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    • 51. 发明授权
    • Device for surface coating or lacquering of substrates
    • 用于表面涂覆或涂漆的装置
    • US5766359A
    • 1998-06-16
    • US802790
    • 1997-02-18
    • Eggo SichmannReinhard Gerigk
    • Eggo SichmannReinhard Gerigk
    • B05C11/08B05C11/10B05C5/00
    • B05C11/1039B05C11/08B05C11/10B05C11/1042
    • An apparatus for surface coating or for lacquering a substrate, such as a disk-shaped substrate 2, which can be placed on a substrate carrier 14 and can be driven or given a rotating movement by means of a drive device, wherein the material or the lacquer fluid 5 to be applied is placed on the substrate 2 from a feed device 6. The fluid medium or the lacquer 4 released by the substrate support 14 is delivered at least to a first collecting reservoir 17 which is connected with at least one filter 28, from where the fluid is indirectly or directly conducted via a pump 29 to the first collecting reservoir 27, wherein an underpressure can be set between a first flow-off line 33 of the first collecting reservoir 27 and the pump 29.
    • 用于表面涂覆或用于对基板(例如盘状基板2)进行涂漆的装置,其可以放置在基板载体14上并且可以通过驱动装置被驱动或给予旋转运动,其中所述材料或 要施加的漆流体5从进料装置6放置在基板2上。由基板支撑件14释放的流体介质或漆4至少被输送到第一收集容器17,该收集容器17与至少一个过滤器28连接 从液体经由泵29间接地或直接地通过泵29传导到第一收集容器27,其中可以在第一收集容器27的第一流出物流33和泵29之间设置负压。
    • 52. 发明授权
    • Apparatus for removing material from a coated moving web and coating
apparatus using such apparatus
    • 用于使用这种装置从涂覆的移动幅材和涂覆装置中去除材料的装置
    • US5755881A
    • 1998-05-26
    • US699453
    • 1996-08-19
    • Alfredo FenoglioLuigi GalloPietro Prato
    • Alfredo FenoglioLuigi GalloPietro Prato
    • B05C11/02B05C11/10C23C14/00
    • B05C11/1039B05C11/02
    • Apparatus for removing an excess amount of a liquid coating material from portions of a moving web following coating of the moving web with the liquid coating material along a coating path. A vacuum head having a suction slot is defined by upstream and downstream walls and adapted to be movably positioned in an inoperative position away from the coating path and in an operative position contacting at least a portion of the liquid coating material on the moving web along the coating path, the downstream wall positively displacing a portion of the liquid coating material when the vacuum head is positioned in the operative position. A suction mechanism is operatively coupled to the vacuum head for establishing a vacuum manifold within the suction slot and communicating with a disposal system. A supply of liquid is operatively coupled to the vacuum head for supplying liquid to the suction slot.
    • 用于沿着涂覆路径用液体涂层材料涂覆移动幅材之后从移动幅材的部分去除多余液体涂覆材料的装置。 具有抽吸槽的真空头由上游和下游壁限定,并且适于可移动地定位在离开涂覆路径的不工作位置,并且在可操作位置中,沿着沿着移动的网状物的至少一部分液体涂覆材料 当真空头位于操作位置时,下游壁将一部分液体涂覆材料积极地移位。 抽吸机构可操作地联接到真空头,用于在抽吸槽内建立真空歧管并与处理系统连通。 供应的液体可操作地耦合到真空头以将液体供应到吸入槽。
    • 53. 发明授权
    • Coating apparatus
    • 涂装设备
    • US5672205A
    • 1997-09-30
    • US533396
    • 1995-09-25
    • Akihiro FujimotoYasuhiro Sakamoto
    • Akihiro FujimotoYasuhiro Sakamoto
    • G03F7/16B05C11/08B05C11/10H01L21/027H01L21/683B05C11/02B05B13/02
    • B05C11/08B05C11/1039
    • According to the present invention, there is provided an coating apparatus including means for holding an object to be process, the object holding means rotating in a state in which the object is placed thereon, a ring-like cup situated on an outer side of the object holding means, processing solution supply means, provided above the object, for supplying a processing solution on a surface of the object, discharge means, provided underneath the ring-like cup, for discharging processing solution portions scattered around when the processing solution is supplied on the surface of the object as a waste solution, together with a gas, and storage means, connected to the discharge means, for storing the waste solution and the gas discharged from the discharge means, wherein the waste solution and the gas are separated from each other in the storage means.
    • 根据本发明,提供了一种涂覆装置,包括用于保持待加工物体的装置,物体保持装置以物体放置在其上的状态旋转,位于外侧的环状杯 物体保持装置,设置在物体上方的处理液供给装置,用于在物体表面上提供处理溶液,设置在环状杯下方的排出装置,用于排出当处理溶液供应时散落的处理溶液部分 在作为废溶液的物体的表面上连同气体和与排放装置连接的存储装置,用于存储废液和从排出装置排出的气体,其中废溶液和气体与 彼此在存储装置中。
    • 54. 发明授权
    • Hot-melt adhesive recycling system
    • 热熔胶回收系统
    • US5067887A
    • 1991-11-26
    • US664268
    • 1991-03-04
    • Howard D. SpeerRobert A. Shortt
    • Howard D. SpeerRobert A. Shortt
    • B05C9/14B05C11/10B29B13/02B29B17/00B29C33/50B29C39/02B29C39/36
    • B05C11/1039B05C9/14B29B13/022B29B17/00B29C33/50B29C39/02B29C39/36B29K2105/0097Y02W30/62Y10S425/044
    • A system for recovering hot-melt materials for reuse in a glue gun includes a flexible mold form mounted in a carrier and having an internal cavity that approximates the dimensions of the preformed hot-melt sticks. In order to change from one type hot-melt material to another, the sticks of the desired material are loaded into the gun while the heated, hot-melt material in the gun is discharged into the mold form. The hot-melt material flows into the mold form and assumes the shape of a conventional preformed stick. After cooling and solidification of the material, the mold form is removed from its carrier and the cooled, cast stick is removed from the mold form for reuse. The mold form is fabricated from a flexible, heat-resistant material, such as a silicone rubber, and includes an elongated tubular portion having a tapered exterior to facilitate removal from its carrier and an internal bore dimensioned to produce a cast stick having the dimensions of the preformed stick. The system advantageously allows recycling hot-melt material purged from a glue gun when changing over from one type of hot-melt material to another.
    • 用于回收用于在胶枪中重新使用的热熔材料的系统包括安装在载体中的柔性模具形状,并且具有接近预成型热熔胶棒的尺寸的内部空腔。 为了从一种类型的热熔材料变为另一种,所需材料的棒被装载到枪中,而枪中的加热的热熔材料被排出到模具形式中。 热熔材料流入模具形状并呈现传统预制棒的形状。 在材料冷却和固化之后,将模具从其载体上移除,将冷却的铸棒从模具形式中移出以供重新使用。 模具形式由诸如硅橡胶的柔性耐热材料制成,并且包括具有锥形外部的细长管状部分,以便于从其载体移除和内孔,该内孔的尺寸用于制造具有 预成型棒。 该系统有利地允许从一种类型的热熔材料转换到另一种时,从胶枪喷出的热熔材料再循环。
    • 56. 发明授权
    • Substrate coating equipment
    • 基材涂布设备
    • US4889069A
    • 1989-12-26
    • US274882
    • 1988-11-22
    • Kazushi Kawakami
    • Kazushi Kawakami
    • B05C11/08B05C11/10G03F7/16H01L21/027
    • B05C11/1039B05C11/08G03F7/162
    • This invention relates to a coating equipment to be used for coating a coating solution (coating diffusion agent, photo-resist agent, etc.) on a film which forms patterns of photo mask substrates (hereinafter merely called "substrates") used for production of reticle and photo masks or of glass substrates used for liquid crystal display. It features that said coating equipment comprises of a substrate table (spin head) having vacuum suction holes to set and fix said substrates being formed on the upper part of the spindle, a vessel for wrapping said spin head consisting of a vessel body having a peripheral side wall of a certain fixed height and its coverlid means, and both said vessel body and coverlid being able to be separated, a plurality of small holes and tubes being provided at the lower part of said peripheral side wall with a prompt interval, a doughnut-like cup being arranged and placed so that said doughnut-like cut can wrap said vessel of the above structure inside the center portion of said cup, an air suction hole whose height is a little larger than the outer diameter of said small holes or tubes being drilled and provided on the internal periphery of said cup, and the bottom portion of said cup being interconnected to a pipe furnished with an exhaust fan.
    • 本发明涉及一种涂覆设备,用于在形成用于生产的光掩模基板(以下简称为“基板”)的图案的膜上涂覆涂布溶液(涂层扩散剂,光致抗蚀剂等) 掩模版和光掩模或用于液晶显示的玻璃基板。 其特征在于,所述涂覆设备包括具有真空抽吸孔的衬底台(旋转头),以设置和固定形成在心轴的上部的所述衬底,用于包裹所述旋转头的容器,所述容器主体包括具有周边 具有一定固定高度的侧壁和其盖板装置,并且所述容器主体和盖板都能够分离,多个小孔和管被提供在所述周边侧壁的下部,具有提示间隔,环形圈 配置和放置,使得所述环状切口可以将上述结构的容器包裹在所述杯的中心部分内,空气吸入孔的高度比所述小孔或管的外径稍大 被钻孔并设置在所述杯的内周上,并且所述杯的底部与配备有排风扇的管道互连。