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    • 55. 发明授权
    • Nitride semiconductor based bipolar transistor and the method of manufacture thereof
    • 氮化物半导体双极晶体管及其制造方法
    • US07728359B2
    • 2010-06-01
    • US11812591
    • 2007-06-20
    • Tatsuo MoritaTetsuzo Ueda
    • Tatsuo MoritaTetsuzo Ueda
    • H01L51/00
    • H01L29/2003H01L29/201H01L29/66318H01L29/7371
    • In a nitride semiconductor based bipolar transistor, a contact layer formed so as to contact an emitter layer is composed of n-type InAlGaN quaternary mixed crystals, the emitter layer and the contact layer are selectively removed so that the barrier height with the emitter formed thereon is small, and the ohmic electrode contact resistance can be lowered on the InAlGaN quaternary mixed crystals, for example, so that a WSi emitter electrode becomes an eave. A base electrode is formed by a self-aligned process using the emitter electrode as a mask. By such a configuration, the distance between the emitter and the edge of the base electrode is sufficiently shortened, and the base resistance can be lowered. As a result, a bipolar transistor having favorable high-frequency characteristics can be realized.
    • 在基于氮化物半导体的双极型晶体管中,形成为与发射极层接触的接触层由n型InAlGaN四元混晶构成,选择性地去除发射极层和接触层,使得其上形成有发射极的势垒高度 例如,在InAlGaN四元混晶中的欧姆电极接触电阻可以降低,使得WSi发射极成为檐。 通过使用发射电极作为掩模的自对准工艺形成基极。 通过这样的结构,能够充分地缩短发射极与基极的边缘之间的距离,能够降低基极电阻。 结果,可以实现具有良好的高频特性的双极晶体管。
    • 59. 发明授权
    • Semiconductor laser device and manufacturing method thereof
    • 半导体激光器件及其制造方法
    • US07508001B2
    • 2009-03-24
    • US11154807
    • 2005-06-17
    • Tetsuzo UedaMasaaki Yuri
    • Tetsuzo UedaMasaaki Yuri
    • H01L27/15H01L31/12H01L33/00
    • H01S5/34333B82Y20/00H01S5/0213H01S5/0422H01S5/0655H01S5/2009H01S5/2206H01S5/2218H01S5/2232H01S5/3063H01S2304/04H01S2304/12
    • The present invention aims to provide a long-lived semiconductor laser device with low threshold current and available for high-output operation in a blue-violet semiconductor laser device using a nitride semiconductor layer. In the semiconductor laser device, the following layers are sequentially formed on a GaN substrate 1: an n-type GaN layer 2; an n-type AlGaN cladding layer 3, a first n-type GaN guiding layer 4; and a p-type AlGaN blocking layer 6 (current-blocking layer), further a striped opening is formed on a portion of the p-type AlGaN blocking layer 6, a second n-type GaN guiding layer 5 is formed to cover the opening, and the following layers are sequentially formed on the second n-type GaN guiding layer 5: an InGaN multiple quantum well active layer 7; an undoped GaN guiding layer 8; a p-type AlGaN electron overflow suppression layer 9, a p-type AlGaN cladding layer 10, and a p-type GaN contact layer 11.
    • 本发明旨在提供一种具有低阈值电流的长寿命半导体激光器件,并且可用于使用氮化物半导体层的蓝紫色半导体激光器件中的高输出操作。 在半导体激光器件中,在GaN衬底1上依次形成以下层:n型GaN层2; n型AlGaN包覆层3,第一n型GaN引导层4, 和p型AlGaN阻挡层6(电流阻挡层),另外在p型AlGaN阻挡层6的一部分上形成条状开口,形成第二n型GaN引导层5以覆盖开口 并且在第二n型GaN引导层5上依次形成以下层:InGaN多量子阱有源层7; 未掺杂的GaN引导层8; p型AlGaN电子溢出抑制层9,p型AlGaN包覆层10和p型GaN接触层11。