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61. 发明授权

US06290583B1 Apparatus for holding workpiece 有权
标题翻译：用于保持工件的装置
公开(公告)号：US06290583B1
公开(公告)日：2001-09-18
申请号：US09150371
申请日：1998-09-10
申请人： Hiroo Suzuki , Seiji Ishikawa
发明人： Hiroo Suzuki , Seiji Ishikawa
IPC分类号： B24B2900
CPC分类号： B24B37/30
摘要： An apparatus for holding a workpiece is incorporated in a polishing apparatus which polishes the workpiece to a flat mirror finish. The workpiece holding apparatus has a top ring holding a workpiece and a top ring drive shaft for rotating the top ring and pressing the top ring holding the workpiece against a turntable. A rotary joint is removably provided on the top ring drive shaft for allowing fluid to pass therethrough to thereby communicate with an external fluid source. A passage provided in the top ring drive shaft allows the rotary joint to communicate with through-holes formed in the top ring.
摘要翻译：用于保持工件的装置结合在抛光装置中，抛光装置将工件抛光成平面镜面。工件保持装置具有保持工件的顶环和用于使顶环旋转并将保持工件的顶环压靠在转台上的顶环驱动轴。旋转接头可移除地设置在顶环驱动轴上，以允许流体通过，从而与外部流体源连通。设置在顶环驱动轴中的通道允许旋转接头与形成在顶环中的通孔相通。

62. 发明授权

US06273802B1 Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device 有权
公开(公告)号：US06273802B1
公开(公告)日：2001-08-14
申请号：US09233039
申请日：1999-01-20
申请人： Katsuya Okumura , Riichirou Aoki , Hiromi Yajima , Seiji Ishikawa , Manabu Tsujimura
发明人： Katsuya Okumura , Riichirou Aoki , Hiromi Yajima , Seiji Ishikawa , Manabu Tsujimura
IPC分类号： B24B500
CPC分类号： H01L21/67161 , B08B1/04 , B24B27/0023 , B24B37/04 , B24B37/345 , B24B51/00 , B24B55/12 , F24F3/161 , H01L21/67028 , H01L21/67046 , H01L21/67057 , H01L21/67167 , H01L21/67219 , H01L21/67745 , H01L21/67778 , H03M13/39 , H04N5/4401 , H04N5/455
摘要： A polishing apparatus includes an arrangement of a plurality of units to deal with various operations and a robot having at least one arm. The plurality of units are disposed around the robot and include a loading unit for receiving thereon a, e.g. dry, workpiece to be polished, a polishing system including at least one polishing unit for polishing the workpiece, a washing system and a drying system at least including one washing unit for washing and drying the polished workpiece, and an unloading unit for receiving thereon a resultant clean and dry polished workpiece.

63. 发明授权

US6096480A Photosensitive polyimidosiloxane compositions and insulating films made thereof 失效
标题翻译：光敏聚亚硅氧烷组合物及其制成的绝缘膜
公开(公告)号：US6096480A
公开(公告)日：2000-08-01
申请号：US985872
申请日：1997-12-05
申请人： Seiji Ishikawa , Hiroshi Yasuno , Hiroyuki Sakurai
发明人： Seiji Ishikawa , Hiroshi Yasuno , Hiroyuki Sakurai
IPC分类号： C08G73/10 , C08G77/455 , C09D183/10 , G03F7/038
CPC分类号： G03F7/0387 , C08G73/1042 , C08G73/106 , C08G77/455 , C09D183/10
摘要： A photosensitive polyimidosiloxane composition comprising a polyimidosiloxane comprising 15-80 mole percent of the units, ##STR1## wherein X represents CO, O or a direct bond and R.sub.3 represents an aromatic residue containing a photosensitive group with an unsaturated hydrocarbon group, and 85-20 mole percent of the units, ##STR2## wherein X is as defined above, each R.sub.4 independently represents a divalent hydrocarbon residue, each R.sub.5 independently represents an alkyl group of 1-3 carbon atoms and 1 represents an integer of 3-30, a finely divided inorganic filler, and an organic solvent. The composition provides films having excellent light transmittance.
摘要翻译：一种光敏聚酰亚胺硅氧烷组合物，其包含包含15-80摩尔％单元的聚亚酰基硅氧烷，其中X表示CO，O或直接键，R 3表示含有不饱和烃基的光敏基团的芳族残基，和85-20摩尔％单元，其中X如上所定义，每个R 4独立地表示二价烃残基，每个R 5独立地表示1-3个碳原子的烷基，1表示3-30的整数，细碎的无机填料和有机溶剂。该组合物提供具有优异透光率的膜。

64. 发明授权

US5653623A Polishing apparatus with improved exhaust 失效
标题翻译：具有改善排气的抛光装置
公开(公告)号：US5653623A
公开(公告)日：1997-08-05
申请号：US357176
申请日：1994-12-13
申请人： Norio Kimura , Seiji Ishikawa , Masako Kodera , Atsushi Shigeta , Riichirou Aoki
发明人： Norio Kimura , Seiji Ishikawa , Masako Kodera , Atsushi Shigeta , Riichirou Aoki
IPC分类号： B24B53/007 , B24B53/017 , B24B7/04 , B24B29/02
CPC分类号： B24B53/017
摘要： A polishing apparatus for polishing a surface of a workpiece such as a semiconductor wafer is installed in a clean room. The polishing apparatus includes a polishing section having a turntable with an abrasive cloth mounted on an upper surface thereof, a top ring for supporting the workpiece to be polished and pressing the workpiece against the abrasive cloth, a loading section for loading the workpiece to be polished onto the top ring, and an unloading section for unloading the workpiece which has been polished from the top ring. A cover covers an entire area of movement of the top ring including the polishing section, the loading section and the unloading section. An exhaust duct discharges air of an interior space of the cover to an outside of an installation space of the polishing apparatus.
摘要翻译：用于抛光诸如半导体晶片的工件的表面的抛光装置安装在洁净室中。抛光装置包括具有安装在其上表面上的研磨布的转台的抛光部分，用于支撑待抛光工件的顶环，并将工件压靠在研磨布上，用于将待抛光工件加载的装载部分以及用于卸载已经从顶环抛光的工件的卸载部分。盖子覆盖包括抛光部分，装载部分和卸载部分在内的顶环的整个运动区域。排气管将盖的内部空间的空气排出到抛光装置的安装空间的外部。

65. 发明授权

US5631838A Apparatus for verifying GPS satellite data 失效
标题翻译： GPS卫星数据验证装置
公开(公告)号：US5631838A
公开(公告)日：1997-05-20
申请号：US614941
申请日：1996-03-11
申请人： Seiji Ishikawa , Yuichi Murakami , Tomio Yasuda , Tomohiro Yamamoto , Toshimitsu Oka
发明人： Seiji Ishikawa , Yuichi Murakami , Tomio Yasuda , Tomohiro Yamamoto , Toshimitsu Oka
IPC分类号： G01S19/20 , G01C21/00 , G01S1/00 , G01S19/27 , G01S19/49 , G06F19/00
CPC分类号： G01S19/20
摘要： A length of time required for the verification of data transmitted from a satellite or satellites is reduced. A distance r1 calculated from a time delay required for the propagation of a radio wave between a transmitting and a receiving site is obtained, as is a line-of-sight distance r2 which is calculated from the positions of a satellite and a point of reception. When a difference between these two distances is small, data from these satellites are regarded as valid data. However, when the difference is large, data is regarded as involving a large error. The position of the point of reception is determined by a positioning calculation which utilizes data from predetermined three or four verified satellites, or is entered by an operator. The position of the satellite is obtained from orbital data which is delivered by that satellite.
摘要翻译：从卫星或卫星发送的数据的验证所需的时间缩短。从发送和接收站点之间的无线电波传播所需的时间延迟计算的距离r1也是从卫星和接收点的位置计算的视距离r2 。当这两个距离之间的差异小时，来自这些卫星的数据被视为有效数据。然而，当差异较大时，数据被认为涉及大的误差。接收点的位置由使用来自预定的三个或四个已验证的卫星的数据或由操作者输入的定位计算来确定。卫星的位置是由该卫星传送的轨道数据获得的。

66. 发明授权

US5598166A Mobile object positioning system 失效
标题翻译：移动对象定位系统
公开(公告)号：US5598166A
公开(公告)日：1997-01-28
申请号：US626722
申请日：1996-04-01
申请人： Seiji Ishikawa , Yoshihisa Suwa , Takeshi Ito , Tomio Yasuda
发明人： Seiji Ishikawa , Yoshihisa Suwa , Takeshi Ito , Tomio Yasuda
IPC分类号： G01C21/00 , G01S1/00 , G01S19/14 , G01S19/49 , G08G1/0969 , H04B7/185 , G01S5/02
CPC分类号： G01S19/49
摘要： A mobile object positioning system includes a GPS signal receiver for receiving positioning radio signals from a plurality of satellites, calculating a present location of a mobile object in accordance with the positioning radio signal and outputting present location data at each of a plurality of calculating times. An electronic controller is provided for updating the present location data at each calculating time, storing the present location data, estimating an error of the present location data in accordance with the positioning radio signals and outputting error data at each estimating time. A vehicle velocity sensor is disposed on the mobile object for detecting the velocity of the moving mobile object and outputting a mobile velocity signal. The electronic controller determines a stationary condition of the mobile object in accordance with the mobile velocity signal and prohibits updating the present location data when a stationary condition of the mobile object is determined and a value of the error data at a present estimating time is larger than that at a last previous estimating time.
摘要翻译：移动物体定位系统包括：GPS信号接收器，用于从多个卫星接收定位无线电信号，根据定位无线电信号计算移动物体的当前位置，并在多个计算时间中的每一个处输出当前位置数据。提供电子控制器，用于在每个计算时间更新当前位置数据，存储当前位置数据，根据定位无线电信号估计当前位置数据的错误，并在每个估计时间输出错误数据。车辆速度传感器设置在移动物体上，用于检测移动移动物体的速度并输出移动速度信号。电子控制器根据移动速度信号确定移动对象的静止状态，并且当确定移动对象的静止状态并且当前估计时间的误差数据的值大于当前位置数据时，禁止更新当前位置数据在最后的估计时间。

67. 发明授权

US5384986A Polishing apparatus 失效
标题翻译：抛光设备
公开(公告)号：US5384986A
公开(公告)日：1995-01-31
申请号：US124648
申请日：1993-09-22
申请人： Masayoshi Hirose , Seiji Ishikawa , Norio Kimura , Kiyotaka Kawashima , You Ishii
发明人： Masayoshi Hirose , Seiji Ishikawa , Norio Kimura , Kiyotaka Kawashima , You Ishii
IPC分类号： B24B37/26 , B24B53/007 , B24B53/017 , B41J11/62
CPC分类号： B24B53/017 , B24B37/26
摘要： A turntable with an abrasive cloth mounted thereon and a top ring positioned above the turntable are independently rotatably provided. The top ring holds a workpiece to be polished and presses the workpiece against the abrasive cloth. The turntable and the top ring are rotated to polish the surface of the workpiece to a flat mirror finish on the abrasive cloth. A rotatable brush pressed against the abrasive cloth is rotated about an axis substantially perpendicularly to the plane of the abrasive cloth, and oscillated substantially radially between radially inner and outer positions over the abrasive cloth. A cleaning solution is sprayed from a nozzle onto the abrasive cloth. The turntable has a bank along an outer circumferential edge thereof for preventing a protective solution, which is supplied to the abrasive cloth to keep the abrasive cloth wet and prevent it, from flowing off the turntable when the turntable is stationary.
摘要翻译：安装有研磨布的转盘和位于转盘上方的顶环可独立地可旋转地设置。顶环保持要抛光的工件，并将工件压在研磨布上。转盘和顶环旋转以将工件的表面抛光到研磨布上的平整镜面上。压在研磨布上的可旋转刷子围绕基本上垂直于研磨布平面的轴线旋转，并且在磨料布的径向内部和外部位置之间基本径向摆动。将清洁溶液从喷嘴喷射到研磨布上。转台沿其外圆周边缘具有一个堤，用于防止当转台静止时供给磨料以保持磨料湿润并防止磨损的保护溶液流出转台。

68. 发明授权

US4665291A Temperature control switch 失效
标题翻译：温控开关
公开(公告)号：US4665291A
公开(公告)日：1987-05-12
申请号：US735063
申请日：1985-05-17
申请人： Seiji Ishikawa
发明人： Seiji Ishikawa
IPC分类号： B60R16/02 , G05B11/00 , H01H9/18 , H01H9/52 , H01H13/02 , H01H37/08 , H01H9/00
CPC分类号： H01H9/18 , H01H37/08 , H01H9/52 , Y10S116/17
摘要： Control knob for temperature control switch is provided with means for heating or/and cooling the same, whereby, by feeling of the temperature of the control knob with a finger tip, it is possible to instantaneously identify what the function of the control knob which the finger has toughed is, without turning the sight to a switch, and, even when the shapes and way of disposition of control knobs are identical with one another.
摘要翻译：温度控制开关的控制旋钮设置有用于加热或/和冷却其的装置，由此，通过用指尖感觉控制旋钮的温度，可以立即识别控制旋钮的功能，手指已经弯曲，而不会将视线转向开关，即使控制旋钮的形状和配置方式彼此相同。

69. 发明授权

US4178431A Aromatic copolyamide fiber from benzidine sulfone or diamino phenanthridone 失效
标题翻译：来自联苯胺砜或二氨基菲啶酮的芳族共聚酰胺纤维
公开(公告)号：US4178431A
公开(公告)日：1979-12-11
申请号：US799091
申请日：1977-05-20
申请人： Takaho Kaneda , Seiji Ishikawa , Hiroshi Daimon , Toshio Katsura , Tatsuaki Maeda , Tadahiro Hondo
发明人： Takaho Kaneda , Seiji Ishikawa , Hiroshi Daimon , Toshio Katsura , Tatsuaki Maeda , Tadahiro Hondo
IPC分类号： C08G69/26 , C08G69/42 , C08G73/06 , D01F6/80 , C08G69/32
CPC分类号： C08G69/42 , C08G69/265 , C08G73/0688 , D01F6/805
摘要： Fibers of a copolyamide derived from a diamine component including 10 to 50 mole % of benzidine sulfone or 2,7-diaminophenanthridone and 90 to 50 mole % of p-phenylene diamine and a dicarboxylic acid component derived from a reactive derivative of terephthalic acid are disclosed. The fibers have an initial modulus of elasticity of at least 400 g/d and a tensile strength of at least 16 g/d.The fibers have in combination various desirable properties, such as excellent initial modulus of elasticity, high tensile strength, high knot strength, high heat resistance and good adhesiveness to various plastics, rubbers and adhesives, and they are valuably used in various industrial fields as fibrous reinforcers and for production of fiber-reinforced plastics and rubber products.
摘要翻译：公开了衍生自包含10至50摩尔％的联苯胺砜或2,7-二氨基苯并菲酮和90至50摩尔％对苯二胺的二胺组分的共聚酰胺纤维和衍生自对苯二甲酸的活性衍生物的二羧酸组分的纤维。纤维的初始弹性模量为至少400g / d，拉伸强度为至少16g / d。纤维具有各种期望的性能，例如优异的初始弹性模量，高拉伸强度，高结强度，高耐热性和对各种塑料，橡胶和粘合剂的良好粘合性，并且它们在各种工业领域中有价值地用于纤维增强材料和生产纤维增强塑料和橡胶制品。

70. 发明授权

US4002011A High speed binding device 失效
标题翻译：高速装订装置
公开(公告)号：US4002011A
公开(公告)日：1977-01-11
申请号：US636202
申请日：1975-11-28
申请人： Shigenobu Tanaka , Seiichi Nishikawa , Seiji Ishikawa
发明人： Shigenobu Tanaka , Seiichi Nishikawa , Seiji Ishikawa
IPC分类号： D02G3/36 , H01B13/26 , D07B3/04
CPC分类号： H01B13/26 , D07B7/14
摘要： Disclosed is a high speed binding device wherein a package wound with a binding thread is fixed to a flange of a flyer with its thread-winding axis in parallel with the rotation axis of said flyer and the binding thread is drawn out in the direction of the winding axis; and thereafter said binding thread is passed through a first tensioner for imparting to the binding thread a back tension decreased with a rise in the rotation speed of the flyer and then through a second tensioner for imparting to the binding thread a back tension increased with a rise in said rotation speed, thereby to cause said decrease in the back tension to be offset by said increase in the back tension, thus to bind, with a substantially constant back tension, the binding thread about the outer periphery of an element assembly passing through a through hole coaxially bored through the flyer.
摘要翻译：公开了一种高速装订装置，其中缠绕有装订螺纹的包装被固定到传单的凸缘上，其缠绕轴线与所述传单的旋转轴线平行，并且装订线沿着绕轴; 然后，所述装订线通过第一张紧器，用于赋予所述装订线，随着所述传单的旋转速度的上升，所述后张力随着所述传单的旋转速度的上升而减小，然后通过第二张紧器，用于赋予所述装订螺纹，在所述转速中，从而使所述背张力的所述减小由于所述背张力的增加而被抵消，从而以大致恒定的背张力将所述装订螺纹围绕通过一个元件组件的所述元件组件的外周缘通孔同轴地穿过传单。

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