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    • 63. 发明授权
    • Trench anti-fuse structures for a programmable integrated circuit
    • 用于可编程集成电路的沟槽反熔丝结构
    • US07977766B2
    • 2011-07-12
    • US12537473
    • 2009-08-07
    • Roger A. Booth, Jr.Kangguo ChengJack A. MandelmanWilliam R. Tonti
    • Roger A. Booth, Jr.Kangguo ChengJack A. MandelmanWilliam R. Tonti
    • H01L21/00H01L23/535
    • H01L23/5252H01L2924/0002H01L2924/00
    • Trench anti-fuse structures, design structures embodied in a machine readable medium for designing, manufacturing, or testing a programmable integrated circuit. The anti-fuse structure includes a trench having a plurality of sidewalls that extend into a substrate, a doped region in the semiconductor material of the substrate proximate to the sidewalls of the trench, a conductive plug in the trench, and a dielectric layer on the sidewalls of the trench. The dielectric layer is disposed between the conductive plug and the doped region. The dielectric layer is configured so that a programming voltage applied between the doped region and the conductive plug causes a breakdown of the dielectric layer within a region of the trench. The trench sidewalls are arranged with a cross-sectional geometrical shape that is independent of position between a bottom wall of the deep trench and a top surface of the substrate.
    • 沟槽反熔丝结构,设计结构体现在用于设计,制造或测试可编程集成电路的机器可读介质中。 反熔丝结构包括具有延伸到衬底中的多个侧壁的沟槽,靠近沟槽侧壁的衬底的半导体材料中的掺杂区域,沟槽中的导电插塞以及沟槽中的介电层 沟槽的侧壁。 电介质层设置在导电插塞和掺杂区域之间。 电介质层被配置为使得施加在掺杂区域和导电插塞之间的编程电压导致沟槽区域内的电介质层的击穿。 沟槽侧壁布置成具有与深沟槽的底壁和基板的顶表面之间的位置无关的横截面几何形状。