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    • 5. 发明授权
    • Semiconductor device
    • 半导体器件
    • US07479651B2
    • 2009-01-20
    • US11293144
    • 2005-12-05
    • Tomohiro MurataYutaka HiroseTsuyoshi Tanaka
    • Tomohiro MurataYutaka HiroseTsuyoshi Tanaka
    • H01L29/06
    • H01L29/155H01L29/2003H01L29/66462H01L29/7787
    • A semiconductor device comprises an active layer formed on a substrate, a superlattice layer formed on the active layer, and an ohmic electrode formed on the superlattice layer. In the superlattice layer, a first thin film and a second thin film are alternately laminated. The second thin film is made of a semiconductor which has polarization characteristics different from those of the first thin film and a band gap larger than that of the first thin film. An interface region between an upper surface of the first thin film and a lower surface of the second thin film or an interface region between a lower surface of the first thin film and an upper surface of the second thin film, is doped with an impurity.
    • 半导体器件包括形成在衬底上的有源层,形成在有源层上的超晶格层和形成在超晶格层上的欧姆电极。 在超晶格层中交替层叠第一薄膜和第二薄膜。 第二薄膜由具有与第一薄膜不同的偏振特性和比第一薄膜的带隙大的带隙的半导体制成。 在第一薄膜的上表面和第二薄膜的下表面之间或第一薄膜的下表面与第二薄膜的上表面之间的界面区域之间的界面区域掺杂有杂质。