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    • 62. 发明授权
    • Sensor utilizing attenuated total reflection
    • 传感器利用衰减全反射
    • US06678053B2
    • 2004-01-13
    • US10026604
    • 2001-12-27
    • Hitoshi Shimizu
    • Hitoshi Shimizu
    • G01N2155
    • G01N21/553
    • A sensor utilizing attenuated total reflection is equipped with a dielectric block, a thin film layer formed on a surface of the dielectric block, an optical system for making a light beam enter the dielectric block at various angles of incidence so that the condition for total internal reflection is satisfied at an interface between the dielectric block and the thin film layer, a photodetector for detecting the light beam satisfying total internal reflection at the interface, and a differential amplifier array for differentiating a signal output from each of the light-receiving elements of the photodetector, in the juxtaposed direction of the light-receiving elements. Every time a measurement is made, a quantity change &Dgr;I′ in the differentiated value I′ is found by subtracting an initial value from the differentiated value I′. The quantity change &Dgr;I′ is amplified, so that measurements can be made without saturating subsequent electric circuits.
    • 使用衰减全反射的传感器配备有介质块,形成在介质块的表面上的薄膜层,用于使光束以各种入射角进入介质块的光学系统,使得总内部的条件 在介质块和薄膜层之间的界面处满足反射,用于检测满足界面处的全内反射的光束的光检测器,以及差分放大器阵列,用于将从每个光接收元件输出的信号 光检测器沿光接收元件的并列方向。 每次进行测量时,通过从微分值I'中减去初始值来发现微分值I'中的量变化ΔI'。 数量变化ΔI'被放大,从而可以在不后续电路饱和的情况下进行测量。
    • 65. 发明授权
    • Aligner for timing the alignment of a wafer and mask with a shutter to
protect the wafer during alignment
    • 对准器用于定时将晶片和掩模与快门对准,以在对准期间保护晶片
    • US5712708A
    • 1998-01-27
    • US681521
    • 1996-07-23
    • Takashi KasashimaHitoshi Shimizu
    • Takashi KasashimaHitoshi Shimizu
    • G01B11/26G03F7/20G03F9/00H01L21/027G01B11/00
    • G01B11/26G03F7/7055G03F9/70
    • A 1:1 projection aligner includes a first optical system for irradiating a light beam, emitted from a light source, on a wafer through a mask; and a second optical system for irradiating a light beam, emitted from the same light source, as that of the first optical system for auto-alignment of the wafer. The aligner further includes a timer for measuring an elapsed time and outputting a signal after a specified time has elapsed, first and second shutters for shielding light paths of light beams from the first and second optical systems, and drive units for driving the shutters on the basis of a signal from the timer. In the case of a failure of the auto-alignment operation, the shutters are closed for preventing the wafer from being irradiated with a light beam for a long time, thereby preventing generation of a defect such as unevenness of exposure. An alarm is also outputted for informing an operator of the failure of the auto-alignment.
    • 1:1投影对准器包括用于通过掩模将从光源发射的光束照射在晶片上的第一光学系统; 以及第二光学系统,用于照射与第一光学系统相同的光源发射的光束,用于晶片的自动对准。 对准器还包括用于测量经过时间并在经过指定时间后输出信号的定时器,用于屏蔽来自第一和第二光学系统的光束的光路的第一和第二快门以及用于驱动快门上的快门的驱动单元 来自定时器的信号的基础。 在自动对准操作失败的情况下,关闭快门以防止晶片长时间被光束照射,从而防止产生诸如曝光不均匀的缺陷。 还输出警报以通知操作者自动对准的故障。
    • 68. 发明授权
    • Pad support device incorporating leaf spring
    • 叶片支撑装置包括叶子弹簧
    • US5099377A
    • 1992-03-24
    • US549097
    • 1990-07-06
    • Hitoshi Shimizu
    • Hitoshi Shimizu
    • G11B17/34G11B17/32
    • G11B17/32
    • A pad support device for supporting a pad member which is to be pressed against a disk member accomodated in a jacket. A movable member is moved toward and away from the disk member. A plate member carries the pad member, and a leaf spring is formed such that the leaf spring has at least two openings. A first portion of the leaf spring between the at-least-two openings is bent in one direction out of the plane of the surface thereof to be substantially arch-shaped while at-least-two second portions of the leaf spring are bent in a direction in which the first portion is bent to also be substantially arch-shaped. The first portion is secured to one of the movable member and the plate member, while the second portions are secured to the other of the movable member and the plate member, whereby the plate member is resiliently suspended from the movable member.
    • 一种衬垫支撑装置,用于支撑衬垫构件,衬垫构件被压靠在容纳在护套中的盘构件上。 可移动构件朝向和远离盘构件移动。 板构件承载衬垫构件,并且板簧形成为使得板簧具有至少两个开口。 在至少两个开口之间的板簧的第一部分在一个方向上从其表面的平面弯曲成大致拱形,而片簧的至少两个第二部分被弯曲成 第一部分弯曲的方向也是基本上拱形的。 第一部分被固定到可动构件和板构件中的一个上,而第二部分固定到可动构件和板构件中的另一个,由此板构件弹性地悬挂在可动构件上。
    • 70. 发明授权
    • Opening/closing device for battery cover
    • 电池盖打开/关闭装置
    • US4913984A
    • 1990-04-03
    • US386478
    • 1989-07-28
    • Hitoshi Shimizu
    • Hitoshi Shimizu
    • H01M2/10G11B19/04G11B19/16H05K5/02
    • G11B19/165G11B19/04H05K5/0208
    • A battery cover opening/closing device which prevents a battery from being opened when the power switch is in the on position and prevents the switch from being turned on when the cover is not completely closed. The device includes a cover opening member (21), a power switch manipulator (51) for turning on and off the power switch for the battery and a safety mechanism for enabling the opening operation of the cover opening member (21) only when the power switch manipulator (51) is in the position of turning off the power switch. The safety mechanism comprises a slide-locking plate (14) having an opening/closing hole means (20) in which a bar coupled to the member integrally therewith is fitted. The opening/closing hole means includes an entry hindrance hole (20b) which does not allow the member (21) to be pressed to open the cover when the manipulator is in the position of turning on the power switch and an entry allowance hole (20a) which is continuous to the entrance hindrance hole (20b) and allows the member (21 ) to be pressed to open the cover when the manipulator is in the position of turning off the switch.
    • 一种电池盖打开/关闭装置,当电源开关处于接通位置时防止电池打开,并且当盖未完全关闭时防止开关打开。 该装置包括盖开启构件(21),用于打开和关闭用于电池的电源开关的电源开关操纵器(51),以及只有当电力开启时才能使盖开启构件(21)打开操作的安全机构 开关操纵器(51)处于关闭电源开关的位置。 安全机构包括具有打开/关闭孔装置(20)的滑动锁定板(14),其中与其整体连接的杆配合在其中。 打开/关闭孔装置包括入口阻碍孔(20b),当操纵器处于打开电源开关的位置和入口容许孔(20a)时,不允许构件(21)按压以打开盖子 ),当操纵器处于关闭开关的位置时,与入口阻碍孔(20b)连续并且允许构件(21)被打开以打开盖子。