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61. 发明申请

US20120267729A1 SELF-SEALED FLUIDIC CHANNELS FOR NANOPORE ARRAY 有权
标题翻译：用于纳米阵列的自密封流体通道
公开(公告)号：US20120267729A1
公开(公告)日：2012-10-25
申请号：US13092424
申请日：2011-04-22
申请人： Bing Dang , Hongbo Peng
发明人： Bing Dang , Hongbo Peng
IPC分类号： H01L29/66 , H01L21/02
CPC分类号： B82Y15/00 , G01N33/48721 , Y10S977/70 , Y10S977/704 , Y10S977/712 , Y10S977/84 , Y10S977/856
摘要： A method of forming a nanopore array includes patterning a front layer of a substrate to form front trenches, the substrate including a buried layer disposed between the front layer and a back layer; depositing a membrane layer over the patterned front layer and in the front trenches; patterning the back layer and the buried layer to form back trenches, the back trenches being aligned with the front trenches; forming a plurality of nanopores through the membrane layer; depositing a sacrificial material in the front trenches and the back trenches; depositing front and back insulating layers over the sacrificial material; and heating the sacrificial material to a decomposition temperature of the sacrificial material to remove the sacrificial material and form pairs of front and back channels, wherein the front channel of each channel pair is connected to the back channel of its respective channel pair by an individual nanopore.
摘要翻译：形成纳米孔阵列的方法包括使衬底的前层图形化以形成前沟槽，所述衬底包括设置在前层和背层之间的掩埋层; 在图案化的前层和前沟槽上沉积膜层; 图案化背层和掩埋层以形成背沟，后沟与前沟槽对齐; 通过膜层形成多个纳米孔; 在前沟槽和后沟槽中沉积牺牲材料; 在所述牺牲材料上沉积前后绝缘层; 并且将所述牺牲材料加热至所述牺牲材料的分解温度以去除所述牺牲材料并形成一对前和后通道，其中每个通道对的前通道通过单独的纳米孔连接到其相应通道对的后通道。

62. 发明申请

US20120199483A1 NANOPORE CAPTURE SYSTEM 有权
标题翻译： NANOPORE捕获系统
公开(公告)号：US20120199483A1
公开(公告)日：2012-08-09
申请号：US13452857
申请日：2012-04-21
申请人： Stanislav Polonsky , Ali Afzali-Ardakani , Hongbo Peng , Gustavo A. Stolovitzky , Ajay A. Royyuru , Mark N. Wegman
发明人： Stanislav Polonsky , Ali Afzali-Ardakani , Hongbo Peng , Gustavo A. Stolovitzky , Ajay A. Royyuru , Mark N. Wegman
IPC分类号： G01N33/50 , C07K1/26 , C07K16/00 , C07H21/04 , B82Y15/00
CPC分类号： G01N33/48721 , G01N33/54373
摘要： A nanopore capture system may include a material configured to pass through a nanopore device in a controlled manner based upon its interaction with the nanopore device. The system may also include a capture mechanism connected to one end of the material. The capture mechanism may be configured to catch a particular type of molecule while ignoring other types of molecules. The system may also include a controller to manipulate and/or detect the particular type of molecule.
摘要翻译：纳米孔捕获系统可以包括配置为基于其与纳米孔装置的相互作用以受控方式穿过纳米孔装置的材料。系统还可以包括连接到材料的一端的捕获机构。捕获机制可以被配置为捕获特定类型的分子，同时忽略其它类型的分子。该系统还可以包括操纵和/或检测特定类型的分子的控制器。

63. 发明申请

US20120193235A1 DNA MOTION CONTROL BASED ON NANOPORE WITH ORGANIC COATING FORMING TRANSIENT BONDING TO DNA 审中-公开
标题翻译：基于NANOPORE的DNA运动控制与有机涂层形成瞬态结合到DNA
公开(公告)号：US20120193235A1
公开(公告)日：2012-08-02
申请号：US13359743
申请日：2012-01-27
申请人： Ali Afzali-Ardakani , Stefan Harrer , Binquan Luan , Glenn J. Martyna , Hongbo Peng , Stephen M. Rossnagel , Ajay K. Royyuru , Gustavo A. Stolovitzky , Philip S. Waggoner
发明人： Ali Afzali-Ardakani , Stefan Harrer , Binquan Luan , Glenn J. Martyna , Hongbo Peng , Stephen M. Rossnagel , Ajay K. Royyuru , Gustavo A. Stolovitzky , Philip S. Waggoner
IPC分类号： G01N27/453
CPC分类号： G01N27/4473 , C12Q1/6869 , C12Q2523/303 , C12Q2565/631
摘要： A nanodevice includes a reservoir filled with a conductive fluid and a membrane separating the reservoir. The membrane includes an insulating layer. A nanopore is formed through the membrane, and an organic coating is provided on the insulating layer to form a transient bond to a DNA molecule in the nanopore. The transient bond is stronger than thermal motion, such that the transient bond can hold the DNA molecule against the thermal motion. When a voltage is applied across the membrane, the voltage will break the transient bond to move the DNA molecule through the nanopore in a controllable state.
摘要翻译：纳米器件包括填充有导电流体的储存器和分离储存器的膜。膜包括绝缘层。通过膜形成纳米孔，并且在绝缘层上提供有机涂层以与纳米孔中的DNA分子形成瞬时键合。瞬态键比热运动强，使得瞬态键可以保持DNA分子抵抗热运动。当跨膜施加电压时，电压将破坏瞬态键合，以在可控状态下将DNA分子移动通过纳米孔。

64. 发明申请

US20120193231A1 DNA SEQUENCING USING MULTIPLE METAL LAYER STRUCTURE WITH ORGANIC COATINGS FORMING TRANSIENT BONDING TO DNA BASES 审中-公开
标题翻译：使用多种金属层结构的DNA序列与有机涂层形成瞬态结合到DNA基础
公开(公告)号：US20120193231A1
公开(公告)日：2012-08-02
申请号：US13359750
申请日：2012-01-27
申请人： Ali Afzali-Ardakani , Stefan Harrer , Binquan Luan , Glenn J. Martyna , Hongbo Peng , Stephen M. Rossnagel , Gustavo A. Stolovitzky , Philip S. Waggoner , George F. Walker
发明人： Ali Afzali-Ardakani , Stefan Harrer , Binquan Luan , Glenn J. Martyna , Hongbo Peng , Stephen M. Rossnagel , Gustavo A. Stolovitzky , Philip S. Waggoner , George F. Walker
IPC分类号： G01N27/447 , G01N27/453
CPC分类号： G01N33/48721 , C12Q1/6869 , C12Q2563/116 , C12Q2563/157 , C12Q2565/607 , C12Q2565/631
摘要： A nanodevice is provided. A reservoir is filled with an ionic fluid. A membrane separates the reservoir, and the membrane includes electrode layers separated by insulating layers in which the electrode layers have an organic coating. A nanopore is formed through the membrane, and the organic coating on the electrode layers forms transient bonds to a base of a molecule in the nanopore. When a first voltage is applied to the electrode layers a tunneling current is generated by the base in the nanopore, and the tunneling current travels through the transient bonds formed to the base to be measured as a current signature for distinguishing the base.
摘要翻译：提供了一个纳米设备。储存器充满离子流体。膜分离储存器，并且膜包括由绝缘层分离的电极层，其中电极层具有有机涂层。通过膜形成纳米孔，并且电极层上的有机涂层与纳米孔中分子的碱基形成瞬态键。当第一电压施加到电极层时，通过纳米孔中的基底产生隧道电流，并且隧道电流通过形成到待测量的基极的瞬态键作为用于区分基极的电流签名传播。

65. 发明申请

US20120132886A1 NANOFLUDIC FIELD EFFECT TRANSISTOR BASED ON SURFACE CHARGE MODULATED NANOCHANNEL 有权
标题翻译：基于表面电荷调制纳米通道的纳米场效应晶体管
公开(公告)号：US20120132886A1
公开(公告)日：2012-05-31
申请号：US13365577
申请日：2012-02-03
申请人： Hongbo Peng , Stanislav Polonsky , Stephen Rossnagel , Gustavo Alejandro Stolovitzky
发明人： Hongbo Peng , Stanislav Polonsky , Stephen Rossnagel , Gustavo Alejandro Stolovitzky
IPC分类号： H01L51/10 , B82Y99/00
CPC分类号： H01L51/0558 , B82Y10/00 , G01N27/4148 , G01N33/48721 , H01L51/0093 , Y10S977/938
摘要： A field effect transistor device includes: a reservoir bifurcated by a membrane of three layers: two electrically insulating layers; and an electrically conductive gate between the two insulating layers. The gate has a surface charge polarity different from at least one of the insulating layers. A nanochannel runs through the membrane, connecting both parts of the reservoir. The device further includes: an ionic solution filling the reservoir and the nanochannel; a drain electrode; a source electrode; and voltages applied to the electrodes (a voltage between the source and drain electrodes and a voltage on the gate) for turning on an ionic current through the ionic channel wherein the voltage on the gate gates the transportation of ions through the ionic channel.
摘要翻译：场效应晶体管器件包括：由三层膜分隔的储存器：两个电绝缘层; 和两个绝缘层之间的导电栅极。栅极具有与至少一个绝缘层不同的表面电荷极性。纳米通道穿过膜，连接储存器的两个部分。该装置还包括：填充储存器和纳米通道的离子溶液; 漏电极; 源电极; 以及施加到电极的电压（源极和漏极之间的电压和栅极上的电压），用于接通通过离子通道的离子电流，其中栅极上的电压通过离子通道输送离子。

66. 发明授权

US08084319B2 Precisely tuning feature sizes on hard masks via plasma treatment 有权
标题翻译：通过等离子体处理在硬掩模上精确调整特征尺寸
公开(公告)号：US08084319B2
公开(公告)日：2011-12-27
申请号：US12704665
申请日：2010-02-12
申请人： Hongbo Peng , Stephen M. Rossnagel , Katherine L. Saenger
发明人： Hongbo Peng , Stephen M. Rossnagel , Katherine L. Saenger
IPC分类号： H01L21/8238
CPC分类号： H01L21/0337 , B81B2201/058 , B81C1/00071 , H01L21/0338
摘要： Methods are provided for fabricating devices. A first layer is formed. A hardmask on the first layer is formed. Features on the hardmask are patterned. The sizes of features on the hardmask are reduced by applying a plasma treatment process to form reduced size features. Also, the size of features on the hardmask can be enlarged to form enlarged size features by applying the plasma treatment process and/or removing the oxidized part of the feature during plasma treatment process. Another method may include a first layer formed on a substrate and a second layer formed on the first layer. First features are patterned on the first layer, and second features are patterned on the second layer. A size of second features on the second layer is closed due to the different oxidation rate of the two layers during the plasma treatment process, to form a self-sealed channel and/or self-buried trench.
摘要翻译：提供了制造器件的方法。形成第一层。形成第一层上的硬掩模。硬掩模上的特征被图案化。通过应用等离子体处理工艺来形成尺寸减小的特征，可减少硬掩模上的特征尺寸。此外，通过在等离子体处理过程中应用等离子体处理工艺和/或去除特征的氧化部分，可以扩大硬掩模上的特征的尺寸以形成扩大的尺寸特征。另一种方法可以包括形成在基底上的第一层和形成在第一层上的第二层。第一特征在第一层上被图案化，并且第二特征被图案化在第二层上。由于在等离子体处理过程中两层的氧化速率不同，所以第二层上的第二特征的尺寸是封闭的，以形成自密封通道和/或自埋式沟槽。

67. 发明申请

US20110312176A1 FORMING AN ELECTRODE HAVING REDUCED CORROSION AND WATER DECOMPOSITION ON SURFACE USING AN ORGANIC PROTECTIVE LAYER 失效
标题翻译：使用有机保护层形成具有降低的腐蚀和表面水分解的电极
公开(公告)号：US20110312176A1
公开(公告)日：2011-12-22
申请号：US12820543
申请日：2010-06-22
申请人： Ali Afzali-Ardakani , Shafaat Ahmed , Hariklia Deligianni , Dario L. Goldfarb , Stefan Harrer , Binquan Luan , Glenn J. Martyna , Hongbo Peng , Stanislav Polonsky , Stephen Rossnagel , Xiaoyan Shao , Gustavo A. Stolovitzky
发明人： Ali Afzali-Ardakani , Shafaat Ahmed , Hariklia Deligianni , Dario L. Goldfarb , Stefan Harrer , Binquan Luan , Glenn J. Martyna , Hongbo Peng , Stanislav Polonsky , Stephen Rossnagel , Xiaoyan Shao , Gustavo A. Stolovitzky
IPC分类号： H01L21/283 , H01L21/441 , C23C28/00 , C30B23/02 , C23C14/34 , B05D3/14 , B05D5/12 , B05D3/06
CPC分类号： B82Y10/00 , H01L21/76834 , H01L29/0665 , H01L51/0093 , H01L51/0504 , H01L51/102
摘要： Accordingly, the present invention provides a method of forming an electrode having reduced corrosion and water decomposition on a surface thereof. A substrate which has a conductive layer disposed thereon is provided and the conductive layer has an oxide layer with an exposed surface. The exposed surface of the oxide layer contacts a solution of an organic surface active compound in an organic solvent to form a protective layer of the organic surface active compound over the oxide layer. The protective layer has a thickness of from about 0.5 nm to about 5 nm and ranges therebetween depending on a chemical structure of the surface active compound.
摘要翻译：因此，本发明提供一种在其表面上形成具有降低的腐蚀和水分解的电极的方法。提供了具有设置在其上的导电层的衬底，并且导电层具有具有暴露表面的氧化物层。氧化物层的暴露表面接触有机表面活性化合物在有机溶剂中的溶液，以在氧化物层上形成有机表面活性化合物的保护层。根据表面活性化合物的化学结构，保护层的厚度为约0.5nm至约5nm，并且其范围。

68. 发明申请

US20100327255A1 NANOFLUDIC FIELD EFFECT TRANSISTOR BASED ON SURFACE CHARGE MODULATED NANOCHANNEL 有权
标题翻译：基于表面电荷调制纳米通道的纳米场效应晶体管
公开(公告)号：US20100327255A1
公开(公告)日：2010-12-30
申请号：US12493811
申请日：2009-06-29
申请人： Hongbo Peng , Stanislav Polonsky , Stephen Rossnagel , Gustavo Alejandro Stolovitzky
发明人： Hongbo Peng , Stanislav Polonsky , Stephen Rossnagel , Gustavo Alejandro Stolovitzky
IPC分类号： H01L51/10 , H01L51/40
CPC分类号： H01L51/0558 , B82Y10/00 , G01N27/4148 , G01N33/48721 , H01L51/0093 , Y10S977/938
摘要： A field effect transistor device includes: a reservoir bifurcated by a membrane of three layers: two electrically insulating layers; and an electrically conductive gate between the two insulating layers. The gate has a surface charge polarity different from at least one of the insulating layers. A nanochannel runs through the membrane, connecting both parts of the reservoir. The device further includes: an ionic solution filling the reservoir and the nanochannel; a drain electrode; a source electrode; and voltages applied to the electrodes (a voltage between the source and drain electrodes and a voltage on the gate) for turning on an ionic current through the ionic channel wherein the voltage on the gate gates the transportation of ions through the ionic channel.
摘要翻译：场效应晶体管器件包括：由三层膜分隔的储存器：两个电绝缘层; 和两个绝缘层之间的导电栅极。栅极具有与至少一个绝缘层不同的表面电荷极性。纳米通道穿过膜，连接储存器的两个部分。该装置还包括：填充储存器和纳米通道的离子溶液; 漏电极; 源电极; 以及施加到电极的电压（源极和漏极之间的电压和栅极上的电压），用于接通通过离子通道的离子电流，其中栅极上的电压控制离子通过离子通道的输送。

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