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    • 61. 发明授权
    • Chamber liner for semiconductor process chambers
    • 半导体工艺腔室内衬
    • US06170429B2
    • 2001-01-09
    • US09163722
    • 1998-09-30
    • Alan M. SchoeppWilliam M. Denty, Jr.Michael Barnes
    • Alan M. SchoeppWilliam M. Denty, Jr.Michael Barnes
    • C23C1600
    • H01J37/32495Y10S156/916
    • A chamber liner for use in a semiconductor process chamber and a semiconductor process chamber containing the chamber liner are disclosed. The process chamber includes a housing having an inner surface defining a chamber in which a vacuum is drawn during processing of a semiconductor wafer. The chamber liner has a plasma confinement shield with a plurality of apertures. An outer sidewall extends upwardly from the plasma confinement shield. An outer flange extends outwardly from the outer sidewall such that the outer flange extends beyond the chamber and into a space at atmospheric pressure. The chamber liner preferably further includes an inner sidewall that extends upwardly from the plasma confinement shield. The plasma confinement shield, the inner and outer sidewalls, and the outer flange are preferably integral with one another.
    • 公开了一种用于半导体处理室的腔室衬垫和包含室内衬的半导体处理室。 处理室包括具有内表面的壳体,该内表面限定了在半导体晶片的处理期间抽出真空的腔室。 室衬里具有具有多个孔的等离子体限制屏蔽。 外侧壁从等离子体限制屏蔽向上延伸。 外凸缘从外侧壁向外延伸,使得外凸缘延伸超出室并进入大气压力的空间。 室衬里优选还包括从等离子体限制屏蔽向上延伸的内侧壁。 等离子体限制屏蔽体,内侧壁和外侧壁以及外部凸缘优选彼此成为一体。
    • 64. 发明授权
    • CVD flowable gap fill
    • CVD可流动缝隙填充
    • US07915139B1
    • 2011-03-29
    • US12508461
    • 2009-07-23
    • Chi-I LangJudy H. HuangMichael BarnesSunil Shanker
    • Chi-I LangJudy H. HuangMichael BarnesSunil Shanker
    • H01L21/00
    • H01L21/76837H01L21/02164H01L21/02216H01L21/02271H01L21/0234H01L21/31612H01L21/76826
    • The present invention meets these needs by providing improved methods of filling gaps. In certain embodiments, the methods involve placing a substrate into a reaction chamber and introducing a vapor phase silicon-containing compound and oxidant into the chamber. Reactor conditions are controlled so that the silicon-containing compound and the oxidant are made to react and condense onto the substrate. The chemical reaction causes the formation of a flowable film, in some instances containing Si—OH, Si—H and Si—O bonds. The flowable film fills gaps on the substrates. The flowable film is then converted into a silicon oxide film, for example by plasma or thermal annealing. The methods of this invention may be used to fill high aspect ratio gaps, including gaps having aspect ratios ranging from 3:1 to 10:1.
    • 本发明通过提供填充间隙的改进方法来满足这些需要。 在某些实施方案中,所述方法包括将基材置于反应室中并将气相含硅化合物和氧化剂引入所述​​室中。 控制反应器条件使得含硅化合物和氧化剂反应并冷凝到基底上。 化学反应导致形成可流动的膜,在某些情况下,含有Si-OH,Si-H和Si-O键。 可流动膜填充基板上的间隙。 然后将可流动膜转化成氧化硅膜,例如通过等离子体或热退火。 本发明的方法可用于填充高纵横比间隙,包括具有3:1至10:1的纵横比的间隙。
    • 65. 发明申请
    • SYSTEMS AND METHODS FOR HYPERSPECTRAL MEDICAL IMAGING USING REAL-TIME PROJECTION OF SPECTRAL INFORMATION
    • 使用实时投影光谱信息进行超视距医学成像的系统和方法
    • US20100069758A1
    • 2010-03-18
    • US12465150
    • 2009-05-13
    • Michael BarnesZhihong PanSizhong Zhang
    • Michael BarnesZhihong PanSizhong Zhang
    • A61B6/00
    • A61B5/445A61B5/0059A61B5/015A61B5/0507A61B5/444A61B5/726
    • Under one aspect, a method of displaying medical information about a subject having a plurality of regions includes: resolving light obtained from each region of the plurality of regions into a corresponding spectrum; selecting a portion of each spectrum, the selected portion including medical information about the corresponding region; constructing an image based on the selected portion of each spectrum; and projecting the image onto the subject. Under another aspect, a method of displaying medical information about a subject that has a plurality of regions includes: resolving light obtained from each region of the plurality of regions into a corresponding spectrum; selecting a portion of each spectrum, the selected portion including medical information about the corresponding region; constructing a spectral image based on the selected portion of each spectrum; displaying an image of the plurality of regions; and displaying the spectral image overlying the image of the plurality of regions.
    • 在一个方面,一种显示关于具有多个区域的对象的医学信息的方法包括:将从多个区域的每个区域获得的光分解成相应的光谱; 选择每个频谱的一部分,所选择的部分包括关于相应区域的医学信息; 基于每个频谱的所选部分构建图像; 并将图像投影到被摄体上。 在另一方面,一种显示关于具有多个区域的对象的医学信息的方法包括:将从所述多个区域中的每个区域获得的光分解成相应的光谱; 选择每个频谱的一部分,所选择的部分包括关于相应区域的医学信息; 基于每个频谱的所选部分构建光谱图像; 显示所述多个区域的图像; 以及显示覆盖所述多个区域的图像的光谱图像。
    • 66. 发明申请
    • TRANSIT PREVENTION IN HUB-AND-SPOKE TOPOLOGIES USING LINK STATE PROTOCOLS
    • 使用链接状态协议在HUB和SPOKE拓扑中的过境预防
    • US20100061246A1
    • 2010-03-11
    • US12207624
    • 2008-09-10
    • Michael BarnesAlvaro E. RetanaPaul Wells
    • Michael BarnesAlvaro E. RetanaPaul Wells
    • H04L12/56
    • H04L45/123H04L45/12H04L45/48
    • In one embodiment, a method and apparatus of controlling transmission of data packets in a communications network includes designating all networking devices in a portion of the communications network as either hubs or spokes, communicating a link-state advertisement to each connected hub and spoke in the portion of the communications network, computing a shortest path tree at all the hubs and the spokes based on the link-state advertisement, the computing including truncating the shortest path tree at the hubs only for links leading from the spoke to the hub, creating a routing table at each of the hub and the spoke based on the truncated shortest path tree, and transmitting the data packets in the communications network based on the link-state advertisement. The shortest path tree includes all data transmission routes in the tree except links leading from a spoke to a hub.
    • 在一个实施例中,控制通信网络中的数据分组传输的方法和装置包括将通信网络的一部分中的所有网络设备指定为集线器或辐条,将链路状态广告传送到每个连接的集线器并在 通信网络的一部分,基于链路状态广告在所有集线器和轮辐处计算最短路径树,所述计算包括仅在从轮辐到集线器的链路上截断中心处的最短路径树,从而创建 基于截短的最短路径树在集线器和辐条的每一个处的路由表,以及基于链路状态广告在通信网络中发送数据分组。 最短路径树包括树中的所有数据传输路由,除了从辐条引导到集线器的链路。
    • 69. 发明申请
    • Method and system for processing transactions
    • 处理交易的方法和系统
    • US20050177507A1
    • 2005-08-11
    • US11028489
    • 2004-12-30
    • David BandychJohn MarronMark HoffmeyerMichael BarnesTim DawsonPaul Hanson
    • David BandychJohn MarronMark HoffmeyerMichael BarnesTim DawsonPaul Hanson
    • G06F17/60
    • G06Q20/10G06Q20/102
    • A system and method is provided for processing transactions between at least one buying company and at least one selling company which results in the creation of a new collaborative data set. In one embodiment, the method comprises providing a central datastore accessible to users from the buying company and users from the selling company. Purchase order and invoice data are obtained and compared via a computer, to identify a matched record having purchase order data and corresponding invoice data. A collaborative data set in the central datastore is created, based in part on the matched record and storing in the datastore detailed settlement data regarding settlement of the matched record of purchase order data and corresponding invoice data. The method stores a complete settlement transaction history by providing for storage of additional settlement data in the central datastore, wherein credit memos, debit memos regarding the invoice, the purchase order of the matched record, and/or other documents related to the transaction are stored as part of the collaborative data set.
    • 提供了一种用于处理至少一个购买公司和至少一个销售公司之间的交易的系统和方法,其导致创建新的协作数据集。 在一个实施例中,该方法包括提供来自购买公司的用户和销售公司的用户可访问的中央数据存储。 通过计算机获得采购订单和发票数据并进行比较,以识别具有采购订单数据和相应发票数据的匹配记录。 创建中央数据存储区中的协作数据集,部分基于匹配的记录,并存储数据存储区中关于结算采购订单数据和相应发票数据的匹配记录的详细结算数据。 该方法通过提供在中央数据存储区中存储附加结算数据来存储完整的结算交易历史,其中存储有关发票的借记凭单,与该交易有关的匹配记录的采购订单和/或其他文件 作为协作数据集的一部分。