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51. 发明申请

US20060007563A1 Holding and positioning apparatus for an optical element 有权
标题翻译：用于光学元件的保持和定位装置
公开(公告)号：US20060007563A1
公开(公告)日：2006-01-12
申请号：US10944135
申请日：2004-09-17
申请人： Ulrich Weber , Hubert Holderer
发明人： Ulrich Weber , Hubert Holderer
IPC分类号： G02B7/02
CPC分类号： G03F7/70258 , G02B7/003 , G02B7/1822 , G03F7/70825 , G03F7/70833 , G03F7/709
摘要： In a holding and positioning apparatus for an optical element, the optical element is mounted in a mounting ring and the mounting ring is mounted via at least one manipulator unit. The manipulator unit has a linear actuating element. The manipulator unit has a manipulator head, a movable manipulator part and a manipulator foot, the manipulator head being connected to the movable manipulator part via a solid body joint. The movable manipulator part is connected to the manipulator foot via an actuator and at least one solid body joint, the linear actuating element being coupled to the manipulator foot and the actuator.
摘要翻译：在用于光学元件的保持和定位装置中，光学元件安装在安装环中，并且安装环经由至少一个操纵器单元安装。操纵器单元具有线性致动元件。操纵器单元具有操纵器头，可移动操纵器部分和操纵脚，操纵器头经由固体接头连接到可动操纵器部分。可移动操纵器部分经由致动器和至少一个实体接头连接到操纵器脚，所述线性致动元件联接到操纵器脚和致动器。

52. 发明授权

US06967792B2 Apparatus for positioning an optical element in a structure 失效
标题翻译：用于将光学元件定位在结构中的装置
公开(公告)号：US06967792B2
公开(公告)日：2005-11-22
申请号：US10458968
申请日：2003-06-11
申请人： Ulrich Weber , Hubert Holderer , Dirk Rexhaeuser
发明人： Ulrich Weber , Hubert Holderer , Dirk Rexhaeuser
IPC分类号： G02B7/18 , G02B7/00 , G03F7/20 , H01L21/027 , G02B7/02
CPC分类号： G03F7/70258 , G02B7/003 , G03F7/70825
摘要： In an apparatus for positioning an optical element in a structure, particularly in an objective housing of a projection objective for microlithography, the optical element is connected to the structure via fastening elements. The position of the optical element is set by means of adjusting fasteners. The fastening elements are arranged in such a way and the adjusting fasteners can be actuated in such a way that the optical element can be tilted about three mutually independent axes and can additionally be displaced in a translatory fashion in one axial direction.
摘要翻译：在用于将光学元件定位在结构中的装置中，特别是在用于微光刻的投影物镜的物镜外壳中，光学元件通过紧固元件连接到结构。光学元件的位置通过调整紧固件来设定。紧固元件以这种方式布置，并且调节紧固件可以以这样的方式致动，使得光学元件可以围绕三个相互独立的轴线倾斜，并且可以在一个轴向方向上以平移方式另外移位。

53. 发明授权

US06724548B2 Objective, in particular a projection lens for microlithography 失效
标题翻译：目的，特别是用于微光刻的投影透镜
公开(公告)号：US06724548B2
公开(公告)日：2004-04-20
申请号：US10375320
申请日：2003-02-26
申请人： Ulrich Weber
发明人： Ulrich Weber
IPC分类号： G02B702
CPC分类号： G03F7/70825 , G02B7/026
摘要： An objective, in particular a projection lens for microlithography, is provided with at least one optical element (8) that is mounted in an inner mount (9a), the inner mount (9a) being connected to the outer mount (9b). A manipulator device (21) performs a displacement of the optical element (8), preferably in at least one direction that lies at least approximately parallel to the optical axis. At least one elastically deformable strip (13) is arranged in a gap (12) between the inner mount (9a) and the outer mount (9b), the strip being connected in each case via a fastening section (15) to the inner mount (9a) and the outer mount (9b), and the two fastening sections (15) being connected to one another by an arcuate section (18, 19) and free bearing parts (16, 17) situated therebetween.
摘要翻译：特别是用于微光刻的投影透镜的目的是提供有至少一个安装在内部安装件（9a）中的光学元件（8），内部安装件（9a）连接到外部安装件（9b）。机械手装置（21）优选地在至少一个至少大致平行于光轴的方向上执行光学元件（8）的位移。至少一个可弹性变形的带（13）布置在内部安装件（9a）和外部安装件（9b）之间的间隙（12）中，条带通过紧固部分（15）连接到内部安装件（9a）和外部安装件（9b），并且两个紧固部分（15）通过位于其间的弓形部分（18,19）和自由轴承部件（16,17）彼此连接。

54. 发明授权

US4552524A Hydraulic press 失效
标题翻译：液压机
公开(公告)号：US4552524A
公开(公告)日：1985-11-12
申请号：US687190
申请日：1984-12-28
申请人： Klaus Schmidts , Dieter Therolf , Ulrich Weber
发明人： Klaus Schmidts , Dieter Therolf , Ulrich Weber
IPC分类号： B29C70/06 , B29C43/32 , B29D7/00 , B29K105/06 , B30B1/32 , B32B37/00 , B30B11/00
CPC分类号： B30B1/323
摘要： In a press an hydraulic adjusting cylinder connected to the slidable cross-piece of the press has a stroke matching the range of movement of the press and a number of hydraulic press cylinders of short stroke are provided for executing the working strokes of the press. The press cylinders are each couplable to the slidable cross-piece by a coupling including a coupling rod and a stationary clamping jaw and a pressable clamping jaw cooperating with the coupling rod, the pressable clamping jaw being activated by at least one single acting hydraulic cylinder.
摘要翻译：在压力机中，连接到压力机的可滑动横截面的液压调节气缸具有与冲压机的运动范围相匹配的冲程，并且提供了许多用于执行压机的工作冲程的液压冲压缸。压力缸通过包括联接杆和固定夹爪的联接器以及与联接杆配合的可压紧夹爪可耦合到可滑动的横梁上，可压紧夹爪由至少一个单作用液压缸启动。

55. 发明申请

US20120147344A1 ACTUATORS AND MICROLITHOGRAPHY PROJECTION EXPOSURE SYSTEMS AND METHODS USING THE SAME 审中-公开
标题翻译：执行器和微观投影曝光系统及其使用方法
公开(公告)号：US20120147344A1
公开(公告)日：2012-06-14
申请号：US13402115
申请日：2012-02-22
申请人： Ulrich Weber , Stefan Hembacher , Armin Schoeppach
发明人： Ulrich Weber , Stefan Hembacher , Armin Schoeppach
IPC分类号： F16H21/44 , G03B27/34 , H02N1/00
CPC分类号： G03F7/70141 , F16H21/44 , G03F7/70258 , G03F7/70825 , H02N1/002 , H02N2/023 , Y10T74/18992
摘要： An actuator includes a housing, a movable part, and an advancing unit that is at least temporarily connected to the movable part. The advancing unit includes a deformation unit and a deformer configured to deform the deformation unit with a vector component perpendicular to an effective direction of the actuator so that a total length of the deformation unit changes in the effective direction of the actuator as a result of the deformation. The movable part is configured to move in the effective direction of the actuator upon a removal of the vector component on the deformation unit and the deformation unit is disposed along the effective direction of the actuator upon the removal of the vector component on the deformation unit.
摘要翻译：致动器包括壳体，可移动部件和至少临时连接到可动部件的前进单元。前进单元包括变形单元和变形构件，其构造成使得垂直于致动器的有效方向的矢量分量使变形单元变形，使得变形单元的总长度在致动器的有效方向上变化，作为形变。可移动部件被构造成在去除变形单元上的矢量分量时沿着致动器的有效方向移动，并且在去除变形单元上的矢量分量时沿着致动器的有效方向设置变形单元。

56. 发明申请

US20120140341A1 HOLDING ARRANGEMENT FOR AN OPTICAL ELEMENT 失效
标题翻译：光学元件的安装
公开(公告)号：US20120140341A1
公开(公告)日：2012-06-07
申请号：US13359368
申请日：2012-01-26
申请人： Ulrich Weber , Hubert Holderer
发明人： Ulrich Weber , Hubert Holderer
IPC分类号： G02B7/02
CPC分类号： G03F7/70825 , B23K26/02 , B23K26/035 , G02B7/003 , G02B7/028
摘要： A holding arrangement for an optical element includes a basic structure surrounding an optical element and a mounting device by which the optical element can be supported on the basic structure with two degrees of freedom for a rotational movement about an optical axis and a translational movement along a first axis which extends perpendicularly to the optical axis and intersects the optical axis in a center. The mounting device includes four joint locations arranged point-symmetrically with respect to the center and at least one parallel rocker which is displaceable parallel to the first axis. A manipulator unit includes a holding arrangement.
摘要翻译：用于光学元件的保持装置包括围绕光学元件的基本结构和安装装置，通过该安装装置，光学元件可以以两个自由度支撑在基本结构上，用于围绕光轴的旋转运动和沿着光轴的平移运动第一轴线垂直于光轴延伸并与中心的光轴相交。安装装置包括相对于中心点对称布置的四个关节位置和平行于第一轴线移动的至少一个平行摇杆。操纵器单元包括保持装置。

57. 发明授权

US08027024B2 Replacement device for an optical element 有权
标题翻译：光学元件更换装置
公开(公告)号：US08027024B2
公开(公告)日：2011-09-27
申请号：US12029165
申请日：2008-02-11
申请人： Bernhard Gellrich , Ulrich Weber
发明人： Bernhard Gellrich , Ulrich Weber
IPC分类号： G03B27/54 , G03B27/42
CPC分类号： G03F7/70825 , G03F7/70308 , G03F7/70691
摘要： Replacement devices for at least one replaceable optical element mounted at least indirectly in a lithographic projection exposure apparatus are disclosed. Lithography objectives and illumination systems are also disclosed. Methods for positioning a replaceable optical element within a lithographic projection exposure apparatus of this type, and methods for replacing a replaceable optical element within a lithographic projection exposure apparatus via a replacement device are also disclosed.
摘要翻译：公开了至少一个至少间接安装在光刻投影曝光装置中的可更换光学元件的替换装置。还公开了光刻目标和照明系统。在这种类型的光刻投影曝光装置内定位可更换光学元件的方法以及通过更换装置替代光刻投影曝光装置内的可更换光学元件的方法也被公开。

58. 发明授权

US07961294B2 Imaging device in a projection exposure facility 有权
标题翻译：投影曝光设备中的成像装置
公开(公告)号：US07961294B2
公开(公告)日：2011-06-14
申请号：US12247597
申请日：2008-10-08
申请人： Wolfgang Hummel , Juergen Fischer , Karl-Eugen Aubele , Erich Merz , Raoul Reiner , Klaus Rief , Stefan Schoengart , Markus Neumaier , Baerbel Trossbach , Ulrich Weber , Michael Muehlbeyer , Hubert Holderer , Alexander Kohl , Jochen Weber , Johannes Lippert , Thorsten Rassel
发明人： Wolfgang Hummel , Juergen Fischer , Karl-Eugen Aubele , Erich Merz , Raoul Reiner , Klaus Rief , Stefan Schoengart , Markus Neumaier , Baerbel Trossbach , Ulrich Weber , Michael Muehlbeyer , Hubert Holderer , Alexander Kohl , Jochen Weber , Johannes Lippert , Thorsten Rassel
IPC分类号： G03B27/42 , G03B27/52 , G03B7/02
CPC分类号： G03F7/70258 , G03F7/70825
摘要： An imaging device in a projection exposure machine for microlithography has at least one optical element and at least one manipulator, having a linear drive, for manipulating the position of the optical element. The linear drive has a driven subregion and a nondriven subregion, which are movable relative to one another in the direction of a movement axis. The subregions are interconnected at least temporarily via functional elements with an active axis and via functional elements with an active direction at least approximately parallel to the movement axis.
摘要翻译：用于微光刻的投影曝光机中的成像装置具有至少一个光学元件和至少一个具有线性驱动的操纵器，用于操纵光学元件的位置。线性驱动器具有驱动区域和非驱动子区域，它们可以在运动轴线的方向上相对于彼此移动。至少临时地通过具有主动轴的功能元件和通过至少大致平行于运动轴的有源方向的功能元件临时地互相连接。

59. 发明授权

US07482605B2 Energy filter device 有权
标题翻译：能量过滤装置
公开(公告)号：US07482605B2
公开(公告)日：2009-01-27
申请号：US10853850
申请日：2004-05-25
申请人： Gerhard Kraft , Ulrich Weber , Sebastian Kraft , Stephan Kraft
发明人： Gerhard Kraft , Ulrich Weber , Sebastian Kraft , Stephan Kraft
IPC分类号： H01J49/44 , A61N5/10
CPC分类号： G21K1/046 , A61N5/1042 , A61N2005/1087 , A61N2005/1095 , G21K1/04 , G21K1/10
摘要： An energy filter device for beams which are used in the course of ion beam therapy, wherein at least one passive modulator is provided. The modulator can comprise a scattering film for the beams and a collimator with an opening for controlling the beams, or a magnetic filter and an absorber, or a nonlinear filter and an apparatus for clipping the intensity of individual energy levels of the beams.
摘要翻译：一种用于在离子束治疗过程中使用的光束的能量过滤装置，其中提供至少一个无源调制器。调制器可以包括用于光束的散射膜和具有用于控制光束的开口的准直器，或磁性滤光器和吸收体，或非线性滤光器以及用于限制光束的各个能级的强度的装置。

60. 发明申请

US20080174758A1 REPLACEMENT DEVICE FOR AN OPTICAL ELEMENT 有权
标题翻译：光学元件更换装置
公开(公告)号：US20080174758A1
公开(公告)日：2008-07-24
申请号：US12029165
申请日：2008-02-11
申请人： Bernhard Gellrich , Ulrich Weber
发明人： Bernhard Gellrich , Ulrich Weber
IPC分类号： G03B27/54
CPC分类号： G03F7/70825 , G03F7/70308 , G03F7/70691
摘要： Replacement devices for at least one replaceable optical element mounted at least indirectly in a lithographic projection exposure apparatus are disclosed. Lithography objectives and illumination systems are also disclosed. Methods for positioning a replaceable optical element within a lithographic projection exposure apparatus of this type, and methods for replacing a replaceable optical element within a lithographic projection exposure apparatus via a replacement device are also disclosed.
摘要翻译：公开了至少一个至少间接安装在光刻投影曝光装置中的可更换光学元件的替换装置。还公开了光刻目标和照明系统。在这种类型的光刻投影曝光装置内定位可更换光学元件的方法以及通过更换装置替代光刻投影曝光装置内的可更换光学元件的方法也被公开。

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