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51. 发明授权

US10345337B2 Scanning probe microscopy utilizing separable components 有权
公开(公告)号：US10345337B2
公开(公告)日：2019-07-09
申请号：US15952368
申请日：2018-04-13
申请人： Bruker Nano, Inc.
发明人： Chanmin Su , Izhar Medalsy , Weijie Wang
IPC分类号： G01Q70/14 , G01Q10/06 , G01Q20/02 , G01Q70/02 , G01Q60/38
摘要： According to embodiments, a cantilever probe for use with an atomic force microscope (AFM) or scanning probe microscope (SPM) has a pad of conformable material that facilitates non-permanent adhesion through van der Waals interactions. Such removable probes and probe tips facilitate use of multiple tips or probes, while reducing the need for recalibration or repositioning.

52. 发明申请

US20180188286A1 SAMPLE VESSEL RETENTION STRUCTURE FOR SCANNING PROBE MICROSCOPE 审中-公开
公开(公告)号：US20180188286A1
公开(公告)日：2018-07-05
申请号：US15739094
申请日：2016-06-15
申请人： Bruker Nano, Inc.
发明人： Charles MEYER , Shuiqing HU , James SHAW , Chanmin SU
IPC分类号： G01Q30/02 , G02B21/02
CPC分类号： G01Q30/025 , G01Q30/14 , G01Q30/16 , G01Q30/18 , G01Q30/20 , G02B21/02 , G02B21/26
摘要： A sample vessel retention mechanism for an inverted microscope having an optical objective and a scanning probe microscope (SPM) head. The inverted microscope includes a platform for supporting a sample vessel, in which is formed an aperture sized to provide a passage for the objective of the inverted microscope to approach the sample vessel from below. The retention mechanism provides a vacuum region formed in the platform, with the vacuum region being barometrically coupled with a vacuum generator. Establishment of a vacuum in the vacuum region prevents or substantially reduces oscillation of the sample vessel floor in an operating frequency range of the SPM head.

53. 发明授权

US09995763B2 Precise probe placement in automated scanning probe microscopy systems 有权
公开(公告)号：US09995763B2
公开(公告)日：2018-06-12
申请号：US14630074
申请日：2015-02-24
申请人： Bruker Nano, Inc.
发明人： Jason Osborne , Eric Milligan , Andrew Lopez , Xianghai Wu , Sean Hand , Vladimir Fonoberov
IPC分类号： G01Q10/02 , G01Q10/06 , G01Q30/06
CPC分类号： G01Q10/02 , G01Q10/065 , G01Q30/06
摘要： A scanning probe microscope (SPM) system and associated method. The SPM system having a probe adapted to interact with nanoscale features of a sample and scan within a target region to produce a three-dimensional image of that target region, the system maintaining location information for a plurality of features of interest of the sample according to a sample-specific coordinate system, wherein the SPM system is configured to adjust positioning of the probe relative to the sample according to a SPM coordinate system, the SPM system further configured to manage a dynamic relationship between the sample-specific coordinate system and the SPM coordinate system by determining a set of alignment errors between the sample-specific coordinate system and the SPM coordinate system and apply corrections to the SPM coordinate system to offset the determined alignment errors.

54. 发明授权

US09846178B2 Chemical nano-identification of a sample using normalized near-field spectroscopy 有权
公开(公告)号：US09846178B2
公开(公告)日：2017-12-19
申请号：US15241029
申请日：2016-08-18
申请人： BRUKER NANO, INC.
发明人： Gregory Andreev , Sergey Osechinskiy , Stephen Minne , Chanmin Su
IPC分类号： G01Q60/18 , G01Q30/04 , G01Q20/02 , G01Q60/22
CPC分类号： G01Q30/04 , G01Q20/02 , G01Q60/18 , G01Q60/22
摘要： Apparatus and method for nano-identification a sample by measuring, with the use of evanescent waves, optical spectra of near-field interaction between the sample and optical nanoantenna oscillating at nano-distance above the sample and discriminating background backscattered radiation not sensitive to such near-field interaction. Discrimination may be effectuated by optical data acquisition at periodically repeated moments of nanoantenna oscillation without knowledge of distance separating nanoantenna and sample. Measurement includes chemical identification of sample on nano-scale, during which absolute value of phase corresponding to near-field radiation representing said interaction is measured directly, without offset. Calibration of apparatus and measurement is provided by performing, prior to sample measurement, a reference measurement of reference sample having known index of refraction. Nano-identification is realized with sub-50 nm resolution and, optionally, in the mid-infrared portion of the spectrum.

55. 发明授权

US09752969B2 Universal mechanical tester for measuring friction and wear characteristics of materials 有权
公开(公告)号：US09752969B2
公开(公告)日：2017-09-05
申请号：US14682115
申请日：2015-04-09
申请人： Douglas Werner , Vladislov Dorfman , Adrian Correa , William Sloan
发明人： Douglas Werner , Vladislov Dorfman , Adrian Correa , William Sloan
IPC分类号： G01N3/56 , G01K13/00 , G01N29/04 , G01N19/02 , G01N29/14
CPC分类号： G01N3/56 , G01K13/00 , G01N19/02 , G01N29/04 , G01N29/14
摘要： A universal tester includes modular sample stages, each dedicated to a test configuration. The modules are manually coupled to the base of the tester and automatically recognized for activation of the correct software relevant to its configuration and test scripts. As a result, no extraneous script can be activated erroneously by an operator. A single motor in the frame of the tester actuates the drive of each sample stage through a drivetrain that is automatically engaged by the manual installation of the stage. Means for controlling and/or measuring temperature, humidity, voltage, resistance, and acoustic emissions are provided through dedicated expansion slots and cards that activate respective software. An electronic identification in each card ensures that only relevant software is enabled.

56. 发明申请

US20160356809A1 CHEMICAL NANO-IDENTIFICATION OF A SAMPLE USING NORMALIZED NEAR-FIELD SPECTROSCOPY 有权
标题翻译：使用正规化近场光谱的样品的化学纳米鉴定
公开(公告)号：US20160356809A1
公开(公告)日：2016-12-08
申请号：US15241029
申请日：2016-08-18
申请人： Gregory Andreev , Sergey Osechinskiy , Stephen Minne , Chanmin Su
发明人： Gregory Andreev , Sergey Osechinskiy , Stephen Minne , Chanmin Su
IPC分类号： G01Q30/04 , G01Q60/22
CPC分类号： G01Q30/04 , G01Q20/02 , G01Q60/18 , G01Q60/22
摘要： Apparatus and method for nano-identification a sample by measuring, with the use of evanescent waves, optical spectra of near-field interaction between the sample and optical nanoantenna oscillating at nano-distance above the sample and discriminating background backscattered radiation not sensitive to such near-field interaction. Discrimination may be effectuated by optical data acquisition at periodically repeated moments of nanoantenna oscillation without knowledge of distance separating nanoantenna and sample. Measurement includes chemical identification of sample on nano-scale, during which absolute value of phase corresponding to near-field radiation representing said interaction is measured directly, without offset. Calibration of apparatus and measurement is provided by performing, prior to sample measurement, a reference measurement of reference sample having known index of refraction. Nano-identification is realized with sub-50 nm resolution and, optionally, in the mid-infrared portion of the spectrum.
摘要翻译：用于纳米识别样品的装置和方法通过使用ev逝波测量在样品和在样品之上的纳米距离处振荡的样品和光学纳米天线之间的近场相互作用的光谱，并且鉴别背景散射辐射对这种近似不敏感场相互作用。通过在纳秒天线振荡的周期性重复时刻的光学数据采集可以实现歧视，而不知道距离分离纳米天线和样品。测量包括纳米尺度上的样品的化学鉴定，其中直接测量相应于表示所述相互作用的近场辐射的相位的绝对值，而没有偏移。仪器和测量的校准通过在样品测量之前执行具有已知折射率的参考样品的参考测量来提供。纳米识别实现了低于50nm的分辨率，并且可选地在光谱的中红外部分中实现。

57. 发明授权

US09291640B2 Method and apparatus of using peak force tapping mode to measure physical properties of a sample 有权
标题翻译：使用峰值力攻丝模式测量样品的物理性质的方法和装置
公开(公告)号：US09291640B2
公开(公告)日：2016-03-22
申请号：US14178076
申请日：2014-02-11
申请人： Bruker Nano, Inc.
发明人： Chanmin Su , Jian Shi , Yan Hu , Shuiqing Hu , Ji Ma
IPC分类号： G01Q20/00 , G01Q10/06 , G01Q60/32
CPC分类号： G01Q20/04 , G01Q10/065 , G01Q20/00 , G01Q60/32
摘要： Methods and apparatuses are provided for automatically controlling and stabilizing aspects of a scanning probe microscope (SPM), such as an atomic force microscope (AFM), using Peak Force Tapping (PFT) Mode. In an embodiment, a controller automatically controls periodic motion of a probe relative to a sample in response to a substantially instantaneous force determined and automatically controls a gain in a feedback loop. A gain control circuit automatically tunes a gain based on separation distances between a probe and a sample to facilitate stability. Accordingly, instability onset is quickly and accurately determined during scanning, thereby eliminating the need of expert user tuning of gains during operation.
摘要翻译：提供了使用峰值力攻丝（PFT）模式来自动控制和稳定扫描探针显微镜（SPM）诸如原子力显微镜（AFM）的方面和装置的方法和装置。在一个实施例中，控制器响应于确定的基本上瞬时的力自动地控制探针相对于样本的周期性运动，并且自动控制反馈回路中的增益。增益控制电路根据探头和样品之间的距离自动调整增益，以促进稳定性。因此，在扫描期间快速且准确地确定不稳定性的开始，从而消除了在操作期间专家用户调整增益的需要。

58. 发明授权

US09234814B1 Automated re-focusing of interferometric reference mirror 有权
标题翻译：干涉式参考镜自动重新聚焦
公开(公告)号：US09234814B1
公开(公告)日：2016-01-12
申请号：US13925708
申请日：2013-06-24
申请人： Erik Novak , Colin Farrell , Bryan Guenther
发明人： Erik Novak , Colin Farrell , Bryan Guenther
IPC分类号： G01B9/02 , G01M11/02
CPC分类号： G01B9/02063 , G01B9/02067 , G01B9/02072 , G01M11/02
摘要： A reference surface is used to develop an empirical plot between a parameter of interest, such as roughness or modulation, and the position of the reference mirror in an interferometer by repeating measurements of the reference surface at different positions of the reference mirror so as to identify the in-focus position of the reference mirror. Serial quality-control measurements of samples of interest are carried out with the reference mirror in such in-focus position until a predetermined quality-control event triggers an automated system re-calibration by re-measuring the reference surface and, if the result does not correspond to the in-focus position of the reference mirror according to the plot, by finding a new in-focus position for the reference mirror using the same plot or, alternatively, a new similarly produced plot. Sample measurements are then resumed with the mirror placed at that new position.
摘要翻译：参考表面用于通过重复在参考镜的不同位置处的参考表面的测量来形成感兴趣参数（例如粗糙度或调制）与参考镜在干涉仪中的位置之间的经验图，以便识别参考镜的对焦位置。所关注的样本的串行质量控制测量使用参考反射镜在这样的对焦位置进行，直到预定的质量控制事件通过重新测量参考表面触发自动系统重新校准，并且如果结果不对应于根据绘图的参考镜的对焦位置，通过使用相同的曲线找到用于参考镜的新的对焦位置，或者替代地，新的类似产生的图。然后用放置在该新位置的反射镜恢复样品测量。

59. 发明授权

US09057757B2 Testing of electroluminescent semiconductor wafers 有权
标题翻译：电致发光半导体晶片的测试
公开(公告)号：US09057757B2
公开(公告)日：2015-06-16
申请号：US13332657
申请日：2011-12-21
申请人： Dong Chen
发明人： Dong Chen
IPC分类号： G01R31/00 , G01R31/26 , H05B31/00 , F21V8/00 , F21Y103/00 , G01R31/265
CPC分类号： G01R31/2648 , F21V29/83 , F21V2200/00 , F21Y2103/00 , G01R31/2656 , H05B31/00 , H05B2206/00
摘要： Forward voltage drift in a probe system for the characterization of a light-emitting wafer is virtually eliminated by directing compressed air to the probe so as to ensure that the exact same temperature conditions exist during repeated measurements of the wafer. In one embodiment of the invention, an air flow at room temperature is used, either continuously or intermittently. In another embodiment, the temperature of the probe is controlled by flowing a liquid or a gas through micro-channels built into the probe. In yet another embodiment, the probe is connected to a solid-state Peltier cell that is computer-controlled to maintain the probe's temperature at a predetermined set-point. A temperature-controlled chamber or a thermal reservoir enclosing the probe could be used as well. The results obtained showed remarkable repeatability.
摘要翻译：用于表征发光晶片的探针系统中的正向电压漂移实际上通过将压缩空气引导到探针来消除，以便确保在晶片的重复测量期间存在完全相同的温度条件。在本发明的一个实施方案中，连续地或间歇地使用室温下的空气流。在另一个实施例中，通过将液体或气体流经内置于探针中的微通道来控制探针的温度。在另一个实施例中，探针连接到被计算机控制的固态珀耳帖细胞，以将探针的温度保持在预定的设定点。也可以使用温度控制室或包围探针的热储存器。获得的结果显示出显着的重复性。

60. 发明授权

US09052336B2 Method and apparatus of physical property measurement using a probe-based nano-localized light source 有权
标题翻译：使用基于探针的纳米局部光源进行物理性能测量的方法和装置
公开(公告)号：US09052336B2
公开(公告)日：2015-06-09
申请号：US14532926
申请日：2014-11-04
申请人： Bruker Nano, Inc.
发明人： Markus B. Raschke , Stefan B. Kaemmer , Stephen C. Minne , Chanmin Su
IPC分类号： G01N13/16 , G01Q10/00 , G01Q60/00
CPC分类号： G01Q20/02 , G01Q10/00 , G01Q10/065 , G01Q60/06 , G01Q60/22 , G01Q60/38
摘要： An apparatus and method of performing physical property measurements on a sample with a probe-based metrology instrument employing a nano-confined light source is provided. In one embodiment, an SPM probe tip is configured to support an appropriate receiving element so as to provide a nano-localized light source that is able to efficiently and locally excite the sample on the nanoscale. Preferably, the separation between the tip apex and the sample during spectroscopic measurements is maintained at less than 10 nm, for example, using an AFM TR Mode control scheme.
摘要翻译：提供了一种使用采用纳米限制光源的基于探针的计量仪器对样品进行物理性能测量的装置和方法。在一个实施例中，SPM探针尖端被配置为支撑适当的接收元件，以便提供能够在纳米尺度上有效地和局部地激发样品的纳米局部光源。优选地，例如使用AFM TR模式控制方案，在光谱测量期间尖端顶点和样品之间的间隔保持在小于10nm。

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