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    • 51. 发明授权
    • Rotary silicon wafer cleaning apparatus
    • 旋转硅片清洗装置
    • US07103990B2
    • 2006-09-12
    • US10498800
    • 2003-09-11
    • Tadahiro OhmiYasuyuki ShiraiTakumi FujitaYukio MinamiNobukazu IkedaAkihiro MorimotoKoji Kawada
    • Tadahiro OhmiYasuyuki ShiraiTakumi FujitaYukio MinamiNobukazu IkedaAkihiro MorimotoKoji Kawada
    • F26B5/08
    • H01L21/67034H01L21/02052
    • It is an object of the present invention to provide a rotation type silicon wafer cleaning device to further raise the stability of a silicon wafer by providing a better hydrogen termination on the silicon wafer after completion of chemical and pure water cleaning treatments.According to the present invention, a rotation type silicon wafer cleaning device has a silicon wafer support/rotation driving mechanism inside the case body for cleaning the silicon wafer at the post chemical cleaning with pure water, drying and hydrogen termination treatments on the outer surface of a silicon wafer is performed by means of installing a silicon wafer drying device comprising a gas supply panel attached to a case body to supply a mixed gas of the hydrogen gas and inactive gas containing a hydrogen gas of more than 0.05%, a mixed gas supply pipe coupled to a gas mixer of the afore-mentioned gas supply panel at one end, a mixed gas heating device to heat the mixed gas in the afore-mentioned gas supply pipe, and a hydrogen radical formation apparatus equipped with a platinum coating film to form hydrogen radical at the gas contacting part where to a high temperature gas heated with the afore-mentioned mixed gas heating device touches, thus to gush out the mixed gas containing hydrogen radical formed with the afore-mentioned radical formation apparatus onto the rotating silicon wafer after cleaning is completed.
    • 本发明的目的是提供一种旋转型硅晶片清洁装置,以在化学和纯净水清洗处理完成之后通过在硅晶片上提供更好的氢终止来进一步提高硅晶片的稳定性。 根据本发明,旋转型硅晶片清洗装置在壳体内部具有硅晶片支撑/旋转驱动机构,用于在后期化学清洗时用纯水清洗硅晶片,在外表面上进行干燥和氢终止处理 通过安装硅晶片干燥装置来执行硅晶片,所述硅晶片干燥装置包括附接到壳体的气体供应板,以供应氢气和含有大于0.05%的氢气的惰性气体的混合气体,混合气体供应 一端连接上述气体供给面板的气体混合器的管道,将上述气体供给管内的混合气体加热的混合气体加热装置以及配备有铂镀膜的氢自由基形成装置, 在与上述混合气体加热装置加热的高温气体接触的气体接触部分处形成氢自由基,从而喷出混合气体 在完成清洁之后,将上述自由基形成装置形成的氢基团固定在旋转的硅晶片上。
    • 57. 发明授权
    • Image processors for reading and outputting data
    • 用于读取和输出数据的图像处理器
    • US06178465B1
    • 2001-01-23
    • US08894607
    • 1997-08-06
    • Yasuyuki ShiraiChiharu Wakabayashi
    • Yasuyuki ShiraiChiharu Wakabayashi
    • G06F300
    • G06T1/20G06T11/60Y10S707/99945Y10S707/99948
    • An image processor which reads and outputs image data. Only by inputting a keyword which causes us to associate an image intuitively, the image processor produces and outputs an image based on a plurality of image data combined on the basis of the input keyword. To this end, an illustration part keyword table contains a plurality of keywords and a plurality of illustration part codes for each keyword. A part arrangement table contains a plurality of image pointer values and their arrangement information in correspondence to illustration part codes. A CPU searches the illustration part keyword table and part arrangement table for a match of the input keyword and reads a plurality of illustration image data corresponding to the keyword from an illustration part image file and arranges the respective illustration images in accordance with the corresponding arrangement information.
    • 一种读取和输出图像数据的图像处理器。 仅通过输入使我们直观地关联图像的关键字,图像处理器基于基于输入的关键字组合的多个图像数据来产生和输出图像。 为此,图示部分关键字表包含关于每个关键字的多个关键字和多个插图部分代码。 部件布置表包含与图示部件代码对应的多个图像指针值及其布置信息。 CPU在图示部分关键词表和部分排列表中搜索输入关键字的匹配,并且从图示部分图像文件中读取与该关键词对应的多个插图图像数据,并根据相应的排列信息排列各自的图示图像 。