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    • 67. 发明授权
    • Compositions, coatings and films for tri-layer patterning applications and methods of preparation thereof
    • 用于三层图案化应用的组合物,涂料和膜及其制备方法
    • US08642246B2
    • 2014-02-04
    • US11838854
    • 2007-08-14
    • Joseph KennedySongyuan XieKim DoSudip Mukhopadhyay
    • Joseph KennedySongyuan XieKim DoSudip Mukhopadhyay
    • G03F7/075G03F7/11C08L83/06
    • G03F7/0752C08G77/20C08G77/70C08L83/04C08L83/06C09D183/04G03F7/091G03F7/11H01L21/02126H01L21/02216H01L21/02282H01L21/3122C08L2666/44
    • Compositions for use in tri-layer applications are described herein, wherein the composition has a matrix and includes: a formulated polymer comprising at least one type of silicon-based moiety forming the matrix of the polymer, a plurality of vinyl groups coupled to the matrix of the polymer, and a plurality of phenyl groups coupled to the matrix of the polymer, at least one condensation catalyst, and at least one solvent. Tri-layer structures are also contemplated herein that comprise an organic underlayer (first layer), antireflective compositions and/or films contemplated herein (second layer) and a photoresist material (third layer) that are coupled to one another. Methods of producing a composition for tri-layer patterning applications includes: providing a formulated polymer comprising at least one type of silicon-based moiety forming the matrix of the polymer, a plurality of vinyl groups coupled to the matrix of the polymer, and a plurality of phenyl groups coupled to the matrix of the polymer, providing at least one condensation catalyst, providing at least one solvent, providing at least one pH modifier, blending the formulated polymer and part of the at least one solvent in a reaction vessel to form a reactive mixture; and incorporating the at least one pH modifier, the at least one condensation catalyst and the remaining at least one solvent into the reactive mixture to form the composition.
    • 本文描述了用于三层应用的组合物,其中所述组合物具有基质,并且包括:配制的聚合物,其包含形成聚合物基质的至少一种类型的硅基部分,多个与基质偶联的乙烯基 的聚合物,以及与聚合物的基质偶联的多个苯基,至少一种缩合催化剂和至少一种溶剂。 本文还涵盖三层结构,其包括彼此耦合的有机底层(第一层),抗反射组合物和/或本文考虑的抗反射组合物(第二层)和光致抗蚀剂材料(第三层)。 制备用于三层图案化应用的组合物的方法包括:提供配制的聚合物,其包含形成聚合物基质的至少一种类型的硅基部分,与聚合物基质偶联的多个乙烯基,以及多个 提供至少一种缩合催化剂,提供至少一种溶剂,提供至少一种pH调节剂,将配制的聚合物和部分至少一种溶剂混合在反应容器中以形成 反应性混合物 并将至少一种pH调节剂,至少一种缩合催化剂和剩余的至少一种溶剂掺入到反应混合物中以形成组合物。
    • 68. 发明申请
    • Amphiphilic Co-Networks, Films Made From Amphiphilic Co-Networks and Uses for Such Co-Networks and Films
    • 两亲共网络,由两亲共同网络制成的薄膜和用于这种共网络和薄膜的用途
    • US20080051513A1
    • 2008-02-28
    • US11572826
    • 2005-07-28
    • Joseph KennedyGabor Erdodi
    • Joseph KennedyGabor Erdodi
    • C08G77/14
    • C08G77/46C09D183/12
    • The present invention relates to the production of amphiphilic copolymer networks or co-networks that are both hydrophobic and hydrophilic, the copolymer networks comprise polyalkylene glycol segments and disubstituted polysiloxane segments. Furthermore, the present invention relates to products and/or films made from the amphiphilic copolymer networks or co-networks produced in accordance with the synthesis methods of the present invention. In one embodiment, amphiphitic networks or co-networks are synthesized using functional multiblock co-polymers according to the formula (AY)x(BY)y, where A represents an alkylene glycol polymer having n repeating alkylene glycol units, B represents a disubstituted siloxane polymer having m repeating siloxane units, and Y represents a molecule (e.g., a silane) that functions both as a chain extender and a crosslinker.
    • 本发明涉及两亲性共聚物网络或疏水和亲水的共网络的制备,共聚物网络包括聚亚烷基二醇链段和二取代的聚硅氧烷链段。 此外,本发明涉及由根据本发明的合成方法生产的两亲性共聚物网络或共网络制备的产品和/或膜。 在一个实施方案中,使用根据式(AY)x(BY)Y Y的官能多嵌段共聚物合成两电网络或共网络,其中A表示亚烷基 具有n个重复亚烷基二醇单元的乙二醇聚合物,B表示具有m个重复硅氧烷单元的二取代的硅氧烷聚合物,Y表示作为扩链剂和交联剂起作用的分子(例如,硅烷)。