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41. 发明申请

US20030030819A1 Apparatus and method(s) for reducing the effects of coherent artifacts in an interferometer 有权
标题翻译：用于减少干涉仪中相干伪像的影响的装置和方法
公开(公告)号：US20030030819A1
公开(公告)日：2003-02-13
申请号：US10053741
申请日：2002-01-22
发明人： Michael Kuechel
IPC分类号： G01B011/02
CPC分类号： G01B9/02059 , G01B9/02034 , G01B9/02057 , G01J9/02
摘要： Interferometric apparatus and methods for reducing the effects of coherent artifacts in interferometers. Fringe contrast in interferograms is preserved while coherent artifacts that would otherwise be present in the interferogram because of coherent superposition of unwanted radiation generated in the interferometer are suppressed. Use is made of illumination and interferogrammetric imaging architectures that generate individual interferograms of the selected characteristics of a test surface from the perspective of different off-axis locations of illumination in an interferometer and then combine them to preserve fringe contrast while at the same time arranging for artifacts to exist at different field locations so that their contribution in the combined interferogram is diluted.
摘要翻译：用于减少干涉仪中相干伪像的影响的干涉仪和方法。保留了干涉图中的边缘对比度，同时由于在干涉仪中产生的不期望的辐射的相干叠加而干涉图中存在的相干伪影被抑制。使用照明和干涉测量成像架构，其从干涉仪中的照明的不同离轴位置的角度产生测试表面的所选特征的单独干涉图，然后将它们组合以保留条纹对比度，同时安排人造物存在于不同的场地，使得它们在组合干涉图中的贡献被稀释。

42. 发明申请

US20030020924A1 Interferometer system 审中-公开
公开(公告)号：US20030020924A1
公开(公告)日：2003-01-30
申请号：US09883296
申请日：2001-06-19
发明人： Fuyuhiko Inoue
IPC分类号： G01B011/02
CPC分类号： G03F7/70691 , G01B11/002
摘要： An interferometric measurement system capable of measuring tilt of a reflecting surface with respect to a vertical axis. The system preferably includes four laser beams spaced at predetermined distances to measure distances between the measurement system and four locations on the reflecting surface. A controller is also provided for receiving inputs from the measuring laser beams to mathematically determine a tilt of the location being measured.

43. 发明申请

US20030016365A1 Method of measuring the movement of a material sheet and optical sensor for performing the method 有权
标题翻译：测量材料片和用于执行该方法的光学传感器的移动的方法
公开(公告)号：US20030016365A1
公开(公告)日：2003-01-23
申请号：US10169314
申请日：2002-07-03
发明人： Martin Dieter Liess , Gillian Antoinette Mimnagh-Kelleher
IPC分类号： G01B011/02
CPC分类号： G06F3/0421 , G01B9/02092 , G01P3/366 , G01P13/04 , G01S7/4811 , G01S7/4916 , G01S7/497 , G01S17/50 , G01S2007/4977
摘要： Measurements on a sheet (12), for example measurement of the movement of the sheet in a printer, can be performed by directing a measuring beam (8) towards the sheet and utilizing the effects of self-mixing in a diode laser (2) and Doppler shift in the measuring beam caused by the movement. The measuring method and a dedicated, cheap and compact, sheet sensor (1) may be used for determining different parameters and in different sheet processing apparatus.
摘要翻译：可以通过将测量光束（8）引向片材并利用二极管激光器（2）中的自混合的效果来执行片材（12）上的测量，例如测量打印机中的片材的移动，和由运动引起的测量光束中的多普勒频移。测量方法和专用，便宜且紧凑的片材传感器（1）可用于确定不同的参数和不同的片材处理设备。

44. 发明申请

US20020176092A1 Wavefront and intensity analyzer for collimated beams 失效
标题翻译：准直光束的波前和强度分析仪
公开(公告)号：US20020176092A1
公开(公告)日：2002-11-28
申请号：US10120077
申请日：2002-04-10
发明人： Leslie L. Deck
IPC分类号： G01B011/02
CPC分类号： G01J1/4257 , G01J9/02
摘要： Interferometeric apparatus for analyzing the wavefront and intensity distribution of collimated beams from fiber optic collimators, lasers, and the like. The collimated beams are directed through a plate beamsplitter and combined with a well defined diverging, spherical reference beam preferably generated by a single mode fiber. Reference and test beams are directed through an optical assembly for changing magnification to selectively control lateral resolution at a detector plane. Phase shifting analysis is performed on the resultant interference patterns to analyze the wavefront, and intensity profile is determined as a separate step.
摘要翻译：用于分析来自光纤准直器，激光器等的准直光束的波前和强度分布的干涉仪。准直的光束被引导通过平板分光镜并与明确限定的发散的球形参考光束组合，优选地由单模光纤产生。参考和测试光束被引导通过用于改变放大率的光学组件以选择性地控制检测器平面处的横向分辨率。对所得到的干涉图案执行相移分析以分析波前，并且将强度分布确定为单独的步骤。

45. 发明申请

US20020145739A1 Interferometer for measuring the thickness profile of thin transparent substrates 失效
标题翻译：用于测量薄透明基板厚度分布的干涉仪
公开(公告)号：US20020145739A1
公开(公告)日：2002-10-10
申请号：US10061238
申请日：2002-02-01
发明人： Peter J. De Groot , Leslie L. Deck
IPC分类号： G01B011/02
CPC分类号： G01B11/02 , G01B11/06
摘要： An method for measuring an optical thickness of a test object, the method includes: interfering a first optical wave front from the test object and a second optical wave front from a reference surface to produce an interference signal; for a selected location on the test object, obtaining an interference pattern of the test object at a first wavelength null1; for the selected location, calculating a first estimate of the optical thickness from the interference pattern recorded at wavelength null1; for the selected location obtaining an interference pattern of the test object at a second wavelength null2; for the selected location, calculating a second estimate of the optical thickness from the interference pattern recorded at wavelength null2; and for the selected location, calculating a third estimate of the optical thickness by combining the first and second estimates of optical thickness.
摘要翻译：一种用于测量被测物体的光学厚度的方法，所述方法包括：从测试对象干涉第一光波前沿和从参考表面干涉第二光波前沿以产生干涉信号; 对于测试对象上的选定位置，以第一波长lambd1获得测试对象的干涉图案; 对于所选择的位置，从记录在波长lambd1处的干涉图案计算光学厚度的第一估计; 对于所选择的位置，获得第二波长lambd2的测试对象的干涉图案; 对于所选择的位置，从记录在波长lambd2处的干涉图案计算光学厚度的第二估计; 并且对于所选位置，通过组合光学厚度的第一和第二估计来计算光学厚度的第三估计。

46. 发明申请

US20020131051A1 Interferometric alignment device 失效
标题翻译：干涉校准装置
公开(公告)号：US20020131051A1
公开(公告)日：2002-09-19
申请号：US09811275
申请日：2001-03-19
发明人： Robert R. Mitchell , Gene H. Widenhofer
IPC分类号： G01B011/02
CPC分类号： G01B11/26
摘要： The interferometric alignment device is a small, compact device that can be attached to any two optical instruments that need to be aligned precisely in both pitch and yaw angles. The device utilizes light reflecting from mirrors that are permanently mounted inside the instruments, one mirror in each of the instruments. The reflected light beams exit their respective instruments via a window built into the frame of the instrument and re-enters the attached alignment device wherein they combine to form an interference pattern. The operator of the alignment device observes the fringes of this pattern and adjusts the azimuth and elevation of one instrument relative to the other instrument until the fringes are at an acceptable minimum number or are eliminated altogether.
摘要翻译：干涉式对准装置是一种小型，紧凑的装置，其可以附接到需要在俯仰角和偏航角度精确对准的任何两个光学仪器。该设备利用永久安装在仪器内的镜子的光反射，每个仪器都有一个镜子。反射光束通过内置在仪器框架中的窗口离开它们各自的仪器，并重新进入附接的对准装置，其中它们组合以形成干涉图案。对准装置的操作者观察这种模式的边缘，并调整一个仪器相对于另一个仪器的方位和仰角，直到条纹达到可接受的最小数量或完全消除为止。

47. 发明申请

US20020128797A1 Method for determining defect depth using thermal imaging 失效
标题翻译：使用热成像确定缺陷深度的方法
公开(公告)号：US20020128797A1
公开(公告)日：2002-09-12
申请号：US09766214
申请日：2001-01-19
发明人： Jiangang Sun
IPC分类号： G06F015/00 , G01B011/02
CPC分类号： G01B11/06 , G01B11/22
摘要： A method and apparatus are provided for determining the thickness of a sample and defect depth using thermal imaging in a variety of plastic, ceramic, metal and other products. A pair of flash lamps is positioned at a first side of the sample. An infrared camera is positioned near the first side of the sample. A data acquisition and processing computer is coupled to the flash lamps for triggering the flash lamps. The data acquisition and processing computer is coupled to the infrared camera for acquiring and processing thermal image data. The thermal image data are processed using a theoretical solution to analyze the thermal image data to determine the thickness of a sample and defect depth.
摘要翻译：提供了一种方法和装置，用于使用各种塑料，陶瓷，金属和其它产品中的热成像确定样品的厚度和缺陷深度。一对闪光灯位于样品的第一侧。红外摄像机位于样品第一侧附近。数据采集和处理计算机耦合到闪光灯以触发闪光灯。数据采集和处理计算机耦合到红外摄像机，用于获取和处理热图像数据。使用理论解决方案处理热图像数据以分析热图像数据以确定样品的厚度和缺陷深度。

48. 发明申请

US20020122184A1 Method and apparatus for determining temperature and temperature distribution in a slider 失效
标题翻译：用于确定滑块温度和温度分布的方法和装置
公开(公告)号：US20020122184A1
公开(公告)日：2002-09-05
申请号：US10034714
申请日：2001-12-28
申请人： International Business Machines Corp.
发明人： Ruediger Friedrich Berger , Peter Karl Maechtle
IPC分类号： G01B011/02
CPC分类号： G01K5/48
摘要： A method for in-situ measuring a temperature and/or temperature distribution within a slider due to local heat transfer is provided, whereby the slider is positioned above the surface of a rotating disk, and carries a sensor and/or write element, whereby the rotating disk is moving relatively to the sensor and/or write element, and whereby the shape of said slider is changed locally due to the temperature and/or temperature distribution. By measuring the shape changes of the slider, the temperature and/or temperature distribution can be calculated on the basis of the changes by means of numerical methods. The method may be used as an in-situ measurement in already existing testers, like, e.g., flying height testers. No additional hardware is required and studies of the slider near contact can be performed. In addition, information with respect to the flight height is obtained simultaneously.
摘要翻译：提供了一种用于由于局部传热而原位测量滑块内的温度和/或温度分布的方法，由此滑块位于旋转盘的表面上方，并且承载传感器和/或写入元件，由此旋转盘相对于传感器和/或写入元件移动，并且由此由于温度和/或温度分布而使滑块的形状局部地改变。通过测量滑块的形状变化，可以通过数值方法基于变化来计算温度和/或温度分布。该方法可以用作已经存在的测试器中的现场测量，例如飞行高度测试仪。不需要额外的硬件，并且可以对接触点附近的滑块进行研究。另外，同时获得关于飞行高度的信息。

49. 发明申请

US20020118369A1 Assembling arrays of small particles using an atomic force microscope to define ferroelectric domains 失效
标题翻译：使用原子力显微镜组装小颗粒阵列来限定铁电畴
公开(公告)号：US20020118369A1
公开(公告)日：2002-08-29
申请号：US09791640
申请日：2001-02-26
发明人： James Misewich , Christopher B. Murray , Alejandro G. Schrott
IPC分类号： G21K007/00 , G01N023/00 , G01B011/02
CPC分类号： G01B11/165 , Y10S977/859 , Y10S977/863 , Y10S977/869 , Y10S977/881 , Y10S977/962
摘要： A method of assembling arrays of small particles or molecules using an atomic force microscope to define ferroelectric domains includes depositing a ferroelectric thin film upon a substrate forming workpiece, then using an atomic force microscope having a conductive, tip for generating a pattern on this thin film to define desired nano-circuit patterns. Next, exposure of this thin film to a solution containing chemical species which selectively adsorb or accumulate under the influence of electrophoretic forces in selected regions of this thin film.
摘要翻译：使用原子力显微镜组装小粒子或分子的阵列来定义铁电畴的方法包括在形成工件的基板上沉积铁电薄膜，然后使用具有导电性的尖端的原子力显微镜，该薄片用于在该薄膜上产生图案以定义所需的纳米电路图案。接下来，将该薄膜暴露于在该薄膜的选定区域内在电泳作用下选择性吸附或积聚的化学物质的溶液。

50. 发明申请

US20020109851A1 Frequency transform phase shifting interferometry 有权
标题翻译：变频相移干涉测量
公开(公告)号：US20020109851A1
公开(公告)日：2002-08-15
申请号：US09919511
申请日：2001-07-31
发明人： Leslie L. Deck
IPC分类号： G01B011/02
CPC分类号： G01B11/2441 , G01B9/02004 , G01B9/02021 , G01B9/02028 , G01B9/02057 , G01B9/02081 , G01B11/06 , G01B2290/45 , G01B2290/70
摘要： The invention features methods and systems in which wavelength-tune PSI data is analyzed in the frequency domain to produce spectrally separated frequency peaks each corresponding to a particular pair of surfaces in an interferometric cavity defined by multiple pairs of surfaces. Each frequency peak provides optical path length information about a corresponding pair of surfaces in the cavity. As a result, the interferometric data from such cavities provides simultaneous information about multiple surfaces.
摘要翻译：本发明的特征在于其中在频域中分析波长调整PSI数据以产生频谱分离的频率峰值的方法和系统，每个频率峰值对应于由多对表面限定的干涉腔中的特定对表面。每个频率峰值提供关于空腔中相应的一对表面的光程长度信息。结果，来自这种空腔的干涉测量数据提供了关于多个表面的同时信息。

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