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61. 发明授权

US5255258A Microprobe, preparation thereof and electronic device by use of said microprobe 失效
标题翻译：微探针，其制备和使用所述微探针的电子装置
公开(公告)号：US5255258A
公开(公告)日：1993-10-19
申请号：US643209
申请日：1991-01-18
申请人： Hisaaki Kawade , Haruki Kawada , Kunihiro Sakai , Hiroshi Matsuda , Yuko Morikawa , Yoshihiro Yanagisawa , Tetsuya Kaneko , Toshimitsu Kawase , Hideya Kumomi , Hiroyasu Nose , Eigo Kawakami
发明人： Hisaaki Kawade , Haruki Kawada , Kunihiro Sakai , Hiroshi Matsuda , Yuko Morikawa , Yoshihiro Yanagisawa , Tetsuya Kaneko , Toshimitsu Kawase , Hideya Kumomi , Hiroyasu Nose , Eigo Kawakami
IPC分类号： C30B25/04 , G01N27/00 , G01Q30/04 , G01Q60/00 , G01Q70/08 , G11B9/00
CPC分类号： G01Q70/10 , B82Y35/00 , G01Q60/16 , B82Y10/00 , G01Q80/00 , Y10S117/913 , Y10S977/70 , Y10S977/861 , Y10S977/947 , Y10S977/949
摘要： A microprobe is provided which comprises a single crystal provided on a part of one main surface of a substrate or a part of a thin film formed on one main surface of the substrate. The microprobe may have a single crystal having an apex portion surrounded by facets having a specific plane direction and comprising a specific crystal face. The method for preparing the microprobe and an electronic device employing the microprobe also provided which is useful for recording and reproducing.
摘要翻译：提供了一种微探针，其包括设置在基板的一个主表面的一部分上的单晶或形成在基板的一个主表面上的薄膜的一部分。微探针可以具有单晶，其具有由具有特定平面方向的面所包围的顶点部分，并且包括特定的晶面。还提供了用于制备微探针的方法和采用该微探针的电子装置，其用于记录和再现。

62. 发明授权

US4685766A Optical device 失效
标题翻译：光学装置
公开(公告)号：US4685766A
公开(公告)日：1987-08-11
申请号：US570814
申请日：1984-01-16
申请人： Yukuo Nishimura , Eigo Kawakami , Toshiaki Asano , Masahiro Haruta , Hiroshi Takagi , Takashi Noma , Nobutoshi Mizusawa , Mitsunobu Nakazawa , Kunitaka Ozawa
发明人： Yukuo Nishimura , Eigo Kawakami , Toshiaki Asano , Masahiro Haruta , Hiroshi Takagi , Takashi Noma , Nobutoshi Mizusawa , Mitsunobu Nakazawa , Kunitaka Ozawa
IPC分类号： G02B6/032 , G02B6/35 , G02F1/01 , G02B6/20
CPC分类号： G02B6/032 , G02F1/011 , G02F1/0147 , G02B6/3522 , G02B6/3538 , G02B6/3576
摘要： An optical device comprises an optical waveguide constituted of as a basic unit a core layer of a material having a relatively high refractive index and a clad layer of a material having a relatively low refractive index and covering said core layer, and heating means for heating said core layer to change the refractive index thereof, characterized in that when said core layer is constituted of a liquid, said core layer is heated by said heating means to a temperature such that said core layer does not boil.
摘要翻译：光学装置包括：光波导，由作为基本单位的折射率相对较高的材料的芯层和折射率相对较低的材料的覆盖层构成，并覆盖所述芯层;以及加热装置，用于加热所述芯层改变其折射率，其特征在于，当所述芯层由液体构成时，所述芯层由所述加热装置加热到使得所述芯层不沸腾的温度。

63. 发明授权

US4640592A Optical display utilizing thermally formed bubble in a liquid core waveguide 失效
标题翻译：在液芯波导中利用热成形气泡的光学显示器
公开(公告)号：US4640592A
公开(公告)日：1987-02-03
申请号：US570810
申请日：1984-01-16
申请人： Yukuo Nishimura , Toshiaki Asano , Nobutoshi Mizusawa , Eigo Kawakami , Masahiro Haruta , Takashi Noma , Hiroshi Takagi , Mitsunobu Nakazawa , Kunitaka Ozawa
发明人： Yukuo Nishimura , Toshiaki Asano , Nobutoshi Mizusawa , Eigo Kawakami , Masahiro Haruta , Takashi Noma , Hiroshi Takagi , Mitsunobu Nakazawa , Kunitaka Ozawa
IPC分类号： F21V8/00 , G02B6/032 , G02F1/01 , G02B6/20 , F21V7/04 , G09F13/00 , G09G3/04
CPC分类号： G02B6/001 , G02B6/032 , G02F1/011 , G02F1/0147
摘要： An optical device comprises an optical waveguide having, as a basic unit, a core layer of a liquid having a relatively high refractive index and a clad layer having a relatively low refractive index and covering said core layer, and a heat-generating means for heating a part of said core layer to form a vapor bubble in said liquid of said core layer.
摘要翻译：光学装置包括：光波导，其具有作为基本单位的具有相对较高折射率的液体的芯层和具有相对较低折射率的覆盖层并覆盖所述芯层;以及用于加热的发热装置所述芯层的一部分在所述芯层的所述液体中形成蒸气泡。

64. 发明授权

US08770964B2 Imprint apparatus and article manufacturing method 有权
标题翻译：印刷装置及制品制造方法
公开(公告)号：US08770964B2
公开(公告)日：2014-07-08
申请号：US13004469
申请日：2011-01-11
申请人： Eigo Kawakami
发明人： Eigo Kawakami
IPC分类号： B29C59/00
CPC分类号： B29C43/021 , B29C33/58 , B29C43/50 , B29C43/58 , B29C2043/025 , B29C2043/5808 , B29C2043/5833 , B29C2043/5866 , H01L21/565 , H01L2924/0002 , H01L2924/00
摘要： An imprint apparatus includes: a support member which supports the mold; a substrate stage which supports the substrate; a detector which detects a force applied to the mold; a mechanism which forms a space for removing the mold supported by the support member, between the support member and the substrate stage, and a controller. The controller determines a release force required to detach the mold from the cured resin, based on a detection result from the detector, compares the determined release force with a first threshold value, and causes the mechanism to form the space if the determined release force is larger than the first threshold value.
摘要翻译：压印装置包括：支撑模具的支撑构件; 支撑基板的基板台; 检测器，其检测施加到模具的力; 形成用于移除由支撑构件支撑的模具，支撑构件和基板台之间的空间的机构以及控制器。控制器基于检测器的检测结果确定从固化树脂分离模具所需的释放力，将确定的释放力与第一阈值进行比较，并且如果所确定的释放力是大于第一阈值。

65. 发明授权

US08226392B2 Transfer apparatus and method of manufacturing device 有权
标题翻译：转移装置及其制造方法
公开(公告)号：US08226392B2
公开(公告)日：2012-07-24
申请号：US12476552
申请日：2009-06-02
申请人： Eigo Kawakami
发明人： Eigo Kawakami
IPC分类号： H05F3/06 , B29C59/02
CPC分类号： G03F7/0002 , B29C43/003 , B29C43/021 , B29C43/56 , B29C43/58 , B29C2043/025 , B29C2043/566 , B29C2043/5825 , B82Y10/00 , B82Y40/00
摘要： A transfer apparatus, for molding a resin on a substrate using a mold on which a pattern is formed and releasing the mold from the resin to transfer the pattern onto the substrate, includes a charge removing device configured to remove a charge of the mold, and a detector configured to detect an electric potential of the mold. The charge removing device is configured to remove the charge of the mold if the electric potential of the mold detected by the detector is not less than a predetermined value.
摘要翻译：一种转印装置，用于使用其上形成有图案的模具将树脂模制在基板上，并将树脂从树脂中释放以将图案转印到基板上，包括：电荷去除装置，其被配置为去除模具的电荷;以及检测器，被配置为检测模具的电位。如果由检测器检测到的模具的电位不小于预定值，则电荷去除装置被配置为去除模具的电荷。

66. 发明授权

US07649184B2 Processing method and system 失效
标题翻译：处理方法和系统
公开(公告)号：US07649184B2
公开(公告)日：2010-01-19
申请号：US10794500
申请日：2004-03-05
申请人： Eigo Kawakami
发明人： Eigo Kawakami
IPC分类号： G01N23/10 , C23C16/00
CPC分类号： G03F7/70808 , C23C14/566 , C23C16/54 , G03F7/70841 , G03F7/70858 , G03F7/70933 , H01L21/67017
摘要： A processing method uses a processing system which includes an atmosphere replacing chamber having first and second gate valves, and a container that has an inside maintained in a reduced pressure or vacuum atmosphere and provides a predetermined process to an object, wherein the atmosphere replacing chamber is connected to the container through the first gate valve and a space different from the container through the second gate valve. The processing method includes the steps of exhausting the atmosphere replacing chamber while introducing first gas below predetermined humidity to the atmosphere replacing chamber, and vacuum-pumping the atmosphere replacing chamber after said exhausting step, by reducing an amount of the first gas to be introduced into the atmosphere replacing chamber.
摘要翻译：处理方法使用处理系统，该处理系统包括具有第一和第二闸阀的气氛置换室和具有保持在减压或真空气氛中的内部并为物体提供预定处理的容器，其中所述气氛置换室为通过第一闸阀连接到容器，并且通过第二闸阀与容器不同的空间。该处理方法包括以下步骤：在第一气体低于预定湿度的同时将气氛置换室排出到大气置换室，并且在所述排气步骤之后对大气置换室进行真空抽吸，通过减少引入的第一气体的量气氛更换室。

67. 发明授权

US5721721A Two scanning probes information recording/reproducing system with one probe to detect atomic reference location on a recording medium 失效
标题翻译：两个扫描探针信息记录/再现系统，具有一个探针，用于检测记录介质上的原子参考位置
公开(公告)号：US5721721A
公开(公告)日：1998-02-24
申请号：US589473
申请日：1996-01-22
申请人： Yoshihiro Yanagisawa , Yuko Morikawa , Hiroshi Matsuda , Haruki Kawada , Kunihiro Sakai , Hisaaki Kawade , Ken Eguchi , Eigo Kawakami , Toshimitsu Kawase , Minoru Yoshii , Kenji Saitoh , Akihiko Yamano , Hiroyasu Nose
发明人： Yoshihiro Yanagisawa , Yuko Morikawa , Hiroshi Matsuda , Haruki Kawada , Kunihiro Sakai , Hisaaki Kawade , Ken Eguchi , Eigo Kawakami , Toshimitsu Kawase , Minoru Yoshii , Kenji Saitoh , Akihiko Yamano , Hiroyasu Nose
IPC分类号： G01B7/00 , G01D5/244 , G01D5/245 , G01Q10/00 , G01Q20/04 , G01Q60/00 , G01Q60/10 , G01Q70/06 , G11B9/00 , G11B7/00
CPC分类号： G01D5/244 , G01B7/003 , G01D5/2451 , G11B9/1418 , G11B9/1427 , G11B9/1481 , B82Y10/00 , G01Q10/06 , G01Q60/16 , G01Q80/00 , G11B9/1472 , Y10S977/851 , Y10S977/861 , Y10S977/947
摘要： An encoder includes an electrically conductive reference scale having surface steps formed at predetermined positions; an electrically conductive probe having a tip disposed opposed to the reference scale; wherein the reference scale and the probe are relatively movable in a direction different from the opposing direction of the tip of the probe and the reference scale; a portion for applying an electrical voltage to between the reference scale and the probe; a portion for detecting a change in a tunnel current between the reference scale and the probe, to between which the electric voltage is applied by the voltage applying portion at the time of the relative movement between the scale and the probe, the detecting portion detecting the change in the tunnel current when the probe passes a position opposed to a surface step of the reference scale; and portion for detecting the amount of the relative movement between the scale and probe, on the basis of the detection by the change detecting portion.
摘要翻译：编码器包括具有形成在预定位置处的表面台阶的导电参考标尺; 导电探针，其具有与参考标尺相对设置的尖端; 其中所述参考标尺和所述探针在与所述探针的尖端和所述参考标尺的相反方向不同的方向上相对移动; 用于将电压施加到参考标尺和探针之间的部分; 用于检测参考标尺和探针之间的隧道电流变化的部分，在标尺和探头之间的相对移动时由电压施加部施加电压，检测部分检测当探针经过与参考刻度的表面台阶相对的位置时隧道电流的变化; 以及用于根据变化检测部分的检测来检测标尺和探针之间的相对移动量的部分。

68. 发明授权

US5276725A Exposure system 失效
标题翻译：曝光系统
公开(公告)号：US5276725A
公开(公告)日：1994-01-04
申请号：US996508
申请日：1992-12-14
申请人： Eigo Kawakami , Minoru Yoshii , Shunichi Uzawa
发明人： Eigo Kawakami , Minoru Yoshii , Shunichi Uzawa
IPC分类号： G03F7/20 , G21K5/00
CPC分类号： G03F7/702
摘要： An exposure apparatus usable with a mask having a pattern and a wafer having a radiation-sensitive surface layer, for transferring with a radiation energy beam the pattern of the mask to the wafer, is disclosed. The apparatus includes a mask supporting member for supporting the mask; a wafer supporting member for supporting the wafer; a reflective member having a reflection surface and an indication pattern, the reflective member being supported by one of the mask supporting member and the wafer supporting member; an arrangement for projecting a beam, which is thinner than the radiation energy beam and which advances along or about the axis of the radiation energy beam, upon the reflective member; a device for observing a positional relationship between the indication pattern and a spot formed by projection of the thinner beam upon the reflective member; and a device for correcting a relationship between the indication pattern and the spot, on the basis of the observation.
摘要翻译：公开了一种可用于具有图案的掩模和具有辐射敏感表面层的晶片的曝光装置，用于将辐射能量束将掩模的图案转印到晶片。该装置包括用于支撑面罩的面罩支撑构件; 用于支撑晶片的晶片支撑构件; 反射构件，其具有反射面和指示图案，所述反射构件由所述面罩支撑构件和所述晶片支撑构件中的一个支撑; 用于投射比辐射能量束更薄并且沿辐射能量束的轴线或围绕辐射能量束的轴线前进的光束的反射构件的布置; 用于观察指示图案与通过将较薄光束投射在反射构件上形成的光斑之间的位置关系的装置; 以及用于基于观察来校正指示图案与斑点之间的关系的装置。

69. 发明授权

US5072116A Microprobe preparation thereof and electronic device by use of said microprobe 失效
标题翻译：麦芽糖的制备及其电子装置
公开(公告)号：US5072116A
公开(公告)日：1991-12-10
申请号：US610314
申请日：1990-11-09
申请人： Hisaaki Kawade , Haruki Kawada , Kunihiro Sakai , Hiroshi Matsuda , Yuko Morikawa , Yoshihiro Yanagisawa , Tetsuya Kaneko , Toshimitsu Kawase , Hideya Kumomi , Hiroyasu Nose , Eigo Kawakami
发明人： Hisaaki Kawade , Haruki Kawada , Kunihiro Sakai , Hiroshi Matsuda , Yuko Morikawa , Yoshihiro Yanagisawa , Tetsuya Kaneko , Toshimitsu Kawase , Hideya Kumomi , Hiroyasu Nose , Eigo Kawakami
IPC分类号： G01N27/00 , G01Q60/16 , G01Q70/10 , G01Q70/14 , G01Q80/00 , G11B9/00 , H01J37/26 , H01J37/28
CPC分类号： G01Q60/16 , B82Y35/00 , G01Q70/10 , B82Y10/00 , G01Q80/00 , Y10S977/878 , Y10S977/879
摘要： A microprobe is constituted by a single crystal having an apex portion surrounded by facets having specific place directions and having specific crystal faces. The microprobe is provided on a part of a main surface of a substrate or a part of a thin film formed on the main surface. In one embodiment the microprobe is provided with a source electrode, a gate electrode, a drain electrode and a thin resistance, so as to form an MOS transistor for amplifying the microprobe.

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