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61. 发明授权

US06639662B2 Sample inspection system 有权
公开(公告)号：US06639662B2
公开(公告)日：2003-10-28
申请号：US09746141
申请日：2000-12-21
申请人： Mehdi Vaez-Iravani , Stanley Stokowski , Guoheng Zhao
发明人： Mehdi Vaez-Iravani , Stanley Stokowski , Guoheng Zhao
IPC分类号： G01N2100
CPC分类号： G01J3/44 , G01J3/0216 , G01J3/0229 , G01N21/21 , G01N21/47 , G01N21/474 , G01N21/8806 , G01N21/94 , G01N21/9501 , G01N2021/8825 , G01N2021/8845 , G01N2021/8848 , G01N2201/065
摘要： A curved mirrored surface is used to collect radiation scattered by a sample surface and originating from a normal illumination beam and an oblique illumination beam. The collected radiation is focused to a detector. Scattered radiation originating from the normal and oblique illumination beams may be distinguished by employing radiation at two different wavelengths, by intentionally introducing an offset between the spots illuminated by the two beams or by switching the normal and oblique illumination beams on and off alternately. Beam position error caused by change in sample height may be corrected by detecting specular reflection of an oblique illumination beam and changing the direction of illumination in response thereto. Butterfly-shaped spatial filters may be used in conjunction with curved mirror radiation collectors to restrict detection to certain azimuthal angles.

62. 发明授权

US06608676B1 System for detecting anomalies and/or features of a surface 失效
标题翻译：用于检测表面的异常和/或特征的系统
公开(公告)号：US06608676B1
公开(公告)日：2003-08-19
申请号：US08904892
申请日：1997-08-01
申请人： Guoheng Zhao , Stanley Stokowski , Mehdi Vaez-Iravani
发明人： Guoheng Zhao , Stanley Stokowski , Mehdi Vaez-Iravani
IPC分类号： G01N2100
CPC分类号： G01N21/9501
摘要： A cylindrical mirror or lens is used to focus an input collimated beam of light onto a line on the surface to be inspected, where the line is substantially in the plane of incidence of the focused beam. An image of the beam is projected onto an array of charge-coupled devices parallel to the line for detecting anomalies and/or features of the surface, where the array is outside the plane of incidence of the focused beam.
摘要翻译：使用圆柱形镜或透镜将输入的准直光束聚焦到要检查的表面上的线上，其中线基本上在聚焦束的入射平面中。光束的图像被投影到平行于线的电荷耦合器件的阵列上，用于检测表面的异常和/或特征，其中阵列位于聚焦光束的入射平面之外。

63. 发明授权

US06201601B1 Sample inspection system 失效
公开(公告)号：US06201601B1
公开(公告)日：2001-03-13
申请号：US08933771
申请日：1997-09-19
申请人： Mehdi Vaez-Iravani , Stanley Stokowski , Guoheng Zhao
发明人： Mehdi Vaez-Iravani , Stanley Stokowski , Guoheng Zhao
IPC分类号： G01N2100
CPC分类号： G01J3/44 , G01J3/0216 , G01J3/0229 , G01N21/21 , G01N21/47 , G01N21/474 , G01N21/8806 , G01N21/94 , G01N21/9501 , G01N2021/8825 , G01N2021/8845 , G01N2021/8848 , G01N2201/065
摘要： A curved mirrored surface is used to collect radiation scattered by a sample surface and originating from a normal illumination beam and an oblique illumination beam. The collected radiation is focused to a detector. Scattered radiation originating from the normal and oblique illumination beams may be distinguished by employing radiation at two different wavelengths, by intentionally introducing an offset between the spots illuminated by the two beams or by switching the normal and oblique illumination beams on and off alternately. Beam position error caused by change in sample height may be corrected by detecting specular reflection of an oblique illumination beam and changing the direction of illumination in response thereto. Butterfly-shaped spatial filters may be used in conjunction with curved mirror radiation collectors to restrict detection to certain azimuthal angles.

64. 发明授权

US09001327B2 Composite polarizer with adjustable polarization angles 有权
标题翻译：具有可调偏振角的复合偏光镜
公开(公告)号：US09001327B2
公开(公告)日：2015-04-07
申请号：US13883988
申请日：2012-02-14
申请人： Guoheng Zhao
发明人： Guoheng Zhao
IPC分类号： G01J4/00 , G02B27/28 , G02B5/30 , G01N21/21 , G01N21/88 , G01N21/95
CPC分类号： G02B27/286 , G01N21/21 , G01N21/8806 , G01N21/9501 , G01N2021/8848 , G02B5/3066 , G02B27/283
摘要： An adjustable, composite polarizer can include first and second plate polarizers and an adjusting apparatus. The adjusting apparatus can adjust a pitch angle and a roll angle for the first and second plate polarizers while maintaining a predetermined, minimal distance between those plates. In this configuration, the adjustable, composite polarizer can provide mirror symmetric polarization with respect to an incident plane while providing the flexibility of any polarization.
摘要翻译：可调节的复合偏振器可以包括第一和第二板偏振器和调节装置。调节装置可以在保持这些板之间预定的最小距离的同时，调整第一和第二板偏振器的俯仰角和滚动角。在这种配置中，可调整的复合偏振器可以提供相对于入射平面的镜对称极化，同时提供任何偏振的柔性。

65. 发明授权

US08891079B2 Wafer inspection 有权
标题翻译：晶圆检查
公开(公告)号：US08891079B2
公开(公告)日：2014-11-18
申请号：US13822281
申请日：2011-12-07
申请人： Guoheng Zhao , Jenn-Kuen Leong , Mehdi Vaez-Iravani
发明人： Guoheng Zhao , Jenn-Kuen Leong , Mehdi Vaez-Iravani
IPC分类号： G01N21/00 , G01J4/00 , G01N21/88 , G01N21/95 , H01L21/66
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/8806 , G01N2201/06113 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： Systems and methods for inspecting a wafer are provided. One system includes an illumination subsystem configured to illuminate the wafer; a collection subsystem configured to collect light scattered from the wafer and to preserve the polarization of the scattered light; an optical element configured to separate the scattered light collected in different segments of the collection numerical aperture of the collection subsystem, where the optical element is positioned at a Fourier plane or a conjugate of the Fourier plane of the collection subsystem; a polarizing element configured to separate the scattered light in one of the different segments into different portions of the scattered light based on polarization; and a detector configured to detect one of the different portions of the scattered light and to generate output responsive to the detected light, which is used to detect defects on the wafer.
摘要翻译：提供了用于检查晶片的系统和方法。一个系统包括配置成照亮晶片的照明子系统; 收集子系统，被配置为收集从晶片散射的光并保持散射光的偏振; 光学元件，被配置为将收集在收集子系统的收集数值孔径的不同段中的散射光分离，其中所述光学元件位于所述收集子系统的傅立叶平面或所述傅立叶平面的共轭处; 偏振元件，被配置为基于极化将所述不同段中的一个中的散射光分离成所述散射光的不同部分; 以及检测器，被配置为检测散射光的不同部分中的一个，并且响应于检测到的光而产生输出，所述检测光用于检测晶片上的缺陷。

66. 发明授权

US08604447B2 Solar metrology methods and apparatus 失效
标题翻译：太阳能计量方法和装置
公开(公告)号：US08604447B2
公开(公告)日：2013-12-10
申请号：US13557047
申请日：2012-07-24
申请人： Scott Young , Guoheng Zhao , Ady Levy , Marco Guevremont , Neeraj Khanna
发明人： Scott Young , Guoheng Zhao , Ady Levy , Marco Guevremont , Neeraj Khanna
IPC分类号： G01N21/64
CPC分类号： G01N21/6489 , G01N21/9501 , H02S50/10
摘要： Methods and apparatus are presented to measure the photoluminescence of incoming wafers and extract parameters such as minority carrier life time, diffusion length, and defect density that may be used to predict final solar cell efficiency. In some examples, illumination light is supplied to a side of an as-cut silicon wafer and the induced luminescence measured from the same side and the opposite side of the wafer is used to determine an indication of the minority carrier lifetime. In another example, the luminescence induced by two instances of illumination light of different wavelength is used to determine an indication of the minority carrier lifetime. In another example, the spatial distribution of luminescence intensity over an area surrounding a focused illumination spot is used to determine an indication of the minority carrier lifetime. Other apparatus useful to passivate the surface of a wafer for inspection are also presented.
摘要翻译：提出了测量进入晶片的光致发光的方法和装置，并提取可用于预测最终太阳能电池效率的参数，例如少数载流子寿命，扩散长度和缺陷密度。在一些示例中，将照明光提供给切割硅晶片的一侧，并且使用从晶片的相同侧和相对侧测量的感应发光来确定少数载流子寿命的指示。在另一示例中，由两个不同波长的照明光实例引起的发光用于确定少数载流子寿命的指示。在另一示例中，使用聚焦照明点周围的区域上的发光强度的空间分布来确定少数载流子寿命的指示。还提出了可用于钝化晶片表面以进行检查的其它装置。

67. 发明授权

US08436554B2 LED solar illuminator 失效
标题翻译： LED太阳能照明灯
公开(公告)号：US08436554B2
公开(公告)日：2013-05-07
申请号：US13081734
申请日：2011-04-07
申请人： Guoheng Zhao , Ady Levy , Alex Salnik , Mehdi Vaez-Iravani , Lena Nicolaides , Samuel S. H. Ngai
发明人： Guoheng Zhao , Ady Levy , Alex Salnik , Mehdi Vaez-Iravani , Lena Nicolaides , Samuel S. H. Ngai
IPC分类号： G05F1/00 , H05B37/02 , H05B39/04 , H05B41/36
CPC分类号： H05B33/0803
摘要： An apparatus for illuminating a target surface, the apparatus having a plurality of LED arrays, where each of the arrays has a plurality of individually addressable LEDs, and where at least one of the arrays is disposed at an angle of between about forty-five degrees and about ninety degrees relative to the target surface, where all of the arrays supply light into a light pipe, the light pipe having interior walls made of a reflective material, where light exiting the light pipe illuminates the target surface, and a controller for adjusting an intensity of the individually addressable light sources.
摘要翻译：一种用于照射目标表面的装置，该装置具有多个LED阵列，其中每个阵列具有多个独立可寻址的LED，并且其中至少一个阵列以大约四十五度之间的角度设置并且相对于目标表面大约九十度，其中所有的阵列将光提供到光管中，光管具有由反射材料制成的内壁，其中离开光管的光照射目标表面，以及用于调节的控制器独立寻址光源的强度。

68. 发明申请

US20130048873A1 Solar Metrology Methods And Apparatus 失效
标题翻译：太阳能计量方法与装置
公开(公告)号：US20130048873A1
公开(公告)日：2013-02-28
申请号：US13557047
申请日：2012-07-24
申请人： Scott Young , Guoheng Zhao , Ady Levy , Marco Guevremont , Neeraj Khanna
发明人： Scott Young , Guoheng Zhao , Ady Levy , Marco Guevremont , Neeraj Khanna
IPC分类号： G01N21/64
CPC分类号： G01N21/6489 , G01N21/9501 , H02S50/10
摘要： Methods and apparatus are presented to measure the photoluminescence of incoming wafers and extract parameters such as minority carrier life time, diffusion length, and defect density that may be used to predict final solar cell efficiency. In some examples, illumination light is supplied to a side of an as-cut silicon wafer and the induced luminescence measured from the same side and the opposite side of the wafer is used to determine an indication of the minority carrier lifetime. In another example, the luminescence induced by two instances of illumination light of different wavelength is used to determine an indication of the minority carrier lifetime. In another example, the spatial distribution of luminescence intensity over an area surrounding a focused illumination spot is used to determine an indication of the minority carrier lifetime. Other apparatus useful to passivate the surface of a wafer for inspection are also presented.
摘要翻译：提出了测量进入晶片的光致发光的方法和装置，并提取可用于预测最终太阳能电池效率的参数，例如少数载流子寿命，扩散长度和缺陷密度。在一些示例中，将照明光提供给切割硅晶片的一侧，并且使用从晶片的相同侧和相对侧测量的感应发光来确定少数载流子寿命的指示。在另一示例中，由两个不同波长的照明光实例引起的发光用于确定少数载流子寿命的指示。在另一示例中，使用聚焦照明点周围的区域上的发光强度的空间分布来确定少数载流子寿命的指示。还提出了可用于钝化晶片表面以进行检查的其它装置。

69. 发明授权

US08283631B2 In-situ differential spectroscopy 失效
标题翻译：原位差分光谱
公开(公告)号：US08283631B2
公开(公告)日：2012-10-09
申请号：US12351215
申请日：2009-01-09
申请人： Mehdi Vaez-Iravani , Mehran Nasser-Ghodsi , Guoheng Zhao
发明人： Mehdi Vaez-Iravani , Mehran Nasser-Ghodsi , Guoheng Zhao
IPC分类号： G01N23/00 , G21K7/00 , H01J40/00
CPC分类号： H01J37/244 , G01N2223/079 , G01N2223/086 , G01N2223/33 , H01J37/256 , H01J2237/24495 , H01J2237/2511 , H01J2237/2807
摘要： A spectrometer having an electron beam generator for generating an electron beam that is directed at a sample. An electron beam positioner directs the electron beam onto a position of the sample, and thereby produces a secondary emitted stream from the sample, where the secondary emitted stream includes at least one of electrons and x-rays. An secondary emitted stream positioner positions the secondary emitted stream onto a detector array, which receives the secondary emitted stream and detects both the amounts and the received positions of the secondary emitted stream. A modulator modulates the electron beam that is directed onto the sample, and thereby sweeps the electron beam between a first position and a second position on the sample. An extractor is in signal communication with both the modulator and the detector array, and extracts a differential signal that represents a difference between the signals that are received from the first position and the signals that are received from the second position.
摘要翻译：具有用于产生针对样品的电子束的电子束发生器的光谱仪。电子束定位器将电子束引导到样品的位置，从而产生来自样品的二次发射流，其中二次发射流包括电子和X射线中的至少一个。二次发射流定位器将二次发射流定位在检测器阵列上，检测器阵列接收二次发射流并检测二次发射流的量和接收位置。调制器调制被引导到样品上的电子束，从而在样品上的第一位置和第二位置之间扫描电子束。提取器与调制器和检测器阵列进行信号通信，并且提取表示从第一位置接收的信号与从第二位置接收的信号之间的差的差分信号。

70. 发明授权

US08194301B2 Multi-spot scanning system and method 有权
标题翻译：多点扫描系统及方法
公开(公告)号：US08194301B2
公开(公告)日：2012-06-05
申请号：US12042252
申请日：2008-03-04
申请人： Guoheng Zhao , Rex Runyon , Mehdi Vaez-Iravani
发明人： Guoheng Zhao , Rex Runyon , Mehdi Vaez-Iravani
IPC分类号： G02B26/08
CPC分类号： G01N21/9501 , G01N21/8806 , G01N2201/10 , G01N2201/104 , G02B26/123 , Y10S359/90
摘要： A multi-spot scanning technique using a spot array having a predetermined gap between spots can advantageously provide scalability to a large number of spots as well as the elimination of cross-talk between channels. The multi-spot scanning technique can select a number of spots for the spot array (1D or 2D), determine a separation between the spots to minimize crosstalk, and perform a scan on a wafer using the spot array and a full field of view (FOV). Performing the scan includes performing a plurality of scan line cycles, wherein each scan line cycle can fill in gaps left by previous scan line cycles. This “delay and fill” scan allows large spacing between spots, thereby eliminating cross-talk at the detector plane. In one embodiment, the scan is begun and ended outside a desired scan area on the wafer to ensure full scan coverage.
摘要翻译：使用具有点之间的预定间隙的点阵列的多点扫描技术可以有利地提供大量斑点的可扩展性以及消除通道之间的串扰。多点扫描技术可以为斑点阵列（1D或2D）选择多个斑点，确定斑点之间的距离以最小化串扰，并使用斑点阵列和全视场对晶片进行扫描（ FOV）。执行扫描包括执行多个扫描线周期，其中每个扫描线周期可以填充先前扫描线周期留下的间隙。这种“延迟和填充”扫描允许斑点之间的大间距，从而消除检测器平面处的串扰。在一个实施例中，扫描开始并在晶片上期望的扫描区域外部结束以确保全扫描覆盖。

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