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51. 发明授权

US5963375A Athermal LCD projection lens 失效
标题翻译：热液晶投影镜头
公开(公告)号：US5963375A
公开(公告)日：1999-10-05
申请号：US788207
申请日：1997-01-24
申请人： Melvyn H. Kreitzer
发明人： Melvyn H. Kreitzer
IPC分类号： G02B9/34 , G02B7/02 , G02B13/16 , G02B13/18 , G02B13/24 , G03B21/00 , H04N5/74
CPC分类号： G02B7/028 , G02B13/16
摘要： A four element, athermalized projection lens for use in forming an enlarged color image of a LCD panel is disclosed. The powers of the elements from the screen to the LCD are negative/positive/negative/positive and the dispersions are low dispersion/low dispersion/high dispersion/low dispersion. The first three elements are composed of plastic and the last element is composed of glass. The projection lens exhibits a high level of aberration correction over magnifications ranging from about 5.times. to about 12.times.. The four element design comprises the minimum number of elements capable of achieving a relatively long back focal length, athermalization, and lateral color correction of less than about half a pixel.
摘要翻译：公开了一种用于形成LCD面板的放大彩色图像的四元素无热投影透镜。从屏幕到LCD的元件的功率为负/正/负/正，分散体为低色散/低色散/高色散/低色散。前三个元素由塑料组成，最后一个元素由玻璃组成。投影透镜在大约5x至大约12x的放大倍数上表现出高水平的像差校正。四元素设计包括能够实现相对较长的后焦距，非热化和少于约一半像素的侧向颜色校正的元件的最小数量。

52. 发明授权

US5856884A Projection lens systems 失效
标题翻译：投影镜头系统
公开(公告)号：US5856884A
公开(公告)日：1999-01-05
申请号：US924303
申请日：1997-09-05
申请人： Romeo I. Mercado
发明人： Romeo I. Mercado
IPC分类号： G02B13/24 , G03F7/20 , G02B9/00
CPC分类号： G03F7/70241 , G02B13/24
摘要： Projection lens systems, which are used to transfer a pattern from a reticle onto a substrate, incorporate projection optical systems that are capable of maintaining the same, or increased performance, as the current projections lens systems, achieve excellent aberration correction, and which have high numerical apertures.
摘要翻译：用于将图案从掩模版传送到基板上的投影透镜系统包括能够保持与当前投影透镜系统相同或增加的性能的投影光学系统，实现优异的像差校正，并且具有高的像差数值孔径。

53. 发明授权

US5831776A Projection optical system and projection exposure apparatus 失效
标题翻译：投影光学系统和投影曝光装置
公开(公告)号：US5831776A
公开(公告)日：1998-11-03
申请号：US944590
申请日：1997-10-06
申请人： Toshihiro Sasaya , Kazuo Ushida , Yutaka Suenaga , Romeo I. Mercado
发明人： Toshihiro Sasaya , Kazuo Ushida , Yutaka Suenaga , Romeo I. Mercado
IPC分类号： G02B13/14 , G02B13/24 , G03F7/20 , H01L21/027 , G02B9/64 , G02B13/22
CPC分类号： G02B13/24 , G03F7/7025
摘要： A projection optical system that projects an image of an object in an object surface onto an image surface with a fixed reduction magnification comprises, in light path order from the object surface: a first group of lenses with positive refractive power; a second group of lenses forming an approximately afocal system; and a third group of lenses with positive refractive power. The projection optical system has a focal length F, the projection optical system has a projection magnification B, the object surface and the image surface are separated by a distance L, and a lens surface in the first group of lenses that is closest to the object surface is separated from the object surface by a distance d.sub.0. A paraxial marginal ray from an axial object point on the object surface enters the second group of lenses G.sub.2 at an entrance height h.sub.1 from an optical axis, and the paraxial marginal ray from the axial object point on the object surface emerges from the second group of lenses G.sub.2 at an emergence height h.sub.2 from the optical axis. The optical system is characterized by the following: 1.8.ltoreq..vertline.F/(B.multidot.L).vertline..ltoreq.6, d.sub.0 /L.ltoreq.0.2, and 4.ltoreq..vertline.h.sub.2 /h.sub.1 .vertline..ltoreq.10.
摘要翻译：以固定的缩小倍率将物体表面上的物体的图像投影到图像表面上的投影光学系统包括从物体表面的光路顺序：具有正折射光焦度的第一组透镜; 第二组透镜，形成大致无焦的系统; 以及具有正屈光力的第三组透镜。投影光学系统具有焦距F，投影光学系统具有投影倍率B，物体表面和图像表面间隔距离L，并且第一组透镜中最靠近物体的透镜表面表面与物体表面分开距离d0。来自物体表面上的轴向物点的近轴边缘射线在距离光轴的入口高度h1处进入第二组透镜G2，并且来自物体表面上的轴向物点的近轴边缘射线从第二组距离光轴出现高度h2的透镜G2。光学系统的特征在于：1.8

54. 发明授权

US5831770A Projection optical system and exposure apparatus provided therewith 失效
标题翻译：投影光学系统和与其一起提供的曝光装置
公开(公告)号：US5831770A
公开(公告)日：1998-11-03
申请号：US826062
申请日：1997-03-24
申请人： Hitoshi Matsuzawa , Yutaka Suenaga
发明人： Hitoshi Matsuzawa , Yutaka Suenaga
IPC分类号： G02B13/24 , G02B13/14 , G02B13/22 , G03F7/20 , H01L21/027 , G02B3/00 , G02B21/02 , G02B9/62 , G03B27/54
CPC分类号： G03F7/70241 , G02B13/14 , G02B13/22
摘要： This invention is directed to a bitelecentric projection optical system very well corrected for various distortions, particularly for distortion (including higher-order distortions) as securing a relatively wide exposure area and a large numerical aperture. The projection optical system according to this invention comprises in order from the object side toward the image side a first lens group having a positive refractive power, a second lens group having a negative refractive power and not including a positive lens, a third lens group having a positive refractive power, a fourth lens group having a negative refractive power, a fifth lens group having a positive refractive power, and a sixth lens group having a positive refractive power. Particularly, the second lens group comprises a front lens disposed nearest to the object, a rear lens disposed nearest to the image, and an intermediate lens group disposed between the front lens and the rear lens and having at least two negative lenses, and the fifth lens group has at least seven positive lenses.
摘要翻译：本发明涉及一种对于各种失真（特别是用于确保相对较宽的曝光区域和大的数值孔径）的失真（包括高阶失真）而非常良好校正的双偏心投影光学系统。根据本发明的投影光学系统从物体侧朝向像侧依次包括具有正折光力的第一透镜组，具有负折光力并且不包括正透镜的第二透镜组，具有正屈光力，具有负屈光力的第四透镜组，具有正屈光力的第五透镜组和具有正屈光力的第六透镜组。特别地，第二透镜组包括最靠近物体设置的前透镜，最靠近图像设置的后透镜以及设置在前透镜和后透镜之间并具有至少两个负透镜的中间透镜组，并且第五透镜组透镜组至少有七个正透镜。

55. 发明授权

US5822128A Projection lenses for display elements and projection systems comprising same 失效
标题翻译：用于显示元件的投影透镜和包括其的投影系统
公开(公告)号：US5822128A
公开(公告)日：1998-10-13
申请号：US821812
申请日：1997-03-21
申请人： Atushi Sekine
发明人： Atushi Sekine
IPC分类号： G02B13/18 , G02B13/02 , G02B13/24 , G02B27/18 , G02B27/28 , G02F1/13 , H04N5/74 , G02B9/34 , G02B9/12
CPC分类号： G02B13/02
摘要： Telecentric retrofocus lenses and projection systems comprising such lenses are disclosed. The lenses are compact and provide a wide field of view (>70.degree.) with effective distortion correction. The lenses comprise, in order from the image side, a first lens group G1, comprising an aspheric lens having a negative focal length, an aperture, and a second lens group having a positive focal length and having a lens that has maximum refractive power among the lenses of the second lens group. Conditions apply to the ratio of the focal lengths of the first and second lens groups and the distance between the aperture and the focal length of the lens within the second lens group having maximum refractive power. The conditions effectively provide compact, wide-field, low-aberration images. Projection systems using these lenses are also disclosed.
摘要翻译：公开了包括这种透镜的远心后焦距透镜和投影系统。镜头紧凑，提供宽视场（> 70°），有效的失真校正。这些透镜从图像侧依次包括第一透镜组G1，其包括具有正焦距的非球面透镜，孔径和具有正焦距的第二透镜组，并且具有具有最大折射能力的透镜。第二透镜组的透镜。条件适用于具有最大折射力的第二透镜组中的第一透镜组和第二透镜组的焦距与光圈与透镜焦距之间的距离的比率。条件有效地提供了紧凑，宽场，低像差图像。还公开了使用这些透镜的投影系统。

56. 发明授权

US5808815A Lens system 失效
标题翻译：镜头系统
公开(公告)号：US5808815A
公开(公告)日：1998-09-15
申请号：US577022
申请日：1995-12-22
申请人： Barbara J. Kouthoofd
发明人： Barbara J. Kouthoofd
IPC分类号： G02B9/34 , G02B13/24
CPC分类号： G02B9/34 , G02B13/24
摘要： A lens system comprises, in order from a first side to a second side four lens elements. They are: a first, positive power lens element having its convex surface oriented towards the first side; a second, negative power lens element; a third, meniscus lens element having its concave surface oriented towards the first side; and a fourth, meniscus lens element having its concave surface oriented towards the second side.
摘要翻译：透镜系统包括从第一侧到第二侧的顺序包括四个透镜元件。它们是：具有朝向第一侧的凸面的第一正功率透镜元件; 第二负功率透镜元件; 第三个弯月透镜元件，其凹面朝向第一侧; 以及第四凹凸透镜元件，其凹面朝向第二侧。

57. 发明授权

US5506729A Copy lens 失效
标题翻译：复制镜头
公开(公告)号：US5506729A
公开(公告)日：1996-04-09
申请号：US314405
申请日：1994-09-27
申请人： Hiromitsu Yamakawa
发明人： Hiromitsu Yamakawa
IPC分类号： G02B9/44 , G02B9/56 , G02B13/24
CPC分类号： G02B9/44 , G02B13/24 , G02B9/56
摘要： A copy lens comprising four lens elements arranged symmetrically with an aperture, namely, in order from the object end to the image end, a first biconvex element and a biconcave element, which are positioned on one side of the aperture, a third biconcave element identical with the second biconcave element and a fourth biconvex element identical with the first biconvex element, which are positioned on another side of the aperture.
摘要翻译：一种复制透镜，包括四个透镜元件，其对称地具有孔，即从物体端到图像端的顺序，位于孔的一侧上的第一双凸面元件和双凹面元件，第三双凸面元件相同其中第二双凹凸元件和与第一双凸元件相同的第四双凸元件位于孔的另一侧。

58. 发明授权

US5493449A Imagery lens system 失效
标题翻译：影像镜头系统
公开(公告)号：US5493449A
公开(公告)日：1996-02-20
申请号：US294739
申请日：1994-08-23
申请人： Hiromitsu Yamakawa
发明人： Hiromitsu Yamakawa
IPC分类号： G02B9/36 , G02B13/24
CPC分类号： G02B13/24 , G02B9/36
摘要： An imagery lens system for image reading consists of first to fourth lens elements which are arranged in this order from the object side. The first and fourth lens elements respectively are double-convex lenses, and the second and third lens elements respectively are double-concave lenses. The following formulae are satisfied.0.35
摘要翻译：用于图像读取的图像透镜系统由从物体侧依次排列的第一至第四透镜元件组成。第一和第四透镜元件分别是双凸透镜，第二和第三透镜元件分别是双凹透镜。满足以下公式。 0.35

59. 发明授权

US5448408A Projection lens system 失效
标题翻译：投影镜头系统
公开(公告)号：US5448408A
公开(公告)日：1995-09-05
申请号：US148351
申请日：1993-11-08
申请人： Takayoshi Togino , Yoshiko Tezuka
发明人： Takayoshi Togino , Yoshiko Tezuka
IPC分类号： G02B9/64 , G02B13/24 , G03F7/20 , G02B3/00
CPC分类号： G03F7/70216 , G02B13/24 , G02B9/64
摘要： This invention relates to a projection lens system used for transferring circuit or other patterns from masks, etc. on which the circuit patterns are drawn onto semiconductor wafers by projection photolithography, and provides a projection lens system which makes high resolving power of the order of a few micrometers and wide exposure coverages compatible with each other.This projection lens system includes at least two sets of lens groups, each built up of lenses having concave surfaces located opposite to each other, and includes at least one lens surface of positive refractive power between said two sets of lens groups, said two sets of lens groups all satisfying the following conditions:1/L
摘要翻译：本发明涉及一种投影透镜系统，该投影透镜系统用于通过投影光刻将电路图案从掩模等传送到半导体晶片上的电路或其他图案，并提供一种投影透镜系统，该投影透镜系统具有高分辨率几微米和宽的曝光量相互兼容。该投影透镜系统包括至少两组透镜组，每组透镜具有彼此相对的凹面的透镜，并且包括在所述两组透镜组之间的至少一个正屈光力透镜表面，所述两组透镜组镜头组满足以下条件：1 / L <| phi 1 <20 / L（1）1 / L <| phi 2 <20 / L（2）其中phi 1和phi 2代表所述相对定位的凹面的相应的负折光力，L是物体和图像之间的距离。

60. 发明授权

US5365371A Projection exposure apparatus 失效
标题翻译：投影曝光装置
公开(公告)号：US5365371A
公开(公告)日：1994-11-15
申请号：US14144
申请日：1993-02-05
申请人： Kazuya Kamon
发明人： Kazuya Kamon
IPC分类号： G02B5/30 , G02B13/24 , G02B27/28 , G03F7/20 , H01L21/027 , H01L21/30
CPC分类号： G03F7/70566 , G02B13/24 , G02B27/283 , G02B5/3025
摘要： A projection exposure apparatus includes a light source, a condenser lens for condensing an illumination light emanating from the light source onto a mask including a circuit pattern, a projection lens for condensing onto a surface of a wafer the illumination light that has passed through the mask, and a polarizer disposed on a surface of a pupil of the projection lens for converting the illumination light converged onto the surface of the wafer into polarized light having radial planes of polarization intersecting the optical axis of the projection lens.
摘要翻译：投影曝光装置包括光源，用于将从光源发出的照明光聚焦到包括电路图案的掩模的聚光透镜，用于在晶片的表面上聚光的投影透镜，通过掩模的照明光以及设置在投影透镜的光瞳表面上的偏振器，用于将会聚在晶片表面上的照明光转换为具有与投影透镜的光轴相交的偏振面的偏振光。

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