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61. 发明申请

US20080259101A1 METHODS AND APPARATUS FOR MINIMIZING THE NUMBER OF PRINT PASSES IN FLAT PANEL DISPLAY MANUFACTURING 审中-公开
标题翻译：在平板显示器制造中最小化打印通行数量的方法和装置
公开(公告)号：US20080259101A1
公开(公告)日：2008-10-23
申请号：US12054381
申请日：2008-03-24
申请人： Shinichi Kurita , John M. White
发明人： Shinichi Kurita , John M. White
IPC分类号： B41J2/01
CPC分类号： B41J2/2103
摘要： A system for inkjet printing includes a first set including a first inkjet print head having a first plurality of nozzles adapted to selectively dispense a first ink, and a second inkjet print head having a second plurality of nozzles adapted to selectively dispense a second ink; a second set including a third inkjet print head having a third plurality of nozzles adapted to selectively dispense a third ink and a fourth inkjet print head having a fourth plurality of nozzles adapted to selectively dispense a fourth ink; and a stage adapted to support the substrate and transport the substrate below the first and second sets during a printing pass; wherein the first set is adapted to dispense the first and second inks into respective adjacent color wells of a display pixel on a substrate and the second set is adapted to dispense the third and fourth inks into respective adjacent color wells of a display pixel on a substrate.
摘要翻译：一种用于喷墨打印的系统包括：第一组，包括具有适于选择性地分配第一油墨的第一多个喷嘴的第一喷墨打印头;以及具有适于选择性分配第二墨水的第二多个喷嘴的第二喷墨打印头; 第二组包括具有适于选择性地分配第三墨的第三多个喷嘴的第三喷墨打印头和具有适于选择性地分配第四墨的第四多个喷嘴的第四喷墨打印头; 以及适于在打印过程中支撑衬底并将衬底输送到第一和第二组下方的台阶; 其中所述第一组适于将所述第一和第二墨水分配到基板上的显示像素的相应的相邻色阱中，并且所述第二组适于将第三和第四墨水分配到基板上的显示像素的相应相邻色阱中。

62. 发明授权

US06577923B1 Apparatus and method for robotic alignment of substrates 失效
标题翻译：用于机器人对准基板的装置和方法
公开(公告)号：US06577923B1
公开(公告)日：2003-06-10
申请号：US09470821
申请日：1999-12-23
申请人： John M. White , Shinichi Kurita
发明人： John M. White , Shinichi Kurita
IPC分类号： G06F1900
CPC分类号： H01L21/67259 , H01L21/68 , H01L21/681 , H01L21/68707
摘要： A robot device that either translationally or rotationally aligns an object with a slot. For translational alignment, the robot device comprises a position sensor positioned in close proximity to the slot. The translational position sensor determines the position of the object by moving the object parallel to the slot until it actuates the position sensor. For rotational alignment, two position sensors are provided that determine the relative angle between the object and a portion of the robot device and the object.
摘要翻译：一个机器人设备，可以平移或旋转对齐一个对象与一个槽。对于平移对准，机器人装置包括位置传感器，该位置传感器位于狭缝附近。平移位置传感器通过将物体平行于槽移动直到其致动位置传感器来确定物体的位置。为了旋转对准，提供了两个位置传感器，其确定物体与机器人装置和物体的一部分之间的相对角度。

63. 发明授权

US06235634B1 Modular substrate processing system 失效
标题翻译：模块化基板处理系统
公开(公告)号：US06235634B1
公开(公告)日：2001-05-22
申请号：US09082483
申请日：1998-05-20
申请人： John M. White , Robert B. Conner , Kam S. Law , Norman L. Turner , William T. Lee , Shinichi Kurita
发明人： John M. White , Robert B. Conner , Kam S. Law , Norman L. Turner , William T. Lee , Shinichi Kurita
IPC分类号： H01L2144
CPC分类号： H01L21/67167 , H01L21/67161 , H01L21/67173 , H01L21/67236 , H01L21/67721 , H01L21/67727 , H01L21/67736 , H01L21/68707
摘要： The invention provides an apparatus and method for performing a process on a substrate. At least two types of structures may be used to provide a flow path for a substrate so that the substrate may be moved from one processing or loading position to another. The first is a conveyor. The second is a track. The flow path may be a closed continuous loop. Each processing island has a valve for introduction and extraction of the substrate into and out of an interior of the island. The processing island may include load locks, and may include in conjunction therewith an inspection station, a CVD chamber, a PECVD chamber, a PVD chamber, a post-anneal chamber, a cleaning chamber, a descumming chamber, an etch chamber, or a combination of such chambers.
摘要翻译：本发明提供了一种在衬底上进行处理的装置和方法。可以使用至少两种类型的结构来提供用于衬底的流动路径，使得衬底可以从一个处理或装载位置移动到另一个。第一个是输送机。第二是轨道。流动路径可以是闭合的连续环路。每个处理岛具有用于将基板引入和提取到岛内部的阀。处理岛可以包括负载锁，并且可以包括检查站，CVD室，PECVD室，PVD室，后退火室，清洁室，除污室，蚀刻室或这些室的组合。

64. 发明授权

US07784164B2 Electronic device manufacturing chamber method 有权
标题翻译：电子装置制造室法
公开(公告)号：US07784164B2
公开(公告)日：2010-08-31
申请号：US11214475
申请日：2005-08-29
申请人： John M. White , Donald Verplancken , Shinichi Kurita
发明人： John M. White , Donald Verplancken , Shinichi Kurita
IPC分类号： B23P11/00
CPC分类号： H01L21/67236 , H01L21/67196 , Y10S414/135 , Y10S414/139 , Y10T29/49826 , Y10T29/53
摘要： A non-polygon shaped, multi-piece chamber is provided. A non-polygon shaped, multi-piece chamber may include (1) a central piece having a first side and a second side, (2) a first side piece adapted to couple with the first side of the central piece, and (3) a second side piece adapted to couple with the second side of the central piece. The central piece, the first side piece, and the second side piece form a cylindrical overall shape when coupled together. Numerous other aspects are provided.
摘要翻译：提供非多边形形状的多片式室。非多边形多片式室可以包括（1）具有第一侧和第二侧的中心件，（2）适于与中心件的第一侧连接的第一侧件，以及（3）适于与中心件的第二侧联接的第二侧件。当连接在一起时，中心件，第一侧件和第二侧件形成圆柱形的整体形状。提供了许多其他方面。

65. 发明授权

US07625063B2 Apparatus and methods for an inkjet head support having an inkjet head capable of independent lateral movement 失效
标题翻译：用于具有能够独立横向运动的喷墨头的喷墨头支撑件的装置和方法
公开(公告)号：US07625063B2
公开(公告)日：2009-12-01
申请号：US11019967
申请日：2004-12-22
申请人： John M. White , Fan Cheung Sze , Quanyuan Shang , Shinichi Kurita , Hongbin Ji , Janusz Jozwiak , Inchen Huang , Emanual Beer
发明人： John M. White , Fan Cheung Sze , Quanyuan Shang , Shinichi Kurita , Hongbin Ji , Janusz Jozwiak , Inchen Huang , Emanual Beer
IPC分类号： B41J23/00
CPC分类号： B41J3/407 , B41J2/04505 , B41J2/04541 , B41J2/04581 , B41J2/04588 , B41J2/0459 , B41J2/04593 , B41J2/125 , B41J3/28 , B41J3/543 , B41J25/001 , B41J25/003 , B41J25/005 , B41J29/15 , B41J29/393
摘要： In a first aspect, a first apparatus is provided for inkjet printing. The first apparatus includes an inkjet head support that includes a plurality of inkjet heads. A first inkjet head of the plurality of inkjet heads is adapted to be independently moveable in both directions along a lateral axis relative to a second inkjet head of the plurality of inkjet heads. The first apparatus also includes a system controller adapted to control an independent lateral movement of the first inkjet head relative to the second inkjet head. Numerous other aspects are provided.
摘要翻译：在第一方面，提供了用于喷墨打印的第一装置。第一装置包括包括多个喷墨头的喷墨头支撑件。多个喷墨头中的第一喷墨头适于独立地沿相对于多个喷墨头的第二喷墨头的横向轴向两个方向移动。第一装置还包括适于控制第一喷墨头相对于第二喷墨头的独立横向移动的系统控制器。提供了许多其他方面。

66. 发明申请

US20090255911A1 LASER SCRIBING PLATFORM AND HYBRID WRITING STRATEGY 审中-公开
标题翻译：激光扫描平台和混合写字策略
公开(公告)号：US20090255911A1
公开(公告)日：2009-10-15
申请号：US12422189
申请日：2009-04-10
申请人： Sriram Krishnaswami , Shinichi Kurita , Bassam Shamoun , Benjamin M. Johnston , John M. White , Jiafa Fan , Inchen Huang , Antoine P. Manens , Wei-Sheng Lei , Wei-Yung Hsu
发明人： Sriram Krishnaswami , Shinichi Kurita , Bassam Shamoun , Benjamin M. Johnston , John M. White , Jiafa Fan , Inchen Huang , Antoine P. Manens , Wei-Sheng Lei , Wei-Yung Hsu
IPC分类号： B23K26/38 , B23K26/02 , B23K26/067 , B23K26/08
CPC分类号： B23K26/067 , B23K26/0676 , B23K26/082 , B23K26/083 , B23K26/16 , B23K26/361 , B23K26/364 , B23K26/40 , B23K2101/34 , B23K2101/36 , B23K2103/16 , B23K2103/172
摘要： Laser scribing can be performed on a workpiece (104) such as substrates with layers formed thereon for use in a solar panel without need to rotate the workpiece (104) during the scribing process. A series of lasers (602, 622) can be used to concurrently remove material from multiple positions on the workpiece (104). Each laser (602, 622) can have at least one scanning device (614, 630, 632) positioned along a beam path thereof in order to adjust a position of the laser output relative to the workpiece (104). By adjusting the beam or pulse positions using the scanning devices (614, 630, 632) while translating the workpiece (104), substantially any pattern can be scribed into at least one layer of the workpiece (104) without the need for any rotation of the workpiece (104).
摘要翻译：可以对工件（104）进行激光划线，例如在其上形成有层的基板，用于太阳能电池板，而不需要在划线过程中旋转工件（104）。可以使用一系列激光器（602,622）来同时从工件（104）上的多个位置去除材料。每个激光器（602,622）可以具有沿其光束路径定位的至少一个扫描装置（614,630,632），以便调节激光输出相对于工件（104）的位置。通过在平移工件（104）的同时通过使用扫描装置（614,630,632）调节光束或脉冲位置，基本上任何图案都可以划分成工件（104）的至少一层，而不需要任何旋转工件（104）。

67. 发明申请

US20090122099A1 METHODS AND SYSTEMS FOR CALIBRATION OF INKJET DROP POSITIONING 审中-公开
标题翻译：用于校准喷墨定位的方法和系统
公开(公告)号：US20090122099A1
公开(公告)日：2009-05-14
申请号：US12354759
申请日：2009-01-15
申请人： John M. White , Emanuel Beer , Hongbin Ji , Chang-Tsung Lin , Shinichi Kurita
发明人： John M. White , Emanuel Beer , Hongbin Ji , Chang-Tsung Lin , Shinichi Kurita
IPC分类号： B41J29/393
CPC分类号： B41J29/393
摘要： Methods and apparatus for inkjet drop positioning are provided. A first method includes determining an intended deposition location of an ink drop on a substrate, depositing the ink drop on the substrate using an inkjet printing system, detecting a deposited location of the deposited ink drop on the substrate, comparing the deposited location to the intended location, determining a difference between the deposited location and the intended location, and compensating for the difference between the deposited location and the intended location by adjusting a parameter of an inkjet printing system. Numerous other aspects are provided.
摘要翻译：提供了用于喷墨滴定位的方法和装置。第一种方法包括确定墨滴在基底上的预期沉积位置，使用喷墨印刷系统将墨滴沉积在基底上，检测沉积的墨滴在基底上的沉积位置，将沉积位置与预期的位置进行比较确定存放位置与预期位置之间的差异，以及通过调整喷墨打印系统的参数来补偿存放位置与预期位置之间的差异。提供了许多其他方面。

68. 发明申请

US20080309715A1 METHODS AND APPARATUS FOR DEPOSITING INK ONTO SUBSTRATES 失效
标题翻译：用于沉积在基材上的方法和装置
公开(公告)号：US20080309715A1
公开(公告)日：2008-12-18
申请号：US11761832
申请日：2007-06-12
申请人： Bassam Shamoun , John M. White , Quanyuan Shang , Shinichi Kurita
发明人： Bassam Shamoun , John M. White , Quanyuan Shang , Shinichi Kurita
IPC分类号： B41J2/21
CPC分类号： B41J2/2132
摘要： Embodiments of an ink jet printing system include a motion stage adapted to move a substrate having a display object in a printing direction and a first printing assembly mounted over the motion stage including a set of print heads aligned and arranged consecutively in the printing direction such that the display object moves under the print heads sequentially. Embodiments of a method of ink jet printing include moving a substrate under the print heads of printing assembly sequentially in a printing direction, activating alternate ink jetting channels within each print head of the first printing assembly, activating corresponding channels within adjacent print heads in the first printing assembly alternately, and depositing ink in alternating sub-pixels within one or more pixels on the substrate.
摘要翻译：喷墨打印系统的实施例包括适于在打印方向上移动具有显示对象的基板的运动台和安装在运动台上的第一印刷组件，该第一印刷组件包括在打印方向上连续排列和排列的一组打印头，使得显示对象顺序地在打印头下移动。喷墨打印方法的实施例包括在打印方向上顺序地移动印刷组件的打印头下的基板，激活第一印刷组件的每个打印头内的交替喷墨通道，在第一印刷组件的相邻打印头内激活相应的通道交替地印刷组件，并且在基板上的一个或多个像素内的交替子像素中沉积墨。

69. 发明授权

US07746088B2 In-line electron beam test system 有权
标题翻译：在线电子束测试系统
公开(公告)号：US07746088B2
公开(公告)日：2010-06-29
申请号：US12422164
申请日：2009-04-10
申请人： Fayez E. Abboud , Sriram Krishnaswami , Benjamin M. Johnston , Hung T. Nguyen , Matthias Brunner , Ralf Schmid , John M. White , Shinichi Kurita , James C. Hunter
发明人： Fayez E. Abboud , Sriram Krishnaswami , Benjamin M. Johnston , Hung T. Nguyen , Matthias Brunner , Ralf Schmid , John M. White , Shinichi Kurita , James C. Hunter
IPC分类号： G01R31/302
CPC分类号： H01L21/67748 , H01J2237/2811 , H01J2237/2817 , H01L21/67201 , H01L21/67236
摘要： A method and apparatus for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the apparatus performs a test on the substrate in one linear axis in at least one chamber that is slightly wider than a dimension of the substrate to be tested. Clean room space and process time is minimized due to the smaller dimensions and volume of the system.
摘要翻译：描述了用于测试形成在大面积基板上的多个电子装置的方法和装置。在一个实施例中，该装置在至少一个室内的一个线性轴线上对衬底进行测试，所述至少一个腔室比待测试衬底的尺寸略宽。由于系统的尺寸和体积较小，洁净室空间和处理时间被最小化。

70. 发明申请

US20090195262A1 IN-LINE ELECTRON BEAM TEST SYSTEM 有权
标题翻译：在线电子束测试系统
公开(公告)号：US20090195262A1
公开(公告)日：2009-08-06
申请号：US12422164
申请日：2009-04-10
申请人： Fayez E. Abboud , Sriram Krishnaswami , Benjamin M. Johnston , Hung T. Nguyen , Matthias Brunner , Ralf Schmid , John M. White , Shinichi Kurita , James C. Hunter
发明人： Fayez E. Abboud , Sriram Krishnaswami , Benjamin M. Johnston , Hung T. Nguyen , Matthias Brunner , Ralf Schmid , John M. White , Shinichi Kurita , James C. Hunter
IPC分类号： G01R31/305
CPC分类号： H01L21/67748 , H01J2237/2811 , H01J2237/2817 , H01L21/67201 , H01L21/67236
摘要： A method and apparatus for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the apparatus performs a test on the substrate in one linear axis in at least one chamber that is slightly wider than a dimension of the substrate to be tested. Clean room space and process time is minimized due to the smaller dimensions and volume of the system.
摘要翻译：描述了用于测试形成在大面积基板上的多个电子装置的方法和装置。在一个实施例中，该装置在至少一个室内的一个线性轴线上对衬底进行测试，所述至少一个腔室比待测试衬底的尺寸略宽。由于系统的尺寸和体积较小，洁净室空间和处理时间被最小化。

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