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    • 65. 发明授权
    • Contour line plotting devices
    • 轮廓线绘图装置
    • US4009961A
    • 1977-03-01
    • US665816
    • 1976-03-11
    • Takashi Maruyama
    • Takashi Maruyama
    • G01C11/12
    • G01C11/12
    • A device for deriving the contour lines for an object from stereophotographic films taken through photographic lenses comprises steroscopic viewing apparatus for comparing the films to locate the different points on the object having a selected height and for producing first position signals representing the positions of the different points in one of the films, and a correction mechanism responsive to the first position signals for producing second position signals which represent corrected positions of the points for defining a contour line corresponding to the selected height.
    • 用于从通过照相镜头拍摄的立体摄影胶片中导出物体的轮廓线的装置包括用于比较胶片以定位具有选定高度的物体上的不同点的立体观察装置,并且用于产生表示不同点的位置的第一位置信号 以及响应于第一位置信号的校正机构,用于产生表示用于限定对应于所选择的高度的轮廓线的点的校正位置的第二位置信号。
    • 67. 发明申请
    • EXPOSURE DATA GENERATION METHOD
    • 暴露数据生成方法
    • US20120304134A1
    • 2012-11-29
    • US13427179
    • 2012-03-22
    • Shinji SUGATANITakashi MARUYAMA
    • Shinji SUGATANITakashi MARUYAMA
    • G06F17/50
    • G03F1/20G06F17/5077
    • An exposure data generation method includes generating a first multi-layer wiring pattern including a plurality of wiring layers according to a netlist and a wiring rule; dividing a layer pattern of each layer included in the generated first multi-layer wiring pattern by a subfield; by referring to a pattern database in which a subfield pattern of a wiring layer, included in a second multi-layer wiring pattern generated in the subfield according to the wiring rule, and a pattern identifier corresponding to the subfield pattern are registered, extracting the pattern identifier of the subfield pattern corresponding to the divided layer pattern of the first multi-layer wiring pattern; and generating exposure data including the extracted pattern identifier and an exposure position of the subfield pattern corresponding to the extracted pattern identifier.
    • 曝光数据生成方法包括根据网表和布线规则生成包括多个布线层的第一多层布线图案; 通过子场将生成的第一多层布线图案中包含的每个层的层图案分割; 通过参照图案数据库,其中登记了包括在根据布线规则的子场中生成的第二多层布线图案中的布线层的子场图案和与子场图案相对应的图案识别符的图案数据库,提取图案 对应于第一多层布线图案的划分图案图案的子场图案的标识符; 以及生成包括提取的图案标识符和与所提取的图案标识符对应的子图案的曝光位置的曝光数据。
    • 68. 发明授权
    • Semiconductor manufacture method
    • 半导体制造方法
    • US08143075B2
    • 2012-03-27
    • US11300276
    • 2005-12-15
    • Takashi Maruyama
    • Takashi Maruyama
    • H01L21/00
    • H01L23/544B82Y10/00B82Y40/00G03F9/7003H01J37/3045H01J37/3174H01J2237/31793H01L2223/54453H01L2223/5448H01L2924/0002H01L2924/00
    • A semiconductor device manufacture method has the steps of: (a) forming a semiconductor device structure in a chip and alignment marks, respectively in a semiconductor wafer; (b) forming a workpiece layer above the semiconductor wafer; (c) exposing the alignment marks; (d) coating an electron beam resist film on the workpiece layer; (e) scanning the alignment marks with an electron beam to obtain plural position information on the alignment marks and obtaining differences between the plural position information; (f) removing abnormal values of position information in accordance with the difference between the plural position information; and (g) performing an electron beam exposure in accordance with plural position information of the alignment marks with the abnormal value being removed. An alignment mark detection precision can be improved in electron beam exposure.
    • 半导体器件制造方法具有以下步骤:(a)分别在半导体晶片中形成芯片中的半导体器件结构和对准标记; (b)在半导体晶片上形成工件层; (c)露出对准标记; (d)在工件层上涂覆电子束抗蚀剂膜; (e)用电子束扫描对准标记,以获得对准标记的多个位置信息,并获得多个位置信息之间的差异; (f)根据多个位置信息之间的差异去除位置信息的异常值; 和(g)根据所述对准标记的多个位置信息进行电子束曝光,异常值被去除。 可以改善电子束曝光中的对准标记检测精度。
    • 69. 发明申请
    • COMBINED CYCLE POWER GENERATING DEVICE
    • 组合式循环发电装置
    • US20120031069A1
    • 2012-02-09
    • US13181892
    • 2011-07-13
    • Takashi MARUYAMA
    • Takashi MARUYAMA
    • F01K23/10F02C6/18
    • F02C7/18F01K13/006F01K23/10F22B1/1815Y02E20/16
    • A combined cycle power generating device in which the exhaust heat of the gas turbine reheats the steam discharged out of the high pressure chamber of the steam turbine so that the reheated steam is supplied to the intermediate-pressure chamber in order to increase the power output of the steam turbine, wherein the cooling steam that has cooled the gas turbine is supplied to the intermediate-pressure chamber via a cooling steam inlet different from the inlet of the reheat steam that is reheated by the exhaust heat of the gas turbine, so that the cooling steam is used for cooling purpose, the temperature of the cooling steam being higher than the temperature of the steam discharged out of the high pressure chamber.
    • 一种联合循环发电装置,其中燃气轮机的排气热量再加热从蒸汽涡轮机的高压室排出的蒸汽,使得再热蒸汽被供给到中压室,以便增加 蒸汽涡轮机,其中已经冷却燃气轮机的冷却蒸汽通过不同于由燃气轮机的排热重新加热的再热蒸汽的入口的冷却蒸汽入口供应到中压室,使得 冷却蒸汽用于冷却目的,冷却蒸汽的温度高于从高压室排出的蒸汽的温度。