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    • 56. 发明授权
    • Pyroelectric detector and method for manufacturing the same
    • 热电探测器及其制造方法
    • US4383174A
    • 1983-05-10
    • US190161
    • 1980-09-23
    • Sadao MatsumuraKatsuyoshi FukutaHitoshi Hirano
    • Sadao MatsumuraKatsuyoshi FukutaHitoshi Hirano
    • G01J5/34H01L37/02G01J1/00
    • H01L37/02G01J5/34H01L2224/48091
    • A device for detecting infrared rays using the pyroelectric effect, namely a pyroelectric detector, and methods for manufacturing the pyroelectric detector, are disclosed. The pyroelectric detector comprises a pyroelectric material, an electrode for receiving infrared rays placed on one face of the pyroelectric material, a shield electrode placed at the other face of the pyroelectric material, a substrate made of a semiconductor or conductive material which is fastened to the shield electrode, the substrate having a hole corresponding in position to the position of the infrared receiving electrode and a stand to which the substrate is fastened. The method for manufacturing the pyroelectric detector comprises the steps of forming a shield electrode at one face of a pyroelectric wafer, making holes in a substrate, fastening the substrate to the shield electrode, grinding the other of the wafer, forming electrodes on the other face of the wafer for receiving infrared rays, the position of the electrodes corresponding to the position of the holes, and dicing the pyroelectric material between the holes to form a single pyroelectric detector.
    • 公开了一种使用热电效应检测红外线的装置,即热电检测器,以及制造该热电检测器的方法。 热电检测器包括热电材料,用于接收放置在热电材料的一个面上的红外线的电极,放置在热电材料的另一个面上的屏蔽电极,由半导体或导电材料制成的基板,其被固定到 屏蔽电极,具有与红外线接收电极的位置对应的孔的基板和固定基板的支架。 热电检测器的制造方法包括以下步骤:在热电晶片的一个面上形成屏蔽电极,在基板上形成孔,将基板固定在屏蔽电极上,研磨另一个晶片,在另一个面上形成电极 用于接收红外线的晶片,电极的位置对应于孔的位置,并且将热电材料切割在孔之间以形成单个热电检测器。