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    • 51. 发明授权
    • Manufacturing work station
    • 制造工作站
    • US4299518A
    • 1981-11-10
    • US126226
    • 1980-03-03
    • Paul L. Whelan
    • Paul L. Whelan
    • B65G51/03H01L21/677B65G51/02
    • H01L21/6779B65G51/03
    • Disclosed for use in a line for manufacturing an article is a manufacturing work station which operates at subatmospheric conditions. The work station comprises a housing which includes a base plate having a recess at least as large as the article to be manufactured. The recess has a plurality of grooves formed in it. A spacer plate overlies the recess and has an aperture over each of the grooves in the base. A track insert plate generally of the same configuration as the spacer plate overlies said spacer plate and has a plurality of grooves therein which overlie each of said spacer apertures. A plurality of slanted holes are formed through the track insert plate and connect to the grooves in the track insert plate whereby when gas is applied through selected base plate grooves, the gas is transmitted through the slanted holes to move the article in the work station.
    • 用于制造制品的生产线的公开是在低于大气压条件下工作的制造工作站。 工作站包括壳体,该壳体包括具有至少与要制造的制品一样大的凹部的基板。 凹部中形成有多个凹槽。 间隔板位于凹部之上,并且在基部中的每个凹槽上具有孔。 通常具有与间隔板相同构造的轨道插入板覆盖在所述间隔板上并且在其中具有覆盖每个所述间隔孔的多个凹槽。 通过轨道插入板形成多个倾斜孔并连接到轨道插入板中的槽,由此当通过选定的基板槽施加气体时,气体通过倾斜孔传递,以使工件移动。
    • 52. 发明授权
    • Live storage system
    • 现场存储系统
    • US4191499A
    • 1980-03-04
    • US926621
    • 1978-07-25
    • Rudolph E. Futer
    • Rudolph E. Futer
    • B65G47/51B65G51/03B65G51/02
    • B65G47/5109B65G51/03B65G2207/06
    • A live storage system for packages is provided in which a rack has a plurality of storage rows, each row having a slot along its base. An input lane for the packages extends along one side of the storage rack and an output lane for the packages extends along another side of the storage rack. A traveler mounted beneath the storage rack moves to positions beneath each of the rows. The traveler has an air plenum with a plurality of air jets extending through the upper surface of the plenum. The traveler has a diverter at each end to divert packages from the input lane to a storage row, and to divert packages from a storage row to the output lane. An air supply pressurizes the plenum of the traveler and the pressurized air flows through the jets in the upper surface of the traveler and through the slot in the base of each of the storage rows to create an air film along which the packages are conveyed onto and off of each storage row. An accumulating conveyor gathers slugs of packages for the storage system.
    • 提供了一种用于包装的活存储系统,其中,机架具有多个存储行,每行具有沿其底部的槽。 用于包装的输入通道沿着存储架的一侧延伸,并且用于包装的输出通道沿着存储架的另一侧延伸。 安装在存储架下方的旅行者移动到每行下方的位置。 旅行者具有一个空气增压室,多个空气喷流通过气室的上表面延伸。 旅行者在每端具有分流器,以将包装从输入通道转移到存储行,并将包装从存储行转移到输出通道。 空气供应器加压旅行者的集气室,加压空气流过旅行者的上表面中的喷口并且通过每个存储行的基部中的狭槽,以形成空气膜,沿着该空气膜将包装物传送到其上, 关闭每个存储行。 堆积式输送机收集用于储存系统的包装件。
    • 53. 发明授权
    • Vacuum braking system for semiconductor wafers
    • 半导体晶圆真空制动系统
    • US3976329A
    • 1976-08-24
    • US504644
    • 1974-09-09
    • Anthony L. AdamsTroy D. Moore
    • Anthony L. AdamsTroy D. Moore
    • B65G51/03H01L21/677B65G51/02B65G53/58
    • H01L21/67784B65G51/03
    • An improved braking system comprising inlets imbedded flush with an air track surface with the elongated portions thereof parallel to the direction of wafer travel. The inlets are connected to a controlled vacuum source preferably by means of pressure regulating passageways communicating with both ends of each inlet. When vacuum is applied to the inlets, a traveling wafer passing over and substantially covering the elongated inlets is pulled uniformly and evenly down by vacuum action, so that substantially the entire bottom surface of the wafer contacts the track simultaneously. Thus, the wafer comes to rest at a single position within the braking station, irrespective of the original direction of wafer travel.
    • 一种改进的制动系统,包括与空气轨道表面齐平地嵌入的入口,其细长部分平行于晶片行进方向。 入口优选地通过与每个入口的两端连通的压力调节通道连接到受控的真空源。 当对入口施加真空时,通过真空作用均匀且均匀地拉动穿过并基本上覆盖细长入口的行进晶片,使得晶片的整个底表面基本上与轨道同时接触。 因此,与晶片移动的原始方向无关,晶片在制动站内的单个位置处停止。
    • 54. 发明授权
    • Fluid bearing apparatus and method utilizing selective turntable
diverter structure
    • 流体轴承装置和方法利用选择性转盘分流器结构
    • US3948564A
    • 1976-04-06
    • US578550
    • 1975-05-19
    • Alan G. Flint
    • Alan G. Flint
    • B65G51/03H01L21/677B65G51/00
    • H01L21/67784B65G51/03
    • Apparatus and method for handling articles, such as silicon and like wafers used in producing electronic devices. Articles are transferred between two predetermined stations on a fluid bearing track structure and may be selectively diverted in sequence into a storage magazine which defines a buffer station so that articles to be handled or treated in adjacent associated apparatus may be maintained in readily available supply to satisfy the needs of the associated apparatus. When such needs may be satisfied by direct transfer of articles into the associated apparatus the storage buffer zone is bypassed. A selectively actuated fluid bearing turntable directs articles into or from the storage magazine as operating conditions require. All handling of articles is automatically effected on fluid bearings and requires no direct manual participation.
    • 用于处理物品的设备和方法,例如用于生产电子设备的硅等晶片。 物品在流体轴承轨道结构上的两个预定站之间转移,并且可以被顺序地转移到限定缓冲站的存储仓库中,使得在相邻的相关设备中待处理或处理的物品可以被保持在容易获得的供应中以满足 相关设备的需要。 当通过将物品直接转移到相关联的装置中可以满足这种需要时,旁路存储缓冲区。 选择性致动的流体轴承转盘根据操作条件要求将物品引入或从储存仓中引导。 对流体轴承自动进行所有物品处理,不需要直接手动参与。
    • 55. 发明授权
    • Supplying objects from an air-film conveyor rapidly and intermittently to a machine
    • 将空气薄膜输送机的物体快速,间歇地送到机器上
    • US3890011A
    • 1975-06-17
    • US27054872
    • 1972-07-10
    • FUTER RUDOLPH E
    • FUTER RUDOLPH E
    • B65G51/03B65G51/00
    • B65G51/03
    • Objects, such as packages or containers, are supplied rapidly and intermittently to a machine, such as a case packer or a rotary device, which may include a feed belt, from an air-film conveyor which advances the objects by gas jets and includes a supply zone and, adjacently to the machine, a feed zone which is arranged to assist the acceleration of the objects to a greater extent than the supply zone. The acceleration assistance may be by a downward inclination of the feed zone (whereby gravity assists in the acceleration), by giving a steady or an intermittent greater kinetic impulse to the objects by gas jets in the feed zone, by providing auxiliary gas jets in the feed zone which may be activated only when the new advance of the objects is to occur, or by mechanical means which engage one or more of the objects, or by a combination of these expedients. The admission of objects to the machine is periodically blocked, as by gate means which may be provided or may be a part of the machine, or by non-moving objects ahead of the leading object on the feed zone.
    • 诸如包装或容器之类的物品能够快速地和间歇地提供给一个机器,例如包装机或旋转装置,该机器可以包括一个进料带,该气流输送机由气体喷射器推进物体,并包括一个 供给区域和与机器相邻的进料区,该进料区被布置成在比供应区域更大程度上帮助对象的加速。 通过在进料区中通过气体射流给物体提供稳定或间歇的较大的动力学冲击,通过在该进料区中提供辅助气体喷射,加速辅助可以是进料区的向下倾斜(由此重力辅助加速) 进料区,只有当物体的新进展发生时,或者通过接合一个或多个物体的机械装置,或者通过这些方法的组合才能被激活。 物体进入机器的入口被定期地封闭,如可以设置或可以是机器的一部分的门装置,或者通过在进料区上的引导物体之前的非移动物体。
    • 56. 发明授权
    • Method of producing fluid bearing track structure
    • 生产流体轴承轨道结构的方法
    • US3785027A
    • 1974-01-15
    • US3785027D
    • 1972-08-14
    • IND MODULAR SYST CORP
    • LASCH C
    • B65G51/03B21D53/00
    • B65G51/03Y10T29/49428
    • An improved fluid bearing track structure for supporting and transporting articles on a fluid bearing, components of such track structure, and a method for fabricating such track structure. The track structure includes as a novel component thereof a flexible insert strip having directional fluid passages therein for directing a supporting fluid against an article to be transported over the upper surface of the track structure. The insert strip is frictionally or otherwise held in place in the track structure with its upper edge flush with the upper surface of the track structure so that support fluid emanating from the fluid passages therein may support and move successive articles along the track. The flexible characteristics of the insert strip permit the track structure to be formed with curved or other non-straight configurations. The track also has bi-directional article movement capability. In its preferred embodiment the insert strip is produced by a chemical etching procedure which allows elongated lengths of insert strips to be inexpensively and accurately produced from various materials.
    • 用于在流体轴承上支撑和运输物品的改进的流体轴承轨道结构,这种轨道结构的部件以及用于制造这种履带结构的方法。 轨道结构包括作为其新部件的柔性插入条带,其中具有定向流体通道,用于将支撑流体引导抵靠要在轨道结构的上表面上运输的物品。 插入条被摩擦地或以其他方式保持在轨道结构中的适当位置,其上边缘与轨道结构的上表面齐平,使得从其中的流体通道发出的支撑流体可以沿着轨道支撑和移动连续的物品。
    • 58. 发明授权
    • Article decelerator for air conveyor
    • 空气输送机的文章减速机
    • US3761134A
    • 1973-09-25
    • US3761134D
    • 1972-01-06
    • MOTCH MERRYWEATHER MACHINERY
    • HURD S
    • B65G51/03B65G51/02
    • B65G51/03
    • A momentum decelerator for air conveyors having the preferred form of a rotatable turnstile positioned above the conveyor with a downwardly directed arm in the path of oncoming articles. The turnstile is rotated upon impact of the downward arm with the moving article to be slowed down and this rotation results in a second arm applying a decelerating force to the article in proportion to the momentum of impact. The decelerator distinguishes between a single article traveling along the conveyor and an accumulated group of articles, and operates only on the first member of a group, allowing the others of the group to pass without further restraint so as to prevent stopping of grouped articles on the conveyor.
    • 用于空气输送机的动量减速器,其具有位于输送机上方的可旋转旋转门的优选形式,在向后物品的路径中具有向下指向的臂。 旋转架在向下臂的冲击下旋转,使移动物品减速,并且该旋转导致第二臂与冲击动量成比例地向制品施加减速力。 减速器区别沿着输送机行进的单个物品和一组累积的物品,并且仅在组的第一个成员上操作,允许该组中的其他人不受进一步限制地通过,以防止在 输送带。