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    • 46. 发明授权
    • Inkless printing method
    • 无油印刷法
    • US09475307B2
    • 2016-10-25
    • US14233881
    • 2012-07-23
    • John Cridland
    • John Cridland
    • B41J2/44B41M5/28B41M5/34G03C1/73G03F7/025
    • B41J2/44B41M5/285B41M5/34G03C1/73G03F7/025
    • The present invention relates to a method of marking a substrate that comprises a color forming material, comprising the steps of: activating a region of the substrate so as to transform it from an inactive, low reactive state to an active, high reactive state; irradiating a part of the activated region with an initial color changing radiation to effect an initial color change to a first color; and irradiating a part of the substrate that has been changed to the first color with a high power density beam of visible electromagnetic radiation to effect a further color change of the irradiated region to a second color.
    • 本发明涉及一种标记包含成色材料的基板的方法,包括以下步骤:激活基板的区域,以便将其从无活性的低反应状态转变为活性的高反应状态; 用初始颜色变化辐射照射激活区域的一部分以实现初始颜色变化为第一颜色; 以及用可见电磁辐射的高功率密度束照射已经被改变为第一颜色的基板的一部分,以使照射区域进一步变色为第二颜色。
    • 47. 发明授权
    • Compositon for forming metal oxide-containing film and patterning process
    • 用于形成含金属氧化物的膜和图案化工艺的组合物
    • US09377690B2
    • 2016-06-28
    • US14107500
    • 2013-12-16
    • SHIN-ETSU CHEMICAL CO., LTD.
    • Tsutomu OgiharaTakafumi UedaSeiichiro TachibanaYoshinori Taneda
    • G03C1/77G03F7/09G03F7/075
    • G03F7/094G03F7/0752
    • The invention provides a composition for forming a metal oxide-containing film comprising, as a component (A), a metal oxide-containing compound A1 obtained by hydrolysis and/or condensation of one or more kinds of hydrolysable metal compounds shown by the following general formula (A-1), as a component (B), an aromatic compound shown by the following general formula (B-1), the compound generating a hydroxyl group by thermal and/or an acid. There can be provided a composition for a resist lower layer film, which has high etching selectivity, capable of subjecting to stripping under mild conditions than the conventional process, has excellent pattern adhesiveness, and fine pattern formation can be performed.
    • 本发明提供一种用于形成含金属氧化物的膜的组合物,其包含作为(A)成分的含有金属氧化物的化合物A1,所述金属氧化物含有化合物A1通过下述一般化合物所示的一种或多种可水解金属化合物的水解和/或缩合得到 式(A-1),作为(B)成分的下述通式(B-1)表示的芳香族化合物,通过热和/或酸生成羟基的化合物。 可以提供一种抗蚀剂下层膜的组合物,其具有高的蚀刻选择性,能够在比常规方法温和的条件下进行剥离,具有优异的图案粘合性,并且可以进行精细图案形成。
    • 50. 发明授权
    • Controller for optical device, exposure method and apparatus, and method for manufacturing device
    • 用于光学装置的控制器,曝光方法和装置以及制造装置的方法
    • US09268235B2
    • 2016-02-23
    • US14320075
    • 2014-06-30
    • NIKON CORPORATION
    • Soichi Owa
    • G03C5/04G03F7/20
    • G03F7/70191G03F7/20G03F7/70091G03F7/70108G03F7/70116G03F7/70141G03F7/702G03F7/70291
    • An exposure method for exposing a mask pattern, which includes plural types of patterns, with a high throughput and optimal illumination conditions for each type of pattern. The method includes guiding light from a first spatial light modulator illuminated with pulse lights of illumination light to a second spatial light modulator and exposing a wafer with light from the second spatial light modulator, accompanied by: controlling a conversion state of the second spatial light modulator including a plurality of second mirror elements; and controlling a conversion state of the first spatial light modulator including a plurality of first mirror elements to control intensity distribution of the illumination light on a predetermined plane between the first spatial light modulator and the second spatial light modulator.
    • 一种曝光方法,用于以每种类型图案的高通量和最佳照明条件曝光包括多种图案的掩模图案。 该方法包括将来自照明光的脉冲光照射的第一空间光调制器的光引导到第二空间光调制器,并且用来自第二空间光调制器的光曝光晶片,伴随着:控制第二空间光调制器 包括多个第二镜元件; 以及控制包括多个第一反射镜元件的第一空间光调制器的转换状态,以控制照明光在第一空间光调制器和第二空间光调制器之间的预定平面上的强度分布。