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    • 51. 发明授权
    • Semiconductor device with self-biased isolation
    • 具有自偏置隔离的半导体器件
    • US08541862B2
    • 2013-09-24
    • US13307449
    • 2011-11-30
    • Hongning YangJiang-Kai Zuo
    • Hongning YangJiang-Kai Zuo
    • H01L29/66
    • H01L29/063H01L21/761H01L29/0634H01L29/0653H01L29/0692H01L29/1083H01L29/423H01L29/66659H01L29/7835
    • A device includes a semiconductor substrate including a surface, a drain region in the semiconductor substrate having a first conductivity type, a well region in the semiconductor substrate on which the drain region is disposed, the well region having the first conductivity type, a buried isolation layer in the semiconductor substrate extending across the well region, the buried isolation layer having the first conductivity type, a reduced surface field (RESURF) region disposed between the well region and the buried isolation layer, the RESURF region having a second conductivity type, and a plug region in the semiconductor substrate extending from the surface of the substrate to the RESURF region, the plug region having the second conductivity type.
    • 一种器件包括:具有表面的半导体衬底,具有第一导电类型的半导体衬底中的漏极区,设置有漏极区的半导体衬底中的阱区,具有第一导电类型的阱区, 所述半导体衬底中延伸穿过所述阱区,所述掩埋隔离层具有第一导电类型,设置在所述阱区和所述掩埋隔离层之间的还原表面场(RESURF)区,所述RESURF区具有第二导电类型,以及 所述半导体衬底中的插塞区域从所述衬底的表面延伸到所述RESURF区域,所述插塞区域具有所述第二导电类型。
    • 53. 发明申请
    • DUAL GATE LATERAL DIFFUSED MOS TRANSISTOR
    • 双门侧向扩散MOS晶体管
    • US20090244928A1
    • 2009-10-01
    • US12060105
    • 2008-03-31
    • Hongning YangJiang-Kai Zuo
    • Hongning YangJiang-Kai Zuo
    • H02M3/335H01L27/088H01L21/822
    • H01L27/0705H01L29/1045H01L29/1083H01L29/402H01L29/41775H01L29/66659H01L29/7831H01L29/7835
    • A disclosed power transistor, suitable for use in a switch mode converter that is operable with a switching frequency exceeding, for example, 5 MHz or more, includes a gate dielectric layer overlying an upper surface of a semiconductor substrate and first and second gate electrodes overlying the gate dielectric layer. The first gate electrode is laterally positioned overlying a first region of the substrate. The first substrate region has a first type of doping, which may be either n-type or p-type. A second gate electrode of the power transistor overlies the gate dielectric and is laterally positioned over a second region of the substrate. The second substrate region has a second doping type that is different than the first type. The transistor further includes a drift region located within the substrate in close proximity to an upper surface of the substrate and laterally positioned between the first and second substrate regions.
    • 适用于可以以超过例如5MHz或更大的开关频率工作的开关模式转换器的公开的功率晶体管包括覆盖在半导体衬底的上表面上的栅极电介质层和覆盖的半导体衬底的第一和第二栅电极 栅介质层。 第一栅电极横向定位成覆盖在衬底的第一区域上。 第一衬底区域具有第一类型的掺杂,其可以是n型或p型。 功率晶体管的第二栅电极覆盖栅极电介质,并且横向地位于衬底的第二区域上方。 第二衬底区域具有与第一类型不同的第二掺杂类型。 晶体管还包括位于衬底内的漂移区域,该漂移区域紧邻衬底的上表面并横向地位于第一和第二衬底区域之间。
    • 54. 发明申请
    • LDMOS device and method
    • LDMOS设备和方法
    • US20080166849A1
    • 2008-07-10
    • US11650188
    • 2007-01-04
    • Hongning YangVeronique C. MacaryJiang-Kai Zuo
    • Hongning YangVeronique C. MacaryJiang-Kai Zuo
    • H01L21/336
    • H01L29/0847H01L21/26586H01L21/7624H01L29/1045H01L29/1083H01L29/66537H01L29/66659H01L29/7835
    • An N-channel device (40, 60) is described having a very lightly doped substrate (42) in which spaced-apart P (46) and N (44) wells are provided, whose lateral edges (461, 45) extending to the surface (47). The gate (56) overlies the surface (47) between the P (46) and N (44) wells. The P-well edge (461) adjacent the source (50) is substantially aligned with the left gate edge (561). The N-well edge (45) lies at or within the right gate edge (562), which is spaced a first distance (471) from the drain (48). The N-well (44) desirably includes a heavier doped region (62) in ohmic contact with the drain (48) and with its left edge (621) located about half way between the right gate edge (562) and the drain (48). A HALO implant pocket (52) is provided underlying the left gate edge (561) using the gate (56) as a mask. The resulting device (40, 60) operates at higher voltage with lower Rdson, less HCI and very low off-state leakage. P and N dopants are interchanged to provide P-channel devices.
    • 描述了具有非常轻掺杂的衬底(42)的N沟道器件(40,60),其中设置有间隔开的P(46)和N(44)阱,其侧边缘(461,45)延伸到 表面(47)。 栅极(56)覆盖在P(46)和N(44)孔之间的表面(47)上。 与源极(50)相邻的P阱边缘(461)基本上与左边缘边缘(561)对准。 所述N阱边缘(45)位于所述右边缘边缘(562)内或所述右边缘边缘(562)中,所述右边缘边缘(562)与所述漏极(48)间隔开第一距离(471)。 N阱(44)期望地包括与漏极(48)欧姆接触的较重的掺杂区域(62),并且其左边缘(621)位于右栅极边缘(562)和漏极(48)之间的大约一半处 )。 使用门(56)作为掩模,将HALO注入口袋(52)设置在左门边缘(561)下方。 所得到的器件(40,60)在较高电压下工作,Rdson较低,HCI较少,非常低的截止状态泄漏。 P和N掺杂剂互换以提供P沟道器件。
    • 58. 发明申请
    • HIGH BREAKDOWN VOLTAGE LDMOS DEVICE
    • 高电压LDMOS器件
    • US20160099341A1
    • 2016-04-07
    • US14968343
    • 2015-12-14
    • Hongning YangDaniel J. BlombergJiang-Kai Zuo
    • Hongning YangDaniel J. BlombergJiang-Kai Zuo
    • H01L29/66
    • H01L29/66689H01L21/76229H01L21/76264H01L29/0653H01L29/1083H01L29/66484H01L29/66772H01L29/7824
    • A multi-region (81, 83) lateral-diffused-metal-oxide-semiconductor (LDMOS) device (40) has a semiconductor-on-insulator (SOI) support structure (21) on or over which are formed a substantially symmetrical, laterally internal, first LDMOS region (81) and a substantially asymmetric, laterally edge-proximate, second LDMOS region (83). A deep trench isolation (DTI) wall (60) substantially laterally terminates the laterally edge-proximate second LDMOS region (83). Electric field enhancement and lower source-drain breakdown voltages (BVDSS) exhibited by the laterally edge-proximate second LDMOS region (83) associated with the DTI wall (60) are avoided by providing a doped SC buried layer region (86) in the SOI support structure (21) proximate the DTI wall (60), underlying a portion of the laterally edge-proximate second LDMOS region (83) and of opposite conductivity type than a drain region (31) of the laterally edge-proximate second LDMOS region (83).
    • 多区域(81,83)横向扩散金属氧化物半导体(LDMOS)器件(40)具有绝缘体上半导体(SOI)支撑结构(21),其上形成有基本上对称的 横向内部的第一LDMOS区域(81)和基本不对称的横向边缘邻近的第二LDMOS区域(83)。 深沟槽隔离(DTI)壁(60)基本上横向地终止横向边缘邻近的第二LDMOS区域(83)。 通过在SOI中提供掺杂的SC掩埋层区域(86)来避免由与DTI壁(60)相关联的横向边缘邻近的第二LDMOS区域(83)表现出的电场增强和较低的源极 - 漏极击穿电压(BVDSS) 靠近DTI壁(60)的支撑结构(21),位于横向边缘邻近的第二LDMOS区域(83)的一部分下方并且具有与横向边缘邻近的第二LDMOS区域的漏极区域(31)相反的导电类型 83)。