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    • 52. 发明授权
    • Method for fabricating a memory cell
    • 用于制造存储单元的方法
    • US06399433B2
    • 2002-06-04
    • US09773218
    • 2001-01-31
    • Franz HofmannWolfgang KrautschneiderTill SchlösserJosef Willer
    • Franz HofmannWolfgang KrautschneiderTill SchlösserJosef Willer
    • H01L218242
    • H01L27/10852H01L27/10817H01L28/55
    • A method for producing a storage cell includes forming a polycrystalline silicon layer on a semiconductor body having at least one selection transistor disposed in a first plane. An interspace is formed between two adjacent structures of the layer and one of the adjacent structures of the layer is placed on a surface of a first silicon plug. A cell plate electrode is formed in the interspace and a trench is formed in the layer. The trench reaches as far as the first plug surface and is filled with an insulating layer. The-layer is removed. A storage capacitor having a high-epsilon or ferroelectric dielectric and a storage node electrode is formed. The capacitor is disposed in a second plane in and above the body. The insulating layer is replaced with silicon to form a second silicon plug directly connected to the first plug. The second plug is electrically connected to the storage node electrode, and the first plane is electrically connected to the second plane through the first and second plugs.
    • 一种存储单元的制造方法包括在半导体本体上形成多晶硅层,该多晶硅层具有设置在第一平面中的至少一个选择晶体管。 在层的两个相邻结构之间形成间隙,并且该层的相邻结构之一被放置在第一硅插头的表面上。 在该间隙中形成单元板电极,并在该层中形成沟槽。 沟槽达到第一插头表面的最远处,并且填充有绝缘层。 该层被删除。 形成具有高ε或铁电介质的存储电容器和存储节点电极。 电容器设置在身体内和上方的第二平面内。 绝缘层被硅替代以形成直接连接到第一插头的第二硅插头。 第二插头电连接到存储节点电极,第一平面通过第一和第二插头电连接到第二平面。
    • 54. 发明授权
    • Method for fabricating an integrated circuit configuration
    • 制造集成电路结构的方法
    • US06242319B1
    • 2001-06-05
    • US09498530
    • 2000-02-04
    • Franz HofmannJosef Willer
    • Franz HofmannJosef Willer
    • H01L2176
    • H01L27/10858H01L23/544H01L25/50H01L2223/54453H01L2924/0002H01L2924/00
    • A first structure of a circuit configuration and a first alignment structure are produced in the region of a surface of a first substrate. The first alignment structure scatters electron beams differently than its surroundings. A second substrate, which is more transmissive to electron beams than the first alignment structure, is connected to the first substrate in such a way that the second substrate is disposed above the surface of the first substrate. In order to align a mask with respect to the first structure, a position of the first alignment structure is determined with the aid of electron beams. With the aid of the mask, at least one second structure of the circuit configuration is produced in the region of an uncovered upper surface of the second substrate. The first structure may be a metallic line encapsulated by insulating material. A contact may connect the first structure to the second structure. With the aid of electron beam lithography, at least one second alignment structure may be produced in the region of the upper surface of the second substrate, using which the mask is aligned.
    • 在第一基板的表面的区域中制造电路结构和第一对准结构的第一结构。 第一对准结构与其周围环境不同地散射电子束。 与第一对准结构相比,对电子束更透射的第二衬底以这样的方式连接到第一衬底,使得第二衬底设置在第一衬底的表面之上。 为了使掩模相对于第一结构对准,借助于电子束来确定第一对准结构的位置。 借助于掩模,在第二基板的未覆盖的上表面的区域中产生电路构造的至少一个第二结构。 第一结构可以是由绝缘材料包封的金属线。 触点可以将第一结构连接到第二结构。 借助于电子束光刻技术,可以在第二衬底的上表面的区域中产生至少一个第二对准结构,使用掩模进行对准。
    • 60. 发明授权
    • Ceramic filter and method for using same
    • 陶瓷过滤器及其使用方法
    • US4713180A
    • 1987-12-15
    • US701135
    • 1985-02-13
    • Franz HofmannHans G. TrappRolf RietzscherJurgen OttoWolfgang KaettlitzGerd Trinki
    • Franz HofmannHans G. TrappRolf RietzscherJurgen OttoWolfgang KaettlitzGerd Trinki
    • B01D39/20B22D1/00B22D43/00C04B38/00C21C1/00C21C7/00C22B4/00C22B9/02B01D29/32
    • C21C1/00B01D39/2093C04B38/00C21C7/00C22B9/023Y02P10/234
    • A ceramic filter for filtering molten iron is disclosed. The ceramic filter is made from a high-melting ceramic material having an open-celled foam structure, a variable bulk density in different portions of the filter, and at least one afflux surface. In order to filter molten iron efficiently, the ratio of filter surface to filter volume should be in the range of about 0.0003 to 9 m.sup.2 /cm.sup.3, the specific filter resistance should be in the range of about 0.1 to 0.9 bar-cm at a flow rate of 5 m.sup.3 /hour, and the pressure loss .DELTA.p across the filter should depend on the specific resistance .rho., the filter length, and the surface area of the afflux plane F in accordance with the relationship: ##EQU1## A method for filtering molten iron using this ceramic filter is also disclosed. In this method, the ceramic filter is located near the point in the casting system where the molten iron has its greatest kinetic energy. The molten iron is first caused to flow tangentially by the afflux plane of the ceramic filter and then is deflected to create turbulence directly before the afflux plane of the filter.
    • 公开了一种用于过滤铁水的陶瓷过滤器。 陶瓷过滤器由具有开孔泡沫结构的高熔点陶瓷材料制成,过滤器的不同部分的可变堆积密度以及至少一个附着面。 为了有效地过滤铁水,过滤器表面与过滤器体积的比例应在约0.0003至9m 2 / cm 3的范围内,特定过滤器阻力在流动下应在约0.1至0.9bar-cm的范围内 速率为5立方米/小时,并且过滤器上的压力损失ΔΔTA应根据以下关系依赖于附着平面F的电阻率rho,滤波器长度和表面积:过滤方法 还公开了使用该陶瓷过滤器的铁水。 在该方法中,陶瓷过滤器位于铸铁系统中靠近熔融铁具有最大动能的点处。 首先使铁水通过陶瓷过滤器的塌陷面切向流动,然后被偏转以在过滤器的附着平面之前直接产生湍流。