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    • 69. 发明申请
    • SCHOTTKY BARRIER DIODE AND METHOD FOR MANUFACTURING SCHOTTKY BARRIER DIODE
    • 肖特基二极体二极管及制造肖特基二极管的方法
    • US20150076515A1
    • 2015-03-19
    • US14143649
    • 2013-12-30
    • Hyundai Motor Company
    • Youngkyun JungDae Hwan ChunKyoung-Kook HongJong Seok LeeJunghee Park
    • H01L29/872H01L29/16H01L29/66
    • H01L29/872H01L29/0619H01L29/1608H01L29/6606
    • A Schottky barrier diode and a method of manufacturing the diode are provided. The diode includes an n− type epitaxial layer disposed on a first surface of an n+ type silicon carbide substrate and a plurality of p+ regions disposed within the n− type epitaxial layer. An n+ type epitaxial layer is disposed on the n− type epitaxial layer, a Schottky electrode is disposed on the n+ type epitaxial layer, and an ohmic electrode is disposed on a second surface of the n+ type silicon carbide substrate. The n+ type epitaxial layer includes a plurality of pillar parts disposed on the n− type epitaxial layer and a plurality of openings disposed between the pillar parts and that expose the p+ regions. Each of the pillar parts includes substantially straight parts that contact the n− type epitaxial layer and substantially curved parts that extend from the substantially straight parts.
    • 提供肖特基势垒二极管和制造二极管的方法。 二极管包括设置在n +型碳化硅衬底的第一表面上的n型外延层和设置在n型外延层内的多个p +区。 在n型外延层上设置n +型外延层,在n +型外延层上设置肖特基电极,在n +型碳化硅基板的第二面上设置欧姆电极。 n +型外延层包括设置在n型外延层上的多个柱部分和设置在柱部分之间并暴露p +区域的多个开口。 每个支柱部分包括接触n型外延层的基本上直的部分和从基本上直的部分延伸的基本上弯曲的部分。
    • 70. 发明授权
    • Method of manufacturing semiconductor device
    • 制造半导体器件的方法
    • US08586434B1
    • 2013-11-19
    • US13729534
    • 2012-12-28
    • Hyundai Motor Company
    • Youngkyun JungKyoung-Kook HongJong Seok LeeDae Hwan Chun
    • H01L21/00
    • H01L29/7827H01L29/66068
    • A method of manufacturing a semiconductor device may include forming a first n− type epitaxial layer by performing a first epitaxial growth on a first surface of an n+ type silicon carbide substrate, forming a photosensitive layer pattern on the first n− type epitaxial layer, etching the first n− type epitaxial layer by using the photosensitive layer pattern as a mask to form a first trench, forming a buffer layer on the first n− type epitaxial layer after the photosensitive layer pattern may be removed, etching the buffer layer to form a trench passivation layer in the first trench, forming an n− type epitaxial layer by performing a second epitaxial growth on the first n− type epitaxial layer, and forming a p type epitaxial layer by performing a third epitaxial growth on the n− type epitaxial layer other than the portion on which the trench passivation layer may be formed.
    • 制造半导体器件的方法可以包括通过在n +型碳化硅衬底的第一表面上进行第一外延生长来形成第一n型外延层,在第一n-型外延层上形成感光层图案,蚀刻 通过使用感光层图案作为掩模来形成第一沟槽的第一n型外延层,在可以去除感光层图案之后在第一n型外延层上形成缓冲层,蚀刻缓冲层以形成 在第一沟槽中的沟槽钝化层,通过在第一n型外延层上进行第二外延生长形成n型外延层,并通过在n型外延层上进行第三外延生长形成p型外延层 可以形成沟槽钝化层的部分。