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51. 发明申请

US20110002359A1 SENSOR AND METHOD FOR PRODUCING THE SAME 有权
标题翻译：传感器及其制造方法
公开(公告)号：US20110002359A1
公开(公告)日：2011-01-06
申请号：US12302677
申请日：2007-04-23
申请人： Hubert Benzel , Simon Armbruster , Arnim Hoechst , Christoph Schelling , Ando Feyh
发明人： Hubert Benzel , Simon Armbruster , Arnim Hoechst , Christoph Schelling , Ando Feyh
IPC分类号： G01K7/01 , C25D5/00
CPC分类号： B81B3/0081 , B81B2201/0278 , B81B2203/0109 , B81B2207/015 , B81C2201/0109 , G01J5/06 , G01J5/20
摘要： A sensor, in particular for the spatially resolved detection, includes a substrate, at least one micropatterned sensor element having an electric characteristic whose value varies as a function of the temperature, and at least one diaphragm above a cavity, the sensor element being disposed on the underside of the at least one diaphragm, and the sensor element being contacted via connecting lines, which extend within, on top of or underneath the diaphragm. In particular, a plurality of sensor elements may be formed as diode pixels within a monocrystalline layer formed by epitaxy. Suspension springs, which accommodate the individual sensor elements in elastic and insulating fashion, may be formed within the diaphragm.
摘要翻译：特别是用于空间分辨检测的传感器包括基板，至少一个微图案化的传感器元件，其具有值随温度变化的电特性，以及在空腔上方的至少一个隔膜，传感器元件设置在所述至少一个隔膜的下侧，并且所述传感器元件经由连接线接触，所述连接线在隔膜的顶部或下方延伸。特别地，多个传感器元件可以形成为通过外延形成的单晶层内的二极管像素。可以在隔膜内形成以弹性和绝缘方式容纳各个传感器元件的悬挂弹簧。

52. 发明申请

US20100296145A1 OPTICAL SCANNER 有权
标题翻译：光学扫描仪
公开(公告)号：US20100296145A1
公开(公告)日：2010-11-25
申请号：US12851093
申请日：2010-08-05
申请人： Hitoshi TAKEDA
发明人： Hitoshi TAKEDA
IPC分类号： G02B26/08
CPC分类号： G02B26/105 , B81B3/0059 , B81B2201/042 , B81B2203/0109
摘要： A pair of substrate portions each being tabular-shaped has side portions located closer to a mirror portion and connected, at both ends thereof in the oscillation axis direction, by a pair of supporting beam portions, and also has outer side portions fixed to a fixing member. An excitation device is formed on at least one substrate portion. The pair of substrate portions is disposed symmetrically in the direction perpendicular to the oscillation axis. A pair of torsion beam portions extends outward from two opposite sides of the mirror portion on the oscillation axis, and each is connected to the center of each supporting beam portion in a longitudinal direction. An edge of the piezoelectric element on an outer side thereof in the direction perpendicular to the oscillation axis is spaced from an outer side portion of the at least one substrate portion in a direction closer to the mirror portion.
摘要翻译：一对平板状的基板部分具有更靠近镜面部分的侧部，并且在振动轴方向的两端通过一对支撑梁部分连接，并且还具有固定到固定件会员。在至少一个基板部分上形成激励装置。一对基板部分在垂直于振荡轴线的方向上对称设置。一对扭转梁部从振动轴上的反射镜部分的两个相对侧向外延伸，并且每个在纵向方向上连接到每个支撑梁部分的中心。压电元件在与振荡轴线垂直的方向上的外侧的边缘与至少一个基板部分的外侧部分沿更靠近镜部分的方向间隔开。

53. 发明申请

US20100285271A1 CARBON NANOTUBE ASSEMBLY 审中-公开
标题翻译：碳纳米管总成
公开(公告)号：US20100285271A1
公开(公告)日：2010-11-11
申请号：US12239281
申请日：2008-09-26
申请人： Robert C. Davis , Richard R. Vanfleet , David N. Hutchison
发明人： Robert C. Davis , Richard R. Vanfleet , David N. Hutchison
IPC分类号： B32B3/10 , B05D1/36 , B05D1/32 , B29C39/00
CPC分类号： H01J5/18 , B81B2201/018 , B81B2203/0109 , B81C1/00031 , B82Y30/00 , B82Y40/00 , C01B32/16 , C01B32/168 , C01B2202/20 , C01B2202/34 , C01B2202/36 , Y10T428/24273
摘要： A carbon nanotube assembly comprises a plurality of carbon nanotubes arranged into a patterned frame and extending from a base of the patterned frame to a face of the patterned frame, the patterned frame having a height of at least about 10 μm or greater. At least one passage extends through or is defined in the patterned frame, the at least one passage extending from the base of the patterned frame to the face of the patterned frame. An interstitial material at least partially fills interstices between at least some of the carbon nanotubes.
摘要翻译：碳纳米管组件包括布置成图案化框架并从图案化框架的基底延伸到图案化框架的表面的多个碳纳米管，所述图案化框架具有至少约10μm或更大的高度。至少一个通道在图案化框架中延伸通过或限定在其中，该至少一个通道从图案化框架的底部延伸到图案化框架的表面。间隙材料至少部分填充至少一些碳纳米管之间的间隙。

54. 发明授权

US07817318B2 Oscillating system and optical deflector 有权
标题翻译：振荡系统和光学偏转器
公开(公告)号：US07817318B2
公开(公告)日：2010-10-19
申请号：US11608343
申请日：2006-12-08
申请人： Kazutoshi Torashima , Yasuhiro Shimada
发明人： Kazutoshi Torashima , Yasuhiro Shimada
IPC分类号： G02B26/08
CPC分类号： G03G15/04 , B81B3/0078 , B81B2201/042 , B81B2203/0109 , B81B2203/0118 , G02B26/085 , G03G15/0435
摘要： Disclosed is an oscillating system arranged so that a gravity center of a movable member and a torsional axis of a resilient support are easily registered with each other to prevent deformation of the movable member due to its dead weight or deviation of deformation from symmetrical deformation, wherein the oscillating system includes a substrate 301, a movable member 302 with hard magnetic members 310 and 311, resilient supports 304 and 305 for supporting the movable member for torsional vibration about a torsional axis 312 with respect to the substrate, and a magnetic field producing device for driving the movable member relative to the substrate, wherein the movable member 302 has recesses 306 and 307, and wherein the hard magnetic members are fixed while their end portions are aligned with end faces 308 and 309 corresponding to the recesses.
摘要翻译：公开了一种摆动系统，其布置成使得活动构件的重心和弹性支撑件的扭转轴彼此容易地对准，以防止可变构件由于其自重或对称变形的偏差而变形，其中振荡系统包括基板301，具有硬磁性构件310和311的可移动构件302，用于支撑可动构件以相对于基板绕扭转轴312扭转振动的弹性支撑件304和305以及磁场产生装置用于相对于基板驱动可移动部件，其中可移动部件302具有凹部306和307，并且其中硬磁部件的端部与对应于凹部的端面308和309对准而固定。

55. 发明申请

US20100143848A1 PATTERNING METHODS FOR STRETCHABLE STRUCTURES 有权
标题翻译：适应性强的结构方法
公开(公告)号：US20100143848A1
公开(公告)日：2010-06-10
申请号：US12331131
申请日：2008-12-09
申请人： Kanti Jain , Kevin Lin
发明人： Kanti Jain , Kevin Lin
IPC分类号： G03F7/20
CPC分类号： H05K1/0283 , B23K26/40 , B23K2103/172 , B81B2201/0292 , B81B2203/0109 , B81B2207/07 , B81C1/0019 , H05K3/0032 , H05K3/007 , H05K2201/09109 , H05K2203/0554 , H05K2203/308
摘要： Described herein are processing techniques for fabrication of stretchable and/or flexible electronic devices using laser ablation patterning methods. The laser ablation patterning methods utilized herein allow for efficient manufacture of large area (e.g., up to 1 mm2 or greater or 1 m2 or greater) stretchable and/or flexible electronic devices, for example manufacturing methods permitting a reduced number of steps. The techniques described herein further provide for improved heterogeneous integration of components within an electronic device, for example components having improved alignment and/or relative positioning within an electronic device. Also described herein are flexible and/or stretchable electronic devices, such as interconnects, sensors and actuators.
摘要翻译：这里描述了使用激光烧蚀图案化方法制造可拉伸和/或柔性电子器件的处理技术。本文使用的激光烧蚀图案化方法允许有效地制造大面积（例如，高达1mm 2或更大或1m 2或更大）的可拉伸和/或柔性电子器件，例如允许减少步数的制造方法。本文描述的技术进一步提供了改进的电子设备内的组件的异构集成，例如具有电子设备内的改进的对准和/或相对定位的组件。本文还描述了柔性和/或可拉伸的电子设备，例如互连，传感器和致动器。

56. 发明申请

US20100038733A1 MICROELECTROMICHANICAL SYSTEM PACKAGE WITH STRAIN RELIEF BRIDGE 有权
标题翻译：具有应变消除桥的微电子自动化系统封装
公开(公告)号：US20100038733A1
公开(公告)日：2010-02-18
申请号：US12191857
申请日：2008-08-14
申请人： Anthony Minervini
发明人： Anthony Minervini
IPC分类号： H01L23/12 , H01L23/48 , H01L21/02
CPC分类号： B81B7/0048 , B81B2201/0257 , B81B2201/0264 , B81B2203/0109 , H01L2924/0002 , H04R1/04 , H04R2201/003 , H01L2924/00
摘要： A strain absorption bridge for use in a MEMS package includes a first substrate that is configured to be attachable to a circuit board. A first elastically deformable element is coupled to the first substrate and the first elastically deformable element is configured to be attachable to a MEMS device. Alternatively, the MEMS device may be attached to the first substrate. The elastically deformable element at least partially absorbs and dissipates mechanical strain communicated from the circuit board before the mechanical strain can reach the MEMS device.
摘要翻译：用于MEMS封装的应变吸收桥包括被配置为可附接到电路板的第一衬底。第一可弹性变形的元件被耦合到第一基板，并且第一可弹性变形元件构造成可附接到MEMS装置。或者，MEMS器件可以附接到第一衬底。可弹性变形的元件至少部分地吸收并消散在机械应变到达MEMS装置之前从电路板传递的机械应变。

57. 发明授权

US07656256B2 Three-dimensional microstructures having an embedded support member with an aperture therein and method of formation thereof 有权
标题翻译：三维微结构具有嵌入的支撑构件和孔的形成方法
公开(公告)号：US07656256B2
公开(公告)日：2010-02-02
申请号：US12005936
申请日：2007-12-28
申请人： William D. Houck , David W. Sherrer
发明人： William D. Houck , David W. Sherrer
IPC分类号： H01P3/06
CPC分类号： H01P3/06 , B81B3/0059 , B81B2203/0109 , B81B2203/0307 , H01P11/005 , Y10T29/49123 , Y10T428/12361 , Y10T428/12389 , Y10T428/24331 , Y10T428/24545
摘要： Provided are three-dimensional microstructures and their methods of formation. The microstructures are formed by a sequential build process and include microstructural elements which are affixed to one another. The microstructures find use, for example, in coaxial transmission lines for electromagnetic energy.
摘要翻译：提供三维微结构及其形成方法。微结构通过顺序构建工艺形成，并且包括彼此贴合的微结构元件。微结构可用于例如用于电磁能的同轴传输线。

58. 发明申请

US20100005886A1 SENSOR AND ITS FABRICATION PROCESS 有权
标题翻译：传感器及其制造工艺
公开(公告)号：US20100005886A1
公开(公告)日：2010-01-14
申请号：US12495012
申请日：2009-06-30
申请人： Kazuhiko Aida , Katsumi Hashimoto , Toshiaki Mori
发明人： Kazuhiko Aida , Katsumi Hashimoto , Toshiaki Mori
IPC分类号： G01P15/09 , H04R17/00
CPC分类号： B81B3/0081 , B81B2201/0235 , B81B2203/0109 , B81B2207/07 , G01P15/0802 , G01P15/123 , G01P15/18 , G01P2015/084 , Y10T29/42
摘要： The invention provides a sensor comprising a frame, a plurality of beams extending inwardly from said frame, a weight portion supported by the beams, a piezoelectric-resistor formed on each beam and an insulating layer that covers the piezoelectric-resistor. The piezoelectric-resistor has at least one bend, and a metal wiring is located on the insulting layer positioned at the bend. The metal wiring is connected to the bend via at least two contact holes formed in the insulating layer. Contact holes are formed in the insulating layer positioned at both ends of the piezoelectric-resistor, and a bridge circuit wiring is connected to the piezoelectric-resistor via the contact holes.
摘要翻译：本发明提供了一种传感器，包括框架，从所述框架向内延伸的多个梁，由梁支撑的重物部分，形成在每个梁上的压电电阻器和覆盖压电电阻器的绝缘层。压电电阻器具有至少一个弯曲部，金属布线位于位于弯曲处的绝缘层上。金属布线通过形成在绝缘层中的至少两个接触孔连接到弯曲部。在位于压电电阻器两端的绝缘层中形成接触孔，桥接电路布线经由接触孔与压电电阻连接。

59. 发明申请

US20090293617A1 SEMICONDUCTOR DEVICE WITH REDUCED SENSITIVITY TO PACKAGE STRESS 有权
标题翻译：具有降低对包装应力敏感性的半导体器件
公开(公告)号：US20090293617A1
公开(公告)日：2009-12-03
申请号：US12130702
申请日：2008-05-30
申请人： Andrew C. McNeil , Aaron A. Geisberger , Daniel N. Koury, JR. , Gary G. Li
发明人： Andrew C. McNeil , Aaron A. Geisberger , Daniel N. Koury, JR. , Gary G. Li
IPC分类号： G01P15/125
CPC分类号： B81B3/0072 , B81B2201/0235 , B81B2203/0109 , B81B2203/0136 , G01P1/006 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/0814 , G01P2015/082
摘要： A microelectromechanical systems (MEMS) sensor (52) includes a substrate (62) a movable element (58) spaced apart from the substrate (62), suspension anchors (66, 68, 70, 72) formed on the substrate (62), and compliant members (74) interconnecting the movable element (58) with the suspension anchors. The MEMS sensor (52) further includes fixed fingers (76) and fixed finger anchors (78) attaching the fixed fingers (76) to the substrate (62). The movable element (58) includes openings (64). At least one of the suspension anchors resides in at least one of the multiple openings (64) and pairs (94) of the fixed fingers (76) reside in other multiple openings (64). The MEMS sensor (52) is symmetrically formed, and a location of the fixed finger anchors (78) defines an anchor region (103) within which the suspension anchors (66, 68, 70, 72) are positioned.
摘要翻译：微机电系统（MEMS）传感器（52）包括基板（62），与基板（62）间隔开的可移动元件（58），形成在基板（62）上的悬挂锚固件（66,68,70,72）以及将可移动元件（58）与悬挂锚固件互连的柔性构件（74）。 MEMS传感器（52）还包括将固定指状物（76）附接到基底（62）的固定指状物（76）和固定指状锚（78）。可移动元件（58）包括开口（64）。悬挂锚中的至少一个驻留在多个开口（64）中的至少一个中，固定指状物（76）的对（94）位于其它多个开口（64）中。 MEMS传感器（52）对称地形成，并且固定指状物锚定件（78）的位置限定了锚定区域（103），悬挂锚固件（66,68,70,72）定位在锚定区域内。

60. 发明申请

US20090250853A1 TORSION RESILIENT ELEMENT FOR HANGING MICROMECHANICAL ELEMENTS WHICH CAN BE DEFLECTED 审中-公开
标题翻译：用于悬挂可扭曲的微小元器件的扭力弹性元件
公开(公告)号：US20090250853A1
公开(公告)日：2009-10-08
申请号：US12297878
申请日：2006-04-24
申请人： Alexander Wolter , Christian Drabe , Thomas Klose
发明人： Alexander Wolter , Christian Drabe , Thomas Klose
IPC分类号： B81B3/00
CPC分类号： B81B3/0078 , B81B2201/042 , B81B2203/0109
摘要： The invention relates to torsion spring elements for the suspension of deflectable micromechanical elements such as reflecting elements pivotable around a rotational axis. It is therefore the object of the invention to provide torsion spring elements for suspensions of deflectable micromechanical elements which can achieve improved properties in operation with respect to known spring elements. Torsion spring elements in accordance with the invention are made so that they have a changing geometrical design in the direction of their longitudinal axis and thereby have non-linear spring characteristics. The longitudinal axis is in this respect aligned between a clamping or support and the deflectable micromechanical element which is held by at least one torsion spring element. In this respect, a torsion spring element in accordance with the invention can have a straight-line region, which is aligned in the direction of the longitudinal axis, and a fork/branching at at least one end face into which the straight-line region merges.
摘要翻译：本发明涉及用于悬挂可偏转微机械元件的扭转弹簧元件，例如围绕旋转轴线可枢转的反射元件。因此，本发明的目的是提供用于可偏转微机械元件的悬架的扭转弹簧元件，其可以相对于已知弹簧元件实现改进的操作性能。根据本发明的扭转弹簧元件被制成使得它们在它们的纵向轴线的方向上具有变化的几何设计，从而具有非线性弹簧特性。在该方面，纵向轴线在夹持件或支撑件与由至少一个扭转弹簧元件保持的可偏转微机械元件之间对齐。在这方面，根据本发明的扭转弹簧元件可以具有在纵向轴线方向上对齐的直线区域和在至少一个端面处的叉/分支，直线区域合并

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