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    • 51. 发明授权
    • Stamper
    • 压模
    • US5458985A
    • 1995-10-17
    • US291190
    • 1994-08-16
    • Hitoshi IsonoHirotoshi Takemori
    • Hitoshi IsonoHirotoshi Takemori
    • C23C14/00C23C14/18G11B7/26B32B3/18B32B7/00
    • C23C14/0005C23C14/18G11B7/26Y10S425/03Y10S428/934Y10T428/12396Y10T428/12535Y10T428/12597Y10T428/12819Y10T428/12854Y10T428/12944Y10T428/12986
    • A method of manufacturing a stamper includes the steps of coating a flat surface of a substrate with photosensitive material; directing light to a specified position on the photosensitive material to expose it; developing the photosensitive material to make a minute photoresist pattern; etching the substrate to a specified depth with a mask of the photoresist pattern; removing the photoresist as the mask to make a glass master; arbitrarily forming a first nickel layer on a surface of the glass master; forming an intermediate layer of a metal having a smaller linear expansion coefficient than nickel over the first nickel layer; forming a second nickel layer on the intermediate layer to form a conductive film having a two- or three-stratum structure; arbitrarily subjecting the whole substrate to a process to make nickel passive; forming an electroformed layer on the conductive film by an electroforming process; and separating the conductive film from the glass master.
    • 制造压模的方法包括以下步骤:用感光材料涂覆基板的平坦表面; 将光引导到感光材料上的指定位置以使其暴露; 显影感光材料制成微小的光刻胶图形; 用光致抗蚀剂图案的掩模将衬底蚀刻到指定的深度; 去除作为掩模的光致抗蚀剂以制成玻璃母板; 任意地在玻璃母板的表面上形成第一镍层; 在所述第一镍层上形成具有比镍更小的线膨胀系数的金属的中间层; 在所述中间层上形成第二镍层以形成具有二层或三层结构的导电膜; 对整个基板进行任意处理,使镍被动; 通过电铸工艺在导电膜上形成电铸层; 并将导电膜与玻璃母板分离。
    • 53. 发明授权
    • Glass-to-metal seal
    • 玻璃 - 金属密封
    • US5227250A
    • 1993-07-13
    • US763237
    • 1991-09-20
    • Thomas A. BobalJeffrey M. ArouhSheldon S. Bitko
    • Thomas A. BobalJeffrey M. ArouhSheldon S. Bitko
    • C03C27/02H01L23/10
    • H01L23/10C03C27/02H01L2924/0002H01L2924/01079Y10T428/12597Y10T428/12625Y10T428/12875
    • A glass-to-metal seal including a metal member such as Pd or a Pd-Ru alloy and a glass member wherein the glass member is in contact with the metal member and forms a glass-to-metal seal therewith. The seal can include an outer body surrounding the glass member and forming a seal therewith. The outer body has a coefficient of thermal expansion greater than that of the glass member and the seals between the outer body, the glass member and metal member are compression seals. The glass-to-metal seal is made by directly glassing onto the metal member in a furnace having an atmosphere which prevents outgassing of hydrogen from the metal member into the interface between the glass member and metal member. After the glass-to-metal seal forming step, the outer body can be metallurgically bonded to another component without chemically cleaning the outer body and the metal member can be metallurgically bonded to another member such as a gold wire without plating the metal member prior to the bonding step.
    • 包括诸如Pd或Pd-Ru合金的金属构件的玻璃 - 金属密封件和玻璃构件,其中玻璃构件与金属构件接触并与其形成玻璃 - 金属密封。 密封件可以包括围绕玻璃构件并与其形成密封的外部主体。 外体的热膨胀系数大于玻璃构件的热膨胀系数,外体,玻璃构件和金属构件之间的密封是压缩密封。 玻璃 - 金属密封件通过在具有防止氢从金属部件逸出到玻璃构件和金属构件之间的界面的气氛的炉子中直接玻璃化到金属构件上而制成。 在玻璃 - 金属密封形成步骤之后,外部体可以冶金地结合到另一个部件上,而不用化学地清洁外部本体,并且金属部件可以冶金地结合到诸如金线的其它部件上,而不会在金属部件之前镀覆金属部件 接合步骤。