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51. 发明授权

US06372285B1 Method of forming liquid film 有权
公开(公告)号：US06372285B1
公开(公告)日：2002-04-16
申请号：US09818610
申请日：2001-03-28
申请人： Shinichi Ito , Katsuya Okumura
发明人： Shinichi Ito , Katsuya Okumura
IPC分类号： B05D512
摘要： A liquid output portion is arranged above and moves relative to a semiconductor substrate with determined film formation and non-film-formation regions. The liquid output portion continuously outputs a liquid in a constant amount to the substrate. Below the liquid output portion is a liquid shut-out-portion. A liquid controlled to spread in a constant amount is continuously output from the liquid output nozzle to the substrate. While the nozzle and the substrate relatively move, the liquid is supplied to a first region, and the liquid is supplied to a second region in such a way that the liquid supplied and spread in the second region is in contact with the liquid supplied and spread in the first region. Where projections and depressions are formed on the surface of the substrate, an amount of the liquid supplied varies depending upon the ratio between the projections and depressions.

52. 发明授权

US06333493B1 Heat treating method and heat treating apparatus 失效
标题翻译：热处理方法和热处理装置
公开(公告)号：US06333493B1
公开(公告)日：2001-12-25
申请号：US09666108
申请日：2000-09-20
申请人： Hideaki Sakurai , Shinichi Ito , Iwao Higashikawa , Akitoshi Kumagae
发明人： Hideaki Sakurai , Shinichi Ito , Iwao Higashikawa , Akitoshi Kumagae
IPC分类号： H05B302
CPC分类号： H01L21/67115 , F26B3/28 , H05B3/0047
摘要： Disclosed is a heat treating method for heating a target substrate by means of light irradiation, in which a light irradiation treatment is applied to the target substrate a plurality of times such that adjacent light irradiated regions on the target substrate partially overlap with each other and that the adjacent light irradiated regions do not overlap with each other in the light irradiating periods.
摘要翻译：公开了一种用于通过光照射加热目标基板的热处理方法，其中对目标基板进行多次光照射处理，使得目标基板上的相邻光照射区域彼此部分重叠，并且这些相互之间的相邻光照射区域彼此部分重叠，相邻的光照射区域在光照射期间不重叠。

53. 发明授权

US06191397B1 Heating device, method for evaluating heating device and pattern forming method 失效
标题翻译：加热装置，加热装置的评价方法和图案形成方法
公开(公告)号：US06191397B1
公开(公告)日：2001-02-20
申请号：US09345749
申请日：1999-07-01
申请人： Kei Hayasaki , Shinichi Ito , Kenji Kawano
发明人： Kei Hayasaki , Shinichi Ito , Kenji Kawano
IPC分类号： H01L21205
CPC分类号： H01L21/67115 , G03F7/168 , G03F7/38
摘要： A heating apparatus for performing heat treatment on a wafer applied with a resist before or after exposure includes a heating plate for heating a wafer which is placed on the heating plate, a light intensity detecting apparatus for irradiating light on the wafer to detect intensity of reflected light from the resist on the wafer, and a control section for controlling heating performed by the heating plate on the basis of the detected intensity of reflected light so that heating amount applied to a plurality of wafers becomes constant. Accordingly, the heating amount of the wafer can be controlled to be constant and variations in dimension of resist patterns can be reduced.
摘要翻译：用于在曝光前后施加抗蚀剂的晶片上进行热处理的加热装置包括用于加热放置在加热板上的晶片的加热板，用于在晶片上照射光以检测反射的强度的光强度检测装置来自晶片上的抗蚀剂的光，以及控制部分，用于根据检测到的反射光强度控制由加热板进行的加热，使得施加到多个晶片的加热量变得恒定。因此，可以将晶片的加热量控制为恒定，并且可以减小抗蚀剂图案的尺寸变化。

54. 发明授权

US06169243A Automatic performance apparatus with quick start by accelerated loading of setting data 有权
标题翻译：自动演奏装置，通过加速加载设定数据快速启动
公开(公告)号：US06169243A
公开(公告)日：2001-01-02
申请号：US09510841
申请日：2000-02-23
申请人： Shinichi Ito
发明人： Shinichi Ito
IPC分类号： G01H700
CPC分类号： G10K15/02
摘要： An automatic performance apparatus is constituted by a memory section, a performance section, and a control section. The memory section stores music sequence data used for carrying out an automatic performance of a music piece, and condition setting data used for setting a condition of the automatic performance. The performance section reads out the condition setting data from the memory section to set the condition of the automatic performance, and reads out the music sequence data from the memory section to carry out the automatic performance under the set condition. The control section controls a first rate of reading of the condition setting data faster than a second rate of reading of the music sequence data, thereby accelerating the setting of the condition prior to the automatic performance.
摘要翻译：自动演奏装置由存储部分，演奏部分和控制部分构成。存储器部分存储用于执行乐曲的自动演奏的音乐序列数据和用于设置自动演奏的条件的条件设置数据。演奏部分从存储器部分读出条件设置数据以设置自动演奏的状态，并从存储器部分读出音乐序列数据，以在设定条件下进行自动演奏。所述控制部分比所述音乐序列数据的第二读取速度更快地控制所述条件设置数据的第一读取速率，从而在所述自动演奏之前加速所述条件的设置。

55. 发明授权

US06038767A Method and apparatus for assembling piston assembly 失效
标题翻译：组装活塞组件的方法和装置
公开(公告)号：US06038767A
公开(公告)日：2000-03-21
申请号：US29077
申请日：1998-04-27
申请人： Shinichi Ito
发明人： Shinichi Ito
IPC分类号： F04B27/08 , F04B39/14 , B23P15/00
CPC分类号： F04B39/14 , F04B27/0878 , Y10T29/49229 , Y10T29/49236
摘要： A method and apparatus to permit automatic installation of pistons and shoes on a swash plate, for reducing in costs and improving the quality of a swash plate type compressor. A slide table 52 is provided which is movable in a direction perpendicular to the axis O of a rotating shaft 2. A plurality of pistons 4 to be assembled are disposed on the slide table 52 in a manner parallel to one another. When the slide table 52 is advances, the shoes 7 disposed within a notch 4a in each of the pistons 4 on the slide table 52 are raised to a substantially vertical position by a presser member 54 and the piston 4 is aligned with the peripheral edge of the swash plate. A pair of heads 50 and 51 for supporting the rotating shaft 2 are provided with a shaft support portion 55 for supporting the rotating shaft 2 thereon. A plurality of piston support portions 67 for supporting the pistons are provided around the shaft support portion at circumferential positions. The pistons on the slide table 52 are supported by the piston support portions 57 in their assembled positions on the peripheral edge of the swash plate. The piston support portions 67 are unitarily rotated a predetermined pitch in synchronous with advancement of the slide table.
摘要翻译： PCT No.PCT / JP96 / 02243 Sec。 371日期：1998年4月27日 102（e）日期1998年4月27日PCT提交1996年8月7日PCT公布。公开号WO98 / 05865 日期1998年2月12日一种允许在斜盘上自动安装活塞和鞋子的方法和装置，用于降低成本并提高斜盘式压缩机的质量。设置有能够在与旋转轴2的轴线O正交的方向上移动的滑动台52.在滑动台52上以相互平行的方式配置多个要组装的活塞4。当滑台52前进时，通过压脚构件54将设置在滑台52上的每个活塞4中的切口4a内的鞋7升高到基本垂直的位置，并且活塞4与斜盘。用于支撑旋转轴2的一对头50和51设置有用于在其上支撑旋转轴2的轴支撑部55。用于支撑活塞的多个活塞支撑部67围绕轴支撑部设置在周向位置。滑动台52上的活塞由活塞支撑部分57支撑在旋转斜盘的周边边缘上的组装位置。活塞支撑部67与滑动台的前进同步地一体地旋转规定的间距。

56. 发明授权

US6030729A Light exposure mask 失效
标题翻译：曝光面膜
公开(公告)号：US6030729A
公开(公告)日：2000-02-29
申请号：US79170
申请日：1998-05-15
申请人： Shinichi Ito , Kenji Kawano , Satoshi Tanaka
发明人： Shinichi Ito , Kenji Kawano , Satoshi Tanaka
IPC分类号： G03F1/30 , G03F1/68 , H01L21/027 , G03F9/00
CPC分类号： G03F1/30 , G03F1/26
摘要： Attention is paid to the shifting of a focal point depth due to an interference between some light penetrating even a light shielding film, that is, a light shielding film having a nonzero transmittance, and light passing through an opening. Study has been made about how both the transmittance of the light shielding film and the phase difference between the light penetrating the light shielding film and light passing through a light transmitting medium the same in thickness as the light shielding film vary, arriving at a conclusion that the broadest focal point tolerance can be obtained if a phase difference of substantially n.multidot..pi. (n: an positive integer) exists between light penetrating the light shielding film and light passing through the light transmitting medium.
摘要翻译：注意由于一些穿透即使是遮光膜的光，即具有非零透射率的遮光膜和穿过开口的光之间的干涉也导致焦点深度偏移。已经研究了遮光膜的透射率以及透过遮光膜的光和穿过光透射介质的光的厚度与遮光膜的厚度相同的相位差是如何变化的，得出如下结论：如果穿透遮光膜的光与通过光传输介质的光之间存在基本上nx pi（n：正整数）的相位差，则可以获得最宽的焦点公差。

57. 发明授权

US5837405A Reticle 失效
标题翻译：标线
公开(公告)号：US5837405A
公开(公告)日：1998-11-17
申请号：US958869
申请日：1997-10-27
申请人： Yoko Tomofuji , Makoto Nakase , Takashi Sato , Hiroaki Hazama , Haruki Komano , Shinichi Ito
发明人： Yoko Tomofuji , Makoto Nakase , Takashi Sato , Hiroaki Hazama , Haruki Komano , Shinichi Ito
IPC分类号： G03F1/00 , G03F9/00
CPC分类号： G03F1/32 , G03F1/29 , G03F1/36
摘要： In a reticle, a semi-transparent film pattern in place of a light blocking film pattern is used as a mask pattern having a size within a certain range, whereby an exposure system can be improved in resolution limit and faithful pattern transfer can be realized with a constant light quantity. A reticle may be of a stacked layer structure which comprises a shift film for providing a different optical path to exposure light, a mask substrate formed on the top or bottom of the shift film, and a transmissivity ratio adjustment layer having a predetermined transmissivity ratio to the exposure light. The material of a phase shifter may be adjusted in amplitude transmissivity ratio so that a shifter width for effectively improving a contrast can be made large and an accuracy necessary for a shifter width can be loosened. The mask pattern may include a semi-transparent film pattern which is made of silicon, a silicon compound, a mixture containing silicon, germanium, a germanium compound or a mixture containing germanium to provide a different optical path from that of the transparent part with respect to lithographic light. A silicon compound, a mixture containing silicon, germanium, a germanium compound or a mixture containing germanium is controlled in its composition ratio to form a semi-transparent film pattern on a transparent substrate.
摘要翻译：在掩模版中，代替遮光膜图案的半透明膜图案被用作尺寸在一定范围内的掩模图案，由此可以提高曝光系统的分辨率极限，并且可以实现忠实的图案转印恒定光量。掩模版可以是堆叠层结构，其包括用于向曝光光提供不同光路的移动膜，形成在换挡膜的顶部或底部上的掩模基板，以及透射比调节层，其具有预定的透射率与曝光灯。可以调节移相器的材料的振幅透射比，从而可以使用于有效地改善对比度的移位器宽度变大，并且可以松动换档器宽度所需的准确度。掩模图案可以包括由硅制成的半透明膜图案，硅化合物，含有硅，锗，锗化合物或含有锗的混合物的混合物，以提供与透明部分不同的光路，到平版印刷光。将硅化合物，含有硅，锗，锗化合物或含有锗的混合物的混合物以其组成比控制，以在透明基板上形成半透明膜图案。

58. 发明授权

US5736664A Automatic accompaniment data-processing method and apparatus and apparatus with accompaniment section selection 失效
标题翻译：自动伴奏数据处理方法及伴奏部分选择的装置和装置
公开(公告)号：US5736664A
公开(公告)日：1998-04-07
申请号：US627082
申请日：1996-04-03
申请人： Shinichi Ito , Masao Kondo , Keiji Kawakami
发明人： Shinichi Ito , Masao Kondo , Keiji Kawakami
IPC分类号： G10H1/00 , G10H1/36 , G10H1/40 , G09B15/02
CPC分类号： G10H1/36
摘要： Automatic accompaniment performance data for a plurality of sections of a musical piece are stored. One of the plurality of sections is designated. Automatic accompaniment performance data for the designated one section from the automatic performance data for the plurality of sections is read out to play automatic accompaniment performance. Automatic accompaniment performance data for another section is used in place of the automatic accompaniment performance data for the designated one section if the automatic accompaniment performance data for the designated on section is not stored.
摘要翻译：存储乐曲的多个部分的自动伴奏演奏数据。指定多个部分中的一个。从多个部分的自动演奏数据中指定的一个部分的自动伴奏演奏数据被读出以播放自动伴奏演奏。如果没有存储指定的部分的自动伴奏演奏数据，则使用另一部分的自动伴奏演奏数据代替指定的一部分的自动伴奏演奏数据。

59. 发明授权

US5679484A Exposure mask, exposure mask substrate, method for fabricating the same, and method for forming pattern based on exposure mask 失效
公开(公告)号：US5679484A
公开(公告)日：1997-10-21
申请号：US757957
申请日：1996-11-25
申请人： Shinichi Ito , Haruo Okano , Toru Watanabe , Katsuya Okumura
发明人： Shinichi Ito , Haruo Okano , Toru Watanabe , Katsuya Okumura
IPC分类号： G03F1/00 , G03F1/26 , G03F1/32 , G03F9/00
CPC分类号： G03F1/32 , G03F1/26
摘要： An exposure mask having an excellent alignment accuracy between patterns, which is prepared by first forming on a light transmissive substrate a light shielding film or a semi-transparent film pattern (first pattern) somewhat larger than a desired dimension, forming thereon a semi-transparent film or a light transmissive film pattern (second pattern) so as to include all patterns of the desired dimensions made up of a light shielding part, a semi-transparent part and a light transmissive part, and then removing a projected part of the first pattern with use of the second pattern as a mask. The semi-transparent film is formed of at least two layers each of which contains a common element, thus the semi-transparent film can be made with use of the same apparatus and when patterning, etching process can be carried out with use of the same etchant. Further, since in a mask including the semi-transparent pattern, at least that area of a non-pattern zone where light reaches a wafer through the transfer, acts to shield the exposure light, too narrowed pattern or insufficient focal depth can be prevented.

60. 发明授权

US5668337A Automatic performance device having a note conversion function 失效
标题翻译：自动演奏设备具有音符转换功能
公开(公告)号：US5668337A
公开(公告)日：1997-09-16
申请号：US583450
申请日：1996-01-05
申请人： Masao Kondo , Shinichi Ito , Hiroki Nakazono
发明人： Masao Kondo , Shinichi Ito , Hiroki Nakazono
IPC分类号： G10H1/00 , G10H1/36 , G10H1/38
CPC分类号： G10H1/36 , G10H1/0041 , G10H1/38 , G10H2210/011
摘要： In a memory, there are stored a plurality of first automatic performance data and a plurality of second automatic performance data. Also, first note-conversion-related information is stored separately in corresponding relations to the individual first automatic performance data. Second note-conversion-related information is stored as information common to the second automatic performance data. In executing an automatic performance, the first and second automatic performance data are read out in accordance with the sequence of the performance so as to reproduce sounds based on note data contained in the read-out automatic performance data. During that time, notes of the first automatic performance data are converted in accordance with the first note-conversion-related information read out in correspondence with the first automatic performance data, while notes of the second automatic performance data are converted in accordance with the common second note-conversion-related information. Where automatic performance sounds are generatable in a plurality of channels, the note conversion process may be executed by processing automatic performance data to be generated in some of the channels as the first automatic performance data and automatic performance data to be generated in the other channels as the second automatic performance data.
摘要翻译：在存储器中，存储有多个第一自动演奏数据和多个第二自动演奏数据。此外，第一音符转换相关信息分别存储在与单独的第一自动演奏数据的对应关系中。第二音符转换相关信息被存储为第二自动演奏数据共同的信息。在执行自动演奏时，根据演奏顺序读出第一和第二自动演奏数据，以便根据读出的自动演奏数据中包含的音符数据再现声音。在此期间，根据与第一自动演奏数据相对应地读出的第一音符转换相关信息，转换第一自动演奏数据的音符，同时根据公共状况转换第二自动演奏数据的音符第二个音符转换相关信息。在多个通道中可产生自动演奏声音的情况下，可以通过处理将在一些频道中生成的自动演奏数据作为要在其他频道中生成的第一自动演奏数据和自动演奏数据来执行音符转换处理第二个自动演奏数据。

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