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41. 发明授权

US08035808B2 Surface defect inspection method and apparatus 有权
标题翻译：表面缺陷检查方法及装置
公开(公告)号：US08035808B2
公开(公告)日：2011-10-11
申请号：US12727752
申请日：2010-03-19
申请人： Yoshimasa Oshima , Toshiyuki Nakao , Shigeru Matsui
发明人： Yoshimasa Oshima , Toshiyuki Nakao , Shigeru Matsui
IPC分类号： G01N21/00 , G01N21/88
CPC分类号： G01N21/9501 , G01N2021/4716
摘要： A surface defect inspection apparatus and method for irradiating a beam multiple times to a same region on a surface of an inspection sample, detecting each scattered light from the same region by detection optical systems individually to produce plural signals, and wherein irradiating the beam includes performing a line illumination of the beam on a line illumination region of the sample surface. The line illumination region is moved in a longitudinal direction at a pitch shorter than a length of the line illumination region in the longitudinal direction.
摘要翻译：一种表面缺陷检查装置和方法，用于将多个光束照射到检查样品的表面上的相同区域，分别通过检测光学系统检测来自相同区域的每个散射光以产生多个信号，并且其中照射光束包括执行在样品表面的线照射区域上的光束的线照明。线照明区域沿纵向方向以比线照明区域的长度方向的长度短的间距移动。

42. 发明申请

US20080151235A1 DEFECT INSPECTION TOOL FOR SAMPLE SURFACE AND DEFECT DETECTION METHOD THEREFOR 有权
标题翻译：用于样品表面的缺陷检查工具及其缺陷检测方法
公开(公告)号：US20080151235A1
公开(公告)日：2008-06-26
申请号：US11940483
申请日：2007-11-15
申请人： Yoshimasa Oshima , Toshiyuki Nakao
发明人： Yoshimasa Oshima , Toshiyuki Nakao
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N2021/8864
摘要： In a defect inspection for a semiconductor substrate, inspection objects include, in addition to a bear Si wafer, a wafer with various films formed on the surface thereof. For a sample formed with a metal film in particular, scattering light generated by surface roughness thereof is large, thus making it difficult to detect a minute defect and a minute foreign substance. It is desirable that a minute defect and a minute foreign substance be detected regardless of scattering light generated by the roughness of the sample surface. Insertion of an analyzer in an optical path of a detection optical system at such an angle that the scattering light generated by the roughness becomes minimum permits suppressing the scattering light generated by the roughness.
摘要翻译：在半导体基板的缺陷检查中，除了承载硅晶片之外，检查对象还包括在其表面上形成有各种膜的晶片。对于特别是金属膜形成的样品，由于其表面粗糙度而产生的散射光大，因此难以检测到微小的缺陷和微小的异物。不管由样品表面的粗糙度产生的散射光如何，都希望检测到微小的缺陷和微小的异物。以使得由粗糙度产生的散射光变得最小的角度插入检测光学系统的光路中的分析器，可以抑制由粗糙度产生的散射光。

43. 发明授权

US07719673B2 Defect inspecting device for sample surface and defect detection method therefor 有权
标题翻译：样品表面缺陷检测装置及其缺陷检测方法
公开(公告)号：US07719673B2
公开(公告)日：2010-05-18
申请号：US11940483
申请日：2007-11-15
申请人： Yoshimasa Oshima , Toshiyuki Nakao
发明人： Yoshimasa Oshima , Toshiyuki Nakao
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N2021/8864
摘要： In a defect inspection for a semiconductor substrate, inspection objects include, in addition to a bare Si wafer, a wafer with various films formed on the surface thereof. For a sample formed with a metal film in particular, scattering light generated by surface roughness thereof is large, thus making it difficult to detect a minute defect and a minute foreign substance. It is desirable that a minute defect and a minute foreign substance be detected regardless of scattering light generated by the roughness of the sample surface. Insertion of an analyzer in an optical path of a detection optical system at such an angle that the scattering light generated by the roughness becomes minimum permits suppressing the scattering light generated by the roughness.
摘要翻译：在半导体衬底的缺陷检查中，检查对象除了裸硅片外还包括在其表面上形成有各种膜的晶片。对于特别是金属膜形成的样品，由于其表面粗糙度而产生的散射光大，因此难以检测到微小的缺陷和微小的异物。不管由样品表面的粗糙度产生的散射光如何，都希望检测到微小的缺陷和微小的异物。以使得由粗糙度产生的散射光变得最小的角度插入检测光学系统的光路中的分析器，可以抑制由粗糙度产生的散射光。

44. 发明授权

US5046847A Method for detecting foreign matter and device for realizing same 失效
标题翻译：异物检测方法及其实现方法
公开(公告)号：US5046847A
公开(公告)日：1991-09-10
申请号：US262573
申请日：1988-10-25
申请人： Toshihiko Nakata , Nobuyuki Akiyama , Yoshihiko Yamuchi , Mitsuyoshi Koizumi , Yoshimasa Oshima
发明人： Toshihiko Nakata , Nobuyuki Akiyama , Yoshihiko Yamuchi , Mitsuyoshi Koizumi , Yoshimasa Oshima
IPC分类号： G01N21/21 , G01N21/94 , G03F9/00
CPC分类号： G03F9/70 , G01N21/94 , G01N21/95623 , G01N2021/473 , G01N21/21
摘要： A method and apparatus for detecting foreign matter on a sample by illuminating a stripe-shaped region with linearly polarized light. Some of the light reflected by the sample is intercepted by a light intercepting stage, and the rest of the light reflected by the sample, which passes through the light intercepting stage is directed to a detecting optical system, to be detected by a photo-detector. The sample is illuminated obliquely at a predetermined angle with respect to a group of straight lines constituting a primary pattern on the sample. The angle is selected so that the diffraction light reflected by the group of straight lines does not enter the detecting optical system. A polarizing spatial filter using a liquid crystal element may be disposed in a predetermined restricted region in a spacial frequency region, or Fourier transformation plane, within the detecting optical system. The light scattered by the sample may further be separated in the detecting optical system into partial beams having different wave orientation characteristics, which characteristics are detected by a number of one-dimensional solid state imaging elements. The signals are processed by a driver, adder, and quantizer in synchronism with the one-dimensional solid state imaging elements.
摘要翻译：一种通过用线性偏振光照射条形区域来检测样品上的异物的方法和装置。由样品反射的一些光被遮光阶段遮挡，并且通过遮光台的由样品反射的其余光指向检测光学系统，由光检测器检测。样品相对于构成样品上的主要图案的一组直线以预定角度倾斜照射。选择该角度使得由直线组反射的衍射光不进入检测光学系统。使用液晶元件的偏振空间滤光片可以设置在检测光学系统内的空间频率区域或傅立叶变换平面的预定限制区域中。由样本散射的光可以在检测光学系统中进一步分离成具有不同波取向特性的部分光束，该特征由多个一维固态成像元件检测。信号由驱动器，加法器和量化器与一维固态成像元件同步处理。

45. 发明授权

US4423331A Method and apparatus for inspecting specimen surface 失效
标题翻译：检测样品表面的方法和装置
公开(公告)号：US4423331A
公开(公告)日：1983-12-27
申请号：US242483
申请日：1981-03-11
申请人： Mitsuyoshi Koizumi , Nobuyuki Akiyama , Yoshimasa Oshima
发明人： Mitsuyoshi Koizumi , Nobuyuki Akiyama , Yoshimasa Oshima
IPC分类号： G01B11/30 , G01N21/88 , G01N21/95 , G11B5/84
CPC分类号： G01N21/88
摘要： A method and apparatus of inspecting a surface of a specimen for the presence of defects, foreign substance and the like are disclosed. The surface has a mark such as a cutting mark formed thereon and composed of fine grooves or recesses extending in a predetermined direction. The surface is scanned two-dimensionally with an irradiating laser beam impinging or illuminating on the specimen surface perpendicularly thereto. Those of the irregularly scattered laser light rays reflected from the specimen surface which are in a first direction perpendicular to the lengthwise direction of the mark are intercepted by a shielding member or caused to pass through regions other than a reflecting region of a reflecting mirror, while those scattered light rays which are in other directions than the first direction are directed to a photoelectric converter tube along a bypass path across the shielding member or through reflection of the mirror. A picture signal derived from the output of the photoelectric converter tube is digitalized into binary picture element signals by a sampling and binary encoding circuit, the resulting signals being then stored in a two-dimensional memory. The presence and forms of defects, foreign substances and the like on the specimen surface are discriminatively determined in dependence on particular combinations of the binary picture element signals stored in the memory.
摘要翻译：公开了一种检查样品表面存在缺陷，异物等的方法和装置。该表面具有形成在其上的切割标记和由沿预定方向延伸的细小凹槽或凹部组成的标记。使用照射激光束在垂直于其的样品表面上照射或照射二维地扫描该表面。从与标记的长度方向垂直的第一方向从试样表面反射的不规则散射的激光光线被屏蔽部件遮断，或者通过反射镜的反射区域以外的区域，同时沿着除了第一方向以外的方向的那些散射光线沿着穿过屏蔽部件的旁通路径或者通过反射镜的反射被引导到光电转换管。从光电转换管的输出得到的图像信号由采样和二进制编码电路数字化成二进制像素信号，然后将所得到的信号存储在二维存储器中。根据存储在存储器中的二进制像素信号的特定组合，鉴别地确定样本表面上的缺陷，异物等的存在和形式。

46. 发明授权

US4242702A Apparatus for automatically checking external appearance of object 失效
标题翻译：用于自动检查物体外观的装置
公开(公告)号：US4242702A
公开(公告)日：1980-12-30
申请号：US856097
申请日：1977-11-30
申请人： Asahiro Kuni , Nobuyuki Akiyama , Yoshimasa Oshima
发明人： Asahiro Kuni , Nobuyuki Akiyama , Yoshimasa Oshima
IPC分类号： G01B11/02 , G01B11/24 , H04N7/18
CPC分类号： G01B11/24 , G01B11/024
摘要： An apparatus for examining an object such as a contact welded on a leaf spring in respect of geometrical and qualitative factors comprises an image pick-up device such as TV camera for detecting an optical image of the contact and the leaf spring having a dark portion along the contour of the contact and converting the optical image into corresponding video signals which are then compared with a predetermined threshold level to be converted into a binary encoded signal having two logic levels corresponding, respectively, to bright and dark portions of the optical image. Frequency distributions of the binary signal representing the dark portion are determined along two orthogonal directions thereby to define a coordinate of a region in which the contact is located. A first checking device is provided to determine if the above coordinate is located in a preset allowable tolerance range. A second checking device is additionally provided which serves to define a frame of a size differed from that of the contact in dependence on the coordinate thereby dividing the area within the frame into a predetermined number of picture elements in a matrix array, whereby faults of the contact such as injury, welding dust or deformation are detected in dependence upon a predetermined combination of the picture element signals representing the dark portions of the optical image.
摘要翻译：用于检查诸如接触焊接在板簧上的物体的几何和定性因素的装置包括用于检测接触的光学图像的电视摄像机等图像拾取装置和具有暗部分的板簧接触的轮廓并将光学图像转换成相应的视频信号，然后将其与预定的阈值电平进行比较，以转换成具有两个逻辑电平的二进制编码信号，该逻辑电平分别对应于光学图像的明暗部分。根据两个正交方向确定表示暗部分的二进制信号的频率分布，从而定义接触位置的区域的坐标。提供第一检查装置以确定上述坐标是否位于预设的允许公差范围内。另外提供另外提供的第二检查装置，其用于根据坐标定义与触点的尺寸不同的尺寸的框架，从而将框架内的区域划分成矩阵阵列中的预定数量的图像元素，由此，根据表示光学图像的暗部的像素信号的预定组合来检测诸如伤害，焊接灰尘或变形的接触。

47. 发明授权

US4115762A Alignment pattern detecting apparatus 失效
标题翻译：对准图案检测装置
公开(公告)号：US4115762A
公开(公告)日：1978-09-19
申请号：US856096
申请日：1977-11-30
申请人： Nobuyuki Akiyama , Yoshimasa Oshima
发明人： Nobuyuki Akiyama , Yoshimasa Oshima
IPC分类号： G01B11/00 , G01B11/02 , G01D5/26 , H01L21/027 , H01L21/30 , G01J1/20
CPC分类号： G01B11/022
摘要： An alignment pattern detecting apparatus comprises an image pick-up device for scanning and picking up an optical image of alignment pattern formed on a wafer to produce a time-base video signal, and means for sampling at predetermined intervals and converting from analog to digital form the video signal produced by the image pick-up device so that the video signal is returned symmetrically at a predetermined point to determine the degree of matching between the two signals thereby to obtain a point where the degree of matching is the best. This best matching degree point is detected as the center position of the alignment pattern.
摘要翻译：对准图案检测装置包括用于扫描和拾取形成在晶片上的对准图案的光学图像以产生时基视频信号的图像拾取装置，以及用于以预定间隔进行采样并从模拟形式转换为数字形式的装置由图像拾取装置产生的视频信号，使得视频信号在预定点对称地返回，以确定两个信号之间的匹配程度，从而获得匹配程度最好的点。该最佳匹配度点被检测为对准图案的中心位置。

48. 发明授权

US4614427A Automatic contaminants detection apparatus 失效
标题翻译：自动污染物检测装置
公开(公告)号：US4614427A
公开(公告)日：1986-09-30
申请号：US611947
申请日：1984-05-18
申请人： Mitsuyoshi Koizumi , Yoshimasa Oshima , Nobuyuki Akiyama , Toshiaki Yachi
发明人： Mitsuyoshi Koizumi , Yoshimasa Oshima , Nobuyuki Akiyama , Toshiaki Yachi
IPC分类号： G01N21/88 , G01B11/30 , G01N21/21 , G01N21/94 , G01N21/956 , G03F1/84 , H01L21/027 , H01L21/66
CPC分类号： G01N21/94 , G01N21/21 , G01N21/956
摘要： An automatic contaminants detection apparatus comprises a polarized laser beam source, a polarized laser beam irradiation optical system having irradiation angle switching means for switching an irradiation angle depending on the presence or absence of a pattern on a sample surface to irradiate the polarized laser beam emitted by the polarized laser beam source to the sample surface with an angle of grazing, a detector for detecting condensed scattered or reflected lights of the laser beam from the sample surface with or without interleave of an analyzer, and analyzer switching means for inserting or removing the analyzer into or from a detection light path of the detector depending on the presence or absence of the pattern on the sample surface. The apparatus can detect contaminants on the patterned or non-patterned sample surface with a high sensitivity.
摘要翻译：一种自动污染物检测装置，包括：偏振激光束源，具有照射角度切换装置的偏光激光束照射光学系统，用于根据样品表面上有无图案切换照射角度，照射由将偏振激光束源以放牧角度放置到样品表面，用于检测来自样品表面的来自样品表面的聚集的散射或反射光的检测器，具有或不具有分析仪的交错;以及分析器切换装置，用于插入或移除分析器取决于样品表面上图案的存在或不存在，进入或离开检测器的检测光路。该装置可以以高灵敏度检测图案化或非图案化样品表面上的污染物。

49. 发明申请

US20070285670A1 METHOD AND APPARATUS FOR DETECTING DEFECT ON A SURFACE OF A SPECIMEN 失效
标题翻译：用于检测样本表面缺陷的方法和装置
公开(公告)号：US20070285670A1
公开(公告)日：2007-12-13
申请号：US11757458
申请日：2007-06-04
申请人： Minoru Yoshida , Yoshimasa Oshima
发明人： Minoru Yoshida , Yoshimasa Oshima
IPC分类号： G01B9/02
CPC分类号： G01B9/02067 , G01B9/02002 , G01B11/2441 , G01B2290/70 , G01N21/45 , G01N21/95 , G01N21/9501 , G01N2021/95676
摘要： A surface inspection apparatus is provided based on an optical interference scheme using a wide-band laser light source, such as diode laser, for an interferometer. In the apparatus, a diode laser with a large spectrum width having a short coherence length is used as an emitted light source; modulation optical elements for performing modulation with slightly different frequencies, and optical path length varying optical elements for adjusting the optical path length are located in each of two optical paths between a branching optical element and a combining optical element; and the above-mentioned optical path length varying optical elements are adjusted, while measuring an interference intensity, so as to maximize the interference intensity.
摘要翻译：基于使用诸如二极管激光器的宽带激光光源作为干涉仪的光学干涉方案来提供表面检查装置。在该装置中，使用具有短相干长度的具有大光谱宽度的二极管激光器作为发射光源; 用于执行具有稍微不同频率的调制的调制光学元件和用于调整光程长度的光路长度变化光学元件位于分支光学元件和组合光学元件之间的两个光路中的每一个中; 并且在测量干涉强度的同时调节上述光程长度变化光学元件，以使干涉强度最大化。

50. 发明授权

US4508453A Pattern detection system 失效
标题翻译：模式检测系统
公开(公告)号：US4508453A
公开(公告)日：1985-04-02
申请号：US397900
申请日：1982-07-13
申请人： Yasuhiko Hara , Nobuyuki Akiyama , Satoru Fushimi , Yoshimasa Oshima , Nobuhiko Aoki
发明人： Yasuhiko Hara , Nobuyuki Akiyama , Satoru Fushimi , Yoshimasa Oshima , Nobuhiko Aoki
IPC分类号： G01N21/956 , G01R31/308 , G03F7/20 , G01M11/00
CPC分类号： G03F7/70616 , G01N21/956 , G01R31/308 , G03F7/7065
摘要： A pattern detection system for inspecting defects in fine or minute patterns such as photomask patterns at a fast speed is disclosed. The system comprises an illuminator, a device for moving objects with the patterns to be inspected with being illuminated by the illuminator, an optical system for imaging the objects, a scanner for scanning the objects in a direction intersected at a given angle with respect to direction of the objects moved by the moving device and arrays of photosensors arranged linearly in a direction perpendicular to that of images on the objects scanned by the scanner, on the surface of which the images are formed by the optical system and for producing respective outputs parallelly on the time basis.
摘要翻译：公开了一种用于以高速度检查诸如光掩模图案的精细或微小图案中的缺陷的图案检测系统。该系统包括照明器，用于利用照明器照亮要检查的图案来移动物体的装置，用于对物体进行成像的光学系统，用于沿相对于方向以给定角度相交的方向扫描物体的扫描仪由移动装置移动的物体和由扫描仪扫描的物体上垂直于图像的方向线性布置的光敏器件的阵列，其表面上由光学系统形成图像并且平行地产生相应的输出时间基础。

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