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    • 56. 发明授权
    • Process for the micromechanical fabrication of nozzles for liquid jets
    • 用于液体喷嘴的喷嘴的微机械制造工艺
    • US5781994A
    • 1998-07-21
    • US564600
    • 1995-11-29
    • Yves FouilletGilles DelapierreMarie-Therese Delaye
    • Yves FouilletGilles DelapierreMarie-Therese Delaye
    • B41J2/135B41J2/16
    • B41J2/1606Y10T29/49401
    • A process for the micromechanical fabrication of nozzles for ink jets includes forming a groove on a surface of a first substrate, securing the first substrate to a second substrate to form an assembly in which the second substrate covers the groove to form a channel having walls, and then forming an internal protective coating within the channel by thermal oxidation of the walls of the channel. The first and second substrates are then cut along a plane extending perpendicular to the channel thereby to form a nozzle for dispensing a liquid jet. Scales, formed as a result of the cutting operations, are formed on the internal protective coating rather than directly on the walls of the channel. These scales then are removed from the nozzle by eliminating the internal protective coating.
    • 用于喷墨喷嘴的微机械制造的方法包括在第一基板的表面上形成凹槽,将第一基板固定到第二基板以形成组件,其中第二基板覆盖凹槽以形成具有壁的通道, 然后通过通道的壁的热氧化在通道内形成内部保护涂层。 然后沿着垂直于通道延伸的平面切割第一和第二基底,从而形成用于分配液体射流的喷嘴。 作为切割操作的结果形成的鳞片形成在内部保护涂层上,而不是直接在通道的壁上。 然后通过消除内部保护涂层从喷嘴中除去这些鳞片。