Fumio Yamagishi , Youji Houki , Shigetake Iwata , Shigeo Kayashima , Satoshi Maeda
IPC分类号： G02B5/32 , G02B26/10
CPC分类号： G02B5/32 , G02B26/106
摘要： An optical beam scanning apparatus includes one rotatable hologram which is rotatable about an axis, and at least two laser beam sources which emit laser beams. The rotatable hologram is provided with at least two hologram areas whose number corresponds to the number of the laser beam sources, so that the laser beams emitted from the respective laser beam sources are made incident upon the respective hologram areas. Each of the hologram areas is provided with a plurality of hologram facets which are concentrically arranged with respect to the axis of rotation of the rotatable hologram to emit laser beams of the same F number. The hologram areas having different numbers of hologram facets having different F numbers.
摘要翻译：光束扫描装置包括可围绕轴线旋转的一个可旋转的全息图以及发射激光束的至少两个激光束源。可旋转全息图设置有至少两个全息区域，其数量对应于激光束源的数量，使得从各个激光束源发射的激光束入射到各个全息图区域。每个全息图区域设置有多个全息面，其相对于可旋转全息图的旋转轴线同心布置以发射相同F数的激光束。全息图区域具有不同数量的具有不同F数的全息图面。

67. 发明授权

US4904033A Method for constructing holograms 失效
标题翻译：构造全息图的方法
公开(公告)号：US4904033A
公开(公告)日：1990-02-27
申请号：US196754
申请日：1988-05-18
申请人： Hiroyuki Ikeda , Fumio Yamagishi , Shinya Hasegawa , Syunji Kitagawa , Kozo Yamazaki , Takefumi Inagaki
发明人： Hiroyuki Ikeda , Fumio Yamagishi , Shinya Hasegawa , Syunji Kitagawa , Kozo Yamazaki , Takefumi Inagaki
IPC分类号： G03H1/04 , G03H1/20
CPC分类号： G03H1/0248 , G03H1/202 , G03H1/0005 , G03H1/265 , G03H2001/205 , G03H2001/2615 , G03H2222/36 , G03H2250/12 , Y10S359/90
摘要： A method for constructing a hologram by use of a master hologram which includes a predetermined pattern of interference fringes formed thereon by optical interference of a plurality of constructing coherent light beams incident at different angles. The method includes preparing a photosensitive medium, in which the hologram is to be formed, on the master hologram, and copying the master hologram onto the photo-sensitive medium by impinging copying light beams onto the master hologram at an incident angle different from the angles of the constructing beams.
摘要翻译：一种通过使用主全息图构成全息图的方法，该主全息图包括通过以不同角度入射的多个构成相干光束的光学干涉在其上形成的干涉条纹的预定图案。该方法包括在主全息图上制备其中要形成全息图的光敏介质，并通过以不同于角度的入射角照射到主全息图上来将主全息图复制到光敏介质上的构造梁。

68. 发明授权

US4810046A Light beam scanning apparatus 失效
标题翻译：光束扫描装置
公开(公告)号：US4810046A
公开(公告)日：1989-03-07
申请号：US120727
申请日：1987-11-16
申请人： Fumio Yamagishi , Shinya Hasegawa , Hiroyuki Ikeda , Takefumi Inagaki
发明人： Fumio Yamagishi , Shinya Hasegawa , Hiroyuki Ikeda , Takefumi Inagaki
IPC分类号： G02B26/10 , G06K15/12 , H04N1/113
CPC分类号： G06K15/1285 , G02B26/106
摘要： In a light beam scanning apparatus using a hologram rotator, a post-hologram is provided for further diffracting a light beam diffracted by the hologram rotator to a direction opposite to that of the direction in which the light beam is diffracted by the hologram rotator. By combining the kinds of wave fronts used for forming the holograms of the holograms rotator and the post-hologram, the light beam scanning apparatus reduces the deviation of the light beam scanning position caused by the mode hopping of a laser diode, and an improved linear scanning of the light beam and/or image focusing characteristic is obtained.
摘要翻译：在使用全息图旋转器的光束扫描装置中，提供后全息图，用于进一步将由全息图旋转器衍射的光束衍射到与通过全息图旋转器衍射光束的方向相反的方向。通过组合用于形成全息图旋转器的全息图和后全息图的波前的种类，光束扫描装置减少了由激光二极管的模式跳变引起的光束扫描位置的偏差，并且改善的线性获得光束的扫描和/或图像聚焦特性。

69. 发明授权

US08481182B2 Magnetic recording medium for thermally assisted magnetic recording 失效
标题翻译：用于热辅助磁记录的磁记录介质
公开(公告)号：US08481182B2
公开(公告)日：2013-07-09
申请号：US12776858
申请日：2010-05-10
申请人： Fumihiro Tawa , Wataru Odajima , Shinya Hasegawa
发明人： Fumihiro Tawa , Wataru Odajima , Shinya Hasegawa
IPC分类号： G11B5/66
CPC分类号： G11B5/667 , G11B5/7325 , G11B5/82 , G11B2005/0021
摘要： A magnetic recording medium used for the thermally assisted magnetic recording system which fires a laser beam at a magnetic recording medium to partially heat the medium and applies a magnetic field from the outside to the part heated to lower the coercivity for recording. The magnetic recording medium is configured by a glass substrate on which a heat radiation layer, heat retention layer, intermediate layer, and recording layer are stacked. Further, the heat retention layer is configured by a member having an effective refractive index lower than the effective refractive index of the recording layer and having an temperature diffusion coefficient determined by the specific heat, density, and heat conductivity rate higher than glass and lower than metal. The material with a high temperature diffusion coefficient is used lowered in temperature diffusion coefficient using a porous structure or granular structure.
摘要翻译：一种用于热辅助磁记录系统的磁记录介质，其在磁记录介质上激发激光束以部分地加热介质并将磁场从外部施加到被加热以降低用于记录的矫顽力的部分。磁记录介质由玻璃基板构成，其上堆叠有散热层，保温层，中间层和记录层。此外，保温层由具有低于记录层的有效折射率的有效折射率的构件构成，并且具有由比玻璃高的比热，密度和导热率确定的温度扩散系数，并且低于金属。使用具有高温扩散系数的材料使用多孔结构或颗粒结构降低温度扩散系数。

70. 发明申请

US20120302934A1 Dialysis Apparatus 失效
标题翻译：透析仪
公开(公告)号：US20120302934A1
公开(公告)日：2012-11-29
申请号：US13565123
申请日：2012-08-02
申请人： Shinya Hasegawa , Kensaku Tanaka
发明人： Shinya Hasegawa , Kensaku Tanaka
IPC分类号： A61M1/14
CPC分类号： A61M1/342 , A61M1/3434 , A61M1/3437 , A61M1/3465 , A61M1/3646 , A61M1/3649
摘要： A dialysis apparatus has a dialysate infusing line. One end of the dialysate infusing line is connected to the dialysate introducing line or the dialysate discharging line. The other end is branched out at a branch point into two flow routes, respectively, a first branch end and a second branch end. The first branch end is connectable to the arterial blood circuit or the venous blood circuit. The second branch end is connectable to the tip end of the arterial blood circuit during the blood-returning process. A dialysate infusing pump is arranged on the dialysate infusing line at a connection-side of the dialysate infusing line relative to the dialysate introducing line or the dialysate discharging line from the branch point. The dialysate infusing pump supplies the dialysate of the dialysate introducing line or the dialysate discharging line to the first branch end and the second branch end.
摘要翻译：透析装置具有透析液输注线。透析液输注线的一端与透析液导入管或透析液排出管连接。另一端在分支点处分别分成两条流动路线，分别是第一分支端和第二分支端。第一分支端可连接到动脉血回路或静脉血回路。第二分支端在血液返回过程中可连接到动脉血回路的末端。在透析液注入线的透析液输注线上，相对于透析液导入管或透析液排出管从分支点配置透析液输注泵。透析液输注泵将透析液引入管线或透析液排出管的透析液供给到第一分支端和第二分支端。

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