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51. 发明授权

US5343291A Method and apparatus for measuring an interval between two objects 失效
标题翻译：用于测量两个物体间隔的方法和装置
公开(公告)号：US5343291A
公开(公告)日：1994-08-30
申请号：US851109
申请日：1992-03-16
申请人： Mitsutoshi Ohwada , Masakazu Matsugu , Shigeyuki Suda , Minoru Yoshii , Yukichi Niwa , Noriyuki Nose , Kenji Saitoh , Masanobu Hasegawa
发明人： Mitsutoshi Ohwada , Masakazu Matsugu , Shigeyuki Suda , Minoru Yoshii , Yukichi Niwa , Noriyuki Nose , Kenji Saitoh , Masanobu Hasegawa
IPC分类号： G03F9/00 , G01B11/02
CPC分类号： G03F9/7023 , G03F9/7049
摘要： A device for measuring an interval between two plate-like objects includes a light source for projecting a light toward the objects, a detector for detecting a position of incidence, upon a predetermined surface, of the light projected by the light source and deflected by the two objects, and a calculating portion for measuring the interval of the two objects on the basis of the detection by the detector.
摘要翻译：用于测量两个板状物体之间的间隔的装置包括：用于向物体投射光的光源;检测器，用于检测由光源投射并被光源偏转的预定表面上的入射位置; 两个物体和用于根据检测器的检测来测量两个物体的间隔的计算部分。

52. 发明授权

US5319444A Position detecting method and apparatus 失效
标题翻译：位置检测方法和装置
公开(公告)号：US5319444A
公开(公告)日：1994-06-07
申请号：US20464
申请日：1993-02-22
申请人： Kenji Saitoh , Masakazu Matsugu , Yukichi Niwa , Noriyuki Nose , Minoru Yoshii , Shigeyuki Suda
发明人： Kenji Saitoh , Masakazu Matsugu , Yukichi Niwa , Noriyuki Nose , Minoru Yoshii , Shigeyuki Suda
IPC分类号： G03F9/00 , G01B11/14 , G01N21/86
CPC分类号： G03F9/7049
摘要： A method of detecting relative positional deviation between first and second objects. The method includes the steps of providing the first object with a first mark which functions as a lens, providing the second object with a second mark which functions as a lens, providing an optical system between the first and second objects, directing a radiation beam through the first mark and the optical system to the second mark, and detecting any shift of the radiation beam from the second mark irradiated with the radiation beam from the optical system, to detect the relative positional deviation of the first and second objects.
摘要翻译：一种检测第一和第二物体之间的相对位置偏差的方法。该方法包括以下步骤：向第一物体提供用作透镜的第一标记，为第二物体提供用作透镜的第二标记，在第一和第二物体之间提供光学系统，引导辐射束通过第一标记和第二标记的光学系统，并且检测来自用来自光学系统的辐射束照射的第二标记的辐射束的任何偏移，以检测第一和第二物体的相对位置偏差。

53. 发明授权

US5317615A Exposure apparatus 失效
标题翻译：曝光装置
公开(公告)号：US5317615A
公开(公告)日：1994-05-31
申请号：US987554
申请日：1992-12-08
申请人： Ryuichi Ebinuma , Nobutoshi Mizusawa , Takao Kariya , Shigeyuki Suda , Shunichi Uzawa , Takayuki Hasegawa
发明人： Ryuichi Ebinuma , Nobutoshi Mizusawa , Takao Kariya , Shigeyuki Suda , Shunichi Uzawa , Takayuki Hasegawa
IPC分类号： G03F7/20 , G03F9/00 , G21K5/00
CPC分类号： G03F7/70066 , G03F7/70858 , G03F7/70891 , G03F9/70
摘要： An exposure apparatus and method for exposing a workpiece to a pattern of an original with radiation includes a masking device having movable blades for variably defining an aperture to selectively block and transmit the radiation to define on the workpiece a desired exposure zone corresponding to the aperture, the masking device having a window, and a detector for detecting the positional deviation between the original and the workpiece by using light passing through the window of the masking device.
摘要翻译：一种用于将工件暴露于具有辐射的原稿图案的曝光装置和方法包括：具有可动刀片的掩模装置，用于可变地限定孔径以选择性地阻挡和透射辐射，以在工件上限定对应于孔的期望曝光区域，具有窗口的掩蔽装置和用于通过使用穿过掩蔽装置的窗口的光检测原件和工件之间的位置偏差的检测器。

54. 发明授权

US5294980A Positioning detecting method and apparatus 失效
标题翻译：定位检测方法及装置
公开(公告)号：US5294980A
公开(公告)日：1994-03-15
申请号：US58662
申请日：1993-05-10
申请人： Masakazu Matsugu , Kenji Saitoh , Yukichi Niwa , Noriyuki Nose , Ryo Kuroda , Shigeyuki Suda
发明人： Masakazu Matsugu , Kenji Saitoh , Yukichi Niwa , Noriyuki Nose , Ryo Kuroda , Shigeyuki Suda
IPC分类号： G03F9/00 , G01B11/00 , G01N21/85
CPC分类号： G03F9/70
摘要： A device for detecting a relative positional relationship between first and second objects with respect to a predetermined direction includes an illumination system for irradiating the first object with light, wherein the first and second objects are provided with first and second physical optic elements, respectively, each having a light converging or diverging function in at least one direction and wherein the illumination system illuminates the first physical optic element. A photodetecting system detects light passing through the first object and emanating from the second object, and is operable to detect light convergently or divergently influenced by both of the first and physical optic elements, such that the relative positional relationship between the first and second objects can be detected on the basis of the detection by the photodetecting system. At least one of the first and second physical optic elements has a light converging or diverging function in a direction perpendicular to the one direction and has different focal lengths in the perpendicular direction and in the one direction.
摘要翻译：用于检测相对于预定方向的第一和第二物体之间的相对位置关系的装置包括用于用光照射第一物体的照明系统，其中第一和第二物体分别设置有第一和第二物理光学元件，在至少一个方向上具有聚光或发散功能，并且其中所述照明系统照亮所述第一物理光学元件。光检测系统检测穿过第一物体并从第二物体发出的光，并且可操作以从第一物理光学元件和物理光学元件两者收敛或分散地检测光，使得第一和第二物体之间的相对位置关系基于光检测系统的检测来检测。第一和第二物理光学元件中的至少一个在垂直于一个方向的方向上具有聚光或发散功能，并且在垂直方向和一个方向上具有不同的焦距。

55. 发明授权

US4927250A Optical system for compensating chromatic abherration of image 失效
标题翻译：用于补偿图像色彩饱和度的光学系统
公开(公告)号：US4927250A
公开(公告)日：1990-05-22
申请号：US232533
申请日：1988-08-16
申请人： Shigeyuki Suda
发明人： Shigeyuki Suda
IPC分类号： G02B15/167 , G02B15/173 , G02B26/08 , G02B27/00 , G02B27/64
CPC分类号： G02B15/173 , G02B26/08 , G02B27/0025 , G02B27/646
摘要： An optical system comprises an image deflector having a variable refraction angle for forcibly moving an object image formed by an objective lens onto an image plane, and an aberration suppressor linked to the image deflector for suppressing a chromatic aberration developed in the object image due to the light refraction by the image deflector.
摘要翻译：光学系统包括具有可变折射角的图像偏转器，用于将由物镜形成的物体图像强制移动到图像平面上;以及像差抑制器，其连接到图像偏转器，用于抑制因对象图像而产生的色差图像偏转器的光折射。

56. 发明授权

US4828373A Aspherical single lens 失效
标题翻译：非球面单镜
公开(公告)号：US4828373A
公开(公告)日：1989-05-09
申请号：US110581
申请日：1987-10-16
申请人： Shigeyuki Suda , Masayuki Suzuki
发明人： Shigeyuki Suda , Masayuki Suzuki
IPC分类号： G02B3/02 , G02B3/04 , G02B13/18
CPC分类号： G02B3/02 , G02B13/18 , G02B3/04
摘要： An aspherical single lens of compact construction and good image-forming performance which is obtained by shaping the first surface into such an aspherical configuration the curvature radius of which increases gradually toward the periphery from the center while satisfying the following conditions:0.42
摘要翻译：一种紧凑结构的非球面单透镜和良好的成像性能，其通过将第一表面成形为其中心曲率半径从中心逐渐向周边逐渐增加而获得，同时满足以下条件：0.42

57. 发明授权

US4802746A Variable-focus optical element and focus detecting device utilizing the same 失效
标题翻译：可变焦光学元件和利用其的焦点检测装置
公开(公告)号：US4802746A
公开(公告)日：1989-02-07
申请号：US832649
申请日：1986-02-25
申请人： Takeshi Baba , Shigeyuki Suda , Noriyuki Nose , Eigo Kawakami , Toshiyuki Nakajima , Nobuo Kushibiki
发明人： Takeshi Baba , Shigeyuki Suda , Noriyuki Nose , Eigo Kawakami , Toshiyuki Nakajima , Nobuo Kushibiki
IPC分类号： G02B3/14 , G02B7/36
CPC分类号： G02B7/36 , G02B3/14
摘要： A variable focus optical element comprises plural elastic members superposed in the axial direction and a deforming member having an aperture to cause the elastic member to protrude therefrom or descend therein thereby deforming the surface of the elastic members, and the modulus of elasticity of an elastic member at the protruding side is selected larger than that of another elastic member adjacent to first-mentioned elastic member at the protruding side. A focus detecting device comprises an imaging optical system having a variable-focus optical element, an image sensor provided at a determined image plane of the imaging optical system or an optically equivalent position, a sharpness detecting device for detecting the sharpness of the image from image signals obtained from the image sensor, and a device for varying the refractive power of the variable-focus optical element, and the focus state of the image on the image sensor is detected by comparing the sharpnesses detected by the sharpness detecting device at plural refractive powers of the variable-focus optical element.
摘要翻译：可变焦距光学元件包括沿轴向重叠的多个弹性构件和具有孔的变形构件，以使弹性构件从其突出或下降，从而使弹性构件的表面变形，并且弹性构件的弹性模量在突出侧的突出侧被选择为大于在突出侧与第一弹性构件相邻的另一个弹性构件的突出侧。焦点检测装置包括具有可变焦点光学元件的成像光学系统，设置在成像光学系统的确定的图像平面上的图像传感器或光学等效位置，用于从图像中检测图像的清晰度的锐度检测装置通过将由锐度检测装置检测的锐度与多个折射力进行比较来检测从图像传感器获得的信号和用于改变可变焦点光学元件的折射力的装置和图像在图像传感器上的聚焦状态的可变焦光学元件。

58. 发明授权

US4788596A Image stabilizing device 失效
标题翻译：影像稳定装置
公开(公告)号：US4788596A
公开(公告)日：1988-11-29
申请号：US855732
申请日：1986-04-25
申请人： Eigo Kawakami , Yukichi Niwa , Mitsutoshi Ohwada , Yasuo Ogino , Minoru Yoshii , Shigeyuki Suda
发明人： Eigo Kawakami , Yukichi Niwa , Mitsutoshi Ohwada , Yasuo Ogino , Minoru Yoshii , Shigeyuki Suda
IPC分类号： H04N5/232 , H04N5/228
CPC分类号： H04N5/23254 , H04N5/23212 , H04N5/23248 , H04N5/23287
摘要： A characteristic point such as an image contrast of a target image in an image screen of an object produced by an image sensor is counted, a correlation between counts at two points in time is determined. A drive means for preventing vibration of an imaging lens is controlled in accordance with the correlation signal and imaging information such as in-focus or out-of-focus information.
摘要翻译：计算特征点，例如由图像传感器产生的对象的图像画面中的目标图像的图像对比度，确定两个时间点的计数之间的相关性。根据相关信号和诸如焦点内或焦点外信息的成像信息来控制用于防止成像镜头的振动的驱动装置。

59. 发明授权

US4780739A Anti-vibration imaging device 失效
标题翻译：防震成像装置
公开(公告)号：US4780739A
公开(公告)日：1988-10-25
申请号：US900997
申请日：1986-08-27
申请人： Eigo Kawakami , Yukichi Niwa , Yasuo Ogino , Minoru Yoshii , Shigeyuki Suda , Mitsutoshi Ohwada
发明人： Eigo Kawakami , Yukichi Niwa , Yasuo Ogino , Minoru Yoshii , Shigeyuki Suda , Mitsutoshi Ohwada
IPC分类号： G02B27/64 , H04N5/232 , G03B7/08
CPC分类号： H04N5/23254 , G02B27/646 , H04N5/23248 , H04N5/23287 , G03B2217/005
摘要： An imaging device has detection means for detecting an image vibration of the imaging device and drive means for driving at least one of a photoelectric conversion device for converting a light of an object transmitted through a lens system of the imaging device to an electrical signal and the imaging device itself in a direction to cancel the vibration. For a high frequency image vibration, the vibration is compensated by using a piezoelectric device.
摘要翻译：一种成像装置具有用于检测成像装置的图像振动的检测装置和用于驱动用于将通过成像装置的透镜系统传输的物体的光转换成电信号的光电转换装置中的至少一个的驱动装置，成像装置本身在消除振动的方向上。对于高频图像振动，通过使用压电装置来补偿振动。

60. 发明授权

US4776679A Objective of variable focal length 失效
标题翻译：可变焦距的目的
公开(公告)号：US4776679A
公开(公告)日：1988-10-11
申请号：US872139
申请日：1986-06-09
申请人： Nozomu Kitagishi , Hiroki Nakayama , Shigeyuki Suda , Jun Hattori , Akihisa Horiuchi
发明人： Nozomu Kitagishi , Hiroki Nakayama , Shigeyuki Suda , Jun Hattori , Akihisa Horiuchi
IPC分类号： G02B15/14 , G02B3/00 , G02B15/16 , G02B15/173
CPC分类号： G02B15/173
摘要： A variable focal length objective of which at least one of a pulrality of lens units is moved to vary the image magnification, wherein at least one of the plurality of lens units has at least one refractive index distribution type lens provided with a condition of N.sub.1 >0 as, taking the distance from the optical axis to a radial direction as h, the refractive index distribution is expressed by N(h)=N.sub.0 +N.sub.1 h.sup.2 +N.sub.2 h.sup.4 +N.sub.3 h.sup.6 +. . . (N.sub.0, N.sub.1, N.sub.2 . . . are constants), and satisfies the following conditions: ##EQU1## where fmax: the maximum focal length;fmin: the minimum focal length;Lmin: the optical total length when the total length is shortest;Y: the maximum image height;N.sub.1 *: the coefficient of h.sup.2 of the refractive index distribution type lens having a refractive index distribution of N.sub.1 >0;D*: the lens thickness of the refractive index distribution type lens having the refractive index distribution of N.sub.1 >0.
摘要翻译：可变焦距物镜，其中移动透镜单元的脉冲中的至少一个以改变图像放大率，其中多个透镜单元中的至少一个具有至少一个折射率分布型透镜，其具有N1> 0，从光轴到径向的距离为h，折射率分布由N（h）= N0 + N1h2 + N2h4 + N3h6 +表示。。。（N0，N1，N2 ...是常数），满足以下条件： SIGMA 2N1 * D *> 0.2 / fmin其中fmax：最大焦距; fmin：最小焦距; Lmin：总长度最短时的光学总长度; Y：最大图像高度; N1 *：折射率分布为N1> 0的折射率分布型透镜的h2的系数; D *：折射率分布为N1> 0的折射率分布型透镜的透镜厚度。

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