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    • 52. 发明授权
    • Method for fabricating a semiconductor element from a dispersion of semiconductor particles
    • 从半导体粒子的分散体制造半导体元件的方法
    • US07517719B2
    • 2009-04-14
    • US11125138
    • 2005-05-10
    • Thomas KuglerChristopher NewsomeDavid RusselShunpu Li
    • Thomas KuglerChristopher NewsomeDavid RusselShunpu Li
    • H01L51/40
    • H01L21/02568H01L21/0256H01L21/02576H01L21/02579H01L21/02601H01L21/02628H01L51/0003H01L51/0037H01L51/0053H01L51/007H01L51/0545
    • Provided is a method for forming a semiconductor element such as film. The method comprises the steps of: (i) depositing a suspension of particles of a first semiconductor and a solution of a second semiconductor or a precursor thereof on a surface of a substrate such that a mixture comprising the particles of the first semiconductor suspended in a liquid phase comprising the second semiconductor or precursor thereof results thereon; and (ii) solidifying the mixture to form the semiconductor element comprising particles of the first semiconductor in a matrix of the second semiconductor which electrically connects adjacent particles of the first semiconductor, the first and second semiconductors being of the same conductivity type and being formed from either the same or different materials. The method does not require any step of vacuum deposition or sintering.Also provided is a semiconductor element itself. The element comprises semiconductor particles in a matrix of a semiconductor binder that has the same conductivity type as the semiconductor particles and which is the same or a different material than that forming the particles, the semiconductor binder electrically connecting adjacent semiconductor particles.
    • 提供了一种形成诸如膜的半导体元件的方法。 该方法包括以下步骤:(i)将第一半导体和第二半导体或其前体的溶液的悬浮液沉积在基板的表面上,使得包含悬浮在基板中的第一半导体颗粒的混合物 在其上产生包含第二半导体或其前体的液相; 和(ii)固化所述混合物以形成所述半导体元件,所述半导体元件包括所述第二半导体的矩阵中的所述第一半导体的粒子,所述第二半导体的矩阵电连接所述第一半导体的相邻颗粒,所述第一和第二半导体具有相同的导电类型,并且由 相同或不同的材料。 该方法不需要真空沉积或烧结的任何步骤。 还提供了半导体元件本身。 该元件包括半导体粘合剂的基质中的半导体颗粒,其具有与半导体颗粒相同的导电类型,并且与形成颗粒的材料相同或不同,所述半导体粘结剂将相邻的半导体颗粒电连接。
    • 56. 发明授权
    • Patterning method for fabricating high resolution structures
    • 用于制造高分辨率结构的图案化方法
    • US07439193B2
    • 2008-10-21
    • US11320582
    • 2005-12-30
    • Shunpu LiChristopher NewsomeDavid RussellThomas Kugler
    • Shunpu LiChristopher NewsomeDavid RussellThomas Kugler
    • H01L21/00
    • H01L21/0338H01L21/0272H01L21/0331H01L21/0337H01L21/3086H01L21/3088H01L21/31144H01L27/1292H01L27/285H01L51/0021H01L51/0036H01L51/0516H01L51/0541H01L51/105
    • Provided is a patterning method capable of fabricating high resolution structures without using a high resolution patterning step. The method comprises the steps of: (i) pre-patterning a layer of material (12) on a substrate (10), (ii) spin-coating a solution of a film-forming substance over the pre-patterned substrate, (iii) drying the spin-coated solution to form a film (14) of the film-forming substance on the unpatterned areas of the substrate and on the surface and sides of the pre-patterned material, (iv) etching the dried film in such a way that it remains only around the sides of the pre-patterned material, and (v) removing the pre-patterned material to leave ridges (20) of the film-forming substance on the substrate, the pattern of the ridges corresponding to the outline of the pre-patterned material.A metal layer may then be deposited on the resulting patterned substrate followed by removal of the ridges leaving discrete areas of metal which form latent source and drain electrodes of a thin film transistor. An array of thin film transistors may then be formed by selectively depositing areas of semiconductor, insulator and conductor, the latter forming a gate electrode associated with each pair of source and drain electrodes.
    • 提供了一种能够在不使用高分辨率图案化步骤的情况下制造高分辨率结构的图案化方法。 该方法包括以下步骤:(i)在衬底(10)上预先图案化材料层(12),(ii)在预图案化衬底上旋涂成膜物质的溶液,(iii) )干燥旋转涂覆的溶液以在基底的未图案区域和预图案化材料的表面和侧面上形成成膜物质的膜(14),(iv)将这样的干燥膜蚀刻 它仅保留在预图案化材料的侧面周围,并且(v)去除预先图案化的材料以将成膜物质的脊(20)留在衬底上,对应于轮廓的脊的图案 的预图案材料。 然后可以在所得到的图案化衬底上沉积金属层,然后去除留下形成薄膜晶体管的潜在源极和漏极的离散的金属区域的脊。 然后可以通过选择性地沉积半导体,绝缘体和导体的区域来形成薄膜晶体管阵列,后者形成与每对源极和漏极电极相关联的栅电极。
    • 59. 发明申请
    • Semiconductor film comprising discrete domains of an organic semiconductor and a method of its fabrication
    • 包括有机半导体的离散畴的半导体膜及其制造方法
    • US20080035915A1
    • 2008-02-14
    • US11517449
    • 2006-09-08
    • David RussellThomas KuglerChristopher NewsomeShunpu Ll
    • David RussellThomas KuglerChristopher NewsomeShunpu Ll
    • H01L51/30H01L51/40
    • H01L51/0012H01L51/0004H01L51/0036H01L51/0053H01L51/0545H01L51/0566
    • According to a first aspect, the present invention provides a method for forming a semiconductor film comprising a first step of providing a solution comprising a first organic semiconductor and a second organic semiconductor on a surface of a substrate. The solution is then dried to form the semiconductor film so that it comprises discrete domains of the first organic semiconductor in a matrix of the second organic semiconductor which electrically connects adjacent domains of the first organic semiconductor. The first and second semiconductors are of the same conductivity type. The mobility of charge carriers in the domains of the first organic semiconductor is higher than the mobility of charge carriers in the matrix of the second organic semiconductor. In alternative aspects, the present invention provides methods forming similar semiconductor film products but in which a solution of the first organic semiconductor is deposited separately from the second organic semiconductor and dried to form discrete domains. The present invention also provides a semiconductor film such as produced by the above methods in which both the first and second organic semiconductors are thiophenes.
    • 根据第一方面,本发明提供了一种形成半导体膜的方法,其包括在衬底的表面上提供包含第一有机半导体和第二有机半导体的溶液的第一步骤。 然后将溶液干燥以形成半导体膜,使得其包含第一有机半导体的第一有机半导体的相邻区域中的第二有机半导体的矩阵中的离散区域。 第一和第二半导体具有相同的导电类型。 第一有机半导体的区域中的载流子的迁移率高于第二有机半导体的基体中的电荷载流子的迁移率。 在替代方案中,本发明提供了形成类似的半导体膜产品的方法,但是其中第一有机半导体的溶液与第二有机半导体分开沉积并干燥以形成离散的畴。 本发明还提供了通过上述方法制备的半导体膜,其中第一和第二有机半导体都是噻吩。
    • 60. 发明授权
    • Method of fabricating a desired pattern of electronically functional material
    • 制造电子功能材料所需图案的方法
    • US07271098B2
    • 2007-09-18
    • US11102711
    • 2005-04-11
    • Shunpu LiChristopher NewsomeThomas KuglerDavid Russell
    • Shunpu LiChristopher NewsomeThomas KuglerDavid Russell
    • H01L21/302
    • H01L51/0023H01L51/0022H01L51/0037H01L51/0541
    • Provided is a method forming a desired pattern of electronically functional material 3 on a substrate 1. The method comprises the steps of: creating a first layer of patterning material 2 on the substrate whilst leaving areas of the substrate exposed to define said desired pattern; printing a suspension comprising particles of the electronically functional material 3 in a liquid dispersant, to which the patterning material is impervious, on the patterning material and the exposed substrate; removing at least some of the liquid dispersant from the suspension to consolidate the particles; and applying a first solvent to said consolidated particles which is capable of solubilizing the patterning material 2 and to which the consolidated particles are pervious so that the patterning material is removed from the substrate 1 together with any overlying electronically functional material 3.
    • 提供了在基板1上形成电子功能材料3的期望图案的方法。 该方法包括以下步骤:在衬底上创建图案材料材料2的第一层,同时使衬底的区域暴露以限定所述期望图案; 将包含电子功能材料3的颗粒的悬浮液印刷在图案形成材料和暴露的基底上的图案形成材料不可渗透的液体分散剂中; 从悬浮液中除去至少一些液体分散剂以固结颗粒; 以及将第一溶剂施加到能够溶解图案形成材料2并且固结的颗粒可渗透的所述固结颗粒,使得图案材料与任何上覆的电子功能材料3一起从基板1移除。