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51. 发明申请

US20080119105A1 Method of making arrays of thin sheet microdischarge devices 有权
标题翻译：制备薄片微放电器件阵列的方法
公开(公告)号：US20080119105A1
公开(公告)日：2008-05-22
申请号：US11981412
申请日：2007-10-31
申请人： J. Gary Eden , Sung-Jin Park , Clark J. Wagner
发明人： J. Gary Eden , Sung-Jin Park , Clark J. Wagner
IPC分类号： H01J9/02
CPC分类号： H01J17/49 , H01J1/025 , H01J9/00 , H01J9/02 , H01J25/50 , H01J61/09 , H01J61/305 , H01J61/62 , H01J63/04 , H01J65/046
摘要： The invention provides methods of making arrays of thin sheet microdischarge devices. In a preferred method of fabricating an array of microdischarge devices, a multi-layer dielectric layer thin sheet is position with respect to a first thin electrode. A second electrode thin sheet is joined on the dielectric layer sheet. An array of microcavities is provided through at least a portion of the dielectric layer sheet. The method can produce thin large arrays inexpensively. In preferred embodiments, each of the multi-layer dielectric layer thin sheet, the first thin electrode and the second electrode thin sheet have a thickness of less than less than 100 μm. In preferred embodiments, the multi-layer dielectric is formed of polymer, and in other embodiments from oxides and/or nitrides. In a particular preferred embodiment, the multilayer dielectric is formed from oxide and nitride films.
摘要翻译：本发明提供了制备薄片微放电器件阵列的方法。在制造微放电器件阵列的优选方法中，多层介电层薄片相对于第一薄电极位置。第二电极薄片接合在电介质层片上。通过介电层片材的至少一部分提供微腔阵列。该方法可以廉价地生产薄的大阵列。在优选实施例中，多层介电层薄片，第一薄电极和第二电极薄片中的每一个具有小于小于100μm的厚度。在优选实施例中，多层电介质由聚合物形成，在其它实施例中由氧化物和/或氮化物形成。在特别优选的实施例中，多层电介质由氧化物和氮化物膜形成。

52. 发明申请

US20060071598A1 Microdischarge devices with encapsulated electrodes 有权
标题翻译：具有封装电极的微放电器件
公开(公告)号：US20060071598A1
公开(公告)日：2006-04-06
申请号：US10958174
申请日：2004-10-04
申请人： J. Gary Eden , Sung-Jin Park
发明人： J. Gary Eden , Sung-Jin Park
IPC分类号： H01J61/04 , H01J17/04
CPC分类号： H01J17/04 , H01J9/02
摘要： A method for fabricating dielectric encapsulated electrodes. The process includes anodizing a metal to form a dielectric layer with columnar micropores; dissolving a portion of the dielectric layer and then anodizing the resultant structure a second time. The nanoporous structure that results can provide properties superior to those of conventional dielectric encapsulated metals. The pores of the dielectric may be backfilled with one or more materials to further tailor the properties of the dielectric.
摘要翻译：一种制造电介质密封电极的方法。该方法包括阳极氧化金属以形成具有柱状微孔的介电层; 溶解电介质层的一部分，然后第二次阳极氧化所得结构。导致的纳米多孔结构可提供优于常规电介质包封金属的性质。电介质的孔可以用一种或多种材料回填以进一步调整电介质的性质。

53. 发明授权

US06867548B2 Microdischarge devices and arrays 失效
标题翻译：微电子器件和阵列
公开(公告)号：US06867548B2
公开(公告)日：2005-03-15
申请号：US10782164
申请日：2004-02-19
申请人： J. Gary Eden , Sung-Jin Park , Clark J. Wagner
发明人： J. Gary Eden , Sung-Jin Park , Clark J. Wagner
IPC分类号： G09G3/10 , H01J1/02 , H01J1/62 , H01J9/00 , H01J9/24 , H01J17/04 , H01J25/50 , H01J61/06 , H01J61/62 , H01J63/04 , H01J65/04
CPC分类号： H01J17/49 , H01J1/025 , H01J9/00 , H01J9/02 , H01J25/50 , H01J61/09 , H01J61/305 , H01J61/62 , H01J63/04 , H01J65/046
摘要： A discharge device is described that contains an anode, a cathode, and an insulating layer disposed between the anode and the cathode. A cavity is extends entirely through at least one of the anode or cathode and penetrates the dielectric layer. At least one of the anode or cathode may include a screen or the dielectric layer may have a plurality of films with at least two different dielectric constants. The voltage differences between the anode and cathode in each of multiple devices electrically connected together may be limited.
摘要翻译：描述了包括阳极，阴极和设置在阳极和阴极之间的绝缘层的放电装置。空腔完全延伸通过阳极或阴极中的至少一个并且穿透电介质层。阳极或阴极中的至少一个可以包括屏幕，或者介电层可以具有多个具有至少两个不同介电常数的膜。电连接在一起的多个装置中的每一个中的阳极和阴极之间的电压差可能受到限制。

54. 发明授权

US06815891B2 Method and apparatus for exciting a microdischarge 失效
标题翻译：用于激发微放电的方法和装置
公开(公告)号：US06815891B2
公开(公告)日：2004-11-09
申请号：US10062269
申请日：2001-10-26
申请人： J. Gary Eden , Sung-Jin Park , Clark J. Wagner
发明人： J. Gary Eden , Sung-Jin Park , Clark J. Wagner
IPC分类号： H01J1704
CPC分类号： G01N30/64 , G01N30/74 , G01N2030/642 , H01J9/245 , H01J17/40 , H01J61/30
摘要： A discharge device has a diode with a depletion region, a channel extending through a surface of the diode, and a gas within the channel. The gas is excited and a discharge formed by reverse biasing the diode and establishing an electric field in the depletion region of the diode.

55. 发明授权

US06695664B2 Microdischarge devices and arrays 有权
公开(公告)号：US06695664B2
公开(公告)日：2004-02-24
申请号：US10040300
申请日：2001-10-26
申请人： J. Gary Eden , Sung-Jin Park , Clark J. Wagner
发明人： J. Gary Eden , Sung-Jin Park , Clark J. Wagner
IPC分类号： H01J900
CPC分类号： H01J17/49 , H01J1/025 , H01J9/00 , H01J9/02 , H01J25/50 , H01J61/09 , H01J61/305 , H01J61/62 , H01J63/04 , H01J65/046
摘要： A discharge device is described that contains an anode, a cathode, and an insulating layer disposed between the anode and the cathode. A cavity is extends entirely through at least one of the anode or cathode and penetrates the dielectric layer. At least one of the anode or cathode may include a screen or the dielectric layer may have a plurality of films with at least two different dielectric constants. The voltage differences between the anode and cathode in each of multiple devices electrically connected together may be limited.

56. 发明授权

US08471471B2 Electron injection-controlled microcavity plasma device and arrays 有权
标题翻译：电子注入控制的微腔等离子体装置和阵列
公开(公告)号：US08471471B2
公开(公告)日：2013-06-25
申请号：US12682974
申请日：2008-10-27
申请人： J. Gary Eden , Kuo-Feng Chen
发明人： J. Gary Eden , Kuo-Feng Chen
IPC分类号： H01J17/49 , H05H1/24
CPC分类号： H01J11/18 , H01J61/82
摘要： An embodiment of the invention is a microcavity plasma device that can be controlled by a low voltage electron emitter. The microcavity plasma device includes driving electrodes disposed proximate to a microcavity and arranged to contribute to generation of plasma in the microcavity upon application of a driving voltage. An electron emitter is arranged to emit electrons into the microcavity upon application of a control voltage. The electron emitter is an electron source having an insulator layer defining a tunneling region. The microplasma itself can serve as a second electrode necessary to energize the electron emitter. While a voltage comparable to previous microcavity plasma devices is still imposed across the microcavity plasma devices, control of the devices can be accomplished at high speeds and with a small voltage, e.g., about 5V to 30V in preferred embodiments.
摘要翻译：本发明的一个实施例是可以由低电压电子发射器控制的微腔等离子体装置。微腔等离子体装置包括靠近微腔设置的驱动电极，并布置成有助于在施加驱动电压时在微腔中产生等离子体。电子发射器布置成在施加控制电压时将电子发射到微腔中。电子发射体是具有限定隧道区域的绝缘体层的电子源。微质体本身可以用作为电子发射体通电所必需的第二电极。虽然与先前的微腔等离子体器件相当的电压仍然施加在微腔等离子体器件之间，但是在优选实施例中，器件的控制可以在高速和小电压下实现，例如约5V至30V。

57. 发明申请

US20110140073A1 SEMICONDUCTING MICROCAVITY AND MICROCHANNEL PLASMA DEVICES 有权
标题翻译： SEMICONDUCING MICROCAVITY和MICROCHANNEL PLASMA DEVICES
公开(公告)号：US20110140073A1
公开(公告)日：2011-06-16
申请号：US12915630
申请日：2010-10-29
申请人： J. Gary Eden , Paul Tchertchian , Clark J. Wagner , Steve Solomon , Robert Ginn
发明人： J. Gary Eden , Paul Tchertchian , Clark J. Wagner , Steve Solomon , Robert Ginn
IPC分类号： H01L29/66
CPC分类号： H01J11/12 , H01J65/046 , H05H1/46
摘要： Preferred embodiments of the invention provide semiconducting microcavity plasma devices. Preferred embodiments of the invention are microcavity plasma devices having at least two pn junctions, separated by a microcavity or microchannel and powered by alternate half-cycles of a time-varying voltage waveform. Alternate embodiments have a single pn junction. Microplasma is produced throughout the cavity between single or multiple pn junctions and a dielectric layer isolates the microplasma from the single or multiple pn junctions. Additional preferred embodiments are devices in which the spatial extent of the plasma itself or the n or p regions associated with a pn junction are altered by a third (control) electrode.
摘要翻译：本发明的优选实施例提供半导体微腔等离子体装置。本发明的优选实施例是具有至少两个pn结的微腔等离子体装置，由微腔或微通道隔开并由时变电压波形的交替半周期供电。备选实施例具有单个pn结。在单个或多个pn结之间的整个空腔中产生微血管，并且介电层将微血管与单个或多个pn结隔离。附加的优选实施例是其中等离子体本身的空间范围或与pn结相关联的n或p区域被第三（控制）电极改变的装置。

58. 发明授权

US07372202B2 Phase locked microdischarge array and AC, RF or pulse excited microdischarge 有权
标题翻译：锁相微放电阵列和AC，RF或脉冲激励微放电
公开(公告)号：US07372202B2
公开(公告)日：2008-05-13
申请号：US10829666
申请日：2004-04-22
申请人： J. Gary Eden , Ju Gao , Sung-o Kim
发明人： J. Gary Eden , Ju Gao , Sung-o Kim
IPC分类号： H01J17/49 , H01J17/04
CPC分类号： H01J17/40
摘要： The invention is directed to a method and apparatus for phase-locking microdischarge device arrays and an ac, rf, or pulse-excited microdischarge. The invention provides output from a non-laser optical source that is a phase-locked array of microdischarges formed of microdischarge cavities containing discharge filler and excitation electrodes. In exemplary embodiments, entire arrays of microdischarge device optical emitters that are not lasers can be fabricated into a surface area having a largest dimension smaller than the coherence length of at least one of the emissions produced by the individual elements. In other embodiments, arrays of microdischarge devices configured in a Fresnel pattern constitute a lens suitable for both producing and focusing light.
摘要翻译：本发明涉及一种用于相位锁定微放电器件阵列和ac，rf或脉冲激发微放电的方法和装置。本发明提供了非激光光源的输出，该非激光光源是由包含放电填料和激发电极的微放电腔形成的微放电的锁相阵列。在示例性实施例中，不是激光器的整个微放电器件光发射器阵列可以被制造成具有比由各个元件产生的至少一个发射的相干长度小的最大尺寸的表面区域。在其它实施例中，以菲涅耳图案配置的微放电器件阵列构成适于产生和聚焦光的透镜。

59. 发明授权

US6016027A Microdischarge lamp 失效
标题翻译：微量放电灯
公开(公告)号：US6016027A
公开(公告)日：2000-01-18
申请号：US858235
申请日：1997-05-19
申请人： Thomas A. DeTemple , James Frame , David J. Wheeler , J. Gary Eden
发明人： Thomas A. DeTemple , James Frame , David J. Wheeler , J. Gary Eden
IPC分类号： H01J61/04 , G03F7/20 , H01J9/02 , H01J17/49 , H01J61/72 , H01J1/16
CPC分类号： G03F7/70016 , H01J17/49 , H01J61/72 , H01J9/02
摘要： A microdischarge lamp formed in a one piece integral substrate, preferably a silicon wafer, via micromachining techniques commonly used in integrated circuit manufacture. The lamp includes a micromachined cavity area for enclosing discharge filler, such as mercury vapor. The one piece substrate includes one or more semiconductor regions which act as electrodes for the lamp. A light transmissive cap seals the cavity area. Selection of particular aperture to length ratios for the cavity area permits the lamp to be operated either as a positive column or hollow cathode discharge. Hollow cathode discharge has been demonstrated at pressures of up to about 200 Torr. The small aperture of the cavity area, of about 1 to 400 micrometers, enable the electrons in the discharge to be ballistic. In addition, the small dimensions permit discharges based upon resonance radiation, such as the 253 nm line of atomic mercury.
摘要翻译：一种微放电灯，其通过在集成电路制造中通常使用的微加工技术形成在一体式整体衬底，优选硅晶片中。该灯包括用于封闭排放填料的微加工空腔区域，例如汞蒸气。一体式衬底包括用作灯的电极的一个或多个半导体区域。透光盖密封空腔区域。选择腔体区域的特定孔径与长度比允许灯作为正柱或空心阴极放电进行操作。已经证明在高达约200Torr的压力下空心阴极放电。约1至400微米的空腔区域的小孔使放电中的电子具有弹道性。此外，小尺寸允许基于共振辐射的放电，例如253nm的原子汞线。

60. 发明授权

US4228407A Ion-beam-excited gas laser 失效
标题翻译：离子束激发气体激光器
公开(公告)号：US4228407A
公开(公告)日：1980-10-14
申请号：US936158
申请日：1978-08-23
申请人： A. Wahab Ali , Jeffry Golden , J. Gary Eden , Redge A. Mahaffey , John A. Pasour
发明人： A. Wahab Ali , Jeffry Golden , J. Gary Eden , Redge A. Mahaffey , John A. Pasour
IPC分类号： H01S3/097 , H01S3/09
CPC分类号： H01S3/09707
摘要： A high-power gas laser pumped by an intense, pulsed, space charge-and current-neutralized ion beam. A high-pressure gas in the laser cavity is ionized by an ion beam. Atomic processes occur which result in a population inversion for the excited states of the gas. Coherent radiation is then emitted by the excited gas atoms in the inverted state. The light is amplified as it traverses the gas. Multiple traversal can be obtained by using an optical cavity comprising mirrors which reflect the light into the excited gas so that the light can be further amplified with each pass through the cavity. Extraction of light energy is done by using a partially transmitting mirror as part of the optical cavity.
摘要翻译：大功率气体激光器由强烈脉冲的空间电荷和电流中和离子束泵浦。激光腔中的高压气体被离子束电离。发生原子过程，导致气体的激发态的群体反演。相反的辐射然后在反转状态下被激发的气体原子发射。光在其穿过气体时被放大。通过使用包括将光反射到激发气体中的反射镜的光学腔可以获得多次穿越，以便每次穿过腔体时可以进一步放大光。通过使用部分透射镜作为光学腔的一部分来提取光能。

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