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51. 发明申请

US20130098289A1 METHODS AND APPARATUS FOR A CHEMICAL VAPOR DEPOSITION REACTOR 审中-公开
公开(公告)号：US20130098289A1
公开(公告)日：2013-04-25
申请号：US13444645
申请日：2012-04-11
申请人： Gang He , Gregg Higashi , Khurshed Sorabji , Roger Hamamjy , Andreas Hegedus , Melissa Archer , Harry Atwater , Stewart Sonnenfeldt
发明人： Gang He , Gregg Higashi , Khurshed Sorabji , Roger Hamamjy , Andreas Hegedus , Melissa Archer , Harry Atwater , Stewart Sonnenfeldt
IPC分类号： C30B25/12 , C30B25/10 , C30B25/18 , C30B25/14 , C30B25/08 , C30B25/02
CPC分类号： C30B25/08 , B65G2207/06 , C23C16/45519 , C23C16/4583 , C23C16/54 , C30B25/025 , C30B25/10 , C30B25/12 , C30B25/14 , C30B25/18 , C30B29/40 , C30B29/42 , H01L21/67109 , H01L21/67784
摘要： Embodiments of the invention generally relate to a chemical vapor deposition system and related method of use. In one embodiment, the system includes a reactor lid assembly having a body, a track assembly having a body and a guide path located along the body, and a heating assembly operable to heat the substrate as the substrate moves along the guide path. The body of the lid assembly and the body of the track assembly are coupled together to form a gap that is configured to receive a substrate. In another embodiment, a method of forming layers on a substrate using the chemical vapor deposition system includes introducing the substrate into a guide path, depositing a first layer on the substrate and depositing a second layer on the substrate, while the substrate moves along the guide path; and preventing mixing of gases between the first deposition step and the second deposition step.

52. 发明授权

US08361828B1 Aligned frontside backside laser dicing of semiconductor films 有权
标题翻译：半导体膜的背面激光切割
公开(公告)号：US08361828B1
公开(公告)日：2013-01-29
申请号：US13222750
申请日：2011-08-31
申请人： Daniel G. Patterson , Laila Mattos , Gang He
发明人： Daniel G. Patterson , Laila Mattos , Gang He
IPC分类号： H01L21/78
CPC分类号： H01L21/78 , B23K26/032 , B23K26/0619 , B23K26/0624 , B23K26/082 , B23K26/0853 , B23K26/361 , B23K26/40 , B23K2101/40 , B23K2103/172 , B23K2103/42 , B23K2103/50 , B23K2103/52
摘要： A method and system for dicing semiconductor devices from semiconductor thin films. A semiconductor film, backed by a metal layer, is bonded by an adhesive layer to a flexible translucent substrate. Reference features define device boundaries. An ultraviolet laser beam is aligned to the reference features and cuts through the semiconductor film, the metal layer and partially into the adhesive layer, cutting a frontside street along a real or imaginary scribe line on the cutting path. An infrared laser beam is aligned to the trough of the frontside street from the back surface of the flexible substrate, or the scribe lines are mapped to the back surface of the flexible substrate. The infrared laser beam cuts through the flexible substrate and the majority of the thickness of the adhesive layer, cutting a backside street along the scribe line. The backside street overlaps or cuts through to the frontside street, thereby separating the semiconductor devices.
摘要翻译：一种用于从半导体薄膜切割半导体器件的方法和系统。由金属层支撑的半导体膜通过粘合剂层粘合到柔性半透明基板上。参考功能定义设备边界。将紫外线激光束对准参考特征并切割穿过半导体膜，金属层并部分地进入粘合剂层，沿着切割路径上的实际或虚拟划线切割前沿街道。红外激光束从柔性基板的后表面与前面街道的槽对准，或者将划线映射到柔性基板的后表面。红外激光束穿过柔性基板和粘合剂层的大部分厚度，沿着划线切割一条背面的街道。背面街道重叠或切割到前方街道，从而分离半导体器件。

53. 发明授权

US08358930B2 In-band optical signal to noise ratio determination method and system 有权
标题翻译：带内光信噪比确定方法和系统
公开(公告)号：US08358930B2
公开(公告)日：2013-01-22
申请号：US12594503
申请日：2008-04-04
申请人： Daniel Gariepy , Gang He , Yves Breton
发明人： Daniel Gariepy , Gang He , Yves Breton
IPC分类号： H04B10/08
CPC分类号： H04B10/07953
摘要： There is provided a method for determining the in-band noise in agile multichannel Dense Wavelength Division Multiplexing (DWDM) optical systems, where the interchannel noise is not representative of the in-band noise in the optical channel. The method relies on the analysis of two observations of the same input optical signal. In the two observations, the linear relationship between the optical signal contribution and the optical noise contribution (i.e. the observed OSNR) is different, which allows the discrimination of the signal and noise contributions in the input optical signal. In a first approach, the two observations are provided by polarization analysis of the input optical signal. In a second, the input optical signal is obtained using two different integration widths.
摘要翻译：提供了一种用于确定敏捷多通道密集波分复用（DWDM）光学系统中的带内噪声的方法，其中信道间噪声不代表光信道中的带内噪声。该方法依赖于对相同输入光信号的两次观察的分析。在两个观察中，光信号贡献与光噪声贡献（即观测到的OSNR）之间的线性关系是不同的，这允许在输入光信号中识别信号和噪声贡献。在第一种方法中，通过输入光信号的偏振分析来提供两个观察结果。一秒钟，使用两个不同的积分宽度获得输入光信号。

54. 发明申请

US20120133529A1 SYSTEMS, METHODS AND COMPUTER READABLE MEDIA FOR DISPLAYING MULTIPLE OVERLAID IMAGES TO A PILOT OF AN AIRCRAFT DURING FLIGHT 有权
标题翻译：系统，方法和计算机可读介质，用于在飞行期间向飞机的飞行员显示多个重叠图像
公开(公告)号：US20120133529A1
公开(公告)日：2012-05-31
申请号：US12956927
申请日：2010-11-30
申请人： Gang He
发明人： Gang He
IPC分类号： G01C21/00
CPC分类号： G01C23/00 , G08G5/0021 , G09G2340/10 , G09G2380/12
摘要： Embodiments for displaying first and second images to a pilot of an aircraft are presented. The embodiments include, but are not limited to, obtaining a first image signal and a second image signal, commanding a display unit to display a first image on a display screen corresponding to the first signal, and computing an image moving velocity of the first image. The method further comprises estimating an image flow velocity for the second image based on the second image signal and comparing the image moving velocity of the first image to the image flow velocity of the second image. After the comparison, the display unit is commanded to display the second image overlaid on the first image, and commanding the display unit to establish an intensity of the second image within a predefined range based upon the comparison.
摘要翻译：呈现了将第一和第二图像显示给飞机飞行员的实施例。这些实施例包括但不限于获得第一图像信号和第二图像信号，命令显示单元在对应于第一信号的显示屏幕上显示第一图像，以及计算第一图像的图像移动速度。该方法还包括基于第二图像信号估计第二图像的图像流速度，并将第一图像的图像移动速度与第二图像的图像流速进行比较。在比较之后，命令显示单元显示覆盖在第一图像上的第二图像，并且基于比较命令使显示单元建立在预定范围内的第二图像的强度。

55. 发明授权

US08184020B2 Method and system displaying a flight path to intercept an ILS glide path 有权
标题翻译：方法和系统显示飞行路径以拦截ILS滑翔路径
公开(公告)号：US08184020B2
公开(公告)日：2012-05-22
申请号：US12511826
申请日：2009-07-29
申请人： Gang He
发明人： Gang He
IPC分类号： G01C21/00
CPC分类号： G01C23/005 , G08G5/0021 , G08G5/025
摘要： A method displaying a pathway (226, 502) for an aircraft includes receiving (302, 402, 602) an instrument generated course generally in alignment with a runway centerline (214), determining (304, 404, 604) the pathway (226, 502) based on aircraft flight parameters in which the aircraft may fly in order to intersect the instrument generated course, rendering (306, 406, 606) on a display the instrument generated course and the pathway; and periodically repeating (308, 408, 608) the determining and rendering steps. The energy state of the aircraft may be considered in determining the pathway and optional indices (508) may be displayed indicating deviation from the pathway centerline.
摘要翻译：显示用于飞机的路径（226,502）的方法包括：接收（302,402,602）通常与跑道中心线（214）对准的生成的乐器，确定（304,404,602） 502）基于飞机飞行参数，其中飞行器可以飞行以便与仪器产生的航线相交，在显示器上渲染（306,406,606）仪器产生的航线和路径; 并定期重复（308,408,608）确定和呈现步骤。可以在确定路径时考虑飞行器的能量状态，并且可以显示指示与路径中心线的偏差的可选指标（508）。

56. 发明申请

US20120106935A1 HEATING LAMP SYSTEM AND METHODS THEREOF 审中-公开
标题翻译：加热灯系统及其方法
公开(公告)号：US20120106935A1
公开(公告)日：2012-05-03
申请号：US13257273
申请日：2010-03-16
申请人： Gang He , Gregg Higashi , Khurshed Sorabji , Roger Hamamjy , Andreas G. Hegedus
发明人： Gang He , Gregg Higashi , Khurshed Sorabji , Roger Hamamjy , Andreas G. Hegedus
IPC分类号： F27D11/12
CPC分类号： C23C16/45565 , C23C16/4411 , C23C16/4412 , C23C16/45519 , C23C16/4557 , C23C16/4583 , C23C16/54
摘要： Embodiments of the invention generally relate to apparatuses and methods for chemical vapor deposition (CVD). In one embodiment, a heating lamp assembly for a CVD reactor system is provided which includes a lamp housing disposed on an upper surface of a support base and containing a plurality of lamps extending from a first lamp holder to a second lamp holder. The lamps may have split filament lamps and/or non-split filament lamps, and in some examples, split and non-split filament may be alternately disposed between the first and second lamp holders. A reflector may be disposed on the upper surface of the support base between the first and second lamp holders. In another embodiment, the method includes exposing a lower surface of a wafer carrier to energy emitted from the heating lamp assembly and heating the wafer carrier to a predetermined temperature.
摘要翻译：本发明的实施方案一般涉及用于化学气相沉积（CVD）的装置和方法。在一个实施例中，提供了一种用于CVD反应器系统的加热灯组件，其包括设置在支撑基座的上表面上并包含从第一灯座延伸到第二灯座的多个灯的灯壳体。灯可以具有裂开的灯丝灯和/或非分裂灯丝灯，并且在一些示例中，分裂和非分裂灯丝可以交替地设置在第一和第二灯座之间。反射器可以设置在第一和第二灯座之间的支撑基座的上表面上。在另一个实施例中，该方法包括将晶片载体的下表面暴露于从加热灯组件发射的能量并将晶片载体加热至预定温度。

57. 发明申请

US20120067286A1 VAPOR DEPOSITION REACTOR SYSTEM AND METHODS THEREOF 审中-公开
标题翻译：蒸气沉积反应器系统及其方法
公开(公告)号：US20120067286A1
公开(公告)日：2012-03-22
申请号：US13257264
申请日：2010-03-16
申请人： Gang He , Gregg Higashi , Khurshed Sorabji , Roger Hamamjy , Andreas G. Hegedus
发明人： Gang He , Gregg Higashi , Khurshed Sorabji , Roger Hamamjy , Andreas G. Hegedus
IPC分类号： C23C16/455 , C23C16/52 , C23C16/46
CPC分类号： C23C16/45565 , C23C16/4411 , C23C16/4412 , C23C16/45519 , C23C16/4557 , C23C16/4583 , C23C16/54
摘要： Embodiments of the invention generally relate to apparatuses and methods for chemical vapor deposition (CVD) processes. In one embodiment, a CVD reactor has a reactor lid assembly disposed on a reactor body and containing a first showerhead assembly, an isolator assembly, a second showerhead assembly, and an exhaust assembly consecutively and linearly disposed next to each other on a lid support. The CVD reactor further contains first and second faceplates disposed on opposite ends of the reactor body, wherein the first showerhead assembly is disposed between the first faceplate and the isolator assembly and the exhaust assembly is disposed between the second showerhead assembly and the second faceplate. The reactor body has a wafer carrier disposed on a wafer carrier track and a lamp assembly disposed below the wafer carrier track and containing a plurality of lamps which may be utilized to heat wafers disposed on the wafer carrier.
摘要翻译：本发明的实施例一般涉及用于化学气相沉积（CVD）工艺的装置和方法。在一个实施方案中，CVD反应器具有反应器盖组件，反应器盖组件设置在反应器主体上，并且在盖支撑件上彼此相邻并且连续并线性地设置有第一淋浴头组件，隔离器组件，第二淋浴头组件和排气组件。 CVD反应器还包含设置在反应器主体的相对端上的第一和第二面板，其中第一喷头组件设置在第一面板和隔离器组件之间，排气组件设置在第二喷头组件和第二面板之间。反应器主体具有设置在晶片载体轨道上的晶片载体和设置在晶片载体轨道下方的灯组件，并且容纳可用于加热设置在晶片载体上的晶片的多个灯。

58. 发明申请

US20120035789A1 ENHANCED FLIGHT VISION SYSTEM FOR ENHANCING APPROACH RUNWAY SIGNATURES 有权
标题翻译：增强飞行视觉系统，增强方式运行标志
公开(公告)号：US20120035789A1
公开(公告)日：2012-02-09
申请号：US12849696
申请日：2010-08-03
申请人： Gang He
发明人： Gang He
IPC分类号： G05D1/00 , G09G5/00 , G06F19/00
CPC分类号： G01C23/005
摘要： Methods and apparatus are provided for visually enhancing approach runway signatures on en Enhanced Flight Vision System (EFVS). The EFVS may retrieve a location and an approach course for a runway, display, on the EFVS, a representation of the runway and the approach course for the runway relative to a position of the aircraft, define an area, along the approach course and before a first end of the runway, where the approach runway signature should be located, and visually enhance, on the EFVS, the defined area.
摘要翻译：提供了在增强型飞行视觉系统（EFVS）上视觉增强进场跑道签名的方法和装置。 EFVS可以检索跑道的位置和接近路线，在EFVS上显示跑道相对于飞机位置的跑道表示和跑道的接近方式，沿着接近方向和之前定义一个区域在跑道的第一端，进场跑道签名应该位于，并在视觉上增强EFVS上的定义区域。

59. 发明申请

US20110313658A1 SYSTEM AND METHOD FOR ENHANCING COMPUTER-GENERATED IMAGES OF TERRAIN ON AIRCRAFT DISPLAYS 有权
标题翻译：用于增强飞机显示器上的计算机生成图像的系统和方法
公开(公告)号：US20110313658A1
公开(公告)日：2011-12-22
申请号：US13219170
申请日：2011-08-26
申请人： Gang He
发明人： Gang He
IPC分类号： G01C21/00
CPC分类号： G01C23/00
摘要： A system and method are disclosed for enhancing the visibility and ensuring the correctness of terrain and navigation information on aircraft displays, such as, for example, continuous, three-dimensional perspective view aircraft displays conformal to the visual environment. More specifically, an aircraft display system is disclosed that includes a processing unit, a navigation system, a database for storing high resolution terrain data, a graphics display generator, and a visual display. One or more independent, higher precision databases with localized position data, such as navigation data or position data is onboard. Also, one or more onboard vision sensor systems associated with the navigation system provides real-time spatial position data for display, and one or more data links is available to receive precision spatial position data from ground-based stations. Essentially, before terrain and navigational objects (e.g., runways) are displayed, a real-time correction and augmentation of the terrain data is performed for those regions that are relevant and/or critical to flight operations, in order to ensure that the correct terrain data is displayed with the highest possible integrity. These corrections and augmentations performed are based upon higher precision, but localized onboard data, such as navigational object data, sensor data, or up-linked data from ground stations. Whenever discrepancies exist, terrain data having a lower integrity can be corrected in real-time using data from a source having higher integrity data. A predictive data loading approach is used, which substantially reduces computational workload and thus enables the processing unit to perform such augmentation and correction operations in real-time.
摘要翻译：公开了一种用于增强可视性并确保飞机显示器上的地形和导航信息的正确性的系统和方法，例如与视觉环境一致的连续的三维透视图飞机显示器。更具体地，公开了一种飞行器显示系统，其包括处理单元，导航系统，用于存储高分辨率地形数据的数据库，图形显示生成器和可视显示器。一个或多个具有本地化位置数据（例如导航数据或位置数据）的独立，更高精度的数据库是板载的。而且，与导航系统相关联的一个或多个车载视觉传感器系统提供用于显示的实时空间位置数据，并且一个或多个数据链路可用于从地面站接收精确的空间位置数据。基本上，在显示地形和导航对象（例如跑道）之前，对与飞行操作相关和/或关键的区域执行地形数据的实时校正和增强，以确保正确的地形以最高的完整性显示数据。执行的这些校正和增强是基于更高的精度，但是本地化的板载数据，例如导航对象数据，传感器数据或来自地面站的上传数据。每当存在差异时，可以使用来自具有较高完整性数据的源的数据实时地校正具有较低完整性的地形数据。使用预测数据加载方法，其大大减少了计算工作量，从而使得处理单元能够实时地执行这种增加和校正操作。

60. 发明申请

US20110308463A1 CHEMICAL VAPOR DEPOSITION REACTOR WITH ISOLATED SEQUENTIAL PROCESSING ZONES 审中-公开
标题翻译：具有隔离序列处理区的化学蒸气沉积反应器
公开(公告)号：US20110308463A1
公开(公告)日：2011-12-22
申请号：US13221780
申请日：2011-08-30
申请人： Gang He , Gregg Higashi
发明人： Gang He , Gregg Higashi
IPC分类号： C23C16/458 , C23C16/455
CPC分类号： C23C16/458 , C23C16/45519 , C23C16/45565 , C23C16/45572 , C23C16/54 , C30B25/08 , C30B25/14 , H01L21/02463 , H01L21/02543 , H01L21/02546 , H01L21/0262 , H01L21/67784
摘要： A chemical vapor deposition reactor and system has a housing, a substrate transport apparatus and a plurality of fixed processing zones. The processing zones include one or more chemical vapor deposition zones, each having an independent reactant gas supply. Each chemical vapor deposition zone may have a respective showerhead. The substrate transport apparatus moves the substrate along a path from the entrance of the housing to the exit of the housing, passing sequentially through each of the processing zones. A respective isolation zone between neighboring processing zones functions to prevent mixing of gases between the processing zones. The isolation zone has a gas dual flow path directing gas flows in opposing directions. The isolation zone may include a gas inflow isolator coupled via a gas dual flow path to respective exhaust ports of respective process zones. The isolation zone may include a respective isolation curtain having a split gas flow.
摘要翻译：化学气相沉积反应器和系统具有壳体，基底输送装置和多个固定处理区域。处理区包括一个或多个化学气相沉积区，每一个具有独立的反应气体供应。每个化学气相沉积区可以具有相应的喷头。基板输送装置沿着从壳体的入口到壳体的出口的路径移动基板，顺序地通过每个处理区域。相邻处理区之间的相应隔离区起到防止处理区之间气体混合的作用。隔离区具有气体双向流动路径，其指导气体沿相反的方向流动。隔离区可以包括通过气体双流路连接到相应处理区的相应排气口的气体流入隔离器。隔离区可以包括具有分流气流的相应隔离帘。

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