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    • 42. 发明申请
    • Scanning Method for Scanning a Sample with a Probe
    • 用探头扫描样品的扫描方法
    • US20130254948A1
    • 2013-09-26
    • US13655200
    • 2012-10-18
    • FEI Company
    • Arthur Reinout HartongCornelis Sander Kooijman
    • H01J37/26G01Q10/00
    • H01J37/26G01Q10/00G01Q30/06H01J37/265H01J37/28H01J2237/221H01J2237/28
    • The method relates to a method of scanning a sample. Scanning a sample is typically done by scanning the sample with a probe along a multitude of parallel lines. In prior art scan methods a sample is scanned multiple times with a nominally identical scan pattern. The invention is based on the insight that the coherence between adjacent points in a direction along the scan direction is much better than the coherence of adjacent points perpendicular to the scan direction. By combining two images that are scanned perpendicular to each other, it should thus be possible to form an image making use of the improved coherence (due to shorter temporal distance) in both directions. The method thus involves scanning the sample with two scan patterns, the lines of one scan pattern preferably perpendicular to the lines of the other scan pattern. Hereby it is possible to use the temporal coherence of scan points on a line of one scan pattern to align the lines of the other scan pattern, and vice versa.
    • 该方法涉及扫描样品的方法。 扫描样品通常通过沿着大量平行线的探头扫描样品来完成。 在现有技术的扫描方法中,用标称相同的扫描图案扫描多次样品。 本发明基于以下认识:沿着扫描方向的相邻点之间的相干性远远优于垂直于扫描方向的相邻点的相干性。 通过组合彼此垂直扫描的两个图像,因此应该可以使用改进的相干性(由于较短的时间距离)在两个方向上形成图像。 因此,该方法涉及用两个扫描图案扫描样本,一个扫描图案的线优选地垂直于另一扫描图案的线。 因此,可以使用一个扫描图案的线上的扫描点的时间相干性来对准另一扫描图案的线,反之亦然。
    • 43. 发明授权
    • Atomic force microscope manipulation of living cells
    • 原子力显微镜操纵活细胞
    • US08495760B2
    • 2013-07-23
    • US13307882
    • 2011-11-30
    • Manish J ButteMarc Amor BruceJianwei Liu
    • Manish J ButteMarc Amor BruceJianwei Liu
    • G01N13/16G01Q10/00G01Q60/24G01Q70/08
    • G01Q10/00G01Q30/025G01Q60/42
    • Techniques for atomic force microscope manipulation of living cells include functionalizing a nanoscale tip of a microscale cantilever with a first ligand for a first receptor associated with a surface of a first type of cell. The method further comprises, controlling the cantilever to cause the first ligand on the nanoscale tip to contact the first receptor on a surface of a living cell of the first type in a particular temporal pattern to induce a target response by the living cell. Other techniques for controlling an atomic force microscope comprising a nanoscale tip include controlling the cantilever to cause the nanoscale tip to contact a living cardiomyocyte at a predetermined pressure. The cantilever is also controlled to turn off vertical deflection feedback after contacting the cardiomyocyte and collecting deflection data that indicates a time series of nanoscale vertical deflections of the microscale cantilever caused by the living cardiomyocyte.
    • 用于原子力显微镜操作活细胞的技术包括用与第一类型细胞表面相关联的第一受体的第一配体官能化微尺度悬臂的纳米级尖端。 该方法还包括:控制悬臂以使纳米级尖端上的第一配体以特定时间模式接触第一类型活细胞表面上的第一受体以诱导活细胞的靶标反应。 用于控制包含纳米级尖端的原子力显微镜的其它技术包括控制悬臂以使纳米级尖端以预定压力接触活的心肌细胞。 接触心肌细胞后,悬臂也被控制为关闭垂直偏转反馈,并收集指示由活体心肌细胞引起的微量悬臂的纳米尺度垂直偏转的时间序列偏转数据。
    • 46. 发明授权
    • Scanning probe microscope
    • 扫描探针显微镜
    • US08342008B2
    • 2013-01-01
    • US12187430
    • 2008-08-07
    • Shuichi BabaMasahiro WatanabeToshihiko NakataYukio KemboToru KurenumaTakafumi MorimotoManabu EdamuraSatoshi Sekino
    • Shuichi BabaMasahiro WatanabeToshihiko NakataYukio KemboToru KurenumaTakafumi MorimotoManabu EdamuraSatoshi Sekino
    • G01B5/28G01Q60/28
    • G01Q10/00B82Y35/00G01Q60/28G01Q60/34
    • In the case of measuring a pattern having a steep side wall, a probe adheres to the side wall by the van der Waals forces acting between the probe and the side wall when approaching the pattern side wall, and an error occurs in a measured profile of the side wall portion. When a pattern having a groove width almost equal to a probe diameter is measured, the probe adheres to both side walls, the probe cannot reach the groove bottom, and the groove depth cannot be measured. When the probe adheres to a pattern side wall in measurements of a microscopic high-aspect ratio pattern using an elongated probe, the probe is caused to reach the side wall bottom by detecting the adhesion of the probe to the pattern side wall, and temporarily increasing a contact force between the probe and the sample. Also, by obtaining the data of the amount of torsion of a cantilever with the shape data of the pattern, a profile error of the side wall portion by the adhesion is corrected by the obtained data of the amount of torsion.
    • 在测量具有陡峭侧壁的图案的情况下,当接近图案侧壁时,探针通过作用在探针和侧壁之间的范德华力附着在侧壁上,并且在测量的轮廓中发生错误 侧壁部分。 当测量具有几乎等于探针直径的槽宽度的图案时,探针粘附到两个侧壁,探针不能到达凹槽底部,并且不能测量凹槽深度。 当使用细长的探针测量微观高纵横比图案时探头粘附到图案侧壁上时,通过检测探针与图案侧壁的粘附力使探针到达侧壁底部,并暂时增加 探针和样品之间的接触力。 此外,通过利用图案的形状数据获得悬臂的扭转量的数据,通过获得的扭转量的数据来校正侧壁部分的粘附的轮廓误差。
    • 47. 发明申请
    • Scanning Probe Microscope
    • 扫描探头显微镜
    • US20090158828A1
    • 2009-06-25
    • US12187430
    • 2008-08-07
    • Shuichi BABAMasahiro WatanabeToshihiko NakataYukio KemboToru KurenumaTakafumi MorimotoManabu EdamuraSatoshi Sekino
    • Shuichi BABAMasahiro WatanabeToshihiko NakataYukio KemboToru KurenumaTakafumi MorimotoManabu EdamuraSatoshi Sekino
    • G01B5/28
    • G01Q10/00B82Y35/00G01Q60/28G01Q60/34
    • In the case of measuring a pattern having a steep side wall, a probe adheres to the side wall by the van der Waals forces acting between the probe and the side wall when approaching the pattern side wall, and an error occurs in a measured profile of the side wall portion. When a pattern having a groove width almost equal to a probe diameter is measured, the probe adheres to both side walls, the probe cannot reach the groove bottom, and the groove depth cannot be measured. When the probe adheres to a pattern side wall in measurements of a microscopic high-aspect ratio pattern using an elongated probe, the probe is caused to reach the side wall bottom by detecting the adhesion of the probe to the pattern side wall, and temporarily increasing a contact force between the probe and the sample. Also, by obtaining the data of the amount of torsion of a cantilever with the shape data of the pattern, a profile error of the side wall portion by the adhesion is corrected by the obtained data of the amount of torsion.
    • 在测量具有陡峭侧壁的图案的情况下,当接近图案侧壁时,探针通过作用在探针和侧壁之间的范德华力粘附到侧壁,并且在测量的轮廓中发生错误 侧壁部分。 当测量具有几乎等于探针直径的槽宽度的图案时,探针粘附到两个侧壁,探针不能到达凹槽底部,并且不能测量凹槽深度。 当使用细长的探针测量微观高纵横比图案时探头粘附到图案侧壁上时,通过检测探针与图案侧壁的粘附力使探针到达侧壁底部,并暂时增加 探针和样品之间的接触力。 此外,通过利用图案的形状数据获得悬臂的扭转量的数据,通过获得的扭转量的数据来校正侧壁部分的粘附的轮廓误差。