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    • 61. 发明授权
    • Integrated circuit interconnect shunt layer
    • 集成电路互连分流层
    • US06455938B1
    • 2002-09-24
    • US09905479
    • 2001-07-13
    • Pin-Chin Connie WangAmit P. MaratheChristy Mei-Chu Woo
    • Pin-Chin Connie WangAmit P. MaratheChristy Mei-Chu Woo
    • H01L2945
    • H01L23/5226H01L2924/0002H01L2924/00
    • An integrated circuit and manufacturing method therefor is provided for an integrated circuit on a semiconductor substrate grated circuit having a semiconductor device. A dielectric layer is on the semiconductor substrate and has an opening provided therein. A barrier layer lines the opening, and a first conductor core fills the opening over the barrier layer. A second dielectric layer is formed on the first dielectric layer and has a second channel and via opening provided therein. A shunt layer is in the via opening above the conductor core. A barrier layer lines the second channel and via opening over the shunt layer and the second dielectric layer. A conductor core fills the second channel and via opening over the barrier layer and the first conductor core to form the second channel and via.
    • 提供了一种用于具有半导体器件的半导体衬底格栅电路上的集成电路的集成电路及其制造方法。 电介质层位于半导体衬底上,其中设有开口。 阻挡层对开口进行排列,并且第一导体芯填充阻挡层上的开口。 第二电介质层形成在第一电介质层上并具有设置在其中的第二通道和通孔。 并联层位于导体芯上方的通孔中。 阻挡层将第二通道和通过开口穿过并联层和第二介电层。 导体芯填充第二通道并通过阻挡层和第一导体芯上的开口形成第二通道和通孔。