专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

51. 发明授权

US6084675A Adjustable beam alignment compensator/retarder with application in spectroscopic ellipsometer and polarimeter systems 有权
标题翻译：可调光束对准补偿器/延迟器，适用于分光椭偏仪和偏光计系统
公开(公告)号：US6084675A
公开(公告)日：2000-07-04
申请号：US246888
申请日：1999-02-08
申请人： Craig M. Herzinger , Blaine D. Johs
发明人： Craig M. Herzinger , Blaine D. Johs
IPC分类号： G01J3/28 , G01J4/00 , G01N21/21
CPC分类号： G01J3/447 , G01J4/00 , G01N21/211 , G01J2003/2866
摘要： Disclosed is a compensator/retarder system which allows adjustment to eliminate introduction of significant deviation and/or displacement into the propagation direction of a beam of electromagnetic radiation caused to interact therewith, even when the present invention retarder system is caused to continuously rotate in a rotating compensator ellipsometer system. Also disclosed is a method of calibration of an ellipsometer/polarimeter system which includes a present invention compensator/retarder system.
摘要翻译：公开了一种补偿器/延迟器系统，其允许调节以消除引起与其相互作用的电磁辐射束的传播方向上的显着偏差和/或位移，即使本发明的延迟器系统在旋转中连续旋转补偿椭圆仪系统。还公开了一种校准椭偏仪/偏振计系统的方法，其包括本发明的补偿器/延迟器系统。

52. 发明授权

US6034777A Methods for uncorrelated evaluation of parameters in parameterized mathematical model equations for window retardence, in ellipsometer and polarimeter systems 有权
标题翻译：用于窗延迟的参数化数学模型方程中参数的不相关评估方法，椭偏仪和偏振计系统
公开(公告)号：US6034777A
公开(公告)日：2000-03-07
申请号：US162217
申请日：1998-09-29
申请人： Blaine D. Johs , Craig M. Herzinger
发明人： Blaine D. Johs , Craig M. Herzinger
IPC分类号： G01N21/21
CPC分类号： G01N21/211
摘要： Disclosed is a method for evaluating parameters in parameterized equations for independently calculating retardence entered to orthogonal components in a beam of electromagnetic radiation which is caused to pass through spatially separated input and output windows, by each of said input and output windows. The present invention finds application in ellipsometric investigation of sample systems present in vacuum chambers, wherein a beam of electromagnetic radiation is caused to pass through an input window, interact with a sample system, and exit through an output window, and where it is necessary to separate out the effects of said input and output windows to arrive at sample system characterizing results.
摘要翻译：公开了一种用于评估参数化方程式中的参数的方法，用于通过所述输入和输出窗口中的每一个独立地计算输入到通过空间分离的输入和输出窗口的电磁辐射束中的正交分量的延迟。本发明应用于存在于真空室中的样品系统的椭圆测量研究中，其中使电磁辐射束通过输入窗口，与样品系统相互作用并通过输出窗口离开，并且其中必须分离所述输入和输出窗口的影响以得到样品系统特征结果。

53. 发明授权

US5956145A System and method for improving data acquisition capability in spectroscopic rotatable element, rotating element, modulation element, and other ellipsometer and polarimeter and the like systems 失效
公开(公告)号：US5956145A
公开(公告)日：1999-09-21
申请号：US17423
申请日：1998-02-02
申请人： Steven E. Green , Craig M. Herzinger , Blaine D. Johs , John A. Woollam , Stephen P. Ducharme
发明人： Steven E. Green , Craig M. Herzinger , Blaine D. Johs , John A. Woollam , Stephen P. Ducharme
IPC分类号： G01J3/28 , G01J4/00 , G01N21/21
CPC分类号： G01N21/211 , G01J4/00 , G01J2003/2866
摘要： Disclosed is a system and method for controlling polarization state determining parameters of a polarized beam of light in an ellipsometer or polarimeter and the like system, (eg. a modulation element ellipsometer system), so that they are in ranges wherein the sensitivity, (of a sample system characterizing PSI and DELTA value monitoring detector used to measure changes in said polarization state resulting from interaction with a "composite sample system," comprised of a sample system per se. and a beam polarization state determining variable retarder, to noise and measurement errors etc. therein), is reduced. The present invention allows determining sample system per se. characterizing PSI and DELTA values, from Composite Sample System characterizing PSI and DELTA values, by compensating for the presence of present invention components, (VR1) and/or VR2), added to an ellipsometer or polarimeter and the like system. The present invention also improves the ability of an ellipsometer or polarimeter and the like system fitted with present invention components (VR1) and/or (VR2) to provide usably accurate and precise sample system characterizing PSI and DELTA determining data values, wherein a sample system per se. investigating polarized beam of light is oriented at other than a Principal or Brewster Angle of Incidence thereto, the use of which Angle of Incidence would otherwise be difficult, if not impossible. Practice of the present invention also allows determination of the "Handedness" of a polarized beam of light, and of sample system Jones or Mueller Matrix component values. As well, the present invention provides means for making system components (VR1) and/or (VR2) added to an ellipsometer or polarimeter and the like system, essentially end user transparent when desired, without removal thereof from said ellipsometer or polarimeter system.

54. 发明授权

US5757494A System and method for improving data acquisition capability in spectroscopic ellipsometers 失效
标题翻译：用于提高光谱椭偏仪数据采集能力的系统和方法
公开(公告)号：US5757494A
公开(公告)日：1998-05-26
申请号：US422346
申请日：1995-04-14
申请人： Steven E. Green , Craig M. Herzinger , Blaine D. Johs , John A. Woollam
发明人： Steven E. Green , Craig M. Herzinger , Blaine D. Johs , John A. Woollam
IPC分类号： C23C14/54 , G01J3/447 , G01J4/00 , G01N21/21 , G01N23/20
CPC分类号： C23C14/54 , G01J3/447 , G01J4/00 , G01N21/211 , G01N23/20058
摘要： The present invention is applicable generally to Spectroscopic Rotatable and Rotating Element Ellipsometers which utilize a relatively large range of wavelengths. Disclosed is a system and method for controlling the polarization state of a polarized beam of light so that it is in a range where the sensitivity of a Polarization State Detector used to measure changes in said polarized beam of light resulting from interaction with a Sample System, to noise and measurement errors etc., is reduced. Exemplified is a system, and method of use, for simultaneously setting both measured ellipsometric ALPHA, and ellipsometric BETA parameter values, (or equivalents), within ranges, in which ranges the sensitivity of transfer functions, and mathematical regressions which utilize said ellipsometric ALPHA and ellipsometric BETA values in the calculation of sample system characterizing PSI and DELTA constant values, to noise and errors in measurement etc., is found to be negligible. The present invention allows obtaining accurate and precise sample system PSI and DELTA Values from an Ellipsometer System in which a polarized beam of light is oriented at other than a Principal of Brewster Angle of Incidence to a sample system, allows determination of DELTA values in ranges otherwise not impossible, allows determination of the "Handedness" of a polarized beam of light, and provides means for determining all of Stokes Vector and Mueller Matrix component values. The present invention also provides means for making all system components added to a conventional ellipsometer system essentially end user transparent when desired, without removal thereof from said ellipsometer system.
摘要翻译：本发明一般适用于使用相对较大波长范围的光谱可旋转和旋转元件椭偏仪。公开了一种用于控制偏振光束的偏振状态的系统和方法，使得其处于用于测量由与样品系统相互作用产生的所述偏振光束的变化的极化状态检测器的灵敏度，降噪，测量误差等。举例说明的是一种系统和使用方法，用于在范围内同时设置测量的椭圆偏振ALPHA和椭圆偏振BETA参数值（或等价物），其范围内的传递函数的灵敏度和使用所述椭圆偏振ALPHA的数学回归和发现表征PSI和DELTA常数值的样本系统的计算中的椭偏测量值BETA值，测量噪声和误差等都是可忽略的。本发明允许从椭圆偏振仪系统获得精确和精确的样本系统PSI和DELTA值，其中偏振光束定向在除了布鲁斯特发生角度的主体之外的样本系统，允许以其它方式确定范围的DELTA值不是不可能的，允许确定偏振光束的“携带”，并且提供用于确定所有斯托克斯矢量和米勒矩阵分量值的装置。本发明还提供了用于使得添加到常规椭偏仪系统的所有系统部件基本上使终端用户在需要时不透明的装置，而不从所述椭偏仪系统中移除。

55. 发明授权

US07349092B1 System for reducing stress induced effects during determination of fluid optical constants 有权
标题翻译：用于在测定流体光学常数期间减少应力诱发效应的系统
公开(公告)号：US07349092B1
公开(公告)日：2008-03-25
申请号：US11256611
申请日：2005-10-24
申请人： Thomas E. Tiwald , John A. Woollam , Galen L. Pfeiffer , Blaine D. Johs , Craig M. Herzinger
发明人： Thomas E. Tiwald , John A. Woollam , Galen L. Pfeiffer , Blaine D. Johs , Craig M. Herzinger
IPC分类号： G01N21/41 , G01J4/00
CPC分类号： G01N21/0303 , G01N21/211
摘要： A system for determination of optical constants of liquids, including provision for reducing stress induced effects while obtaining data.
摘要翻译：一种用于确定液体光学常数的系统，包括在获得数据的同时降低应力诱发效应。

56. 发明授权

US06483586B1 Beam splitting analyzer means in rotating compensator ellipsometer 有权
标题翻译：光束分束分析仪是指旋转补偿椭圆偏振仪
公开(公告)号：US06483586B1
公开(公告)日：2002-11-19
申请号：US09950036
申请日：2001-09-10
申请人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green , Jeffrey S. Hale
发明人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green , Jeffrey S. Hale
IPC分类号： G01N2121
CPC分类号： G01J3/447 , G01J4/00 , G01J2003/2866 , G01N21/211
摘要： Disclosed is a rotating compensator sample system investigation system which includes a source of a beam of electromagnetic radiation, a polarizer, a stage for supporting a sample system, a beam splitting analyzer, and at least two detector systems which are positioned each to intercept a different of the at least two electromagnetic beams which emerge from the beam splitting analyzer. Also disclosed is a regression based approach to calibration which simultaneously extracts a sample system PSI and DELTA.
摘要翻译：公开了一种旋转补偿器样本系统调查系统，其包括电磁辐射源的源，偏振器，用于支撑样本系统的平台，分束分析器和至少两个检测器系统，每个检测器系统被定位成截取不同的的从分束分析仪出现的至少两个电磁波束。还公开了一种基于回归的校准方法，其同时提取样品系统PSI和DELTA。

57. 发明授权

US06353477B1 Regression calibrated spectroscopic rotating compensator ellipsometer system with pseudo-achromatic retarder system 有权
标题翻译：具有伪消色差延迟器系统的回归校准光谱旋转补偿器椭偏仪系统
公开(公告)号：US06353477B1
公开(公告)日：2002-03-05
申请号：US09496011
申请日：2000-02-01
申请人： Blaine D. Johs , Craig M. Herzinger
发明人： Blaine D. Johs , Craig M. Herzinger
IPC分类号： G01N2121
CPC分类号： G01J3/447 , G01J4/00 , G01J2003/2866 , G01N21/21 , G01N21/211 , G02B5/3058 , G02B5/3083 , G02B27/46
摘要： A Spectroscopic Rotating Compensator Material System Investigation System including a Dual Waveplate Pseudo-Achromatic Compensator System, and a Photo-Array for simultaneously detecting a Multiplicity of Wavelengths, is disclosed. The Spectroscopic Rotating Compensator Material System Investigation System is calibrated by a Mathematical Regression based technique involving, where desirable, Parameterization of Calibration Parameters. Calibration is possible utilizing various dimensional Data Set(s) obtained with the Spectroscopic Rotating Compensator Material System Investigation System in a “Material System present” or in a Straight-through” configuration, said data sets being variously normalized to D.C., A.C. or combination D.C. and A.C. components thereof.
摘要翻译：公开了一种包括双波片伪消色差补偿器系统的光谱旋转补偿器材料系统调查系统和用于同时检测波长的多重性的光阵列。光谱旋转补偿器材料系统调查系统通过基于数学回归的技术进行校准，该技术涉及校准参数的参数化。使用在“材料系统存在”或“直通”配置中的光谱旋转补偿器材料系统调查系统获得的各种维度数据集可以进行校准，所述数据集被不同地归一化到DC，AC或组合DC 及其AC成分。

58. 发明授权

US06937341B1 System and method enabling simultaneous investigation of sample with two beams of electromagnetic radiation 有权
标题翻译：系统和方法能够同时对具有两束电磁辐射的样品进行调查
公开(公告)号：US06937341B1
公开(公告)日：2005-08-30
申请号：US10238241
申请日：2002-09-10
申请人： John A. Woollam , Galen L. Pfeiffer , Daniel W. Thompson , Blaine D. Johs , Craig M. Herzinger
发明人： John A. Woollam , Galen L. Pfeiffer , Daniel W. Thompson , Blaine D. Johs , Craig M. Herzinger
IPC分类号： G01N21/21 , G01J4/00 , G01N21/00
CPC分类号： G01N21/211
摘要： Disclosed are system and method for characterizing a system consisting of a fluid sample on a two sided stage, utilizing data obtained by applying, from both sides thereof, beams of electromagnetic radiation to a fluid coated surface in a containing cell volume. The beams can have the same or different wavelength content and/or polarization state, and can be applied at the same or different magnitude angles-of-incidence, and a third typically unpolarized beam can be applied at a normal angle-of-incidence.
摘要翻译：本发明公开了一种用于表征在双面台上由流体样品构成的系统的系统和方法，利用通过从电磁辐射束两侧将电磁辐射束施加到容纳细胞体积中的流体涂覆表面而获得的数据。光束可以具有相同或不同的波长含量和/或偏振状态，并且可以以相同或不同的大小的入射角施加，并且可以在正常入射角施加第三通常的非偏振光束。

59. 发明授权

US06822738B1 Spectroscopic rotating compensator ellipsometer system with pseudo-achromatic retarder system 有权
标题翻译：具有伪消色差延迟器系统的光谱旋转补偿器椭偏仪系统
公开(公告)号：US06822738B1
公开(公告)日：2004-11-23
申请号：US10034800
申请日：2001-12-28
申请人： Blaine D. Johs , Craig M. Herzinger
发明人： Blaine D. Johs , Craig M. Herzinger
IPC分类号： G01N2100
CPC分类号： G01J3/447 , G01J3/0224 , G01J4/00 , G01J2003/2866 , G01N21/211
摘要： Disclosed is a spectroscopic Ellipsometer having pseudo-achromatic compensator(s) having fast axes which vary with wavelength and which provide, a range of retardations, (that is, maximum retardance minus minimum retardance), of less than 90 degrees over a range of wavelengths, said range of retardations being bounded by a minimum of preferably at least 30 degrees, to a maximum of less than 135 degrees. Calibration is achieved by a Mathematical Regression based technique involving, where desirable, Parameterization of Calibration Parameters. Various Dimensional Data Set(s) obtained with the Spectroscopic Ellipsometer configured in a Sample, present” or in a Straight-through” configuration, are variously normalized to D.C., A.C. or combination D.C. and A.C. components. Sample analysis using a detector provided intensity signal simultaneously comprising 2&ohgr; and 4&ohgr; signals simultaneously, and use of un-normalized A.C. and/or D.C. signals in reflectance monitoring are also disclosed.
摘要翻译：公开了一种光谱椭圆计，其具有伪波消除补偿器，其具有随波长变化的快轴，并且在波长范围内提供小于90度的延迟范围（即最大延迟减去最小延迟）所述延迟范围由最小至少30度的最小值限制到最大不超过135度。通过基于数学回归的技术实现校准，该技术涉及校准参数的参数化。使用配置在样品中的“或”直通“配置的样品中的光谱椭圆计数器获得的各种尺寸数据集被不同地归一化为D.C.，A.C.或组合D.C.和A.C.组分。还公开了使用检测器提供的同时包含2omega和4omega信号的强度信号的样本分析，并且还公开了在反射率监测中使用未归一化的交直流信号和/或直流信号。

60. 发明授权

US06118537A Multiple tipped berek plate optical retarder elements for use in spectroscopic ellipsometer and polarimeter systems 有权
标题翻译：用于光谱椭圆光度计和偏光计系统的多个倾斜的人造革板光学延迟器元件
公开(公告)号：US06118537A
公开(公告)日：2000-09-12
申请号：US223822
申请日：1999-01-04
申请人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green
发明人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green
IPC分类号： G01J3/28 , G02B5/30 , G01N21/21
CPC分类号： G02B5/3083 , G01J2003/2866
摘要： Disclosed are retarder systems, for entering retardation between orthogonal components of an electromagnetic beam of radiation, having first and second Berek-type retarders which each present with first and second essentially parallel sides. The first and second Berek-type retarders are oriented, as viewed in side elevation, with first and second sides of one Berek-type retarder being oriented other than parallel to first and second sides of the other Berek-type retarder. During use in a spectroscopic ellipsometer/polarimeter system, a beam of electromagnetic radiation exits in a propagation direction which is essentially undeviated and undisplaced from the direction of an incident beam of electromagnetic radiation, even when the retarder system is caused to rotate about the locus of the beam of electromagnetic radiation. A system with similarly oriented third and fourth Berek-type retarders, sequentially placed after the first and second Berek-type retarders, is also disclosed.
摘要翻译：公开了用于在电磁辐射束的正交部件之间输入延迟的延迟器系统，其具有第一和第二Berek型延迟器，每个Berek型延迟器具有第一和第二基本平行的侧面。第一和第二Berek型延迟器从侧视图中被定向，其中一个Berek型延迟器的第一和第二侧面定向成不同于另一Berek型延迟器的第一和第二侧。在光谱椭偏仪/偏振计系统中使用时，电磁辐射束在传播方向上离开，即使当延迟器系统绕电磁辐射的轨迹旋转电磁辐射束。还公开了具有相似方向的第三和第四Berek型延迟器的系统，其顺序地放置在第一和第二Berek型延迟器之后。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式