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    • 65. 发明申请
    • MANUFACTURING METHOD OF A THIN FILM TRANSISTOR ARRAY PANEL
    • 薄膜晶体管阵列的制造方法
    • US20080299712A1
    • 2008-12-04
    • US12192531
    • 2008-08-15
    • Woo-Geun LEEHye-Young RYUSang-Gab KIMJang-Soo KIM
    • Woo-Geun LEEHye-Young RYUSang-Gab KIMJang-Soo KIM
    • H01L21/336
    • H01L27/1288H01L21/32134H01L21/76838H01L27/1214H01L29/66765
    • A method of manufacturing a thin film transistor array panel includes forming a gate line including a gate electrode, forming a gate insulating layer on the gate line, forming a semiconductor stripe on the gate insulating layer; forming ohmic contacts on the semiconductor stripe, forming a data line including a source electrode and a drain electrode on the ohmic contacts, depositing a passivation layer on the data line and the drain electrode, and forming a pixel electrode connected to the drain electrode. The formation of the data line and the drain electrode, the ohmic contacts, and the semiconductor stripe includes depositing an intrinsic silicon layer, an extrinsic silicon layer, and a conductor layer on the gate insulating layer, forming a photoresist including a second portion corresponding to a channel area between the source electrode and the drain electrode, and a first portion corresponding to a wire area on the data line and the drain electrode, wherein the first portion is thicker than the second portion, etching the conductor layer corresponding to a remaining area except for the wire and the channel area using the photoresist as an etch mask, removing the second portion to expose the conductor layer on the channel areas, etching the intrinsic silicon layer and the extrinsic silicon layer on the remaining area, etching the conductor layer and the extrinsic silicon layer on the channel areas, and removing the first portion.
    • 制造薄膜晶体管阵列面板的方法包括:形成包括栅电极的栅极线,在栅极线上形成栅绝缘层,在栅绝缘层上形成半导体条; 在半导体条上形成欧姆接触,在欧姆接触上形成包括源电极和漏电极的数据线,在数据线和漏电极上沉积钝化层,并形成连接到漏电极的像素电极。 数据线和漏电极,欧姆接触和半导体条纹的形成包括在栅绝缘层上沉积本征硅层,非本征硅层和导体层,形成光致抗蚀剂,其包括对应于 源极电极和漏极电极之间的沟道区域,以及对应于数据线和漏极电极的导线区域的第一部分,其中第一部分比第二部分厚,蚀刻对应于剩余区域的导体层 除了使用光致抗蚀剂作为蚀刻掩模的导线和沟道区域之外,去除第二部分以暴露沟道区域上的导体层,蚀刻剩余区域上的本征硅层和非本征硅层,蚀刻导体层和 在通道区域上的非本征硅层,以及去除第一部分。
    • 66. 发明申请
    • DISPLAY SUBSTRATE HAVING THE SAME AND METHOD OF MANUFACTURING THE DISPLAY SUBSTRATE
    • 具有该显示基板的显示基板和制造显示基板的方法
    • US20080185589A1
    • 2008-08-07
    • US12027102
    • 2008-02-06
    • Kyoung-Ju ShinJang-Soo KimChong-Chul Chai
    • Kyoung-Ju ShinJang-Soo KimChong-Chul Chai
    • H01L29/04H01L21/02G02F1/136
    • G02F1/136213G02F2001/136222
    • A display substrate includes a thin-film transistor (TFT) layer, a color filter layer and a pixel electrode formed on a substrate. The TFT layer includes a gate line, a data line electrically insulated from the gate line and extending in a direction different from the gate line, a TFT electrically connected to the gate line and the data line, and a storage electrode formed from the same layer as the gate line in each pixel. The color filter layer includes a storage hole extending to a portion of the TFT layer corresponding to the storage electrode. The storage hole has a horizontal cross-sectional area greater than the storage electrode, wherein the horizontal cross-sectional area is measured in a plane parallel to the substrate. The pixel electrode is formed on the color filter layer and in the storage hole to form a storage capacitor with the storage electrode.
    • 显示基板包括薄膜晶体管(TFT)层,滤色器层和形成在基板上的像素电极。 TFT层包括栅极线,与栅极线电绝缘并沿与栅极线不同的方向延伸的数据线,与栅极线和数据线电连接的TFT,以及由同一层形成的存储电极 作为每个像素中的栅极线。 滤色器层包括延伸到对应于存储电极的TFT层的一部分的存储孔。 存储孔具有大于存储电极的水平横截面积,其中在平行于衬底的平面中测量水平横截面面积。 像素电极形成在滤色器层和存储孔中,以与存储电极形成存储电容器。
    • 69. 发明授权
    • Thin film transistor array panel for liquid crystal display having pixel electrode
    • 具有像素电极的液晶显示器的薄膜晶体管阵列面板
    • US07289171B2
    • 2007-10-30
    • US11551450
    • 2006-10-20
    • Dong-Gyu KimHyang-Shik KongJang-Soo Kim
    • Dong-Gyu KimHyang-Shik KongJang-Soo Kim
    • G02F1/136G02F1/1343
    • G02F1/136213G02F1/1337G02F1/133784G02F1/134336G02F1/136227G02F2201/123
    • A TFT array panel includes an insulating substrate, a gate line and a storage electrode line formed thereon. The gate line and the storage electrode line are covered with a gate insulating layer, and a semiconductor island is formed on the gate insulating layer. A pair of ohmic contacts are formed on the semiconductor island, and a data line and a drain electrode are formed thereon. The data line and the drain electrode are covered with a passivation layer having a contact hole exposing the drain electrode. A pixel electrode is formed on the passivation layer and connected to the drain electrode through the contact hole. The TFT array panel is covered with an alignment layer rubbed approximately in a direction from the upper left corner to the lower right corner of the TFT array panel or the pixel electrodes. The pixel electrode has approximately a rectangular shape and overlaps the gate line and the data line. The pixel electrode has an expansion located near the upper left corner of the pixel electrode to increase the width of the corresponding overlapping area between the pixel electrode and the gate line and/or the data line.
    • TFT阵列面板包括绝缘基板,栅极线和形成在其上的存储电极线。 栅极线和存储电极线被栅极绝缘层覆盖,并且在栅极绝缘层上形成半导体岛。 在半导体岛上形成一对欧姆接触,在其上形成数据线和漏电极。 数据线和漏电极被具有暴露漏电极的接触孔的钝化层覆盖。 像素电极形成在钝化层上,并通过接触孔与漏电极连接。 TFT阵列面板被大致沿着从TFT阵列板的左上角到右下角或像素电极的方向摩擦的取向膜覆盖。 像素电极具有大致矩形形状并且与栅极线和数据线重叠。 像素电极具有位于像素电极的左上角附近的扩展部,以增加像素电极与栅极线和/或数据线之间的对应重叠区域的宽度。