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    • 56. 发明申请
    • High productivity plasma processing chamber
    • 高效等离子体处理室
    • US20050229849A1
    • 2005-10-20
    • US11057041
    • 2005-02-11
    • Mario SilvettiDavid QuachBok KimThomas NowakThomas ChoFred HarizRobert Moore
    • Mario SilvettiDavid QuachBok KimThomas NowakThomas ChoFred HarizRobert Moore
    • C23C16/00C23C16/44C23C16/458H01J37/32
    • C23C16/4404C23C16/4586H01J37/32522H01J2237/022
    • Embodiments of the present invention are generally directed to apparatus and methods for a plasma-processing chamber requiring less maintenance and downtime and possessing improved reliability over the prior art. In one embodiment, the apparatus includes a substrate support resting on a ceramic shaft, an inner shaft allowing for electrical connections to the substrate support at atmospheric pressure, an aluminum substrate support resting on but not fixed to a ceramic support structure, sapphire rest points swaged into the substrate support, and a heating element inside the substrate support arranged in an Archimedes spiral to reduce warping of the substrate support and to increase its lifetime. Methods include increasing time between in-situ cleans of the chamber by reducing particle generation from chamber surfaces. Reduced particle generation occurs via temperature control of chamber components and pressurization of non-processing regions of the chamber relative to the processing region with a purge gas.
    • 本发明的实施例一般涉及等离子体处理室的装置和方法,其需要较少的维护和停机时间,并且比现有技术具有更高的可靠性。 在一个实施例中,该设备包括搁置在陶瓷轴上的基板支撑件,允许在大气压下与基板支撑件电连接的内轴,支撑在陶瓷支撑结构上但不固定到陶瓷支撑结构的铝基板支撑件,模锻的蓝宝石支架 衬底支撑件内部的加热元件和布置在阿基米德螺旋中的衬底支撑件内的加热元件,以减少衬底支撑件的翘曲并增加其寿命。 方法包括通过减少从室表面产生颗粒来增加室内原位清洗之间的时间。 通过腔室部件的温度控制和腔室相对于处理区域的吹扫气体的非处理区域的加压而发生减少的颗粒产生。
    • 58. 发明授权
    • Graphics pipeline token synchronization
    • 图形流水线令牌同步
    • US06867781B1
    • 2005-03-15
    • US09722419
    • 2000-11-28
    • Timothy J. Van HookFarhad FouladiRobert MooreHoward H. Cheng
    • Timothy J. Van HookFarhad FouladiRobert MooreHoward H. Cheng
    • G06T1/20
    • G06T1/20
    • A graphics system including a custom graphics and audio processor produces exciting 2D and 3D graphics and surround sound. The system includes a graphics and audio processor including a 3D graphics pipeline and an audio digital signal processor. The graphics pipeline processes graphics commands at different rates depending upon the type of operation being performed. This makes it difficult to synchronize pipeline operations with external operations (e.g., a graphics processor with a main processor). To solve this problem, a synchronization token including a programmable data message is inserted into a graphics command stream sent to a graphics pipeline. At a predetermined point near the bottom of the pipeline, the token is captured and a signal is generated indicated the token has arrived. The graphics command producer can look at the captured token to determine which of multiple possible tokens has been captured, and can use the information to synchronize a task with the graphics pipeline. Applications include maintaining memory coherence in memory shared between the 3D graphics pipeline and a graphics command producer.
    • 包括定制图形和音频处理器的图形系统产生令人兴奋的2D和3D图形和环绕声。 该系统包括包括3D图形流水线和音频数字信号处理器的图形和音频处理器。 图形管线根据正在执行的操作类型以不同的速率处理图形命令。 这使得难以将流水线操作与外部操作(例如,具有主处理器的图形处理器)同步。 为了解决这个问题,将包括可编程数据消息的同步令牌插入发送到图形流水线的图形命令流中。 在管道底部附近的预定点,捕获令牌,并产生指示令牌到达的信号。 图形命令制作者可以查看捕获的令牌以确定已经捕获了多个可能的令牌,并且可以使用该信息将任务与图形管线同步。 应用程序包括维护3D图形流水线与图形命令生成器之间共享的内存中的内存一致性。
    • 60. 发明授权
    • Vertex cache for 3D computer graphics
    • 3D计算机图形的顶点缓存
    • US06717577B1
    • 2004-04-06
    • US09465754
    • 1999-12-17
    • Howard H. ChengRobert MooreFarhad FouladiTimothy J. Van Hook
    • Howard H. ChengRobert MooreFarhad FouladiTimothy J. Van Hook
    • G06T1500
    • G06T17/00G06F12/0875G06T15/005
    • In a 3D interactive computer graphics system such as a video game display system, polygon vertex data is fed to a 3D graphics processor/display engine via a vertex cache used to cache and organize indexed primitive vertex data streams. The vertex cache may be a small, low-latency cache memory local to the display engine hardware. Polygons can be represented as indexed arrays, e.g., indexed linear lists of data components representing some feature of a vertex (for example, positions, colors, surface normals, or texture coordinates). The vertex cache can fetch the relevant blocks of indexed vertex attribute data on an as-needed basis to make it available to the display processor—providing spatial locality for display processing without requiring the vertex data to be prestored in display order. Efficiency can be increased by customizing and optimizing the vertex cache and associated tags for the purpose of delivering vertices to the graphics engine—allowing more efficient prefetching and assembling of vertices than might be possible using a general-purpose cache and tag structure.
    • 在诸如视频游戏显示系统的3D交互式计算机图形系统中,通过用于高速缓存和组织索引的原始顶点数据流的顶点高速缓存将多边形顶点数据馈送到3D图形处理器/显示引擎。 顶点缓存可以是显示引擎硬件本地的小的,低延迟的高速缓存。 多边形可以表示为索引数组,例如表示某个顶点特征的数据组件的索引线性列表(例如,位置,颜色,表面法线或纹理坐标)。 顶点高速缓存可以根据需要提取索引顶点属性数据的相关块,使其可用于显示处理器 - 提供用于显示处理的空间位置,而不需要以显示顺序预先存储顶点数据。 可以通过定制和优化顶点缓存和相关标签来提高效率,以便将顶点传递给图形引擎,从而允许比使用通用缓存和标签结构可能更有效的预取和组合顶点。