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    • 51. 发明授权
    • Inspection apparatus and method using a particle beam
    • 使用粒子束的检查装置和方法
    • US6140644A
    • 2000-10-31
    • US116345
    • 1998-07-16
    • Yoshimi KawanamiAkio YoneyamaTadashi Otaka
    • Yoshimi KawanamiAkio YoneyamaTadashi Otaka
    • G01Q40/02G01B15/00G01B15/08G01N23/00H01J37/21H01J37/22H01J3/26
    • G01N23/00
    • The inspection apparatus uses a particle beam and has a high throughput by obtaining a characteristic frequency corresponding to the characteristic quantity of focusing-shift from a Fourier spectrum of a sample image using a focusing-shift evaluator. A beam blur profile is produced corresponding to the characteristic frequency in a beam blur profile generator. A component of the beam-blur profile is removed from the sample image stored in one dimensional image memory using a de-convolution operator. A dimensional measurement is performed in a critical dimension evaluator for an obtained sample image. Since time spent for focus adjustment using particle beam scanning is obviated, it is possible to reduce the inspection time for a dimension and an appearance abnormality of a semiconductor element.
    • 检查装置使用粒子束并且通过使用聚焦移位评估器从样本图像的傅立叶频谱获得与聚焦移位的特征量相对应的特征频率而具有高吞吐量。 对应于光束模糊分布生成器中的特征频率产生光束模糊轮廓。 使用去卷积运算符从存储在一维图像存储器中的样本图像中去除光束模糊轮廓的分量。 对于获得的样本图像,在关键维度评估器中执行尺寸测量。 由于消除了使用粒子束扫描进行焦点调整的时间,因此可以减少半导体元件的尺寸和外观异常的检查时间。
    • 52. 发明授权
    • Strength-related testing of concrete using microwave signals
    • 使用微波信号进行强度相关试验
    • US5939889A
    • 1999-08-17
    • US58453
    • 1993-05-07
    • Reza ZoughiPaul S. Nowak
    • Reza ZoughiPaul S. Nowak
    • G01N23/00G01N33/28G01R27/04
    • G01N23/00G01N33/28
    • An apparatus is disclosed for testing concrete having an unknown water/cement ratio and an unknown compressive strength. The apparatus includes a transmitter assembly for transmitting microwave signals at one or more predetermined frequencies. A receiver assembly receives each microwave signal reflected from the concrete under test. The reflected microwave signals, together with the transmitted microwave signals, are used to determine a reflection coefficient magnitude for the particular microwave frequency. A processing unit uses the reflection coefficient magnitude to determine a value related to concrete strength. In one embodiment, the processing unit relies on a logarithmic function that correlates the reflection coefficient magnitude and a water/cement ratio. A value related to the compressive strength of the concrete can also be obtained using the value of the water/cement ratio or the value of the reflection coefficient magnitude.
    • 公开了一种用于测试具有未知水/水泥比和未知抗压强度的混凝土的装置。 该装置包括用于以一个或多个预定频率发送微波信号的发射器组件。 接收器组件接收从被测混凝土反射的每个微波信号。 反射的微波信号与传输的微波信号一起用于确定特定微波频率的反射系数幅度。 处理单元使用反射系数大小来确定与混凝土强度相关的值。 在一个实施例中,处理单元依赖于将反射系数大小和水/水泥比相关联的对数函数。 也可以使用水/水泥比值或反射系数大小的值来获得与混凝土抗压强度有关的值。