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    • 62. 发明授权
    • SOI FET with source-side body doping
    • 具有源极体掺杂的SOI FET
    • US07867866B2
    • 2011-01-11
    • US12651499
    • 2010-01-04
    • Jin CaiTak Hung Ning
    • Jin CaiTak Hung Ning
    • H01L21/336H01L31/119
    • H01L29/78612H01L29/66772
    • An SOI FET device with improved floating body is proposed. Control of the body potential is accomplished by having a body doping concentration next to the source electrode higher than the body doping concentration next to the drain electrode. The high source-side dopant concentration leads to elevated forward leakage current between the source electrode and the body, which leakage current effectively locks the body potential to the source electrode potential. Furthermore, having the source-to-body junction capacitance larger than the drain-to-body junction capacitance has additional advantages in device operation. The device has no structure fabricated for the purpose of electrically connecting the body potential to other elements of the device.
    • 提出了一种具有改进的浮体的SOI FET器件。 体电位的控制是通过使源电极旁边的体掺杂浓度高于漏电极旁边的体掺杂浓度来实现的。 高源侧掺杂剂浓度导致源电极和体之间的向前泄漏电流升高,这种泄漏电流有效地将体电位锁定到源极电位。 此外,具有大于漏极 - 体结结电容的源极 - 体结结电容在器件操作中具有额外的优点。 该装置没有制造用于将身体电势电连接到装置的其它元件的结构。
    • 64. 发明申请
    • PARTIALLY DEPLETED SOI FIELD EFFECT TRANSISTOR HAVING A METALLIZED SOURCE SIDE HALO REGION
    • 具有金属化源侧HALO区域的部分沉积SOI场效应晶体管
    • US20090321831A1
    • 2009-12-31
    • US12554344
    • 2009-09-04
    • Jin CaiWilfried HaenschAmlan Majumdar
    • Jin CaiWilfried HaenschAmlan Majumdar
    • H01L29/786
    • H01L29/78696H01L29/458H01L29/66772H01L29/78612H01L29/78624
    • Source and drain extension regions and source side halo region and drain side halo region are formed in a top semiconductor layer aligned with a gate stack on an SOI substrate. A deep source region and a deep drain region are formed asymmetrically in the top semiconductor layer by an angled ion implantation. The deep source region is offset away from one of the outer edges of the at least spacer to expose the source extension region on the surface of the semiconductor substrate. A source metal semiconductor alloy is formed by reacting a metal layer with portions of the deep source region, the source extension region, and the source side halo region. The source metal semiconductor alloy abuts the remaining portion of the source side halo region, providing a body contact tied to the deep source region to the partially depleted SOI MOSFET.
    • 源极和漏极延伸区域和源极侧卤素区域和漏极侧晕圈形成在与SOI衬底上的栅极堆叠对准的顶部半导体层中。 通过成角度的离子注入,在顶部半导体层中不均匀地形成深源区和深漏区。 深源区域远离至少间隔物的外缘之一偏离以暴露半导体衬底的表面上的源延伸区域。 源金属半导体合金通过使金属层与深源区,源极延伸区和源极侧晕区的一部分反应而形成。 源极金属半导体合金与源极侧光晕区域的剩余部分相邻,从而将与源极区域连接的体接触部分连接到部分耗尽的SOI MOSFET。
    • 69. 发明授权
    • ETSOI CMOS with back gates
    • 带后门的ETSOI CMOS
    • US08415743B2
    • 2013-04-09
    • US13114410
    • 2011-05-24
    • Jin CaiRobert H DennardAli Khakifirooz
    • Jin CaiRobert H DennardAli Khakifirooz
    • H01L27/092
    • H01L27/1203
    • A structure has a functional region having a first type of conductivity and a top surface. The functional region is connected to a bias contact. The structure further includes an insulating layer; a semiconductor layer and first and second transistor devices having the same type of conductivity disposed upon the semiconductor layer. The structure further includes a first back gate region adjacent to the top surface and underlying one of the transistor devices, the first back gate region having a second type of conductivity; and a second back gate region adjacent to the top surface and underlying the other one of the transistor devices, the second back gate region having the first type of conductivity. The first transistor device has a first characteristic threshold voltage and the second transistor device has a second characteristic threshold voltage that differs from the first characteristic threshold voltage.
    • 结构具有具有第一类型的导电性的功能区域和顶表面。 功能区域连接到偏置触点。 该结构还包括绝缘层; 半导体层和具有相同类型导电性的第一和第二晶体管器件设置在半导体层上。 所述结构还包括与所述顶表面相邻并且位于所述晶体管器件之一下方的第一后栅极区域,所述第一背栅极区域具有第二类型的导电性; 以及与顶表面相邻并且位于另一个晶体管器件下方的第二背栅极区域,第二背栅极区域具有第一类型的导电性。 第一晶体管器件具有第一特征阈值电压,并且第二晶体管器件具有不同于第一特征阈值电压的第二特征阈值电压。