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    • 68. 发明授权
    • Wear-resistant protective film for thermal head and method of producing
the same
    • 热敏头用耐磨保护膜及其制造方法
    • US5557313A
    • 1996-09-17
    • US149440
    • 1993-11-09
    • Masatoshi NakayamaMasahiro NakanoTsukimi Endo
    • Masatoshi NakayamaMasahiro NakanoTsukimi Endo
    • B41J2/345B41J2/335
    • B41J2/345
    • A method of producing a wear-resistant protective film for a thermal head comprises depositing a wear-resistant protective film by sputtering on a thermal head which includes a substrate, and a heat-developing layer and a pair of electrodes formed on either the substrate or a heat-regenerative layer formed thereon. A layer of the wear resistant protective film is formed under a RF larger bias and another layer without a bias or with a smaller bias. Good step coverage is obtained by the RF sputter layer of the wear-resistant and the protective film prevents the intrusion of water that can cause cracking, and the layer formed under no or smaller bias reduces internal stresses and inhibits the development of cracks due to internal stresses as well as the cracking by RF sputtering.
    • 制造用于热敏头的耐磨保护膜的方法包括通过溅射将耐磨保护膜沉积在包括基底的热敏头上,以及形成在基底上的热显影层和一对电极 形成在其上的热再生层。 在RF较大的偏压下形成耐磨保护膜层,而在没有偏压或较小偏压的情况下形成另一层。 耐磨层的RF溅射层获得良好的阶梯覆盖,保护膜防止可能引起裂纹的水侵入,而在没有或较小偏置的条件下形成的层会降低内部应力,并抑制内部产生裂缝的发展 应力以及RF溅射的裂纹。