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    • 61. 发明申请
    • Piezolectric micro electro-mechanical system switch, array of the switches, and method of fabricating the same
    • 压电微电子机械系统开关,开关阵列及其制造方法
    • US20070132044A1
    • 2007-06-14
    • US11634627
    • 2006-12-06
    • Sung-Hae JungMyung LeeSung Kang
    • Sung-Hae JungMyung LeeSung Kang
    • H01L29/82
    • H01H57/00H01H2057/006H01L2924/0002H01L2924/00
    • A piezoelectric micro electro-mechanical system switch (MEMS), an array of piezoelectric MEMS switches, and a method of fabricating the switch, which are capable of improving low voltage and switching characteristics while securing high signal isolation, are provided. The piezoelectric MEMS switch includes a semiconductor substrate including a groove, a support formed over the semiconductor substrate and the groove. An actuator including a piezoelectric layer is formed on the support. A switching member is formed on the support on one side of the actuator, wherein upward movement of the switching member changes by a deformation of the piezoelectric layer of the actuator. Radio frequency (RF) transfer lines are arranged at a predetermined distance on the switching member and are separated by a predetermined interval from each other. The actuator is formed to have at least two cantilevers each having one end such that the ends are connected to each other.
    • 提供压电微机电系统开关(MEMS),压电MEMS开关阵列,以及制造开关的方法,其能够在确保高信号隔离的同时提高低电压和开关特性。 压电MEMS开关包括半导体衬底,其包括凹槽,形成在半导体衬底上的支撑件和凹槽。 包括压电层的致动器形成在支撑件上。 切换构件形成在致动器的一侧上的支撑件上,其中切换构件的向上运动通过致动器的压电层的变形而改变。 射频(RF)传输线被布置在切换部件上的预定距离处并以彼此间隔预定间隔分开。 致动器形成为具有至少两个悬臂,每个悬臂具有一端,使得端部彼此连接。
    • 63. 发明申请
    • PLASMA DISPLAY PANEL AND MANUFACTURING METHOD THEREOF
    • 等离子显示面板及其制造方法
    • US20060138955A1
    • 2006-06-29
    • US11275334
    • 2005-12-23
    • Myung LeeWon Jeon
    • Myung LeeWon Jeon
    • H01J17/49
    • H01J11/44H01J11/12H01J11/24H01J2211/444
    • This document relates to a plasma display panel and manufacturing method thereof, and more particularly, to a plasma display panel and manufacturing method thereof, in which the uniformity of a black layer and the yield can be improved. The plasma display panel according to an embodiment of the present invention comprises a front glass substrate, a transparent electrode formed on the front glass substrate in a discharge region, an adhesive agent formed at least on a portion of the front glass substrate in a non-discharge region and a black layer formed on the adhesive agent in the non-discharge region. In the method of manufacturing the plasma display panel according to an embodiment of the present invention, a process of forming the front panel comprises the steps of (a) coating a transparent electrode paste and an adhesive paste on a glass substrate, (b) disposing a mask on the transparent electrode and the adhesive agent, (c) irradiating a top surface of the mask with a amount of light to form a transparent electrode pattern and a adhesive pattern, and (d) coating a black paste on the transparent electrode pattern and the adhesive pattern to form a black layer.
    • 本发明涉及等离子体显示面板及其制造方法,更具体地说,涉及一种能够提高黑色层的均匀性和成品率的等离子体显示面板及其制造方法。 根据本发明的实施例的等离子体显示面板包括前玻璃基板,在排出区域中形成在前玻璃基板上的透明电极,至少在前玻璃基板的一部分上形成的粘合剂, 放电区域和在非放电区域中形成在粘合剂上的黑色层。 在根据本发明实施例的等离子体显示面板的制造方法中,形成前面板的方法包括以下步骤:(a)在玻璃基板上涂覆透明电极浆料和粘合剂糊剂,(b) 透明电极上的掩模和粘合剂,(c)用一定量的光照射掩模的上表面以形成透明电极图案和粘合剂图案,(d)在透明电极图案上涂布黑色糊料 和粘合剂图案以形成黑色层。
    • 69. 发明申请
    • Thermally actuated wavelength tunable optical filter
    • 热致振动波长可调滤光片
    • US20050105849A1
    • 2005-05-19
    • US10819271
    • 2004-04-07
    • Chang KimMyung LeeChang ChoiChi JunYun Kim
    • Chang KimMyung LeeChang ChoiChi JunYun Kim
    • G02B26/00G02B6/34G02B6/26G02B6/32G02B6/42
    • G02B6/29358G02B6/29395
    • Provided is a wavelength tunable optical filter of a micro-electro-mechanical system (MEMS). The wavelength tunable optical filter comprises two optical fibers or optical waveguides having their optical axes aligned to each other, two lens for collimating light at leading ends of the optical fibers or optical waveguides, two or more mirrors formed on a substrate, thermal actuators supporting at least one of the mirrors, wherein one of the mirrors is actuated by thermal expansion of the actuator. Because all mirrors are formed on a substrate, a manufacturing process is simple and an initial resonance wavelength can be precisely adjusted. Since the thermal expansion is generated by the electrical current directly flowing through the thermal actuators, it can be actuated by a low consumption power. Also, since an electrostatic force is not used to move the mirrors, a sticking phenomenon between the mirrors does not occur, and the wavelength can be tunable in a wide range. Since the planar mirrors are arranged in parallel, the light alignment is easily performed, the line width is constant and the insertion loss is low.
    • 提供了微机电系统(MEMS)的波长可调光滤波器。 波长可调光滤波器包括两个光纤或光波导,其光轴彼此对准,用于准直光纤​​或光波导前端的光的两个透镜,形成在基板上的两个或更多个反射镜,支持在 至少一个反射镜,其中一个反射镜由致动器的热膨胀致动。 因为所有的反射镜都形成在基板上,所以制造工艺简单,可以精确调节初始共振波长。 由于热膨胀是由直接流过热致动器的电流产生的,因此可以通过低功耗来致动。 此外,由于不使用静电力来移动反射镜,所以不会发生反射镜之间的粘附现象,并且波长可以在宽范围内可调。 由于平面镜平行配置,因此容易进行光对准,线宽恒定,插入损耗低。