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    • 63. 发明授权
    • Methods for forming multi-layer three-dimensional structures
    • 形成多层三维结构的方法
    • US08216931B2
    • 2012-07-10
    • US11548207
    • 2006-10-10
    • Gang Zhang
    • Gang Zhang
    • H01L21/4763
    • B81C1/0019B81C2201/019
    • Embodiments are directed to the formation of multi-layer three-dimensional structures by forming and attaching a plurality of layers where each of the plurality of layers comprises at least one structural material forming a pattern and where at least one of the plurality of layers comprises at least one sacrificial material. In one embodiment, the formation of a multi-layer three-dimensional structure comprises (1) forming a plurality of individual layers and (2) attaching at least the formed plurality of individual layers together. In another embodiment, the formation of a multi-layer three-dimensional structure comprises (1) attaching an individual layer onto a substrate or onto a previously formed layer; (2) processing the attached individual layer to form a new layer comprising at least one material forming a pattern; and (3) repeating the steps of (1) and (2) one or more times.
    • 实施例涉及通过形成和附接多个层来形成多层三维结构,其中多个层中的每个层包括形成图案的至少一个结构材料,并且其中至少一个层包括在 至少一种牺牲材料。 在一个实施例中,多层三维结构的形成包括(1)形成多个单独的层和(2)至少将形成的多个单独的层附接在一起。 在另一个实施方案中,多层三维结构的形成包括(1)将单独的层附着在基底上或先前形成的层上; (2)处理附着的单独层以形成包含形成图案的至少一种材料的新层; 和(3)重复步骤(1)和(2)一次或多次。
    • 65. 发明授权
    • Methods for forming multi-layer silicon structures
    • 形成多层硅结构的方法
    • US08043931B1
    • 2011-10-25
    • US11855906
    • 2007-09-14
    • Gang Zhang
    • Gang Zhang
    • H01L21/00H01L21/331H01L21/76
    • B81C1/00119B81C1/00357B81C2201/019H01L21/187
    • The embodiments of the present invention are directed to the formation of multi-layer silicon structures by forming and attaching a plurality of individual layers or structures where each of the layers or the structures comprises at least silicon forming a desired pattern. In some embodiments or some applications of some embodiments, at least one of the plurality of individual layers or the structures comprises a plurality of discrete silicon features that are combined together with at least one sacrificial material. In some embodiments or some applications of some embodiments, at least one of the plurality of individual layers or the structures comprises a plurality of discrete silicon features that are supported by a temporary substrate. Still in some embodiments or some applications of some embodiments, at least one of the plurality of individual layers or the structures needs to be machined after it is attached to a receiver such as a substrate or an another layer or structure. The present invention also discloses various fabrication methods for making required silicon layers or structures and attaching methods for forming multi-layer silicon structures.
    • 本发明的实施例涉及通过形成和附接多个单独的层或结构来形成多层硅结构,其中每个层或结构至少包括形成期望图案的硅。 在一些实施例或某些实施例的一些应用中,多个单独层或结构中的至少一个包括与至少一种牺牲材料组合在一起的多个离散硅特征。 在一些实施例或一些实施例的一些应用中,多个单独层或结构中的至少一个包括由临时衬底支撑的多个离散硅特征。 仍然在一些实施例或某些实施例的一些应用中,多个独立层或结构中的至少一个在其附接到例如基板或另一层或结构的接收器之后需要被加工。 本发明还公开了制造所需硅层或结构的各种制造方法以及用于形成多层硅结构的附着方法。
    • 66. 发明授权
    • Phase to digital converter in all digital phase locked loop
    • 所有数字锁相环中的相数转换器
    • US08022849B2
    • 2011-09-20
    • US12102768
    • 2008-04-14
    • Gang ZhangAbhishek JajooYiping Han
    • Gang ZhangAbhishek JajooYiping Han
    • H03M1/00
    • H03L7/085H03L7/089H03L7/1976H03L2207/50
    • A phase to digital converter, all digital phase locked loop, and apparatus having an all digital phase locked loop are described herein. The phase to digital converter includes a phase to frequency converter driving a time to digital converter. The time to digital converter determines a magnitude and sign of the phase differences output by the phase to frequency converter. The time to digital converter utilizes tapped delay lines and looped feedback counters to enable measurement of small timing differences typical of a loop tracking process and large timing differences typical of an loop acquisition process. The tapped delay lines permit the measurement of fractions of a reference period and enable lower power operation of the phase to digital converter by reducing requirements on the speed of the reference clock.
    • 这里描述了一个相数转换器,全数字锁相环和具有全数字锁相环的装置。 相数转换器包括驱动时间到数字转换器的相位到频率转换器。 数字转换器的时间决定了相位变频器输出的相位差的大小和符号。 数字转换器的时间利用抽头延迟线和环路反馈计数器来测量环路跟踪过程中典型的小时序差异以及循环采集过程的典型时间差。 抽头延迟线允许测量参考周期的分数,并通过减少对参考时钟速度的要求,实现相位数字转换器的低功耗操作。
    • 68. 发明申请
    • ADC-BASED MIXED-MODE DIGITAL PHASE-LOCKED LOOP
    • 基于ADC的混合模式数字锁相环
    • US20110090998A1
    • 2011-04-21
    • US12582661
    • 2009-10-20
    • Gang Zhang
    • Gang Zhang
    • H04L7/00H03D3/24
    • H03L7/1072H03L7/093H03L7/1976
    • A Phase-Locked Loop (PLL) includes a Phase-to-Digital Converter (PDC), a programmable digital loop filter, a Digitally-Controlled Oscillator (DCO), and a loop divider. Within the PDC, phase information is converted into a stream of digital values by a charge pump and an Analog-to-Digital Converter (ADC). The stream of digital values is supplied to the digital loop filter which in turn supplies digital tuning words to the DCO. A number of types of ADCs can be used for the ADC including a continuous-time delta-sigma oversampling Digital ADC and a Successive Approximation ADC. The voltage signal on the charge pump output is a small amplitude midrange voltage signal. The small voltage amplitude of the signal leads to numerous advantages including improved charge pump linearity, reduced charge pump noise, and lower supply voltage operation of the overall PLL.
    • 锁相环(PLL)包括一个相位数转换器(PDC),一个可编程数字环路滤波器,一个数字控制振荡器(DCO)和一个环路分频器。 在PDC中,相位信息由电荷泵和模数转换器(ADC)转换成数字值流。 数字值流被提供给数字环路滤波器,数字环路滤波器又向DCO提供数字调谐字。 ADC可以使用多种类型的ADC,包括连续时间Δ-sigma过采样数字ADC和逐次逼近ADC。 电荷泵输出上的电压信号是一个小幅度的中频电压信号。 信号的小电压幅度导致许多优点,包括改善电荷泵线性度,降低电荷泵噪声,以及整个PLL的较低电源电压操作。
    • 69. 发明授权
    • Delta-sigma modulator clock dithering in a fractional-N phase-locked loop
    • Delta-sigma调制器时钟在分数N锁相环中抖动
    • US07911247B2
    • 2011-03-22
    • US12037503
    • 2008-02-26
    • Yang XuGang ZhangPrasad S. Gudem
    • Yang XuGang ZhangPrasad S. Gudem
    • H03L7/06
    • H03L7/1974
    • The clock signal supplied to the delta-sigma modulator in a fractional-N phase-locked loop is dithered. In one example, the PLL includes a novel programmable clock dithering circuit. The programmable clock dithering circuit is controllable via a serial bus to dither the phase of the clock signal in a selected one of several ways. If the clock signal is dithered in a first way (pseudo-random phase dithering), then the power of digital noise generated by the delta-sigma modulator is spread over a frequency band, thereby reducing the degree to which the noise interferes with other circuitry. If the clock signal is dithered in a second way (rotational phase dithering), then the power of digital noise is frequency shifted such that the degree to which the noise interferes with the other circuitry is reduced. The programmable clock dithering circuit can be controlled in other ways. For example, dithering can be programmably disabled.
    • 在分数N锁相环中提供给Δ-Σ调制器的时钟信号被抖动。 在一个示例中,PLL包括新颖的可编程时钟抖动电路。 可编程时钟抖动电路可通过串行总线进行控制,以选择的几种方式对时钟信号的相位进行抖动。 如果时钟信号以第一种方式抖动(伪随机相位抖动),则由Δ-Σ调制器产生的数字噪声的功率在频带上扩展,从而降低噪声干扰其他电路的程度 。 如果时钟信号以第二种方式抖动(旋转相位抖动),则数字噪声的功率被频移,使得噪声干扰另一电路的程度降低。 可编程时钟抖动电路可以以其他方式进行控制。 例如,抖动可以可编程地禁用。
    • 70. 发明授权
    • Linear phase frequency detector and charge pump for phase-locked loop
    • 用于锁相环的线性相位频率检测器和电荷泵
    • US07876871B2
    • 2011-01-25
    • US11565062
    • 2006-11-30
    • Gang Zhang
    • Gang Zhang
    • H03D3/24
    • H03L7/1976H03L7/0891
    • Techniques for achieving linear operation for a phase frequency detector and a charge pump in a phase-locked loop (PLL) are described. The phase frequency detector receives a reference signal and a clock signal, generates first and second signals based on the reference and clock signals, and resets the first and second signals based on only the first signal. The first and second signals may be up and down signals, respectively, or may be down and up signals, respectively. The phase frequency detector may delay the first signal by a predetermined amount, generate a reset signal based on the delayed first signal and the second signal, and reset the first and second signals with the reset signal. The charge pump receives the first and second signals and generates an output signal indicative of phase error between the reference and clock signals.
    • 描述了在锁相环(PLL)中实现相位频率检测器和电荷泵的线性操作的技术。 相位频率检测器接收参考信号和时钟信号,基于参考和时钟信号产生第一和第二信号,并且仅基于第一信号复位第一和第二信号。 第一和第二信号可以分别是上下信号,也可以分别是下降信号。 相位频率检测器可以将第一信号延迟预定量,基于延迟的第一信号和第二信号产生复位信号,并用复位信号复位第一和第二信号。 电荷泵接收第一和第二信号,并产生指示参考和时钟信号之间的相位误差的输出信号。