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41. 发明申请

US20160028374A1 APPARATUS AND METHOD FOR TUNING A RESONANCE FREQUENCY 审中-公开
标题翻译：用于调谐谐振频率的装置和方法
公开(公告)号：US20160028374A1
公开(公告)日：2016-01-28
申请号：US14774471
申请日：2013-03-11
申请人： NOKIA TECHNOLOGIES OY
发明人： Martti VOUTILAINEN
IPC分类号： H03J1/06 , H01Q1/50 , H03H3/02 , H03H9/02 , H03H9/46
CPC分类号： H03J1/06 , H01L41/193 , H01Q1/50 , H03H3/02 , H03H9/02244 , H03H9/02409 , H03H9/2436 , H03H9/2457 , H03H9/2463 , H03H9/462 , H03H9/70 , H03H2003/027 , H03H2009/155
摘要： There are disclosed various apparatuses and methods for tuning a resonance frequency. In some embodiments there is provided an apparatus (200) comprising at least one input electrode (202, 204) for receiving radio frequency signals; a graphene foil (210) for converting at least part of the radio frequency signals into mechanical energy; at least one dielectric support element (212) to support the graphene foil (210) and to space apart the at least one input electrode (202, 204) and the graphene foil (210). The graphene foil (210) has piezoelectric properties. In some embodiments there is provided a method comprising receiving radio frequency signals by at least one input electrode (202, 204) of an apparatus (200); providing a bias voltage to the apparatus (200) for tuning the resonance frequency of the apparatus (200); and converting at least part of the radio frequency signals into mechanical energy by a graphene foil (210) having piezoelectric properties.
摘要翻译：公开了用于调谐共振频率的各种装置和方法。在一些实施例中，提供了一种装置（200），包括用于接收射频信号的至少一个输入电极（202,204）; 用于将至少部分射频信号转换为机械能的石墨烯箔（210）; 至少一个电介质支撑元件（212），以支撑所述石墨烯箔（210）并使所述至少一个输入电极（202,204）和所述石墨烯箔（210）间隔开。石墨烯箔（210）具有压电特性。在一些实施例中，提供了一种方法，包括由装置（200）的至少一个输入电极（202,204）接收射频信号; 向所述设备（200）提供偏置电压以调谐所述设备（200）的谐振频率; 以及通过具有压电特性的石墨烯箔（210）将至少部分射频信号转换为机械能。

42. 发明授权

US08951821B2 Method for producing oscillator 有权
标题翻译：振荡器的制造方法
公开(公告)号：US08951821B2
公开(公告)日：2015-02-10
申请号：US14093290
申请日：2013-11-29
申请人： Seiko Epson Corporation
发明人： Takahiko Yoshizawa
IPC分类号： H01L21/00 , B81C1/00
CPC分类号： H03H9/2457 , H03H3/0072 , H03H9/02433
摘要： A method for producing an oscillator includes: (a) forming a first layer on a substrate; (b) ion implanting a first impurity into a first region of the first layer; (c) forming a first electrode having a tapered plane on a side surface thereof by patterning the first layer; (d) forming a sacrificial layer on the first electrode and on the tapered plane of the first electrode; (e) forming a second electrode on the substrate and the sacrificial layer; and (f) removing the sacrificial layer. The step (b) is performed so that the concentration of the first impurity monotonically decreases from the upper surface side to the lower surface side in a region located at a depth of more than 10 nm from the upper surface of the first electrode.
摘要翻译：制造振荡器的方法包括：（a）在基板上形成第一层; （b）将第一杂质离子注入第一层的第一区域; （c）通过对所述第一层进行构图而在其侧表面上形成具有锥形平面的第一电极; （d）在第一电极上和第一电极的锥形平面上形成牺牲层; （e）在所述衬底和所述牺牲层上形成第二电极; 和（f）去除牺牲层。执行步骤（b），使得第一杂质的浓度在距第一电极的上表面大于10nm的深度的区域中从上表面侧到下表面侧单调减小。

43. 发明授权

US08902010B2 Microelectronic machine-based ariable 有权
标题翻译：微电子机为主
公开(公告)号：US08902010B2
公开(公告)日：2014-12-02
申请号：US13732515
申请日：2013-01-02
申请人： Motorola Mobility LLC
发明人： William P. Alberth, Jr. , Gregory R. Black , Richard E. Mach
IPC分类号： H03B5/30 , H01L41/053 , H01L41/09 , H03H9/46 , H03H9/24 , H03H9/02 , H03H9/15 , H03H7/00 , H03H9/19
CPC分类号： H03B5/30 , H03H9/02393 , H03H9/02409 , H03H9/19 , H03H9/2457 , H03H9/467 , H03H2007/008 , H03H2009/02291 , H03H2009/0233 , H03H2009/155
摘要： A tunable resonator is provided that has a high Q for each resonate frequency. The tunable resonator is a MEMs tunable resonator wherein the tuner is affected by moving a moveable mass, associated with the resonating portion of the resonator, form a first position to a second position such that the moveable mass is held in the first position or second position by a detent rather than a constant electromagnet magnetic or electrostatic force applied thereon.
摘要翻译：提供了一种可调谐谐振器，对于每个谐振频率具有高Q值。可调谐谐振器是MEMs可调谐谐振器，其中调谐器通过移动与谐振器的谐振部分相关联的可移动质量而受到影响，形成第一位置到第二位置，使得可移动质量块保持在第一位置或第二位置通过制动而不是施加在其上的恒定的电磁体磁性或静电力。

44. 发明申请

US20140184347A1 MICROELECTRONIC MACHINE-BASED VARIABLE RESONATOR 有权
标题翻译：基于微电子机器的可变谐振器
公开(公告)号：US20140184347A1
公开(公告)日：2014-07-03
申请号：US13732515
申请日：2013-01-02
申请人： MOTOROLA MOBILITY LLC
发明人： William P. Alberth, Jr. , Gregory R. Black , Richard E. Mach
IPC分类号： H03B5/30
CPC分类号： H03B5/30 , H03H9/02393 , H03H9/02409 , H03H9/19 , H03H9/2457 , H03H9/467 , H03H2007/008 , H03H2009/02291 , H03H2009/0233 , H03H2009/155
摘要： A tunable resonator is provided that has a high Q for each resonate frequency. The tunable resonator is a MEMs tunable resonator wherein the tuner is affected by moving a moveable mass, associated with the resonating portion of the resonator, form a first position to a second position such that the moveable mass is held in the first position or second position by a detent rather than a constant electromagnet magnetic or electrostatic force applied thereon.
摘要翻译：提供了一种可调谐谐振器，对于每个谐振频率具有高Q值。可调谐谐振器是MEMs可调谐谐振器，其中调谐器通过移动与谐振器的谐振部分相关联的可移动质量而受到影响，形成第一位置到第二位置，使得可移动质量块保持在第一位置或第二位置通过制动而不是施加在其上的恒定的电磁体磁性或静电力。

45. 发明授权

US08749315B2 Resonator electrode shields 有权
标题翻译：谐振器电极屏蔽
公开(公告)号：US08749315B2
公开(公告)日：2014-06-10
申请号：US13561862
申请日：2012-07-30
申请人： David Raymond Pedersen , Aaron Partridge , Thor Juneau
发明人： David Raymond Pedersen , Aaron Partridge , Thor Juneau
IPC分类号： H03B5/30
CPC分类号： H03H9/2405 , H03H3/0072 , H03H9/02259 , H03H9/02433 , H03H9/2457 , H03H9/2468 , H03H2009/02456 , H03H2009/02496
摘要： A MEMS resonator system that reduces interference signals arising from undesired capacitive coupling between different system elements. The system, in one embodiment, includes a MEMS resonator, electrodes, and at least one resonator electrode shield. In certain embodiments, the resonator electrode shield ensures that the resonator electrodes interact with either one or more shunting nodes or the active elements of the MEMS resonator by preventing or reducing, among other things, capacitive coupling between the resonator electrodes and the support and auxiliary elements of the MEMS resonator structure. By reducing the deleterious effects of interfering signals using one or more resonator electrode shields, a simpler, lower interference, and more efficient system relative to prior art approaches is presented.
摘要翻译：一种MEMS谐振器系统，其减少由不同系统元件之间的不期望的电容耦合引起的干扰信号。在一个实施例中，该系统包括MEMS谐振器，电极和至少一个谐振器电极屏蔽。在某些实施例中，谐振器电极屏蔽件通过防止或减少谐振器电极与支撑和辅助元件之间的电容耦合，确保谐振器电极与一个或多个分流节点或MEMS谐振器的有源元件相互作用的MEMS谐振器结构。通过使用一个或多个谐振器电极屏蔽减少干扰信号的有害影响，提出了相对于现有技术方法的更简单，更低干扰和更有效的系统。

46. 发明申请

US20140091871A1 MEMS ELEMENT AND OSCILLATOR 有权
标题翻译： MEMS元件和振荡器
公开(公告)号：US20140091871A1
公开(公告)日：2014-04-03
申请号：US14031143
申请日：2013-09-19
申请人： Seiko Epson Corporation
发明人： Ryuji Kihara
IPC分类号： B81B3/00
CPC分类号： B81B3/0021 , B81B2201/0271 , B81B2203/0118 , B81B2203/019 , H03B5/30 , H03H9/2457 , H03H2009/02251 , H03H2009/02488 , H03H2009/02511
摘要： A MEMS element includes: a substrate; a first electrode formed above the substrate; and a second electrode having a support portion and a beam portion, the support portion being formed above the substrate, the beam portion extending from the support portion, being formed in a state of having a gap between the first electrode and the beam portion, and being capable of vibrating in a thickness direction of the substrate. The width of the beam portion decreases with distance from a base of the beam portion toward a tip of the beam portion. The central length of the beam portion is larger than the lengths of ends of the beam portion. The width of the base of the beam portion is larger than the central length of the beam portion.
摘要翻译： MEMS元件包括：基板; 形成在所述衬底上的第一电极; 以及具有支撑部和梁部的第二电极，所述支撑部形成在所述基板的上方，所述梁部从所述支撑部延伸，形成为在所述第一电极和所述梁部之间具有间隙的状态，以及能够在基板的厚度方向上振动。梁部分的宽度随着从梁部分的基部朝向梁部分的尖端的距离而减小。梁部分的中心长度大于梁部分的端部长度。梁部分的基部的宽度大于梁部分的中心长度。

47. 发明授权

US08653716B2 Method and device for suppressing hysteresis of resonators through simultaneous resonance 有权
标题翻译：谐振器通过同时谐振抑制磁滞的方法和装置
公开(公告)号：US08653716B2
公开(公告)日：2014-02-18
申请号：US13040670
申请日：2011-03-04
申请人： Sebastien Hentz , Najib Kacem
发明人： Sebastien Hentz , Najib Kacem
IPC分类号： H02N1/00 , H03L7/00
CPC分类号： G01C19/56 , H03H9/02244 , H03H9/02259 , H03H9/2436 , H03H9/2457 , H03H9/2463 , H03H2009/02488 , H03H2009/02496
摘要： An electromechanical resonator including: at least one deformable element, and at least one electrode that simultaneously supplies, to the at least one deformable element, at least one first actuating force at a first frequency, and a second actuating force at a second frequency, the first and the second frequencies creating at least two simultaneous resonances with a primary resonance at a frequency ω0 equal to the first frequency and the second frequency being equal to a subharmonic resonant frequency (kω0, with k>1) of the resonator, or to a superharmonic resonant frequency (ω0/k, with k>1).
摘要翻译：一种机电谐振器，包括：至少一个可变形元件，以及至少一个电极，其同时向所述至少一个可变形元件提供至少一个第一频率的第一致动力和第二频率的第二致动力，第一和第二频率在等于第一频率的频率ω0和第二频率等于谐振器的次谐波共振频率（komega0，k> 1）产生至少两个同时谐振的初级谐振，或者形成为超谐振共振频率（ω= 0，k，k> 1）。

48. 发明申请

US20130027146A1 MEMS VIBRATOR AND OSCILLATOR 有权
标题翻译： MEMS振动器和振荡器
公开(公告)号：US20130027146A1
公开(公告)日：2013-01-31
申请号：US13550950
申请日：2012-07-17
申请人： Shogo INABA
发明人： Shogo INABA
IPC分类号： H03B1/00
CPC分类号： H03H9/2457 , B81B3/007 , B81B2201/014 , H03H3/0072 , H03H2009/02283 , H03H2009/02456 , H03H2009/02511
摘要： A MEMS vibrator includes: a substrate; a first electrode disposed above the substrate; and a second electrode disposed in a state where at least one portion of the second electrode has a space between the first electrode and the second electrode, and having a beam portion capable of vibrating, in the thickness direction of the substrate, with electrostatic force and a supporting portion supporting one edge of the beam portion and disposed above the substrate, wherein a supporting side face of the supporting portion supporting the one edge has a bending portion which bends in plan view from the thickness direction of the substrate, and the one edge is supported by the supporting side face including the bending portion.
摘要翻译： MEMS振动器包括：基板; 设置在所述基板上方的第一电极; 以及第二电极，其设置在所述第二电极的至少一部分具有在所述第一电极和所述第二电极之间的空间的状态下，并且具有能够在所述基板的厚度方向上以静电力振动的光束部分，支撑部分，其支撑梁部分的一个边缘并且设置在基板上方，其中支撑所述一个边缘的支撑部分的支撑侧面具有从基板的厚度方向在平面图中弯曲的弯曲部分，并且所述一个边缘由包括弯曲部的支撑侧面支撑。

49. 发明申请

US20130002363A1 OUT-OF-PLANE RESONATOR 有权
标题翻译：超平面谐振器
公开(公告)号：US20130002363A1
公开(公告)日：2013-01-03
申请号：US13173449
申请日：2011-06-30
申请人： Mehrnaz Motiee , Emmanuel P. Quevy , David H. Bernstein
发明人： Mehrnaz Motiee , Emmanuel P. Quevy , David H. Bernstein
IPC分类号： H03B5/30
CPC分类号： H03H9/2457 , H03H9/2452 , H03H2009/02299 , H03H2009/02511
摘要： A microelectromechanical system (MEMS) device includes a resonator anchored to a substrate. The resonator includes a first strain gradient statically deflecting a released portion of the resonator in an out-of-plane direction with respect to the substrate. The resonator includes a first electrode anchored to the substrate. The first electrode includes a second strain gradient of a released portion of the first electrode. The first electrode is configured to electrostatically drive the resonator in a first mode that varies a relative amount of displacement between the resonator and the first electrode. The resonator may include a resonator anchor anchored to the substrate. The first electrode may include an electrode anchor anchored to the substrate in close proximity to the resonator anchor. The electrode anchor may be positioned relative to the resonator anchor to substantially decouple dynamic displacements of the resonator relative to the electrode from changes to the substrate.
摘要翻译：微机电系统（MEMS）装置包括锚定到基板的谐振器。谐振器包括使第一应变梯度在相对于衬底的平面外方向上静态偏转谐振器的释放部分。谐振器包括锚定到基板的第一电极。第一电极包括第一电极的释放部分的第二应变梯度。第一电极被配置为以改变谐振器和第一电极之间的相对的位移量的第一模式静电驱动谐振器。谐振器可以包括锚定到衬底的谐振器锚。第一电极可以包括锚固到靠近谐振器锚的衬底的电极锚。电极锚定件可以相对于谐振器锚固件定位，以基本上使谐振器相对于电极的动态位移与基板的变化相分离。

50. 发明申请

US20120329255A1 OUT-OF-PLANE MEMS RESONATOR WITH STATIC OUT-OF-PLANE DEFLECTION 有权
标题翻译：具有静态非平面偏移的平面外平面MEMS谐振器
公开(公告)号：US20120329255A1
公开(公告)日：2012-12-27
申请号：US13599240
申请日：2012-08-30
申请人： Emmanuel P. Quevy , David H. Bernstein , Mehrnaz Motiee
发明人： Emmanuel P. Quevy , David H. Bernstein , Mehrnaz Motiee
IPC分类号： H01L21/20
CPC分类号： H03H9/2457 , H03H3/0072 , H03H3/0076 , H03H9/02409 , H03H9/2463 , H03H2009/02299 , H03H2009/02307 , H03H2009/0233 , H03H2009/02472 , H03H2009/02511 , H03H2009/02519
摘要： A method of forming a microelectromechanical systems (MEMS) device includes forming an electrode on a substrate. The method includes forming a structural layer on the substrate. The structural layer is disposed about a perimeter of the electrode and has a residual film stress gradient. The method includes releasing the structural layer to form a resonator coupled to the substrate. The residual film stress gradient deflects a first portion of the resonator out of a plane defined by a surface of the electrode.
摘要翻译：形成微机电系统（MEMS）器件的方法包括在衬底上形成电极。该方法包括在衬底上形成结构层。结构层围绕电极的周边设置并具有残余膜应力梯度。该方法包括释放结构层以形成耦合到衬底的谐振器。残余膜应力梯度将谐振器的第一部分偏离由电极表面限定的平面。

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