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    • 65. 发明授权
    • Semiconductor device
    • 半导体器件
    • US07135736B2
    • 2006-11-14
    • US10616917
    • 2003-07-11
    • Takashi NishikawaTakashi Ohtsuka
    • Takashi NishikawaTakashi Ohtsuka
    • H01L29/788
    • H01L21/28291H01L21/28273H01L29/78391
    • This specification relates to a semiconductor device that comprises a semiconductor substrate 11, a source region 12 and a drain region 13, which are formed on the semiconductor substrate 11 with a channel region 14 therebetween; a floating gate electrode 152 that is formed on the channel region 14 with a gate insulator film 151 therebetween; a ferroelectric film 154 that is formed on the floating gate electrode 152; and a control gate electrode 156 that is formed on the ferroelectric film 154, wherein intermediate insulator films 153 and 155 are formed between at least one of the pairs consisting of the floating gate electrode 152 and the ferroelectric film 154, and the ferroelectric film 154 and the control gate electrode 156, and the intermediate insulator films 153 and 155 are made of hafnium oxide that contains nitrogen atoms.
    • 本说明书涉及半导体器件,其包括在半导体衬底11上形成有沟道区域14的半导体衬底11,源极区12和漏极区13; 在沟道区域14上形成有栅极绝缘膜151的浮栅电极152; 形成在浮栅电极152上的铁电体膜154; 以及形成在铁电体膜154上的控制栅极电极156,其中,在由浮置栅极电极152和铁电体膜154构成的至少一对之间形成中间绝缘膜153,155,以及强电介质膜154和 控制栅电极156和中间绝缘膜153,155由含有氮原子的氧化铪构成。
    • 67. 发明授权
    • Non-volatile latch circuit and a driving method thereof
    • 非易失性锁存电路及其驱动方法
    • US06845032B2
    • 2005-01-18
    • US10785031
    • 2004-02-25
    • Kenji ToyodaTakashi OhtsukaKiyoshi Morimoto
    • Kenji ToyodaTakashi OhtsukaKiyoshi Morimoto
    • G11C11/22H01L21/8246H01L27/105H03K3/356H03K17/693H03K19/0948H03K19/185
    • G11C11/22H03K17/693
    • Non-volatile latch circuit 10 of the present invention comprises ferroelectric capacitor 1 provided with a first electrode 1a, second electrode 1b, and ferroelectric film 1c that lies between these electrodes; reset terminal Tre that is connected to first electrode 1a and a CMOS inverter element 2 that is connected to second electrode 1b of ferroelectric capacitor 1; voltage switching terminal Tpl that applies a voltage to second electrode 1b; switching element 5 that is connected between second electrode 1b and second input terminal Tpl and switches a voltage applied to second electrode 1b; and set terminal Tse that applies a voltage for switching on or off switching element 5, wherein the voltage generated in second electrode 1b caused by polarization retained by ferroelectric film 1c is higher than the threshold voltage Vtn of NMISFET 4 of CMOS inverter element 2.
    • 本发明的非易失性锁存电路10包括设置有位于这些电极之间的第一电极1a,第二电极1b和铁电体膜1c的铁电电容器1; 连接到第一电极1a的复位端子Tre和连接到铁电电容器1的第二电极1b的CMOS反相器元件2; 向第二电极1b施加电压的电压切换端子Tpl; 开关元件5,其连接在第二电极1b和第二输入端子Tpl之间,并切换施加到第二电极1b的电压; 并设置施加用于接通或关断开关元件5的电压的端子Tse,其中由铁电体膜1c保持的极化所引起的第二电极1b中产生的电压高于CMOS反相器元件2的NMISFET 4的阈值电压Vtn。
    • 68. 发明授权
    • Method for forming film and method for fabricating semiconductor device
    • 薄膜形成方法及制造半导体器件的方法
    • US06191054B1
    • 2001-02-20
    • US09413758
    • 1999-10-06
    • Takashi OhtsukaMichihito Ueda
    • Takashi OhtsukaMichihito Ueda
    • H01L21469
    • C23C16/4401C23C16/409H01L21/31691
    • In forming a film by a chemical vapor deposition (CVD) process using, as a source material, an organometallic complex dissolved in a solvent, a method for reducing the quantity of carbon compounds mixed into the film is provided. According to this method, a nonpolar solvent is used for dissolving the organometallic complex or an organometallic compound therein. Unlike a polar group contained in a polar solvent, the nonpolar solvent includes no organic molecular group with a large molecular weight to be coordinated with the organometallic complex. Thus, electrical interaction between the organometallic complex and the solvent can be suppressed, and the quantity of carbon compounds mixed into the film can be reduced as a result.
    • 在通过使用溶解在溶剂中的有机金属配合物作为源材料的化学气相沉积(CVD)法形成膜时,提供了一种减少混入膜中的碳化合物的量的方法。 根据该方法,使用非极性溶剂来溶解有机金属络合物或其中的有机金属化合物。 与极性溶剂中包含的极性基团不同,非极性溶剂不包括具有大分子量的有机分子,与有机金属络合物配位。 因此,可以抑制有机金属配合物与溶剂之间的电相互作用,结果可以减少混入膜中的碳化合物的量。