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    • 1. 发明授权
    • Projection lens system
    • 投影镜头系统
    • US5448408A
    • 1995-09-05
    • US148351
    • 1993-11-08
    • Takayoshi ToginoYoshiko Tezuka
    • Takayoshi ToginoYoshiko Tezuka
    • G02B9/64G02B13/24G03F7/20G02B3/00
    • G03F7/70216G02B13/24G02B9/64
    • This invention relates to a projection lens system used for transferring circuit or other patterns from masks, etc. on which the circuit patterns are drawn onto semiconductor wafers by projection photolithography, and provides a projection lens system which makes high resolving power of the order of a few micrometers and wide exposure coverages compatible with each other.This projection lens system includes at least two sets of lens groups, each built up of lenses having concave surfaces located opposite to each other, and includes at least one lens surface of positive refractive power between said two sets of lens groups, said two sets of lens groups all satisfying the following conditions:1/L
    • 本发明涉及一种投影透镜系统,该投影透镜系统用于通过投影光刻将电路图案从掩模等传送到半导体晶片上的电路或其他图案,并提供一种投影透镜系统,该投影透镜系统具有高分辨率 几微米和宽的曝光量相互兼容。 该投影透镜系统包括至少两组透镜组,每组透镜具有彼此相对的凹面的透镜,并且包括在所述两组透镜组之间的至少一个正屈光力透镜表面,所述两组透镜组 镜头组满足以下条件:1 / L <| phi 1 <20 / L(1)1 / L <| phi 2 <20 / L(2)其中phi 1和phi 2代表所述相对定位的凹面的相应的负折光力,L是物体和图像之间的距离。
    • 2. 发明授权
    • Projection lens system
    • 投影镜头系统
    • US5260832A
    • 1993-11-09
    • US780339
    • 1991-10-22
    • Takayoshi ToginoYoshiko Tezuka
    • Takayoshi ToginoYoshiko Tezuka
    • G02B9/64G02B13/24G03F7/20G02B9/60G02B9/62
    • G03F7/70216G02B13/24G02B9/64
    • This invention relates to a projection lens system used for transferring circuit or other patterns from masks, etc. on which the circuit patterns are drawn onto semiconductor wafers by projection photolithography, and provides a projection lens system which makes high resolving power of the order of a few micrometers and wide exposure coverages compatible with each other. This projection lens system includes at least two sets of lens groups, each built up of lenses having concave surfaces located opposite to each other, and includes at least one lens surface of positive refractive power between said two sets of lens groups, said two sets of lens groups all satisfying the following conditions:(1) 1/L
    • 本发明涉及一种投影透镜系统,该投影透镜系统用于通过投影光刻将电路图案从掩模等传送到半导体晶片上的电路或其他图案,并提供一种投影透镜系统,该投影透镜系统具有高分辨率 几微米和宽的曝光量相互兼容。 该投影透镜系统包括至少两组透镜组,每组透镜具有彼此相对的凹面的透镜,并且包括在所述两组透镜组之间的至少一个正屈光力透镜表面,所述两组透镜组 透镜组全部满足以下条件:(1)1 / L <| phi 1| <20 / L(2)1 / L <| phi 2| <20 / L其中phi 1和phi 2代表各自的负折射率 所述相对定位的凹面的功率,L是物体与图像之间的距离。
    • 4. 发明授权
    • Optical element, optical system having the same and endoscope using the same
    • 光学元件,具有该光学元件的光学系统和使用其的内窥镜
    • US08254038B2
    • 2012-08-28
    • US12655910
    • 2010-01-07
    • Takayoshi Togino
    • Takayoshi Togino
    • G02B13/06G02B17/00
    • A61B1/00096A61B1/00177A61B1/00181A61B1/041G02B13/06G02B17/0856G02B23/243
    • An optical element is made of a transparent medium that is rotationally symmetric relative to the central axis with a refractive index greater than 1. The transparent medium has a first transmissive surface at the outermost periphery relative to the central axis, a first reflective surface at the side of the central axis relative to the first transmissive surface, a second reflective surface at the side opposite to the image plane relative to the first reflective surface and a second transmissive surface at the side of the image plane relative to the second reflective surface. The flux of light enters and proceeds through the transparent medium via the first transmissive surface, the first reflective surface, the second reflective surface and the second transmissive surface to form an optical path. The optical path is formed only at a side relative to the central axis.
    • 光学元件由折射率大于1的相对于中心轴旋转对称的透明介质制成。透明介质在相对于中心轴的最外周处具有第一透射表面,第一反射表面在 相对于第一透射表面的中心轴线的一侧,相对于第一反射表面与图像平面相对的一侧的第二反射表面和相对于第二反射表面的图像平面侧的第二透射表面。 光的通量经由第一透射表面,第一反射表面,第二反射表面和第二透射表面进入透明透明介质并形成光路。 光路仅在相对于中心轴的一侧形成。
    • 7. 发明申请
    • WIDE-ANGLE OPTICAL SYSTEM
    • 宽角度光学系统
    • US20100014174A1
    • 2010-01-21
    • US12448231
    • 2007-11-15
    • Takayoshi Togino
    • Takayoshi Togino
    • G02B13/04
    • G02B13/06
    • The invention provides a superwide-angle imaging or projecting optical system provided that, albeit being a wide-angle optical system having an angle of view exceeding 180°, is of small size and reduced F-number and fast, and has improved f-θ performance. The optical system consists only of transmitting surfaces, and has an angle of view of 180° or more. The optical system comprises a front group (Gf) comprising at least one meniscus lens (L1) having a negative focal length, an aperture (S), and a rear group (Gb) comprising at least two lenses having a positive focal length. At least one transmitting surface in the front group is made up of an extended rotation free-form surface.
    • 本发明提供了一种超大角度成像或投影光学系统,只要是具有超过180°的视角的广角光学系统,其尺寸小,F值减小,并且具有改善的f-θ 性能。 光学系统仅由透光面构成,其视角为180°以上。 光学系统包括前组(Gf),其包括具有负焦距的至少一个弯月形透镜(L1),孔径(S)和包括至少两个具有正焦距的透镜的后组(Gb)。 前组中的至少一个透射表面由延伸的旋转自由曲面形成。
    • 8. 发明授权
    • Optical system
    • 光学系统
    • US07616389B2
    • 2009-11-10
    • US11652744
    • 2007-01-11
    • Takayoshi Togino
    • Takayoshi Togino
    • G02B13/06
    • G02B13/06G02B17/0852G02B17/0856G02B17/086G02B27/0025G02B27/2242
    • The invention relates to an optical system adapted to take or project high-definition images with well corrected aberrations for the purpose of taking images from a 360° panoramic scene on a cylindrical, conical or other three-dimensional surface or project such a three-dimensional display surface onto a 360° field of view. Images from the 360° panoramic scene are formed on a rotationally symmetric, three-dimensional image surface 3. The optical system comprises at least one rotationally symmetric reflective surface 2, the position of an entrance pupil 4s with respect to a sagittal section is different from the position of an exit pupil 4m with respect to a meridional section.
    • 本发明涉及一种光学系统,其适于采取或投影具有良好校正像差的高清晰度图像,以便从圆柱形,圆锥形或其它三维表面或项目上的360度全景场景拍摄图像,例如三维 显示表面360度视野。 来自360°全景场景的图像形成在旋转对称的三维图像表面3上。光学系统包括至少一个旋转对称的反射表面2,入射光瞳4s相对于矢状部分的位置不同于 离开光瞳相对于子午线部分4m的位置。
    • 10. 发明授权
    • Panoramic attachment optical system, and panoramic optical system
    • 全景附件光学系统和全景光学系统
    • US07403343B2
    • 2008-07-22
    • US11205212
    • 2005-08-17
    • Takayoshi Togino
    • Takayoshi Togino
    • G02B13/06
    • G02B13/06
    • The invention relates to a panoramic attachment optical system and a panoramic optical system for taking an image having a full 360°-direction angle of view or projecting an image at a full 360°-direction angle of view. These optical systems are reduced in size and flare light and improved in resolving power. A panoramic attachment optical system 10 attached to the entrance side of an image-formation lens 20 to form a full 360°-direction image on an image plane 30 comprises a transparent medium that is rotationally symmetric about a center axis 1 and includes at least one internal reflecting surface 12 and at least two refracting surfaces 11 and 13. A light beam incident on the entrance surface 11 in order of travel of light enters the transparent medium via the entrance surface 11, and is reflected at the internal reflecting surface 12 to leave the transparent medium via the exit surface 13, forming an image at a position of the image plane 30 off the center axis 1 via the image-formation lens 20. The internal reflecting surface and the refracting surfaces are each of shape rotationally symmetric about the center axis 1, and a light beam 2 coming from far way forms an image at least one time in a section including the center axis 1, but does not form any image in a plane that is orthogonal to that section and includes a center ray 20 of that light beam.
    • 本发明涉及全景附属光学系统和全景光学系统,用于拍摄具有完整的360°方向视角的图像或以完全360°方向的视角投影图像。 这些光学系统的尺寸减小并且发光,并提高分辨能力。 附着到图像形成透镜20的入口侧以在图像平面30上形成完整的360°方向图像的全景附接光学系统10包括围绕中心轴线1旋转对称的透明介质,并且包括至少一个 内部反射表面12和至少两个折射表面11和13。 入射面11上以入射面11入射的光束经由入射面11进入透明介质,并在内部反射面12反射,经由出射面13离开透明介质,在 图像平面30经由图像形成透镜20离开中心轴线1的位置。 内反射面和折射面各自的形状围绕中心轴线1旋转对称,并且来自远方的光束2至少在包括中心轴线1的部分中形成图像,但不形成任何 在与该部分正交的平面中的图像,并且包括该光束的中心光线2 <0>。