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    • 57. 发明申请
    • Techniques for Three-Dimensional Circuit Integration
    • 三维电路集成技术
    • US20090297091A1
    • 2009-12-03
    • US12132029
    • 2008-06-03
    • Solomon AssefaKuan-Neng ChenSteven J. KoesterYurii A. Vlasov
    • Solomon AssefaKuan-Neng ChenSteven J. KoesterYurii A. Vlasov
    • G02B6/12H01L21/84H01L27/12
    • H01L27/0688
    • Integrated circuits having complementary metal-oxide semiconductor (CMOS) and photonics circuitry and techniques for three-dimensional integration thereof are provided. In one aspect, a three-dimensional integrated circuit comprises a bottom device layer and a top device layer. The bottom device layer comprises a digital CMOS circuitry layer; and a first bonding oxide layer adjacent to the digital CMOS circuitry layer. The top device layer comprises a substrate; an analog CMOS and photonics circuitry layer formed in a silicon-on-insulator (SOI) layer adjacent to the substrate, the SOI layer having a buried oxide (BOX) with a thickness of greater than or equal to about one micrometer; and a second bonding oxide layer adjacent to a side of the analog CMOS and photonics circuitry layer opposite the substrate. The bottom device layer is bonded to the top device layer by an oxide-to-oxide bond between the first bonding oxide layer and the second bonding oxide layer.
    • 提供了具有互补金属氧化物半导体(CMOS)的集成电路和用于其三维集成的光子电路和技术。 一方面,一种三维集成电路包括底部器件层和顶部器件层。 底部器件层包括数字CMOS电路层; 以及与数字CMOS电路层相邻的第一结合氧化物层。 顶部器件层包括衬底; 形成在与衬底相邻的绝缘体上硅(SOI)层中的模拟CMOS和光子电路层,所述SOI层具有厚度大于或等于约1微米的掩埋氧化物(BOX); 以及与模拟CMOS和与衬底相对的光子电路层的一侧相邻的第二结合氧化物层。 底部器件层通过第一接合氧化物层和第二接合氧化物层之间的氧化物 - 氧化物键接合到顶部器件层。
    • 59. 发明授权
    • Method and apparatus for resonant coupling in photonic crystal circuits
    • 光子晶体谐振耦合的方法和装置
    • US07536069B2
    • 2009-05-19
    • US11743454
    • 2007-05-02
    • Sharee J. McNabYurii A. Vlasov
    • Sharee J. McNabYurii A. Vlasov
    • G02B6/12G02B6/26G02B6/10
    • B82Y20/00G02B6/1225
    • The present invention is a method and an apparatus for resonant coupling in photonic crystal circuits. In one embodiment, a photonic crystal device comprises a substrate having a plurality of apertures formed therethrough, a photonic crystal circuit (e.g., formed by “removing” a series of apertures), and a strip waveguide extending through the apertures and coupled to the photonic crystal circuit via a surface localized photonic state formed at a surface of the photonic crystal (e.g., in the apertures). The surface localized photonic state facilitates the efficient resonant tunneling of photons from the wavelength-independent strip waveguide to the wavelength-selective photonic crystal circuit, thereby improving the filtering capabilities of the photonic crystal device.
    • 本发明是一种用于光子晶体谐振耦合的方法和装置。 在一个实施例中,光子晶体器件包括具有穿过其形成的多个孔的衬底,光子晶体电路(例如,通过“去除”一系列孔)形成的)以及延伸穿过孔并且耦合到光子 通过形成在光子晶体的表面(例如,在孔中)的表面局部光子态的晶体电路。 表面局部光子态有助于从波长无关条形波导到波长选择性光子晶体电路的光子的有效谐振隧穿,从而提高光子晶体器件的滤波能力。